arXiv:2105.05188v1 [quant-ph] 11 May 2021 irwv ar-eo aiy(htnbx represent high- a box) with ( one-by-one cavity interacting Fabry-Perot microwave and states berg [21– moments dipole electric 23]. large to with Ryd- transitions appropriate of berg employ coupling to is strong cavities promis- microwave achieving on-chip A for [17–20]. approach interfaces quan- ing optical realize transi- and to systems (Raman) memories suitable tum optical therefore coherence are strong good and tions, possess and chip [12–16] an properties of surface trapped the atoms Cold near [9–11]. and memories can the ensemble cavities me- between and transfer Microwave [8] state quantum qubits diate superconducting atoms. magnetic with neutral and couple strongly cold resonator for waveguide con- traps chip coplanar atom a superconducting taining integrated an on based optical [7]. and channels 6] communication [5, memories quantum quantum long-lived with gates 4] quantum [3, fast sub- interfacing different by Hy- achieve operations of may high-fidelity functionalities composed tasks. complementary 2] with different [1, systems for systems quantum suitable physical brid universally single no is generally, sci- system Quite quantum technology. for and importance ence fundamental of is many-body interacting systems, as of simulations quantum communication, for and as well storage processing, information ∗ § ‡ † [email protected] [email protected] [email protected] [email protected] eoiyclbae tm rprdi iclrRyd- circular in prepared atoms Velocity-calibrated is system quantum hybrid promising particularly A quantum for components hardware various Developing aulKaiser, Manuel itrKoelle, Dieter aiuaino ybr tm neatn ihsupercondu also with inhomo but interacting an feasibility, atoms in the Rydberg atoms demonstrate of of manipulation studies states Our Rydberg of cha surface. pair and a observe superconductin We between coh integrated lations resonator. of waveguide an coplanar realization on on-chip the trapped an on atoms atomi report ultracold use we of to Here suggested transitions. was conversion. dipole it optical resonators, to microwave microwave on-chip for transducers s and spin ories atomic between interactions infinite-range mediated aiydie aioclain ewe ybr ttso a of states Rydberg between oscillations Rabi driven Cavity yrdqatmssesivligcl tm n irwv r microwave and atoms cold involving systems quantum Hybrid 1 etrfrQatmSine hsklshsIsiu,Eber Institut, Physikalisches Science, Quantum for Center 2 nttt fEetoi tutr n ae,FRH GR-700 FORTH, Laser, and Structure Electronic of Institute INTRODUCTION 1, ∗ 1 enodKleiner, Reinhold on Glaser, Conny rpe nasprodcigao chip atom superconducting a on trapped u e ogntle1,D706Tuign Germany T¨ubingen, D-72076 14, Morgenstelle der Auf 1, † 1 iYa Ley, Yuan Li ai Petrosyan, David Dtd a 2 2021) 12, May (Dated: Q 1 esGrimmel, Jens lcn h tm ls oteci ufc,ad nthe Ryd- on appropriate an and, of hand, surface, frequency chip one the the tuning the to hand, on other close atoms requires, mi- the the field placing and cavity atoms (MW) coplanar the Strong crowave between surface. a coupling chip su- the containing electric-dipole on integrated chip resonator an (CPW) atom waveguide on (SC) trapped perconducting atoms rubidium tracold unu icist pia htn i tm [32]. atoms via state solid optical from to atomic transfer circuits state or and quantum atoms 31], single 30, via [20, ensembles conversion microwave photon coherent realiza- 29], optical 28, the to 21, [12, and gates atoms quantum of distant tion of resonator- excitation [21], switchable, atoms conditional the as between interactions stepping such long-range a mediated properties, is systems quantum work unique hybrid Our with of realization surface. the in the chip towards fields stone address the of inhomogeneous we vicinity the so, the with doing copla- In associated on-chip challenges an supercon- resonator. of microwave a field microwave on nar the trapped to atoms, chip, ultra-cold ducting of states berg magnetic- [27]. hyperfine transitions for atomic only dipole res- achieved of coplanar been coupling have superconducting coplanar however, onators with far, atoms a trapped So with cold, [26]. beam coplanar a resonator with supersonic microwave recently, of more a states and, have [23] in microwave-guide Rydberg works atoms of Pioneering helium coupling chip state electric-dipole [25]. superconducting achieved Rydberg demonstrated a of been above have coherence atoms optical of Long-lived quantum superpositions controlled accurately [24]. most systems the of one ,2 1, u yrdqatmsse ossso lu ful- of cloud a of consists system quantum hybrid Our eew eosrt lcrcdpl opigo Ryd- of coupling electric-dipole demonstrate we Here nra G¨unther,Andreas sesadraieaoi unu mem- quantum atomic realize and ystems eeltecalne,o oeetstate coherent of challenges, the reveal oaheesrn opigo tm to atoms of coupling strong achieve To rn opigo ybr transition Rydberg a of coupling erent tn circuits. cting tmci otemcoaefil of field microwave the to chip atom g ybr ttswt togelectric strong with states Rydberg c atrz h aiydie aioscil- Rabi driven cavity the racterize adKrsUniversit¨at T¨ubingen, Karls hard 1 eeu lcrcfil ertechip the near field electric geneous eg Hattermann, Helge 3Hrkin rt,Greece Crete, Heraklion, 13 sntr a nbecavity- enable can esonators 1, RESULTS ‡ n J´ozsef Fort´aghand 1 ailBothner, Daniel toms 1, § 1 2

