DOCSLIB.ORG

(CMP) Slurries with Fluorescence Correlation Spectroscopy

Total Page：16

File Type：pdf, Size：1020Kb

Download full-text PDF Read full-text
(CMP) Slurries with Fluorescence Correlation Spectroscopy Fine Particle Characterization in Chemical Mechanical Planarization (CMP) Slurries with Fluorescence Correlation Spectroscopy June 8th, 2021 © 2021 HORIBA, Ltd. All rights reserved. Presentation Content 1. Brief CMP description 1. Particle size variation 2. Simplified abrasion model 2. Motivation and scope 1. Process variation 2. Roadmap Fine Particle Focus 1. IRDS 2. SEMI Standard 3. 2 methods using fluorescence 1. FCS 2. NTA © 2021 HORIBA, Ltd. All rights reserved. 2 Basic Description of CMP Material overburden Chemical Mechanical Polishing • Slurry: Liquid, additives, particles • Chemically modify surface Continue the process flow • Mechanical abrasion of modified surface • Compliant pad • Wafer Dynamic process…focus on particle metrology © 2021 HORIBA, Ltd. All rights reserved. 3 Simplified Mechanical Abrasion Model ~MPS these define the normal abrasion • ~D20 and less • Difficult to measure • These can be useless filler if too high Larger Particles Scratch the wafer • Essentially depleting the active abrasives near MPS • Can remain on the wafer as post CMP defects • High surface area may react with other additives uncontrollably Soft CMP pad; polyurethane “hard” wafer; Cu, W, SiO2, etc © 2021 HORIBA, Ltd. All rights reserved. 4 Motivation and Scope Metrology improvements to reduce variation from particles CMP process parameters distribution system • RR / uniformity particle supplier • dilution • defects • oxidizer • planarity • filtration slurry supplier • dilution • additives • filtration Reactive: respond to process parameter excursions for slurry in MFG process Proactive: New metrology and methods Particle suppliers: improve PSD metrology control PSD Slurry R&D Optimize abrasive performance robust CMP performance Commercial slurry Avoid process excursions due to abrasive particle raw material variation © 2021 HORIBA, Ltd. All rights reserved. 5 Background – IRDS 2018 & 2020 2020 Challenge #5 is a perennial for IRDS Yield Enhancement… https://irds.ieee.org/images/files/pdf/2020/2020IRDS_YE_Tables.xlsx Roadmap perspective: Perpetual need for improvements to particle metrology… © 2021 HORIBA, Ltd. All rights reserved. Background – SEMI Standards Semi standards do not list FCS or NTA on the list of techniques for particle size… However, they do acknowledge the needs for improved particle metrology as semiconductor technology advances. SEMI C98-1219 GUIDE FOR CHEMICAL MECHANICAL PLANARIZATION (CMP) PARTICLE SIZE DISTRIBUTION (PSD) MEASUREMENT AND REPORTING USED IN SEMICONDUCTOR MANUFACTURING “Response to Semiconductor Technology Advances • As node sizes continue to decrease, new requirements for CMP PSD are becoming increasingly important. • As CMP slurries move towards smaller particle sizes more nano-size sensitive PSD metrologies are needed. • More PSD information is needed at smaller particle sizes (i.e., more particle size bins in the nanometer size range). • Metrologies capable of differentiating the nature of the measured particles are needed….” Next gen