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Metalurgies for Ulrasonic ,Thermosonic and Thermocompression

--PlatingPlating processesprocesses --GoldGold basedbased metalurgiesmetalurgies --AluminiumAluminium basedbased metalurgiesmetalurgies --OtherOther metalsmetals --OtherOther interconnectioninterconnection techniquestechniques --LongLong termterm reliabilityreliability --ExamplesExamples

Rui De Oliveira 12/06/03 PlatingPlating processesprocesses

ElectroElectro && ChemicalChemical platingplating

VacuumVacuum platingplating

ThickThick filmfilm platingplating

Layout/patternsLayout/patterns ElectroElectro--/Chemicalplating/Chemical --platingplating

Chemical plating Electro plating -Plate only catalysed -Plate only on metals - in -Metal in salts or directly the electrodes -Deposition by immersion or autocatalytic -Metals thickness depends on time/temp/current -thickness is not fully temperature and time dependent ElectroplatingElectroplating bathbath

Rayon X

Anode Cathode

Gold bath (electro plating) Ni, Au, Cu, Pd ,Ag The bath can be re-used by replenisching with salts or changing the anodes ChemicalChemical platingplating bathbath

Gold bath (chemical plating)

Ni , Au , Pd, Cu

You can deposit around 6 to 10 times the metal present in one bath The bath start to be instable after that. VacuumVacuum platingplating

-Amorphous deposition -Metals deposited :Ni,Cu,Al,Au,TI,Pd etc - depends on pressure

Lift-off ScreenScreen printingprinting platingplating 1/21/2

Screen printing machine Screen : stainless mesch ScreenScreen printingprinting platingplating 2/22/2

Firing :belt oven

Metals: Thick Au , Ag, PtAu, PdAu Special Gold alloys for reduced Kirkendall effects LayoutsLayouts/Patterns/Patterns

Seed layer

Electro plating

«Nourrice» Direct plate or print Lift-off or etching

Chemical plating Thick film plating GoldGold basedbased platingsplatings 1/21/2

Type Thicknesses (um) Plating type Ni/AuNi/Au 5/0.055/0.05--0.10.1 chemicalchemical Ni/Pd/AuNi/Pd/Au 5/0.3/0.055/0.3/0.05--0.10.1 chemicalchemical Ni/Ni/ ThickThick AuAu 5/15/1 chemical/electrochemical/electro AuAu CobaltCobalt 33 electroelectro ChemicalChemical AuAu 0.050.05--0.10.1 chemicalchemical ElectroElectro AuAu 1.51.5--22 electroelectro Ni/AuNi/Au VacuumVacuum 2/12/1 sputteringsputtering AuAu thickthick filmfilm 88--1515 ScreenScreen printingprinting GoldGold basedbased platingsplatings 2/22/2

Plating Al Au contact Press fit bonding bonding Ni/Au OK NO NO OK OK Ni/Pd/Au OK OK NO OK OK Ni/Thick Au OK OK NO OK OK* Au cobalt NO NO OK OK NO Chemical Au NO NO NO NO OK Electro Au OK/NO OK/NO NO NO OK* Ni/Au OK OK NO NO OK* vacuum Au thick film OK OK NO NO NO

* Ok but not recomanded AluminiumAluminium basedbased platingsplatings

Aluminium type Thicknesses Wedge Al Ball Au (um) Sheet 99.9 % 15-50 OK OK

Vacuum evaporation 1.5-2 mini OK/NO OK/NO

Vacuum sputtering 1.5-2mini OK* OK*

Al/Si sputtering (1-2%) 1.5-2mini OK* OK*

Al/Cu sputtering(1-3%) OK* OK*

* Depend on the parameters during the process OtherOther metalsmetals

-Cu Æ bondable but not reliable

-Ag Æ bondable but not reliable

-Cr Æ difficult to bond due to

-Ni Æ difficult to bond due to passivation

-Pt Au Æ bondable but not as good as Gold

-Pd or Ni/Pd Æ Seem to be as good as Gold but not very used ( chemical & electro) OtherOther interconnectionsinterconnections techniquestechniques withwith similarsimilar processesprocesses asas wirewire bondingbonding

-TAB (tape automated bonding) Thermocompression Au/Au or Au/Sn -Bump bonding Thermocompression Au/Au (C4 or ball bumps) -SMD component bonding Ultrasonic SnPb/SnPb LongLong termterm reliabilityreliability 1/31/3 Kierkendall effect (Al to Au bond)

Kirkendall voids evolution

Curve X=cte

X=thickness of AuAl2 t= Time T=Temperature K=Boltzmann constant LongLong termterm reliabilityreliability 2/32/3

Kirkendall voids observed in 2 cases:

-Aluminium bonding on thick gold pads (1 to 15um) Not on immersion gold (0.05um)

-Gold bonding on Aluminium pads

No information on with Pt/Au or Pd LongLong termterm reliabilityreliability 3/33/3

Sealed package with Nitrogen without humidity

Glass epoxy Glob-top , gel, glob-top. Sensitive to CTE mismatch No protection , need a controlled atmosphere and no humidity ExamplesExamples