FIG. 1. Schematics of the experimental system (not to scale). a An ultracold cloud of 87Rb atoms is trapped at 130 µm distance from a CPW resonator. A pair of lasers with wavelengths 780 nm and 480 nm is used for two-photon excitation of the atoms from the ground state |5Si to a Rydberg state |r1i (and |rxi) via an intermediate non-resonant state |5P i. The MW coplanar waveguide cavity is inductively coupled via a feedline to an external MW source. In turn, the electric field of the cavity drives the atomic transition from state |r1i to another Rydberg state |r2i, inducing damped Rabi oscillations. An extraction electrode below the cloud is used to apply a DC electric field for Stark-tuning the Rydberg transition frequency, for field-ionization of Rydberg atoms, and for extraction of the ions from the atom cloud. The ions are detected with a channel electron multiplier and adjacent detection electronics. b Bottom-view of the integrated superconducting atom chip containing a Z-shaped trapping wire and the CPW resonator: the trapping wire and the core of the MW resonator are made of superconducting niobium (gray); parts of the ground plane are coated with normal conducting gold (yellow); the bare sapphire chip surface is shown in blue. The magnetic trap with an offset field Boff at the center is generated by the current Itrap running through the trapping wire, persistent supercurrents around the cavity gaps, and external magnetic fields from macroscopic wires and coils [33]. c Circuit scheme of the inductively-coupled superconducting transmission line cavity and the corresponding standing-wave electric field of the third harmonic frequency ωc = 2π × 20.55 GHz. The atom cloud is trapped near one of the electric field antinodes. berg transition of the atoms into with the fixed cloud is positioned close to an electric-field antinode of frequency of the cavity mode. the third harmonic mode of the MW resonator at fre- quency ωc 2π 20.55GHz (see Fig.1c). The resonator is inductively≃ coupled× via a feedline to an external coher- Experimental apparatus ent and tunable MW source. A laser system is used for imaging the atomic cloud and for Rydberg excitation of the atoms. A DC electric field applied via the electrode The experimental system is illustrated in Fig. 1a. The can state-selectively ionize the Rydberg state atoms and experiment is performed in an ultra-high vacuum cham- 11 extract the resulting ions for detection via a channel elec- ber at a pressure of 6 10− mbar. The SC atom chip is tron multiplier (CEM). attached to a He-flow× cryostat with the surface temper- ature adjusted to 4.5 K. A chip-based magnetic trap for ultracold atoms is created via the field of the current in a Z-shaped trapping wire, the field associated with persis- Rydberg state excitation tent SC currents in the resonator, and an external field generated by macroscopic wires and coils (see Fig. 1b). The trapped atoms are excited from the ground state The resulting trapping potential, with an offset field of 5S to a Rydberg state r1 (and to rx , see below) 3.4G at the trap center, has a harmonic shape and can by| i a two-photon transition,| i via an intermediate| i non- trap an atom cloud at a distance of 130 µm from the resonant state 5P , using a pair of laser pulses with chip surface. A cloud of cold 87Rb atoms is loaded to wavelengths 780| nmi and 480 nm (see Methods section the magnetic trap and shifted into the field mode of the M1). The atoms are subject to a spatially varying DC standing-wave MW resonator, similar to Refs. [27, 33, 34] (static) electric field, which is the sum of an inhomoge- (see the Methods section M1 for more details). The atom neous field produced by adsorbates on the chip surface 3

FIG. 2. Laser excitation of Rydberg states of atoms in external fields. a Stark map of Rydberg states in the vicinity of the 48D state in a magnetic field of 3.4 G. The energies (frequency detuning relative to the 48D state in zero electric field) of the Stark states in the varying electric field are indicated by solid lines, while the dashed line indicates the frequency of the excitation laser detuned by −2π × 130 MHz. The target state |r1i (green line) is resonantly excited by the laser in a field of