PSD requires: “Sensitivity in the nm range….Smaller bins in the nm range” © 2021 HORIBA, Ltd. All rights reserved. The Problem What happens when mean particle size approaches the limit of resolution? As our mean particle size approaches our resolution limit, we are at risk of missing the true PSD on the “fine” side Particle counts (#/ml)counts Particle particle diameter (nm) Improve Process Control and meet Roadmap Challenges: Improve the resolution of fine particles © 2021 HORIBA, Ltd. All rights reserved. 8 Fluorescent Enhancement Techniques Fluorescence Correlation Spectroscopy (FCS) DLS Laser Diffraction Disk Centrifuge E-Microscopy Nanoparticle Tracking Analysis (NTA) Viewsizer 3000 • Multi wavelength • Dye enhanced © 2021 HORIBA, Ltd. All rights reserved. 9 Outline • Overview of Fluorescence Correlation Spectroscopy (FCS) • Use of Multiple Dyes in FCS Analysis and Application of Fluorescence Lifetime Analysis (FLA) • FCS Characterization of Different Dyes Adsorbed Silica Abrasives • FCS Characterization of the Small Particle Tail in Silica Particle Size Distributions Using Fractionation via Differential Sedimentation Analysis of Supernatant Fractions • Conclusions and Directions for Future Studies © 2021 HORIBA, Ltd. All rights reserved. 10 Fluorescence Correlation Spectroscopy Consider the following Thought Experiment: Image the fluorescence from a dilute solution of dye molecules. diameter of sample cell diameter of sample cell diameter at the focus diameter at the focus © 2021 HORIBA, Ltd. All rights reserved. 11 Single-Molecule Spectroscopic Analysis Fluorescence Correlation Spectroscopy (FCS) © 2021 HORIBA, Ltd. All rights reserved. 12 FCS Measurements: Intensity Fluctuation Autocorrelation Function, G(τ) Define the normalized autocorrelation function, G(τ) : G(τ) = <δF(t) • δF(t + τ)> <F(t)>2 where: F(t) is the intensity at time t Intensity δF(t) is the fluctuation in intensity at time t δF(t + τ) is the fluctuation in intensity at time t + τ 0 Time (t) ) τ ( G Intensity 0 0 Time (t) log τ © 2021 HORIBA, Ltd. All rights reserved. 13 Evaluate the Diffusion Coefficient, DT, and Number of Fluorophores, N τD is related to the translational diffusion coefficient, G(0) DT: 2 τD = r0 / 4DT 2 where: r0 is the radius of focal volume (~0.5 m) ) τ ( G(τ) = G(0)/e DT is related to the hydrodynamic diameter, dh : G DT = kT / 3ηdh (Stokes-Einstein equation) where: k is the Boltzmann constant. T is the absolute temperature. η is the solvent viscosity. 0 log τ τD τD G(0) is related to the average number of fluorophores in the focal volume, N: 1 1 1 1/2[ G(τ) = 2 2 N 1 + 4DTτ/r0 [1+4DTτ /(z0/2) G(0) = 1 / N © 2021 HORIBA, Ltd. All rights reserved. 14 Representative FCS Analysis of Dispersed Silica Abrasive Using Adsorbed Rhodamine 110 1.0 10 nM R110 (D = 1.2 nm) 3 wt% silica (D = 70 nm) + 10 nM R110 0.8 solvent: 10 mM NaCl, pH 7.4 ) ( G 0.6 - 0.4 Dn = 68 nm Normalized + 0.2 0.0 10-5 10-4 10-3 10-2 10-1 (s) Jacobson, L.M.; Turner, D.K.; Wayman, A.E.; Rawat, A.K.; Carver, C.T.; Moinpour, M.; Remsen, E.E. ECS J. Solid State Sci. Tech. 2015, 4, P5053-P5057. Schorr, D.K.; Smith, M.A.; Rawat, A.K.; Carver, C.T.; Mansour, M.; Remsen, E.E. ECS Trans. 2016 72, 43-51. © 2021 HORIBA, Ltd. All rights reserved. 