UNIVEX Experimental systems for thin film coating and space simulation 3611 0248 02 Technical alterations reserved Experimentation systems

Vacuum based Physical Vapor Deposition (PVD) processes are criti- cal and enabling components of many modern technologies and components. Both researching new fundamen- tal phenomenon and developing new products require laboratory testing and integration of PVD processes.

Having a reliable, repeatable and professional platform on which to perform research and pilot-scale experiments of vacuum coating is essential to efficient and cost effective development. The UNIVEX family of vacuum coating systems make profes- sional results possible. UNIVEX systems are standardized for reliability, but modular and highly con- figurable to adapt to changing process requirements. This flexibility enables upgrades or retrofits as research or development needs change over time. Applications Process n Sensor technology components n Optoelectronics n Dactyloscopy / Forensic analysis n Thermal evaporation n Spectacle and precision optics n Organics evaporation n OLED / Display n Electron beam evaporation n Tribology / Wear protection n Effusion cells n Lift-off processes n DC sputtering n Laser n RF sputtering n Storage media n Ion sources n Solar n Process gas inlet n Thermovoltaics n Film thickness measurement n Glass coating n Substrate rotation (UV protection, Lotus effect) n Substrate bias n Superconductors n Substrate manipulation n Foil coating n Planetary drives n Decorative coatings / n Heating, cooling, tempering Costume jewelry n Shrouds n Medical devices n Load lock n Space simulation customized to your needs Space simulation Thin film deposition units UNIVEX

The UNIVEX system range is well established for experimental coating and thin film deposition applications in university and industrial research and pilot production.

UNIVEX are multipurpose coating systems for the production of func- tional physical deposition (PVD) layers. Features such as modular designs, variable chamber sizes and a numerous accessories make UNIVEX systems ver- satile across wide fields of applications

Leybold provides UNIVEX system solutions, customizable for specific process needs. Our UNIVEX enable highly reproducible results through easy operation with either manual or full process control.

The entire line UNIVEX –

Advantages n Universally configurable for almost all vacuum PVD coating processes n Simple to operate n Compact footprint n Easy to retrofit and upgrade n Incorporates modern vacuum technology and electronics UNIVEX Box Coating systems are designated by number representing their chamber widths

Basic models n UNIVEX 250 - 900 n UNIVEX G Glove Box Systems

n UNIVEX C Cluster Tool

n UNIVEX D Dactyloscopy

n UNIVEX S Space Simulation

- from experiment to series production Box coating systems

Advantages Design

n Modular system design n Compact unit with direct access n Pump system optimized to the to the process chamber

application n The UNIVEX box coaters systems n Multi-purpose vacuum chamber consist of a process and a control module: n Convenient access to all installed equipment Process module: - vacuum chamber n Simple operation - coating components n Multiple deposition techniques in - pump system same chamber Control module: n Cleanroom compatible - PLC, PC controller - HMI visualization - Power supply and distribution UNIVEX 250 UNIVEX 400 UNIVEX 600 UNIVEX 900 compact, high performance systems System details

Vacuum chamber

n Box-shaped stainless steel vacuum chambers UNIVEX 250-600

n Octagonal stainless steel vacuum chamber UNIVEX 900

n Hinged door for simple chamber access

n Viewing window with coating protection

n Removable stainless steel protection panels

n Flexible layout for chamber bottom and chamber top

n Connecting flanges for pump system and process components

n Coolable and heatable chamber walls optional Vacuum system

n Mechanical forevacuum pump (dry compressing or oil sealed)

n High vacuum pump (turbomolecular or cryo pump)

n Vacuum valves

n Pressure measurement devices Glove box systems

Advantages Vacuum chamber

n Direct and easy access to process n Box-shaped stainless steel vacuum equipment via front side sliding door chambers UNIVEX 250 G - 450 G

n Convenient service access via back n Sliding front door for easy chamber side hinged door access through the glove box

n Customized system configuration n Viewing window with coating n Integration of any process protection

components n Removable stainless steel coating n Easy operation via full color touch- protection panels

screen n Flexible layout for chamber bottom and chamber top

n Connecting flanges for pump Typical applications system and process components n UNIVEX G Vacuum deposition of metals onto All system components with exception oxygen/ moisture sensitive layers, of the sliding door are accessible from matches easily with a glovebox including organic electronics or outside the glove box of your choice biological samples - Organic based photovoltaics (OPV) - Organic light-emitting diodes (OLED) - Flexible / organic electronics Cluster tool systems

Design

n Central load lock system

n Central transfer chamber with vacuum robot

n Separate pump systems for each chamber

n PLC controlled, fully automated system operation

Typical applications UNIVEX C Advantages n Automated coating sequences in research, development and pilot the cluster tool solution n Customized system design production n Programmable, recipe controlled n Multiple deposition chambers for process sequence sputtering metals and dielectrics n Fully automated process control n Applications with high demands for n Excellent process vacuum, low wafer throughput or complex layer residual gas contaminates requirements, including a variety of n Easy operation via full color touch- materials to be deposited without screen PLC breaking vacuum Dactyloscopy systems Space simulation

UNIVEX D proven in laboratories for criminal investigations UNIVEX S customized system solutions for space simulation Advantages n Easily controllable thermal coating System design process n Typically, the system comprises a n Coating of large areas up to cylindrical vacuum chamber with 800 x 400 mm high vacuum system and supply n Short cycle times, module with process controller depending on the material with the n The simulation chamber is fingerprint evidence generally equipped with temperature n Good contrast and visibility on controllable trays and shrouds, multicolor surfaces which may be both heated and n The material containing the finger cooled in a vacuum print evidence remains undamaged n The process module is moved manually along rails so that the Typical applications simulation chamber can be opened for loading n Metal evaporation process to reveal fingerprints on items containing finger print evidence Typical applications n Thermal vacuum experiments for simulation of space conditions 3611 0248 02 Technical alterations reserved