Er1 = 3.625 V/cm, and the nearby state |rxi (yellow line) is resonant at Erx = 3.570 V/cm. Adsorbate field components parallel to the chip surface can not be compensated, preventing the excitation of Rydberg states in the hatched area. b Adsorbates on the chip surface produce an inhomogeneous electric field (black dashed line) that falls off exponentially with the distance from the surface. A voltage U applied between the chip and the extraction electrode creates a homogeneous electric field of Eh = 7.2 V/cm that partially compensates the z-component of the adsorbate field at the position of the atom cloud (red profile). This leads to a minimum of the total field (black solid line) at a distance of zmin = 117 µm from the chip surface (see the inset for a magnified view of this area). Due to non-compensated field components in the xy plane, the total field has a parabolic form around the minimum (see Methods section M2). State |r1i is resonantly excited in thin atomic layers at positions zr1 = 108 µm and 128 µm where the field is Er1 , while state |rxi is resonantly excited at positions zrx = 110 µm and

126 µm where the field is Erx . The excitation probability at each of these positions is proportional to the product (gray profile) of the cloud density (red profile) and the laser intensity (blue profile), and the corresponding atomic transition probabilities to states |r1i and |rxi. Applying a high-voltage ramp between the chip and the extraction electrode results in field ionization of Rydberg atoms and acceleration of the resulting ions towards the ion detector (CEM). c Mean number of Rydberg excitations (ion counts, black dots) per laser pulse versus the applied compensation field. The experimental data is fitted by a sum of individual contributions from the |r1i (green) and |rxi (yellow) Rydberg states within two excitation layers (solid and dashed lines) each. From the fit we deduce the characteristic parameters of the adsorbate field.

[35–38] and a controlled homogeneous compensation field magnetic fields [39, 40], with the eigenvalues yielding the produced by the extraction electrode (see Fig. 1a). The Rydberg energy spectrum for each field value. electric field results in strong level shifts of the atomic Rydberg states. Figure 2a shows the calculated Stark The electric field of the adsorbates falls off exponen- map of Rydberg states in the vicinity of the zero-field tially from the chip surface. An appropriate voltage 48D state, taking into account the offset magnetic field applied to the extraction electrode creates a homoge- of the trap. The calculation employs a diagonalization neous compensation field between the chip surface and of the atomic Hamiltonian in the presence of electric and the electrode, which cancels the z component of the ad- sorbate field at a desired position zmin within the atomic 4 cloud. Since the adsorbate field is inhomogeneous, the Tuning the Rydberg transition total field strength increases in both directions from zmin along z. Furthermore, the adsorbates produce a non- With an atom in Rydberg state r1 , depending on vanishing field component parallel to the chip surface, the total electric and magnetic fields| ati the atomic po- in the xy plane, which cannot be compensated for in our sition, there are many possible MW transitions to the setup. This field component thus determines the minimal Rydberg states in the n = 47 manifold. In Fig. 3a we achievable field strength, while the total electric field in z show the calculated Stark map for the Rydberg states direction acquires a parabolic form (see Fig. 2b and the of atoms in the 3.4 G offset magnetic field of the trap Methods section M2). Hence, the resonance conditions and varying total electric field. Given the resonant fre- for Rydberg excitations strongly vary across the atom quency of the cavity field ω and the total electric field cloud and each Rydberg state can be laser excited only c Er1 =3.625V/cm at the position of the resonantly laser- in a thin (. 0.3 µm) atomic layer. Since the energies of excited layer of atoms in state r , we deduce a suitable the Stark eigenstates depend only on the absolute value | 1i Rydberg transition to state r2 (see Fig. 3b). Our calcu- of the electric field, for each Rydberg state there are typ- lations also yield the dipole| momentsi for different transi- ically two resonant excitation layers, one on each side of tions (see Methods section M3) and we obtain the dipole the field minimum at zmin (see the inset of Fig. 2b). By moment d 30ea for the r r transition, while varying the compensation field, these resonant layers can ≃ 0 | 1i → | 2i the differential Stark shift between levels r1 and r2 be shifted through the cloud with nearly constant layer is rather small, 163 MHz/(V/cm). Moreover,| i neighbor-| i separation. ing Rydberg states− are sufficiently far off-resonant, which suppresses their excitation.