15 Fluorophores Employed in FCS Studies of Silica Abrasive Dispersions - + Alexa fluor 488 (A488) Rhodamine 110 (R110) Rhodamine 6G (R6G) λex = 490 nm, λem = 525 nm λex = 496 nm, λem = 520 nm λex = 530 nm, λem = 565 nm © 2021 HORIBA, Ltd. All rights reserved. 16 Overlay of Normalized FCS ACFs for 10 nM A488, R110 and R6G 1 A488 R6G 0.8 R110 ) ) ( ( 0.6 G G 0.4 Normalized Normalized Normalized 0.2 0 10-5 10-4 10-3 10-2 10-1 © 2021 HORIBA, Ltd. All rights reserved. (s) 17 Overlay of Normalized ACFs for A488 and Adsorbed A488 on PL-2 1 10 nM A488 0.8 5 nM A488 + 5 wt% PL-2 ) ( G 0.6 0.4 Normalized Normalized 0.2 0 10-5 10-4 10-3 10-2 10-1 (s) © 2021 HORIBA, Ltd. All rights reserved. 18 Overlay of Normalized ACFs for R110 and Adsorbed R110 on PL-2 1 10 nM R110 0.8 5 nM + 5 wt% PL-2 ) ( - G G 0.6 0.4 + Normalized Normalized Normalized Normalized 0.2 0 10-5 10-4 10-3 10-2 10-1 (s) © 2021 HORIBA, Ltd. All rights reserved. 19 Overlay of Normalized ACFs for R6G and Adsorbed R6G on PL-2 1 10 nM R6G 5 nM R6G + 5 wt% PL-2 0.8 ) ) ( ( 0.6 G G 0.4 Normalized Normalized Normalized 0.2 0 10-5 10-4 10-3 10-2 10-1 (s) © 2021 HORIBA, Ltd. All rights reserved. 20 Overlay of Normalized ACFs for Adsorbed A488, R110 and R6G on PL-2 1 5 nM A488 + 5 wt% PL-2 5 nM R110 + 5 wt% PL-2 0.8 5 nM R6G + 5 wt% PL-2 Table 1. Two-component ACF analysis of Dye + PL-2 ) Dye Diameter (nm) % Bound % Free ( 0.6 A488 5.7 16 84 G R110 57 18 82 R6G 71 38 62 0.4 Normalized Normalized 0.2 0 10-5 10-4 10-3 10-2 10-1 (s) © 2021 HORIBA, Ltd. All rights reserved. 21 Overlay of Normalized ACFs for Supernatants from Centrifuged R110 + S3 Mixtures as Function of Spin Time at 14,500 rpm 1 10 nM R110 (diameter = 1.2 nm) 5 nM R110 + 5 wt% S3 (20 min) 0.8 5 nM R110 + 5 wt% S3 (10 min) 5 nM R110 + 5 wt% S3 (0 min) ) ( 0.6 Table 2. Two-component ACF analysis of Dye + S3 G Time (min) Diameter (nm) % Bound % Free 0 46 8 92 10 36 7 93 0.4 20 1.6 - - Normalized Normalized 0.2 0 10-5 10-4 10-3 10-2 10-1 (s) © 2021 HORIBA, Ltd. All rights reserved. 22 Overlay of Normalized ACFs for Supernatants from Centrifuged R110 + S3 Mixtures as Function of Rotor Speed for 60 min 1 10 nM R110 (diameter = 1.2 nm) 5 nM R110 + 5 wt% S3 (2,500 rpm) 5 nM R110 + 5 wt% S3 (4,500 rpm) 0.8 5 nM R110 + 5 wt% S3 (6,500 rpm) 5 nM R110 + 5 wt% S3 (8,500 rpm) ) 5 nM R110 + 5 wt% S3 (0 rpm, diameter = 50 nm) ( G 0.6 Table 3. Two-component ACF analysis of S3 Speed Diameter (nm) % Bound % Free 8,500 1.4 - - 0.4 6,500 18 5 95 4,500 28 10 90 Normalized Normalized 2,500 41 8 92 0.2 0 10-5 10-4 10-3 10-2 10-1 (s) © 2021 HORIBA, Ltd. All rights reserved. 23 Conclusions and Directions for Future Studies • A488, R110 and R6G adsorbed to silica without significant static or dynamic quenching • The adsorption of the dyes to silica increases in the following order: A488 < R110 < R6G • Differential sedimentation of silica allows isolation and analysis by FCS of the small particle tail of the particle size distribution (PSD) • Use R6G adsorption in conjunction with differential sedimentation for highest resolution of the small particle tail of the PSD • Use FCS to quantify the adsorption isotherm of the dye interaction with silica © 2021 HORIBA, Ltd.
