AMIDE COMPOUNDS AS POTENTIAL PRECURSORS FOR THE SYNTHESIS OF ZINC

Eva Maile, Anjana Devi, R.A. Fischer*

Lehrstuhl für Anorganische Chemie II,

Organometallics & Materials Chemistry,

Ruhr-Universität Bochum,

Universitätsstraße 150, 44780 Bochum,

Germany.

[email protected] Fig. 1 SEM of a Zn3N2 film grown on Si(100) Zinc nitride is, in contrast to cadmium-

containing materials, a non-toxic semiconductor ) 21 ) (3

2 25000 with an optical band-gap in the VIS/NIR. There 3 (3

α are very few compounds known so far, which 20000 K Cu /2 ) λ .] ) (222) have the potential to be used as precursors for .u 15000 0 a (400) 10) (211 [ y t 40) (40 (1 i 3 s Si (4 O n

MOCVD of zinc nitride. For this reason, we i e t

10000 S In synthesized with Zn bonded ligands. The heteroleptic zinc amides 5000 0 3,3’-Imino bis(N,N-dimethylaminopropyl) zinc 20 30 40 50 60 2 Theta [°] [bis(trimethylsilyl)-amide] and N,N-Dimethyl- N’-ethyl-ethylene-diamin zinc [bis(trimethyl- Fig. 2 XRD of a Zn3N2 silyl)amide] were synthesized by salt metathesis film grown on Si(100) reaction. Furthermore, [(Diethylamino) propyl] zinc azide was resulted of the reaction between 1, 0x105 Bis-[(Diethylamino)propyl]zinc chloride] and 8, 0x104 an excess of sodium azide. These three Zn 3p

4

] 6,0x10

. Zn 3s u compounds are looking promising for furher .

a Zn 3d

d [ N 1s 4

el 4,0x10 i C 1s applications in the preparation of nano scaled Y materials and thin films using MOCVD. 2,0x104 Fe 3p

0,0 0 50 100 1 50 200 250 300 350 40 0 450 The known compound Bis-[Bis- Bi nding Energy [eV]

(Trimethylsilyl)amido] zinc was synthesized via Fig. 3 XPS of a Zn N salt-metathesis reaction. It was used as a single 3 2 film grown on Si(100) molecule precursor for MOCVD of thin, crystalline zinc nitride films with using as reactive gas. The films were characterized by XRD, SEM and XPS. The dense and homogenous film growth can be showed in figure 1. Reflexes for cubic zinc nitride were observed in the XRD patterns (figure 2). A small shift between the expected ratio between the intensities can be seen, but the films were not epitaxial. The XPS spectra (figure 3) showed signals of zinc and nitrogen, but there were indications of surface carbon contamination. The peaks corresponding to iron originate from the sample holder.