Rydberg ionization signal To match the position of resonant layers with that of the atomic cloud and the excitation laser beams, we Using the electric field ramp of the extraction elec- vary the compensation field and count the number of trode, we ionize the Rydberg state atoms and detect Rydberg atoms excited by the laser with fixed detun- the resulting ions. In principle, each state ionizes un- ing 2π 130MHz with respect to the zero-field 48D5/2 der the influence of an electric-field ramp with a char- state.− To× this end, we prepare cold atomic clouds in acteristic time dependence, which can be used to distin- the mode volume of the CPW cavity, at a distance of guish the Rydberg states [43, 44]. In general, states with 130 µm from the chip surface. Each of these clouds is higher principal quantum numbers n tend to ionize ear- exposed to a series of 300 excitation pulses of 1 µs dura- lier, while states with higher orbital angular momenta tion, followed by Rydberg atom detection, at 3 kHz rep- L and magnetic quantum numbers mj are ionized later etition rate, without significantly reducing the number [45]. In practice, the ionization signal from neighboring of trapped atoms. After each pulse, the Rydberg excited Rydberg states can have large temporal overlap, com- atoms are ionized by a 1 µs electric field ramp and the re- plicating their unambiguous discrimination. In Fig. 3c sulting ions are subsequently detected by the CEM with upper panel, we show three examples of calculated ion- a detection efficiency > 50% [41, 42]. Figure 2c shows ization signals from different Rydberg states subject to the mean number of ion counts per excitation pulse as the same electric field ramp (see Methods section M4). If a function of the compensation field. We excite on av- we divide the ion arrival times into two intervals T1 and erage about one Rydberg atom per pulse, which allows T2, then during T1 we will detect all the ions from state us to disregard interactions between the Rydberg atoms. 48D and some of the ions from states n = 47, while the The resulting dependence of the ion count on the com- ions detected during T2 will only be from states n = 47. pensation field maps the atomic density distribution and In the experiment, we populate via laser excita- the laser intensity profile in different excitation layers. tion states r and r with comparable probabilities, | xi | 1i The latter is deduced from fitting an appropriate model Nrx /Nr1 = a 1, and then couple r1 to state r2 via function to the experimental data (see Methods section the resonant MW≈ cavity field. The| electrici field| rampi M2). We then obtain that the exponential decay length results in the Rydberg state ionization and detection of of the adsorbate field from the chip surface is ζ 70 µm, N = Nrx + Nr1 + Nr2 ions. All the ions Nrx and Nr1 while the field component parallel to the chip≃ surface from states r and r are detected during the time | xi | 1i has a value of 3.482V/cm. For a compensation field of interval T1 =1.8 2.0 µs, while we estimate that the Nr2 7.2 V/cm, only two Rydberg states r and r are ex- ions from state r− are detected during the time interval | 1i | xi | 2i cited with significant probabilities in the center of the T2 = 2.0 2.1 µs with probability p = 0.34 and during atom cloud. The calculated two-photon transition am- T with probability− (1 p)=0.66. Hence, the num- 1 − plitudes between the ground 5S and the Rydberg states ber of ions NT1 and NT2 detected during T1 and T2 are r and r are approximately| equal,i which corresponds N = N +N +(1 p)N (1+a)(N +N ) pN | 1i | xi T1 rx r1 − r2 ≃ r1 r2 − r2 to similar excitation numbers Nr1 and Nrx . and NT2 = pNr2 , while NT1 + NT2 = N. We then ob-