Load more

Recommended publications
  • Viewsizer 3000
    ViewSizer TM 3000 Unmatched Visualization and Measurement of Nanoparticles Visualize and determine the size distribution of a wide range of nanoparticle sizes even when they coexist in the same liquid. APPLICATIONS INCLUDE • Batteries • Exosomes, microvesicles, • Pharmaceuticals and other biological particles • Catalysts • Limnology • Pigments and inks • Chemical & • Metal powders • Polymers mechanical polishing • Colloid stability • Nanoparticles • Protein aggregation • Cosmetics • Oceanography • Semiconductors • Ecotoxicology • Particle counting • Water quality • Energy • Particle number concentration • Viruses and virus like particles (VLP’s) • Environmental sciences • Particle size distribution even for polydisperse samples High resolution size distribution and nanoparticle concentration Determine both with the ViewSizer™ 3000 INTRODUCTION Analyzing nanoparticles is inherently challenging. They are too small to image with visible light and must be imaged by laborious electron microscopy. Dynamic light scattering and laser diffraction can be used to determine particle size and size distribution with some success. However, as ensemble techniques, high resolution size distribution information cannot be obtained and those methods do not measure particle concentration. The ultramicroscope and nanoparticle tracking have been used with only partial success since the wide range of sizes present in many samples means that scattering from the largest particles is bright enough to saturate the detector and eliminate any hope of learning about
    [Show full text]
  • Controlling Nanoparticle Dispersion for Nanoscopic Self-Assembly
    CONTROLLING NANOPARTICLE DISPERSIONS FOR NANOSCOPIC SELF- ASSEMBLY A Project Report presented to the Faculty of California Polytechnic State University, San Luis Obispo In Partial Fulfillment of the Requirements for the Degree Master of Science in Polymers and Coatings by Nathan Stephen Starkweather March 2013 © 2013 Nathan Stephen Starkweather ALL RIGHTS RESERVED ii COMMITTEE MEMBERSHIP TITLE: Controlling Nanoparticle Dispersions for Nanoscopic Self- Assembly AUTHOR: Nathan Stephen Starkweather DATE SUBMITTED: March 2013 COMMITTEE CHAIR: Raymond H. Fernando, Ph.D. COMMITTEE MEMBER: Shanju Zhang, Ph.D. COMMITTEE MEMBER: Chad Immoos, Ph.D. iii ABSTRACT Controlling Nanoparticle Dispersions for Nanoscopic Self-Assembly Nathan Stephen Starkweather Nanotechnology is the manipulation of matter and devices on the nanometer scale. Below the critical dimension length of 100nm, materials begin to display vastly different properties than their macro- or micro- scale counterparts. The exotic properties of nanomaterials may trigger the start of a new technological revolution, similar to the electronics revolution of the late 20th century. Current applications of nanotechnology primarily make use of nanoparticles in bulk, often being made into composites or mixtures. While these materials have fantastic properties, organization of nano and microstructures of nanoparticles may allow the development of novel devices with many unique properties. By analogy, bulk copper may be used to form the alloys brass or bronze, which are useful materials, and have been used for thousands of years. Yet, organized arrays of copper allowed the development of printed circuit boards, a technology far more advanced than the mere use of copper as a bulk material. In the same way, organized assemblies of nanoparticles may offer technological possibilities far beyond our current understanding.
    [Show full text]
  • Nonlinear Dark-Field Microscopy
