EFEF 40LT1 40LT1 LOW TEMPERATURE FFUSION CELL LOW TEMPERATURE EFFUSION CELL INSTRUMENTS

17,5 with POWER SUPPLIES 12 0,7 46 46,8

10,6 12

DESCRIPTION TECHNICAL DATA

EF 40LT1 Effusion Cell (Knudsen Cell) is designed for highly 0RXQWLQJÁDQJH DN 40 CF (rotatable) constant rates in lower ranges of temperature. Heater W wire (tungsten) Temperature range 100 °C - 1000 °C FEATURES Temperature stability ± 0.1 °C

ƒ Evaporation temperature range: 100 °C - 1000 °C Crucible type PBN, Al2O3, Quartz ƒ ([WUHPHO\VWDEOHÁX[UDWHV (option) (other materials on request) ƒ Various crucible materials Crucibles volume 5cc (other volumes on request) ƒ Highly reproducible & reliable ƒ Suitable for use in any MBE system Evaporated materials High pressure and organic ƒ Mo free construction (allows high tempera- materials (e.g. As, Sb, Ba, Bi, K, Li, tures) Mg, Ca, CdSe) ƒ Integral water cooling Thermocouple type type K ƒ Thermocouple type K Degassing temp. 1100 °C Type of shutter VLGHRUÁLSW\SHPDQXDORUSQHXPDWLF OPTIONS Water cooling ZDWHUÁRZ!OPLQ ƒ Customised insertion length (required) temperature: 20 - 30 °C ƒ With or without integrated manual/electro-pneumatic max pressure: 6 bar shutter Insertion length min. 115 mm (other on request) ƒ Linear shift OD: 35 mm ƒ Crucibles Deposition area dependent on working distance Working distance 100 - 150 mm HEATING CONTROL APPLICATION Bakeout temperature up to 250 °C Working pressure < 10-5 mbar

ELECTRONICS HEAT3-PS HEATING POWER SUPPLY (resistive mode)

Please refer to the product page: 29

PREVAC sp. z o.o. [email protected] Raciborska Str. 61 +48 32 459 21 30 PL44362 Rogów +48 32 459 20 01 Precision and Vacuum Technology INSTRUMENTS WITH ELECTRONICS 33

EF 40C1DF www.prevac.eu ELECTRON SOURCE TDS ES40-PS ELECTRON SOURCE POWER SUPPLY HEAT3-PSHEAT3-PS HEATING POWER SUPPLY INSTRUMENTS

SAMPLE HEATING POWER SUPPLY INSTRUMENTS with POWER SUPPLIES with POWER SUPPLIES

Real time pressure charts (data export possibility).