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FIG. 3. Rydberg transition and state detection. a Stark map of Rydberg states in the vicinity of 48D and 47(L ≥ 3) states in a magnetic field of 3.4 G. State |r1i (green line) is resonantly excited by a laser in an electric field of Er1 = 3.625 V/cm (see Fig. 2a) and is coupled by a MW photon with frequency ωc = 2π × 20.55GHz to the Rydberg state |r2i (red line) in the 47(L > 3) manifold. b Frequencies (solid lines) and dipole moments (opacity) for transitions from state |r1i to the states in the n = 47 manifold, assuming in the calculations the total electric field along x, the magnetic field along y, and linear MW field polarization in the z direction. The dashed horizontal line indicates the cavity resonance frequency ωc and the transition to the resonant state |r2i (red circle) has a dipole moment of d = 30ea0. c Upper panel: Examples of calculated ionization rates for three Rydberg states (green, red and orange lines) upon the electric field ramp (black line). Central panel: Histogram of the ion arrival times (blue bars) as measured for a laser Rydberg excitation followed by a MW π-pulse of 250 ns duration and a subsequent electric field ramp (black solid line). The data is averaged over 25 experimental cycles with 300 excitation-interaction-detection sequences in each cycle. Defining two time intervals T1 and T2 permits distinguishing the ion signal from states |r1i and |r2i. Lower panel: Ion arrival time distribution without MW pulses.

Nr2 tain that the population of state r2 is ρ22 = Cavity driven Rydberg transition | i ≡ Nr1 +Nr2 (1+a) NT2 1+a p N = p p2, where p2 NT2 /N. ≡ Having described all the necessary ingredients of our system, we now turn to the demonstration of coherent In Fig. 3c middle panel, we show the measured ion coupling of the atomic Rydberg transition to an exter- signal after applying a MW π-pulse, which would ideally nally pumped MW field mode of the cavity. The ex- perimental sequence is illustrated in Fig. 4a: after the transfer all of the population of state r1 to state r2 . | i | i two-photon laser excitation of the atoms to the Rydberg The ion arrival times have a large peak in T1 originating state r1 , we inject into the cavity a MW pulse of vari- from all states rx , r1 , r2 , and a smaller peak in T2 | i | i | i able power| i and duration. The Rydberg atom interacts that we attribute only to state r2 . With NT1 /NT2 5.6, | i ≈ with the cavity field on the transition r1 r2 for up to the population of state r2 is ρ22 0.9, consistent with | i−| i a weakly damped half of| ai resonant≃ Rabi cycle. Without 1.5 µs. The cavity induced population transfer between the Rydberg states is then detected via selective field the MW pulse, all the population remains in states rx | i ionization and time-resolved ion counting. and r1 and no peak is observed in T2, as shown in the lower| paneli of Fig. 3c. The interaction of the atom with the MW cavity field 6

FIG. 4. Coupling Rydberg transition to pumped MW cavity mode. a Schematics of the experimental sequence involving optical excitation of the atoms to the Rydberg state by a two-photon laser pulse of 1 µs duration, injection of a MW pulse of variable power and duration τ ≤ 1.5 µs into the cavity, interaction of the Rydberg excited atoms with the MW cavity field, and selective field ionization (SFI) and detection of the Rydberg atoms by a 1 µs electric field ramp from 7.2 V/cm to about 210 V/cm. In each experimental cycle, the atom cloud is exposed to a series of 300 excitation-interaction-detection sequences at a repetition rate of 3 kHz. MW leakage through the electronic switches and background counts lead to a small offset of the ion signal. b Normalized ion count p2 = NT2 /N (open circles), proportional to the population ρ22 of Rydberg state |r2i, versus the frequency of the injected into the cavity MW pulses of duration τ = 1.5 µs, for three different powers Ps, 4Ps, 16Ps (blue, red, green) of the MW source. Each data point is obtained by averaging over 10 experimental cycles, with error bars denoting ±2 standard deviations. We fit the data by theoretical excitation spectra (solid lines of the same color) to deduce the Rabi frequencies Ω¯ of the MW field resonant with the |r1i → |r2i transition. c Dynamics of population of Rydberg state |r2i (proportional to ion count p2) for three different powers Pd, 4Pd, 16Pd of the injected MW field at frequency ωMW = 20.551 GHz. Each data point (open circle) is obtained by averaging over 25 experimental cycles, with error bars denoting ±2 standard deviations. Rabi frequencies Ωfit and decoherence rates γfit are obtained by fitting the model function (see the text and Methods section M5 for details), with the fitted curves (solid lines) shown with 95% confidence bounds (gray). The inset shows the MW cavity field strength in the xz plane for a rms ground state voltage of 3 µV (see Methods section M3), with the cloud placed at a distance of z ≃ 130 µm from the chip surface (bottom) and laterally displaced from the central cavity conductor by x ≃ 50 µm. The gray bars indicate the position of the CPW. can be well approximated by a two-level model. The field In Fig. 4b we show the Rydberg transition spectrum mode of the cavity with frequency ω =2π 20.55 GHz of the atoms interacting with the intracavity MW field c × is resonant with the atomic transition r1 r2 , while pumped by the external source of variable frequency at the next nearest Rydberg transition is detuned| i − | byi at least three different powers. The exposure time of 1.5 µs is 15MHz (see Fig. 3b), which exceeds the cavity linewidth sufficiently long for the atomic populations to attain the κ = 2π 9 MHz and the maximal achieved Rabi fre- steady state. We fit the observed spectrum with a model quency Ω× 2π 8MHz. There are no near resonant function corresponding to the steady-state population max ≃ × transitions from state rx . Decay to other states is neg- ρ22 of the Rydberg state r2 , while the Rabi frequency ligible during the entire| excitation,i interaction and mea- of the MW field also depends| i on the frequency of the in- surement time of 3 µs, which is much shorter than the jected into the cavity field (see Methods section M5). We Rydberg state lifetime∼ 1/Γ 60 µs [46, 47]. assume that the main contribution to the atomic spec- ≈ 7 tral linewidth comes from the inhomogeneous broaden- resonator. We used DC electric fields to fine-tune the ing ∆ω12 2π 1.1 MHz of the transition r1 r2 due atomic Rydberg transition and observed resonant Rabi to the differential≃ × Stark shift of 163 MHz/(V/cm)| i − | i be- oscillations between a pair of Rydberg states driven by − tween levels r1 and r2 in the inhomogeneous electric the MW field of the cavity pumped by an external co- field varying| byi 0.0067| V/cmi within the resonantly ex- herent source. The observed damping of the Rabi oscil- cited atomic layer of widths . 0.3 µm (see Methods sec- lations in our system is dominated by the spread of Rabi tion M3). In comparison, the natural linewidth (decay frequencies for the Rydberg atoms in different positions rate) Γ 2π 2.7 kHz of the Rydberg state is negligible. of the resonantly excited by the laser layer. In compar- For stronger≃ × pumping fields, the spectrum is dominated ison, the real single atom decoherence is much smaller, by power broadening. and individual Rydberg atoms are expected to exhibit For each pumping power, we extract the peak Rabi much longer coherence times. frequency Ω¯ at the pump MW frequency ωMW ω¯12 We note, that the damping rate of the Rabi oscillations resonant with the mean transition frequency of the≃ atoms originating from the variations of the cavity field at dif- in the resonant layer. We then obtain that the peak Rabi ferent positions within the atom cloud is significantly re- frequency Ω¯ scales approximately as square root of the duced by the resonant laser excitation of Rydberg states pumping power P , as expected for a resonant one-photon of atoms in a thin layer at a well defined distance from transition. the atom chip. Better positioning of the atomic cloud, By changing the detuning of the excitation lasers, we reducing the lateral size of the excitation layer, and us- can excite the Rydberg states of atoms in a different res- ing narrow-line excitation lasers can further reduce or onant layer. This in turn will shift the atomic Rydberg completely eliminate the cavity field variations for the transition out of the cavity resonance, causing the sig- Rydberg excited atoms, leading to much longer