    pubs.acs.org/NanoLett Nonlinear Dark-Field Microscopy Hayk Harutyunyan,† Stefano Palomba,† Jan Renger,‡ Romain Quidant,‡,§ and Lukas Novotny*,† † Institute of Optics, University of Rochester, Rochester, New York 14627, United States, ‡ ICFO-Institut de Ciencies Fotoniques, Mediterranean Technology Park, 08860 Castelldefels (Barcelona), Spain, and § ICREA-Institucio´ Catalana de Recerca i Estudis Avanc¸ats, 08010 Barcelona, Spain ABSTRACT Dark-field microscopy is a background-free imaging method that provides high sensitivity and a large signal-to-noise ratio. It finds application in nanoscale detection, biophysics and biosensing, particle tracking, single molecule spectroscopy, X-ray imaging, and failure analysis of materials. In dark-field microscopy, the unscattered light path is typically excluded from the angular range of signal detection. This restriction reduces the numerical aperture and affects the resolution. Here we introduce a nonlinear dark-field scheme that overcomes this restriction. Two laser beams of frequencies ω1 and ω2 are used to illuminate a sample surface and to generate a purely evanescent field at the four-wave mixing (4WM) frequency ω4wm ) 2ω1 - ω2. The evanescent 4WM field scatters at sample features and generates radiation that is detected by standard far-field optics. This nonlinear dark-field scheme works with samples of any material and is compatible with applications ranging from biological imaging to failure analysis. KEYWORDS Dark-field imaging, microscopy, nonlinear wave mixing, optical sensing, detection and
    [Show full text]
  • Nanotechnology and Drug Delivery Part 1: Background and Applications
    Ochekpe et al Tropical Journal of Pharmaceutical Research, June 2009; 8 (3): 265-274 © Pharmacotherapy Group, Faculty of Pharmacy, University of Benin, Benin City, 300001 Nigeria. All rights reserved . Available online at http://www.tjpr.org Review Article Nanotechnology and Drug Delivery Part 1: Background and Applications Nelson A Ochekpe 1*, Patrick O Olorunfemi 2 and Ndidi C Ngwuluka 2 1Department of Pharmaceutical Chemistry and 2Department of Pharmaceutics and Pharmaceutical Technology, Faculty of Pharmaceutical Sciences, University of Jos, PMB 2084, Jos, Nigeria Abstract Nanotechnology in general and as it relates to drug delivery in humans has been reviewed in a two-part article, the first part of which is this paper. In this paper, nanotechnology in nature, history of nanotechnology and methods of synthesis are discussed, while also outlining its applications, benefits and risks. Nanotechnology is an industrial revolution, based on integration of disciplines that could change every facet of human life. Some examples of changes brought about by reduction in particle sizes to the physical, chemical and biological properties of substances, compounds and drug products have been cited. The benefits of nanotechnology are enormous and so these benefits should be maximized while efforts are made to reduce the risks. Keywords: Nanotechnology, Nanobiotechnology, Nanostructures, Nanomaterials, Nanocarriers, Drug delivery. Received: 4 Nov 2008 Revised accepted: 13 Jan 2009 *Corresponding author: E-mail: [email protected]; Tel: +234-(0)8037006372 Trop J Pharm Res, June 2009; 8 (3): 265 Ochekpe et al INTRODUCTION Definition Nanotechnology can simply be defined as the Nanotechnology in nature technology at the scale of one-billionth of a metre.
    [Show full text]
  • Controlling Gold Nanoparticle Assembly Through Particle
    CONTROLLING GOLD NANOPARTICLE ASSEMBLY THROUGH PARTICLE- PARTICLE AND PARTICLE-SURFACE INTERACTIONS Dissertation Submitted to The School of Engineering of the UNIVERSITY OF DAYTON In Partial Fulfillment of the Requirements for The Degree of Doctor of Philosophy in Engineering By John Joseph Kelley, M.S. Dayton, Ohio August, 2018 CONTROLLING GOLD NANOPARTICLE ASSEMBLY THROUGH PARTICLE-PARTICLE AND PARTICLE-SURFACE INTERACTIONS Name: Kelley, John Joseph APPROVED BY: ___________________________ ___________________________ Erick S. Vasquez, Ph.D. Donald Klosterman, Ph.D. Advisory Committee Chairman Committee Member Assistant Professor, Department of Associate Professor, Department of Chemical and Materials Engineering Chemical and Materials Engineering ___________________________ ___________________________ Andrey Voevodin, Ph.D. P. Terrence Murray, Ph.D. Committee Member Committee Member Adjunct Professor, Department of Adjunct Professor, Department of Chemical and Materials Engineering Chemical and Materials Engineering ___________________________ Richard A. Vaia, Ph.D. Research Advisor Technical Director, Air Force Research Laboratory ___________________________ ___________________________ Robert J. Wilkens, Ph.D., P.E. Eddy M. Rojas, Ph.D., M.A., P.E. Associate Dean for Research and Innovation Dean, School of Engineering Professor School of Engineering ii ABSTRACT CONTROLLING GOLD NANOPARTICLE ASSEMBLY THROUGH PARTICLE- PARTICLE AND PARTICLE-SURFACE INTERACTIONS Name: Kelley, John Joseph University of Dayton Advisor: Dr. Erick S. Vasquez
