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Handling and Manipulation of Microcomponents: Work-Cell Design and Preliminary Experiments

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Handling and Manipulation of Microcomponents: Work-Cell Design and Preliminary Experiments Handling and Manipulation of Microcomponents: Work-Cell Design and Preliminary Experiments Serena Ruggeri1, Gianmauro Fontana2, Claudia Pagano2, Irene Fassi2, Giovanni Legnani1 1Department of Mechanical and Industrial Engineering, University of Brescia, Brescia, Italy {serena.ruggeri, giovanni.legnani}@ing.unibs.it 2Institute of Industrial Technologies and Automation, CNR, Milan, Italy {gianmauro.fontana, claudia.pagano, irene.fassi}@itia.cnr.it Abstract. The paper introduces an experimental setup for the automatic manipulation of microcomponents, based on a 4 dof robot with Shoenflies motion and a two-camera vision system. The general architecture of the work- cell is presented. The work-cell functionality was tested via repeatability experiments using a set of vacuum grippers. Due to their intrinsic simplicity, vacuum grippers are very cheap and appear a promising solution for micromanipulation. An innovative nozzle for a vacuum gripper was designed, fabricated and tested, comparing its performance with traditional needles. The design was conceived to reduce the frequency of occlusions of the gripper and handle a wide range of particles. The performed tests evaluate the success and precision of the part release. Indeed, this is a crucial aspect of micromanipulation because microparts tend to stick to the gripper preventing the successful performance of manipulation tasks. The results confirm that adhesive effects prevent the release of components. For this reason different strategies were adopted in order to improve the efficiency in the release of stuck components. This solution increases the percentage of release and, setting appropriately the intensity of the pressure, it does not affect negatively the accuracy nor the repeatability of the positioning. Keywords: Micro-handling, Micro-Robotics. 1 Introduction During the past decades several microproducts have been fabricated for a great variety of applications in the traditional fields and in more innovative areas. The majority of microsystems are currently fabricated by semiconductor-based manufacturing techniques, taking advantage of the consolidated experience gained from the fabrication of integrated circuits. More recently, a variety of emergent products (e.g. micro-resonators, radio frequency devices, drug delivery systems, chemical and biochemical sensors) requires components made of non semiconductor 1 material in order to increase the performance and functionalities of the whole system. These components have to be made of metal, plastic and ceramic, which need appropriate fabrication processes and have to be assembled with each other or with semiconductor structures. These hybrid three dimensional microproducts have still great difficulty in penetrating the market, mainly due to the limits of the fabrication processes that require manipulation and final assembly of microcomponents. However, new market perspectives can be reached automating the assembly phase. The main challenge is due to the new physical scenario when dealing with millimetric and sub-millimetric parts. Indeed, due to the high surface to volume ratio of microcomponents, superficial forces are predominant and the manipulation of microparts significantly differs from that of macroscopic ones. For this reason, the downscaling of standard assembling procedures at the microlevel is infeasible or inefficient and many operations have to be done manually [1]. Many issues can affect one or more of the three main manipulation phases (grasp, handling, release) and have to be taken into account during the design of the microgripping systems. Due to the charging effects, the parts move into their energetically most favourable configuration, leading in an uncontrolled grasping or release. Moreover, due to the adhesion forces, objects stick to the gripper preventing the release that is not anymore facilitated by the gravitational force due to the reduced weight. In the literature, several solutions to these manipulation problems can be found, including hybrid-type grippers where two principles are integrated in order to reduce the adhesive force during the release [2], grippers based on physical principles peculiar of the microscale that control and exploit the adhesive forces [3][4], and handling systems without physical contacts between the gripper and the component, in order to avoid stiction [5]. Among the strategies proposed for the micromanipulation there are: phase transition [6], magnetic [5], van der Waals [7], electrostatic [3][8], adhesive and capillary interactions [4][9]-[12] suction [13], and laser [14]. Each of these solutions has its own advantages and drawbacks, mainly concerning the cost, accuracy, repeatability, compliancy, versatility and complexity. One of the strategies downsized from the macroworld is the use of the force generated by the pressure difference between the gripper and the atmosphere. Indeed, vacuum grippers are very common in the assembly of fragile macrocomponents