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SUPER ENGINEERING POLYIMIDE APPLICATIONS

01 FPD (Flat Panel Display) 02 Solar Cell 03 Inflammability 02 Wear

· Drying oven(HP/CP, Baking, IR) Glass support pins, · Drying oven(HP/CP, Baking, IR) Glass support pins, PLAVIS has a UL 94 listing as V0. It will not sustain a flame in air. The continual burning is 55% for PLAVIS-N. 54.15% for PLAVIS-G15, and The friction level and wear rate of PLAVIS bearings quickly stabilize level of the filled grades. Pure PLAVIS bearings are select- Glass holders, Rollers Glass holders, Rollers limiting oxygen index that indicates the minimum oxygen required for 53.7% for PLAVIS-G40. to uniform valves. Temperature is an important factor for friction ed when low particle generation is required. · Cleaning EUV roller, Bearing · Cleaning EUV roller, bearing · PVD/CVD Insulation parts Insert, Clamp, Bush, Caps, · PVD/CVD Insulation parts Insert, Clamp, Bush, Caps, Friction Coefficient vs Temperature (non-lubrication, S45C) 60 0.4 80 14 Susceptor pin, Ball bearing etc. Susceptor pin, Ball bearing etc. 12 PE PSU PLAVIS Test Condition : 0.3μm Acetal Wear Test speed : 300mm/sec 50 a unit 12 10 L.O.I(%) 0.5μm · Etcher Screw, bolts. PES PTFE Resistant Grade Time : 10hrs

cm/cm/˚C 0.3 60 PEEK-CA30 Running distance : 18km -5 40 10 · Others Probe unit, station parts 8 PC TPI PEEK PLAVIS Load : 1.5kgf 10 30 PEEK-HPV 8 6 Friction Coefficient PLAVIS Phenol 0.2 23~150˚C 40 PEEK 20 6 4 MC 175˚C 0.1 20 4 2 Stainless 10 Acetal (into Exposure in the air) Titanium 200˚C ~ Condition P=25kg/cm², V=1m/sec 2 0 0 Coonterpart S45C, Non Lubricant PLAVIS-N PLAVIS-G15 PLAVIS-G40 PEI PAI PEEK 200 300 400 500 600 700 ˚C 0 1 2 3 4 5 Time(hrs) 2 4 6 8 10 1 2 3 4 5 6 7 8 9 10 Time(hr) Picture7. Comparison of Thermal Expansion Picture8. Comparison of Limiting Oxygen Index Picture9. PLAVIS-N Exposure Test at High Coefficient of Various Materials between PLAVIS and Various Enpla Temperature in the Air (for one minute) Picture13. Relations between friction coefficient Picture14. Typical wear curve of PLAVIS-G15 Picture15. Particle Count on running (PLAVIS-N) and temperature (PLAVIS-G15) (vs carbon steel)

03 Semiconductor 04 General Industry 04 Low Out-gassing

· Wafer Processing Wafer clamp rings, Insulators, · Hot runner system Seal caps, Insulators PLAVIS does not degrade at high temperatures or give off volatiles metals. PLAVIS meets the NASA specification for total mass loss in CHEMICAL STABILITY Screw & Fasteners, Vacuum pads, Aligmnet pins · Plasma cutting torches parts Swirl rings, Insulator, Caps. or condensable gasses. In vacuum processing chambers for LCD or space vacuum environments for satellite applications. · Wafer handling Wafer guides, Wafer carriers, Vaccum · Heat resistance materials Bottle grippers, VConveyor tips Electronics, PLAVIS is the only plastic that can replace ceramics and PLAVIS has good resistance to many organic solvents, oils, and greases such as ATF (automatic transmission fluid). Even at high tempera- tures in these lubricants, the mechanical properties of PLAVIS are not significantly changed. pick up strips · Scientific consumable parts GC/Mass ferrels, HPLC % Total Mass Loss PLAVIS should not be used in strong alkali con- (TDS, 150˚C, 10-7 torr) (TDS, 300˚C, 10-7 torr) 0.01 1.2 Vacuum Condition : 10-7 torr (ASTM<10-5 torr) · IC handling & testing Die pick up collects, Test socket insulator valve rotors % ditions such as pH over 10. The chemical structure of PLAVIS is not resistant to bases. 150 0.01 300 Temperature : 125˚C Q-Graph(300˚C) · Textile Machines Valve seat, Bearing, Shedder Bushing Q-Graph(150˚C) 1E-3 1.0 1E-3 SPEC Limit 0.8 100 200 1E-4 1E-4 Q=C∆P(Torr L/s)

