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Table of Contents 2004 IEEE International Vacuum Electronics E LECTRON DEVICES S OCIETY IEEEIEEE ELECTRONELECTRON DEVICESDEVICES SOCIETYSOCIETY Jan. 2004 Vol. 11, No. 1 ISSN:1074 1879 Editor-in-Chief: Ninoslav D. Stojadinovic 20042004 IEEEIEEE InternationalInternational VacuumVacuum ElectronicsElectronics ConferenceConference (IVEC)(IVEC) Table of Contents Upcoming Technical Meetings ................1 • 2004 IVEC • 2004 MIEL • 2004 P2ID • 2003 IRPS Message from the EDS President .............2 2004 EDS Graduate Student Fellowship Call for Nominations.....................................7 Society News...................................................8 • 2002 EDS George Smith Award • 2002 EDS Paul Rappaport Award • Announcement of the EDS Graduate Student Fellowship Winners for 2003 • Call for IEEE Fellow Nominations The Fifth International Vacuum Electronics Conference (IVEC 2004) is • 2002 IEEE Transactions on returning to the picturesque city of Monterey, California April 27-29, Semiconductor Manufacturing 2004. The meeting will be held at the Monterey Conference Center at Best Paper Award the Doubletree Hotel under the sponsorship of the IEEE Electron • EDS Members Recently Elected Devices Society (EDS). Dr. Dan M. Goebel of the NASA Jet Propul- to IEEE Senior Member Grade sion Laboratory will serve as the General Chair, and Dr. Carol L. Kory of CCR and Analex Corp/NASA GRC will serve as Technical Program • EDS Region 9 Chapters Chair. The EDS Technical Committee on Vacuum Devices provides over- Meeting Summary sight of the conference; an international committee chaired by Dr. • EDS Distinguished Lecturers James Dayton, Jr. Participate in the 2nd Since its inception in 2000, IVEC has become the premier international WIMNACT – Korea venue for presentations in the field of vacuum electronics. IVEC 2004 continues the tradition of the U.S. “Power-Tube” Conference in Mon- Regional & Chapter News ........................15 terey, which has become the US home of IVEC, in providing a forum for presentation and discussion of topics on vacuum devices, vacuum micro- EDS Meetings Calendar ............................23 electronics, applications of vacuum devices, and the theory and techno- EDS Distinguished Lecturers Participate in logical developments of vacuum electron devices. IVEC meets in the U.S. every other year and in Europe and Asia alternately every fourth year. A the 3rd WIMNACT – Singapore .........24 highlight of the meeting will be the presentation of the IVEC Award for Excellence in Vacuum Electronics, given at the conference banquet. Com- plete details about the meeting and this award can be found on the con- ference web site at http://www.ivec2004.org. The IVEC 2004 conference will begin with a half-day plenary session followed by two and a half days of oral and poster sessions. Two page Your Comments Solicited abstracts for IVEC 2004 should be submitted electronically to Mr. Ralph Your comments are most welcome. Please write Nadell of Palisades Convention Management at [email protected] directly to the Editor-in-Chief of the Newsletter at by January 5, 2004. Information on the preparation and submission of [email protected] the abstracts can be found on the conference web site. continued on page 6 ElectronElectron DevicesDevices SocietySociety Message from the President Awards Chair EDS President Steven J. Hillenius Alfred U. Mac Rae Agere Systems Mac Rae Technologies Tel: +1 610 712 6054 Tel: +1 908 464 6769 E-Mail: [email protected] E-Mail: [email protected] It has been my privilege and honor to serve as the President of the Electron Vice President Educational Activities Chair Hiroshi Iwai Ilesanmi Adesida Devices Society for the last two years. It Tokyo Institute of Technology University of Illinois has also been two years of tremendous Tel: +81 45 924 5471 Tel: +1 217 244 6379 challenge and change. This will be the E-Mail: [email protected] E-Mail: [email protected] last message I write to you as President, Treasurer Meetings Chair so it is a time to reflect back over this Paul K. L. Yu Kenneth F. Galloway period. I hope that I am leaving the posi- University of California at San Diego Vanderbilt University tion with the Society in better shape to Tel: +1 858 534 6180 Tel: +1 615 322 0720 Steven J. Hillenius face the future. I can look at some of the E-Mail: [email protected] E-Mail: [email protected] high points of the last two years with pride and satisfaction. Secretary Membership Chair These include; the celebration of EDS’ 50th Anniversary; the John K. Lowell James B. Kuo development of a strategic plan with a primary focus on our Consultant National Taiwan University technical committees, and the progress towards fulfilling our Tel: +1 972 839 4900 Tel: +886 2 236352251 Ext. 338 goal of providing our members with on-line access to a E-Mail: [email protected] E-Mail: [email protected] ‘complete’ set of EDS publications by digitizing all legacy Sr. Past President