and can be easily miniaturised. They can be very cheap as consist mainly of a micropipette connected to a vacuum pump. However, both the gripper and the part should have smooth surfaces to prevent air leakage. Moreover, like all the contact grippers at the microscale, the adhesion forces significantly affect the release so that the precise positioning is difficult to achieve. This is the reason why some expedients for the release of microcomponents have been proposed. For instance, a short pressure pulse can be applied to assist the release of the microcomponent, even if it can affect the accuracy of the positioning [13]. The adhesion due to the electrostatic force can be reduced coating the glass pipette for the suction with a conductive layer connected to the ground [15]. In this paper, an experimental setup devoted to the automatic manipulation of microcomponents is introduced and preliminary experiments on the grasping and 2 releasing of parts are described and discussed. The performance of two standard vacuum microgrippers (commercially available needles for dispensing) with respect to an innovative multi-lumen nozzle (Fig. 1a) is critically analysed. The limitations of these grippers, mainly in the releasing phase, are highlighted and some solutions proposed. 2 Experimental Setup A suitable experimental setup (Fig. 1) able to move the parts and measure their position in the working area was designed. The work-cell is equipped with a Mitsubishi Electric RP-1AH robot (1). It presents a 5-joint closed link structure and 4 degrees of freedom with Schoenflies motion: 2 revolute joints for the positioning in the x-y working area, a third revolute joint for rotation and a prismatic joint for the z vertical end-effector motion. The operating limits are 150x105 mm2 with a vertical stroke of 30 mm. The repeatability is ±5 µm in the x-y plane, ±10 µm for the vertical motion and ±0.02° for the end-effector rotation. A smart and standard mechanical interface (2) was realized in order to facilitate the tool change. It was directly connected to the bottom part of the hollow screw constituting the third and fourth axis of the robot. The vacuum generation system is a critical part of the setup, mainly during the releasing phase. Two vacuum generation systems were tested. The former consisted of an air compressor, a FRL (Filter Regulator Lubricator) group, a normally closed solenoid valve mounted on the top of the robot arm and a piINLINE Micro Ti vacuum ejector installed directly on the hose near the suction point. The latter used the same air compressor and FRL group, but was equipped with a piCOMPACT10 vacuum ejector (3). This ejector integrates a vacuum sensor and two normally closed solenoid valves, one for the supply and one for the release. This latter and more complex generation system was chosen to assist the release with a positive pressure. By modifying the throttling, the entity of the blow in the release phase can be set and optimized for the specific component and application. The measurements of the position of the parts in the focal plane were performed using a suitable vision system, consisting of a camera (4) with field of view (FoV) 16.3x13.5 mm2 and spatial resolution 6.6 µm and a second camera (5) with FoV 25x18.9 mm2 and spatial resolution 18.4 µm. The parts lied on a transparent glass substrate (6) so that the camera, fixed on a rigid structure below the robot working area, detects from the bottom their position and orientation. An opportune lighting system is essential for the detection, robust recognition and reliable measurement, thus a diffuse illumination of the scene was adopted, making the disturbance of the environment light negligible. In order to obtain better images, the end-effector was also equipped with a contrast panel (7) on the top of the gripping tool (8). Concerning the gripping tools, the nozzle (Fig. 1a) has a central circular hole (radius=55.4µm) and an external circle (radius=140.1µm), circumscribing the internal hole and the other four holes. This geometry was conceived with the purpose of manipulating a wider range of components, avoiding the need of changing the tool for 3 the manipulation of components different in size or geometry. The nozzle should be able to perform like a needle with dimension equal to its internal radius and a needle with dimension equal to its external one at the same time. Keeping that in mind, the performance of the nozzle was compared with the performance of two needles with internal diameters of 100 and 260 µm (Fig. 1b). Fig. 1. Experimental setup. The camera and the robot were calibrated in order to allow the automatic part detection for the grasp and after the release and for the measure of the part position and orientation. A non-conventional calibration process was conceived and implemented in order to simultaneously calibrate the camera and georeference the camera with respect to the robot, without using external tools. This procedure was based on the use of a virtual grid with the same characteristics of the standard calibration pattern, created by moving a sphere gripped by the robot end-effector in the field of view of the camera. A similar procedure was presented in [16].
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