    [Show full text]
  • Flow Anisotropy Due to Thread-Like Nanoparticle Agglomerations in Dilute Ferrofluids
    Article Flow Anisotropy due to Thread-Like Nanoparticle Agglomerations in Dilute Ferrofluids Alexander Cali 1, Wah-Keat Lee 2, A. David Trubatch 1,* and Philip Yecko 3 1 Department of Mathematical Sciences, Montclair State University, Montclair, NJ 07043, USA; [email protected] 2 National Synchrotron Light Source II, Brookhaven National Laboratory, Upton, NY 11973, USA; [email protected] 3 Physics Department, The Cooper Union, New York, NY 10003, USA; [email protected] * Correspondence: [email protected] Received: 16 October 2017; Accepted: 1 December 2017; Published: 7 December 2017 Abstract: Improved knowledge of the magnetic field dependent flow properties of nanoparticle-based magnetic fluids is critical to the design of biomedical applications, including drug delivery and cell sorting. To probe the rheology of ferrofluid on a sub-millimeter scale, we examine the paths of 550 µm diameter glass spheres falling due to gravity in dilute ferrofluid, imposing a uniform magnetic field at an angle with respect to the vertical. Visualization of the spheres’ trajectories is achieved using high resolution X-ray phase-contrast imaging, allowing measurement of a terminal velocity while simultaneously revealing the formation of an array of long thread-like accumulations of magnetic nanoparticles. Drag on the sphere is largest when the applied field is normal to the path of the falling sphere, and smallest when the field and trajectory are aligned. A Stokes drag-based analysis is performed to extract an empirical tensorial viscosity from the data. We propose an approximate physical model for the observed anisotropic drag, based on the resistive force theory drag acting on a fixed non-interacting array of slender threads, aligned parallel to the magnetic field.
    [Show full text]
  • Gustav Mie and the Scattering and Absorption of Light by Particles: Historic Developments and Basics
    ARTICLE IN PRESS Journal of Quantitative Spectroscopy & Radiative Transfer 110 (2009) 787–799 Contents lists available at ScienceDirect Journal of Quantitative Spectroscopy & Radiative Transfer journal homepage: www.elsevier.com/locate/jqsrt Gustav Mie and the scattering and absorption of light by particles: Historic developments and basics Helmuth Horvath à Faculty of Physics, Aerosol- Bio- and Environmental Physics, University of Vienna, Boltzmanngasse 5, 1090 Vienna, Austria article info abstract Article history: Gustav Mie was a professor of physics with a strong background in mathematics. After Received 28 November 2008 moving to the University of Greifswald in North-Eastern Germany he became Received in revised form acquainted with colloids, and one of his PhD students investigated the scattering and 11 February 2009 attenuation of light by gold colloids experimentally. Mie used his previously acquired Accepted 13 February 2009 knowledge of the Maxwell equations and solutions of very similar problems in the literature to concisely treat the theoretical problem of scattering and absorption of light Keywords: by a small absorbing sphere. He also presented many numerical examples which Scattering completely explained all the effects that had been observed until then. Since all Absorption calculations were done by hand, Mie had to limit his theoretical results to three terms in Mie theory infinite expansions, thus he only could treat particles smaller than 200 nm at visible Polarization wavelengths. Mie’s paper had remained hardly noticed for the next 50 years, most likely because of the lack of computers. It experienced a revival later and up to now it has been referenced more than 4000 times, owing to the widespread use of Mie’s approach in sciences such as astronomy, meteorology, fluid dynamics and many others.
