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Surface Modification of Materials by Ion Implantations for Industrial And IAEA-TECDOC-1165 Surface modification of materials by implantationsion industrialfor and medical applications Final report co-ordinateda of research project INTERNATIONAL ATOMIC ENERGY AGENCY U/J~\\ July 2000 e IAETh A doe t normallno s y maintain stock f reporto s n thii s s series The e howevear y r collecte Internationae th y db l Nuclear Information System (INIS non-conventionas a ) l literature Should a document be out of print, a copy on microfiche or in electronic format can be purchased fro INIe mth S Document Delivery Services INIS Clearinghouse International Atomic Energy Agency Wagramer Strasse5 0 10 x Bo O P A-1400 Vienna, Austria Telephone (43 2601 ) 0 2288 2286r 0o 6 Fax (43) 1 2600 29882 E-mail chouse@iaea ora Orders should be accompanied by prepayment of 100 Austrian Schillings in the form of a cheque or credit card (VISA, Mastercard) More information on the INIS Document Delivery Services and a list of national document delivery services where these reports can also be ordered can be found on the INIS Web site at http //www laea org/mis/dm ht v sr d The originating Section of this publication in the IAEA was: Industrial Applications and Chemistry Section International Atomic Energy Agency Wagramer Strasse5 P.O. Box 100 A-1400 Vienna, Austria SURFACE MODIFICATIO MATERIALF NO IMPLANTATIONN IO Y SB R SFO INDUSTRIAL AND MEDICAL APPLICATIONS IAEA, VIENNA, 2000 IAEA-TECDOC-1165 ISSN 1011^289 © IAEA, 2000 Printed by the IAEA in Austria July 2000 FOREWORD The objectives of the Co-Ordinated Research Project (CRP) on Modification Of Material n TreatmenIo y b sr Industriafo t l Applications wer o develot e p economically acceptable surface modification techniques leading to thick treated layers, to predict ion beam mixin d impuritan g y atom migration durin d aftean gr implantation o evaluatt d e an , th e tribological post-implantation properties and performance of treated components. Laboratories from Belarus, China, India, Poland, Slovenia, Spain, Romania, Thailand and the United States of America participated in the project. The CRP was able to evaluate alternative ion beam based coating techniques to coat relatively thicker coatings and achieve improvemen tribologican i t mechanicad lan l propertie surfacese th f so . There were several outcomes from this CRP in both basic research and in applications leadinimplantatiow ne o gt n techniques, characterization procedurew ne d an s post-implantation evaluation tests. An important commoe activitth s ywa n interlaborator l participantsyal tesr fo t n Te . standard samplecoateN Cr df s o stainles s steel were provide eaco dt h participating groupe Th . CRP participants undertook characterizatio testind e sampleth an n f go s accordine th o gt techniques, facilitie capabilitied san theit sa r disposal. This publication provides a brief review of the methodology of ion beam implantatio described nan majoe sth r result achievgementd san s obtained. The IAEA wishes to thank all the scientists who contributed to the progress of this CRP preparatioe th an o dt thif no s TECDOC particulan i d an , r A.S. Khanna drafteo wh text,e dth . IAEe Th A officer responsibl publicatioe th r . Thereskefo J s Divisioe nwa th f ao Physicaf no l and Chemical Sciences. EDITORIAL NOTE The use of particular designations of countries or territories does not imply any judgement by the publisher, legalthe IAEA,to the status as suchof countries territories,or theirof authoritiesand institutions or of the delimitation of their boundaries. The mention of names of specific companies or products (whether or not indicated as registered) does imply intentionnot any infringeto proprietary rights, should construednor be it endorsement an as recommendationor partthe IAEA. ofon the CONTENTS 1. INTRODUCTION...............................................................................................................1 2. METHODOLOGY OF ION BEAM DEPOSITION ...........................................................3 bean Io m2.1 mixing.......................................................................................................... 3 . 2.2. bean .Io m assisted deposition (IBAD).........................................................................3 2.3. Plasma nitriding..........................................................................................................5 2.4. Plasma arc...................................................................................................................6 2.5. Metal vapour vacuum arc (MEVVA).........................................................................6 BEAN IO M3. ANALYSIS.....................................................................................................7 3.1. Rutherford backscattering (RBS) ...............................................................................7 3.2. Elastic recoil detection analysis (ERDA) ...................................................................9 3.3. Nuclear reaction analysis (NRA)..............................................................................10 4. EXPERIMENTAL WORK...............................................................................................11 implantation io Y 4.1. ZrOn no 2 ceramics.......................................................................11 4.1.1. Microhardnes flexurad san l strength ............................................................12 4.1.2. Fracture toughness........................................................................................ 13 4.1.3. Surface resistance......................................................................................... 13 implantation io Y d an SIsNn o no M 44.2 ceramics........................................................ 3 .1 4.2.1. Scanning auger microprobe..........................................................................14 4.2.2. X ray diffraction analysis.............................................................................. 14 4.2.3. Microhardness ..............................................................................................15 4.2.4. Sheet resistance.............................................................................................17 4.2.5. Fracture toughness........................................................................................ 17 4.3. Particle migration in the Ni/Al multilayers..............................................................18 4.3.1. Auger electron spectrometry (AES).............................................................. 18 4.4. Investigation of interaction of gaseous ions with getter material............................. 19 4.5. Formation of thick, nitrogen rich layer.....................................................................22 4.5.1. Wear test.......................................................................................................26 4.6. Formation of thick, wear-resistant metallic layers via ion beam mixing technique......................................................................................................26 4.6.1. Auger electron spectrometry (AES)..............................................................26 4.6.2. Wea frictiod ran n test ...................................................................................27 4.7. Nand implantatio n steel..............................................................2B1 io 1 D SK n no 9 4.7.1. Hardness.......................................................................................................29 4.7.2. Wea frictiod ran n test...................................................................................29 4.7.3. Friction..........................................................................................................30 implantation io N 4.8. n assiste preparativy db closind ean g implantatior nfo surface modificatio toof no l steel .............................................................................30 4.8.1. Auger electron spectrometry (AES)..............................................................31 4.8.2. Hardness.......................................................................................................32 4.8.3. Wear test.......................................................................................................35 4.9. Applied high-curren implantation io tN industriaf no l steel toold san s ...................36 diffraction............................................................................................3y 4.9.1ra X . 6 4.9.2. Wear test.......................................................................................................36 4.10. Deposition of ALN film by high energy density plasma..........................................36 implantation Io 4.11. bio-materialn no s ............................................................................38 4.11.1. Material methods..................................................................................3d san 9 4.11.2. Wear test.......................................................................................................40 4.11.3. Friction test...................................................................................................40 4.12. Wear friction tes duaf implantatioto n io l n AISIM2 steel........................................42 4.13. Preliminar irradiation yio substratf no improvemenr efo coatinf o t g mechanical properties...............................................................................................44 4.13.1. Auger electron spectrometry
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