DESCRIPTION TECHNICAL DATA DESCRIPTION TECHNICAL DATA 7KH (636 SRZHU VXSSO\ DOORZV ÀQH DGMXVWPHQW RI HOHF- Supply voltage 100 - 240 V, 50-60 Hz tron beam ,The HEAT3-PS density, is used position for resistive on theheating sample or electron and bombardment Supply voltage(power 100-130VAC/200-260 consumption max VAC,250 W) 50-60Hz (power consumption max 1600 W) DOVR EHDP SURÀOHheating. 6FDQQLQJ The power IHDWXUHV supply can DOORZV also IRUbe used LQGHSHQ for effusion- cellBeam eva -energy 0 - 5000 eV, resolution 0.1 eV, dently controlledporators. scanning The unit speed is equipped and range.with a PIDAll temperaturesettin- controller. Resistive heatingripple 9$VWDQGDUG< 200 mV gs can be manuallyRamp heating adjusted function or controlcan be sample stored temperature and re- to protect sam- mode parameters other versions on request called automaticallyple from damage.after unit Sample switch overheating on. The canunit alsoalso be protectedEmission by current Ǎ$UHVǍ$>(6PRGH@ EB heating 1000 V, 300 mA - standard; features a builtsetting in timerthe voltage and andautomatic current limits.standby The unitmode. can be operated in Q$UHVQ$>&0$PRGH@ auto mode (with temperature control) or manual mode (without mode parameters other versions on request 7KH(636FDQEHVXSSOLHGDVDIXOOZLGWKļUDFNPRXQ- temperature control). The unit is equipped with autosave functionFocus voltage 60 - 100 % related to energy WLQJXQLW 8KHLJKW RUIUHHVWDQGLQJ(DV\ÀUPZDUHXSGDWH Temperature ō273.15 K - 2473.15 K for type C thermocouple (the device save your parameters, preset and apply them automa- voltage, resolution 0.1 % via USB port. Unit can be remotely controlled via RS232/485 range (dependent on sample holder type or evaporator) tically after restart). Wehnelt voltage 9UHV9>(6PRGH@ or Ethernet interfaces. The unit is equipped with autosave 9UHV9>&0$PRGH@ō73.15 K - 1645.15 K for type K thermocouple function (the device save your parameters, preset and apply ō1.4 K - 500 KIRU'7'7VLOLFRQGLRGHV them automaticallyFEATURES after restart). Beam position (Px,Py) resolution(dependent 0.01 mm, on sample holder type and conditions middlein poschamber) ±5 mm ƒ Dual heating mode: resistive and electron bombardment APPLICATIONƒ :LGHUDQJHWHPSHUDWXUHPHDVXUHPHQW . 6FDQQLQJDUHD Ʀ[Ʀ\ Temperature 10 mm2 ×- for10 thermocouplesmm, K/C/E/N ƒ 2D real time chart module independent resolution2 - for 0.01 VLOLFRQGLRGHV'7'7 mm The ES40-PS powerƒ +LJKHIÀFLHQF\ supply is intended to use with the ES40C1 Scanning speedinputs ǍVPV ƒ Setpoint based over-voltage and over-current output pro- Low Energy Electron Source or Double Pass Mini Cylindrical (time/dot) Temperature adjustable from 0.1 K to 1000 K/ s|min|h 0LUURU$QDO\]HU&0$&)7KHSRZHUVXSSO\DOORZVÀQHDGtection - setpoint ramp rate MXVWPHQWRIWKHHOHFWURQEHDPSURÀOHWRDFKLHYHDVPDOOƒ Fully manual or PID temperature controlled (by setpointTimer and dual mode timer 0 s - 99 h 59 m Ʀ7VHWSRLQW 0.1 to 5.0 K/s spot at high energyramp) and emission currents. Vacuum measurement CTR90, TTR91, TTR211, PTR225, ƒ Process temperature control with built-in PID controller (with (optional) Vacuum PTR90,CTR90, ITR90, TTR91,ITR100, TTR211, Baratron, PTR225, PTR90, ITR90, autotuning function for optimized process PID parameters) measurement ITR100, Baratron, ANALOG IN, PG105, ƒ Various kind of temperature sensors: thermocouples K/C/ $1$/2*,10.6$3* (optional) MG13/14, PKR251/360/361, PCR280, ATMION OPTIONS E/N (other on request), Pt, diode MG13/14, PKR251/360/361, ƒ Multiple I/O (10 digital/4 analog) - individual reprogrammable CommunicationPCR280, RS232/485, ATMION Ethernet ƒ Analog I/O ƒcard High for resolution vacuum (16-bitmeasurement analog I/O,(1 gauge) 0.1 K temp.) Communicationinterface RS232/485, Ethernet ƒ One vacuum channel for active gauges interface Communication MODBUS-TCP ƒ Shutter control function - up to 2* shutters (e.g. shutters of protocol sources or manipulators) Communication MODBUS-TCP ELECTRONƒ SOURCEMobile solutions CONTROL for remote APPLICATION access and control protocol User interface ļ7)7GLVSOD\ZLWKWRXFKVFUHHQ ƒ Customised menu options (for robust and effectivity) digital encoder User Interface ļ7)7GLVSOD\ZLWKWRXFKVFUHHQ ƒ 6XSSRUW HDV\ÀUPZDUHXSGDWHYLD86% Interface digitalEnglish, encoder German, Polish * for double DC module version, 1 shutter per channel languages Interface languages English, German, Polish Dimensions ððPP :ð+ð'  OPTIONS Dimensions 483 × 133ļUDFNPRXQWDEOH × 435 mm (W×H×D), ļUDFNPRXQWDEOH Weight (approx.) 8.8 kg (for standard version) ƒ Second DC module available: two resistive heating zonesWeight with (approx.) 9.2 kg independent control, or one resistive heating zone with higher output power 9$RU9$ H[FOXGLQJ(%PRGXOH APPLICATION ƒ Analog I/O card for vacuum measurement (1 gauge) ƒ $Q\WKHUPDOSURFHVVDFFRUGLQJWRWKHVSHFLÀFDWLRQV ƒ Effusion cells supply ƒ Sample holders heating ƒ Thermal monitoring

Precision and VacuumPREVAC Technology sp. z o.o. [email protected] INSTRUMENTS WITH ELECTRONICS 25 Raciborska Str. 61 +48 32 459 21 30 Precision and Vacuum Technology INSTRUMENTS WITH ELECTRONICS 29 PL44362 Rogów +48 32 459 20 01

HEAT3-PS www.prevac.eu