    [Show full text]
  • Mapping 2D- and 3D-Distributions of Metal/Metal Oxide Nanoparticles Within Cleared Human Ex Vivo Skin Tissues T
    NanoImpact 17 (2020) 100208 Contents lists available at ScienceDirect NanoImpact journal homepage: www.elsevier.com/locate/nanoimpact Mapping 2D- and 3D-distributions of metal/metal oxide nanoparticles within cleared human ex vivo skin tissues T George J. Touloumesa,1, Herdeline Ann M. Ardoñaa,1, Evan K. Casalinoa, John F. Zimmermana, ⁎ Christophe O. Chantrea, Dimitrios Bitounisb, Philip Demokritoub, Kevin Kit Parkera, a Disease Biophysics Group, Wyss Institute for Biologically Inspired Engineering, John A. Paulson School of Engineering and Applied Sciences, Harvard University, Cambridge, MA 02138, USA b Center for Nanotechnology and Nanotoxicology, Department of Environmental Health, T. H. Chan School of Public Health, Harvard University, Boston, MA 02115, USA ARTICLE INFO ABSTRACT Keywords: Increasing numbers of commercial skincare products are being manufactured with engineered nanomaterials Engineered nanomaterials (ENMs), prompting a need to fully understand how ENMs interact with the dermal barrier as a major biodis- Skin imaging tribution entry route. Although animal studies show that certain nanomaterials can cross the skin barrier, Tissue clearing physiological differences between human and animal skin, such as the lack of sweat glands, limit the transla- Hyperspectral microscopy tional validity of these results. Current optical microscopy methods have limited capabilities to visualize ENMs 3D imaging within human skin tissues due to the high amount of background light scattering caused by the dense, ubiquitous extracellular matrix (ECM) of the skin. Here, we hypothesized that organic solvent-based tissue clearing (“im- munolabeling-enabled three-dimensional imaging of solvent-cleared organs”,or“iDISCO”) would reduce background light scattering from the extracellular matrix of the skin to sufficiently improve imaging contrast for both 2D mapping of unlabeled metal oxide ENMs and 3D mapping of fluorescent nanoparticles.
    [Show full text]
  • Gold Nanoparticles: Optical Properties and Implementations in Cancer Diagnosis and Photothermal Therapy
    Journal of Advanced Research (2010) 1, 13–28 University of Cairo Journal of Advanced Research REVIEW ARTICLE Gold nanoparticles: Optical properties and implementations in cancer diagnosis and photothermal therapy Xiaohua Huang a,b, Mostafa A. El-Sayed a,* a Laser Dynamics Laboratory, School of Chemistry and Biochemistry, Georgia Institute of Technology, Atlanta, GA 30332-0400, USA b Emory-Georgia Tech Cancer Center for Nanotechnology Excellence, Department of Biomedical Engineering, Emory University and Georgia Institute of Technology, Atlanta, GA 30322, USA KEYWORDS Abstract Currently a popular area in nanomedicine is the implementation of plasmonic gold nano- Gold nanoparticles; particles for cancer diagnosis and photothermal therapy, attributed to the intriguing optical prop- Cancer; erties of the nanoparticles. The surface plasmon resonance, a unique phenomenon to plasmonic Imaging; (noble metal) nanoparticles leads to strong electromagnetic fields on the particle surface and con- Photothermal therapy sequently enhances all the radiative properties such as absorption and scattering. Additionally, the strongly absorbed light is converted to heat quickly via a series of nonradiative processes. In this review, we discuss these important optical and photothermal properties of gold nanoparticles in different shapes and structures and address their recent applications for cancer imaging, spectro- scopic detection and photothermal therapy. ª 2009 University of Cairo. All rights reserved. Introduction for a wide range of biomedical applications such as cellular imaging, molecular diagnosis and targeted therapy depending Nanomedicine is currently an active field. This is because new on the structure, composite and shape of the nanomaterials properties emerge when the size of a matter is reduced from [3]. Plasmonic (noble metal) nanoparticles distinguish them- bulk to the nanometer scale [1,2].