Publications Chair content (pre-1988) for Electron Device Letters, Transactions Bruce F. Griffing Renuka P. Jindal on Electron Devices and the IEDM proceedings. N/A University of Louisiana at Lafayette The challenge over the last two years has been one of Tel: N/A Tel: +1 337 482 6570 responding to the dramatic change in our businesses and the E-Mail: [email protected] E-Mail: [email protected] economy within the world of electron devices. The change Jr. Past President Regions/Chapters Chair has been one where a dramatic decrease in the amount of Cary Y. Yang Cor L. Claeys commercial research and development has occurred. The Santa Clara University IMEC result of this decrease has reduced our pool of traditional Tel: +1 408 554 6814 Tel: +32 16 281328 E-Mail: [email protected] E-Mail: [email protected] members; and in turn, has decreased the attendance at our technical meetings and the number of subscribers to our EDS Executive Director IEEE Newsletters publications. These challenges and the fact that the IEEE as a William F. Van Der Vort Paul Doto whole was experiencing a budget crisis drove much of the IEEE Operations Center IEEE Operations Center behavior over the last two years and it was mostly one of belt 445 Hoes Lane 445 Hoes Lane Piscataway, NJ 08854 Piscataway, NJ 08854 tightening and deferring plans for expansion. Tel: +1 732 562 3926 Tel: +1 732 562 3945 In my last message, I said that the challenges that we Fax: +1 732 235 1626 Fax: +1 732 981 1855 are confronted within the research and businesses that the E-Mail: [email protected] E-Mail: [email protected] Society represents are greater now than they have been for our entire history. We are looking at the end of the Contributions Welcome roadmap for the transistor scaling, a globalized economy that is making many of our technology innovations a wide- Readers are encouraged to submit news items ly available commodity and new technology developments concerning the Society and its members. Please that will challenge and disrupt our established institutions. send your ideas/articles directly to either the Edi- The viability of the Society will be determined by how tor-in-Chief or appropriate Editor. All contact quickly we will be able to adapt to these changes and posi- information is listed on the back cover page. tion the technical component of the Society to the interests Whenever possible, e-mail is the preferred form and needs of the people who will be driving these changes. of submission. I think that we have made significant steps to position the Newsletter Deadlines Society in such a way that it will maintain a technical edge. Issue Due Date We have created the position of Technical Committees Chair January October 1st that has AdCom voting rights and is included as a member of April January 1st the EDS Executive Committee (ExCom). The key purpose of July April 1st October July 1st (continued on page 3) IEEE Electron Devices Society Newsletter (ISSN 1074 1879) is published quarterly by the Electron Devices Society of the Institute of Electrical and Electronics Engineers, Inc. Headquarters: 3 Park Avenue, 17th Floor, New York, NY 10016-5997. Printed in the U.S.A. One dollar ($1.00) per member per year is included in the Society fee for each member of the Electron Devices Society. Periodicals postage paid at New York, NY and at additional mailing offices. Postmaster: Send address changes to IEEE Electron Devices Society Newsletter, IEEE, 445 Hoes Lane, P.O. Box 1331, Piscataway, NJ 08855-1331. Copyright © 2004 by IEEE: Information contained in this Newsletter may be copied without permission provided that copies are not used or distributed for direct commercial advantage, and the title of the publication and its date appear on each photocopy. 2 IEEE Electron Devices Society Newsletter ❍ January 2004 UpcomingUpcoming TechnicalTechnical MeetingsMeetings 20042004 IEEEIEEE InternationalInternational SymposiumSymposium onon Plasma-Plasma- andand Process-InducedProcess-Induced DamageDamage (P2ID)(P2ID) The ninth annual International these aspects of damage – mecha- Symposium on Plasma- and nisms, processes, tooling, design Process-Induced Damage will rules, materials - are the province be held May 17-19 in Austin, of this conference and it is why Texas. This conference, popu- the study of these phenomena is larly known as P2ID, has served multi-disciplinary. for nearly a decade to highlight There are several trends in the issues surrounding all aspects industry that signal an evolution of of process-induced damage in this field of study. For example, the semiconductor fabrication. nature of the gate dielectric is Since its inception in 1996, this evolving – will the emergence of conference has been held in Califor- or “electrical.” One example of physical high-k gate insulators reduce or nia, Hawaii, and Paris, making it truly damage is a notch etched at the bottom increase the susceptibility to process- international.
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