Temperature˚C 0.6 Temperature˚C

Temp Q=C∆P(Torr L/s) Temp 1E-5 1E-5 0.4 50 PBI 100 PBI Other PI Other PI NEW GRADE PLAVIS-C & PLAVIS-ESD 1E-6 0.2 PLAVIS® PLAVIS® 1E-6 0 0 0.0 0.2 0.4 0.6 0.8 1.0 Time(hr) 0.2 0.4 0.6 0.8 1.0 Time(hr) PLAVIS Other PI 01 Electrical Properties of PLAVIS-C&ESD 02 Applications Picture10. Outgassing characteristics of Picture11. Outgassing characteristics of Picture12. Total Mass Loss (%) PLAVIS at 150℃ PLAVIS at 300℃ PLAVIS-C is the conductive polyimide. PLAVIS-ESD is electrostatic · Wafer handling dissipative grade. PLAVIS-C & ESD show the uniform surface resis- · Flat panel display glass handling process tivity under the various input voltages · Electronics manufacturing line fixtures 05 Automotive / Transportation 06 Aerospace/Aircraft · Bearing in electronic products and motors · Burn in and test socket · Transmissions Thrust Washers, Seal Rings, Valve Seats, Compressor Variable Vane Bushings and Washers, Aircraft Transmission Valve Balls, Check Valves Fan Thrust Reverser, Fan Blade Wear Strips, Locking Insert FRICTION & WEAR PROPERTIES · Electrical Motors Bushings, Washers, Thrust Plugs Nut, Fuel Line Spacer, Reciprocating Shaft Seal for Jet Q GraphlPLAVIS-C, PLAVIS-ESD, COMPETITOR 0.1 · Brakes Wear Pads, Valve Seats and Balls in ABS Systems Engine Afterbunner Actuating System PLAVIS graphite filled grades are self lubricating and can be applied to wear and friction applications such as bearings and wear strips even 10 9 300 1E-3 · Fuel Systems Bushings, Seal Rings, Band Springs, Valve Seats in high temperature oil/grease starved environments. Temp · Turbo Chargers Ball Bearing Retainers, Wastegate Bushings 250 1E-5 107 · Others Vacuum Pump Vanes, Engine Belt Tensioners, Rubbing 200

01 Friction Temperature˚C

Blocks, Door Hinge Bushings, Gear Stick Rollers, Ignition 1E-7 Q=C∆P(Torr L/s) 10 5 150 Distributors, Constant Friction Pads for Split-Flywheels PLAVIS bearing grades operate at the highest temperatures of any . PLAVIS-ESD Other PI 1E-9 PLAVIS-C 100 PLAVIS-C No other can operate at 300℃ without oil or grease lubrication. 3 10 PLAVIS-ESD Surface resistivity(Ω/square) 50 Other PI 1E-11

Grade PLAVIS-N PLAVIS-G15 PLAVIS-G40 0 100mV 1V 10V 90V Input Voltage 60 120 180 240 300 360 Time(min) PV=10kg/cm². m/sec 0.32 0.23 0.16

Table3. Typical friction coefficient of PLAVIS Picture16. Surface resistivity of PLAVIS-C & ESD grades under Picture17. Out-gassing property of PLAVIS-C & ESD the various input voltages