    [Show full text]
  • Polymers and Biopolymers in Micro- and Nanotechnology
    Physics Chemistry Polymers and biopolymers in Polymerscience Nanoscience micro- and nanotechnology Life Sciences Engineering Sciences Biomimetisches Optisch Lithographische Strukturdesign Strukturierungstechniken Selbstorganisation Motivation Softlithographie Mikrodisperse Surface Design Strukturelemente Polymers and biopolymers in micro- and nanotechnology What are micro- and nanotechnology about ? • Majour goals • Representative examples from microtechnology • Representative examples from nanotechnology What are the materials used in micro- and nanotechnology? • Silicon, metals, semiconductors and inorganics • Polymers, organic materials Polymers and biopolymers in micro- and nanotechnology What are the technologies used in micro- and nanosciences? • Structuring technologies • Analytical techniques • Self assembly What is the biological input to micro- and nanotechnology? • Biomimetic strategies • Biophysical techniques What are the visionary goals of nanotechnology ? Goals of nanotechnology Nanotechnology focuses on • preparation • analysis • understanding of physical properties and • technological application of nano- and mesosized objects Nanoobjects Layers Rods Particles z y x x y y 1-d 2-d 3-d < 100 nm History of nanotechnology Ultrathin gold layers ( 100 nm) History of nanotechnology Technological applications of nanoobjects Colloidal colours in glases –Optical properties of nanoparticles History of nanotechnology Alchemist Kunckel Johann Kunckel, der am sächsischen Hof diente und sich in der europäischen Glaskunst auskannte, wurde
    [Show full text]
  • Measuring and Modelling the Absolute Optical Cross-Sections of Individual
    MEASURINGANDMODELLINGTHE ABSOLUTEOPTICALCROSS-SECTIONS OFINDIVIDUALNANO-OBJECTS attilio zilli Thesis submitted to Cardiff University for the degree of Doctor of Philosophy february 2018 supervisors Prof. Paola Borri, School of Biosciences Prof. Wolfgang Langbein, School of Physics and Astronomy This document was typeset using the typographical look-and- feel classicthesis developed by André Miede. The style was inspired by Robert Bringhurst’s seminal book on typography “The Elements of Typographic Style”. classicthesis is available for both LATEX and LYX at the following url: https://bitbucket.org/amiede/classicthesis/ Attilio Zilli, Measuring and modelling the absolute optical cross- sections of individual nano-objects. © February 2018 Attilio Zilli Dedicated to the memory of my friend and colleague Juris¯ Kiškis When I am laid in earth May my wrongs create No trouble in thy breast; Remember me, remember me, But ah! forget my fate. —Henry Purcell, Dido and Aeneas ABSTRACT Nanoparticles are ubiquitous in nature, and the number of tech- nological applications exploiting nano-objects, either synthes- ized chemically or fabricated lithographically, is in steady rise. In particular, metal nano-objects exhibit resonant modes corres- ponding to an enhanced coupling to electromagnetic radiation. The interaction of light with a nano-object is wholly described by its cross-sections for absorption and elastic scattering. In this thesis we present a method to measure the absolute amplitude of the cross-sections. Differently from currently available tech- niques, we account for the finite angular collection of the ob- jective via an analytical model of the scattering process, thereby rendering our method accurate also for objects dominated by scattering and high numerical aperture detection.
    [Show full text]
  • Nanoplasmonic Sensing Using Metal Nanoparticles
    Linköping Studies in Science and Technology Dissertation No. 1624 Nanoplasmonic Sensing using Metal Nanoparticles Erik Martinsson Division of Molecular Physics Department of Physics, Chemistry and Biology Linköping University, Sweden Linköping 2014 Cover: An illustration of surface immobilized spherical gold nanoparticles illuminated with a ray of light. During the course of the research underlying this thesis, Erik Martinsson was enrolled in Forum Scientium, a multidisciplinary doctoral programme at Linköping University, Sweden. © Copyright 2014 ERIK MARTINSSON, unless otherwise noted Martinsson, Erik Nanoplasmonic Sensing using Metal Nanoparticles ISBN: 978-91-7519-223-9 ISSN: 0345-7524 Linköping Studies in Science and Technology, Dissertation No. 1624 Electronic publication: http://www.ep.liu.se Printed in Sweden by LiU-Tryck, Linköping 2014. “Everything happens for a reason and that reason is usually physics” Abstract In our modern society, we are surrounded by numerous sensors, constantly feeding us information about our physical environment. From small, wearable sensors that monitor our physiological status to large satellites orbiting around the earth, detecting global changes. Although, the performance of these sensors have been significantly improved during the last decades there is still a demand for faster and more reliable sensing systems with improved sensitivity and selectivity. The rapid progress in nanofabrication techniques has made a profound impact for the development of small, novel sensors that enables miniaturization and integration. A specific area where nanostructures are especially attractive is biochemical sensing, where the exceptional properties of nanomaterials can be utilized in order to detect and analyze biomolecular interactions. The focus of this thesis is to investigate plasmonic nanoparticles composed of gold or silver and optimize their performance as signal transducers in optical biosensors.
    [Show full text]