coher- nal in Fig. 4b to disappear. Using a MW antenna from ence times of the MW Rydberg transition of the atoms. outside the chamber, we can recover the ionization signal The atoms in our system are trapped relatively far for an appropriate MW frequency, which verifies that the from the CPW cavity, 130 µm from the chip surface, and (0) Rydberg MW transition is indeed driven by the cavity the resulting vacuum Rabi frequency Ωvac = dEc /~ = field. The cavity and the atomic resonance are, however, 2π 0.6 kHz is much smaller than the cavity linewidth not perfectly aligned, which leads to a small asymmetry κ ×2π 9 MHz. Several improvements can be made: The of the resonance profiles that becomes more pronounced atoms≃ can× be brought much closer to the chip surface and, for increasing MW power, as seen in Fig. 4b. e.g., at a distance of 10 µm the cavity field strength We next fix the frequency of the injected MW field (0) ∼ Ec will increase by more than an order of magnitude. to ω = 2π 20.551 GHz, and investigate the dy- MW × At smaller distances, the stronger adsorbate fields should namics of the Rydberg transition by varying the du- be treated more carefully and a pair of Rydberg-Stark ration of the MW pulse for three different input pow- 3 eigenstates with much larger dipole moments d 10 ea0 ers. In Fig. 4c we show the normalized ion count p2 and small differential Stark shift should be found≃ and from the upper Rydberg state r as a function of the | 2i used. Furthermore, there has been great progress in in- MW pulse duration. We observe damped Rabi oscil- creasing the quality factors of superconducting coplanar lations between states r and r with the Rabi fre- 6 | 1i | 2i waveguide resonators, already exceeding 10 at 50mK quencies that scale approximately as Ω √P , simi- ∼ ∝ temperatures [48], which also enables coherent operations larly to the steady-state case above. We approximate of SC qubits. This will then bring the strong-coupling the population difference between the Rydberg states regime of single Rydberg atoms and SC qubits to single as D¯ = ρ ρ = exp( t2/τ 2 ) cos(Ω¯t), which fol- 11 − 22 − damp MW cavity photons within the experimental reach. lows from a simple model (see Methods section M5) that assumes two-level atoms coherently driven by spatially varying Rabi frequencies corresponding to an inhomo- geneous MW cavity field distribution across the later- ally displaced atomic ensemble, as shown in the inset of Fig. 4c. The corresponding damping rate γ = 1/τdamp then scales approximately linearly with the Rabi fre- quency, γ b Ω¯ with the proportionality constant ≃ √2 b 0.2 that quantifies the relative change of cavity MW field≈ across the atomic cloud along the x direction.

DISCUSSION

We have demonstrated coherent coupling of ultracold Rb atoms, trapped on an integrated atom chip and laser excited to the Rydberg states, to a superconducting MW 8

METHODS atoms, we excite on average about one atom to the Rydberg state r . | 1i M1 EXPERIMENTAL SYSTEM Microwave cavity. The on-chip superconducting coplanar waveguide cavity is a λ/2 transmission line res- Atomic cloud. Starting with 87Rb atoms in a onator with the fundamental mode frequency ω =2π conventional magneto-optical trap, about 5 107 0 6.85 GHz. To drive the transition between the Rydberg× atoms in the ground state 5S , F =2,m =2× are 1/2 F states r and r , we use the third harmonic mode of loaded into a magnetic quadrupole| trap. The atomsi 1 2 the resonator| i having| i the frequency ω =2π 20.55 GHz, are then moved to a Ioffe trap for evaporative cooling. c the linewidth κ = 2π 9 MHz and the corresponding× Using optical tweezers, the ultracold atomic cloud is quality factor Q 2300.× Within the temperature range transferred to a superconducting atom chip, which is where the resonator≈ is superconducting, the resonance mounted on the cold-finger of a He-flow cryostat. At frequency can be tuned by about 30MHz. For driving the chip, the spin-polarized atomic cloud is loaded into purposes, the resonator is inductively coupled to a MW a magnetic microtrap generated by a current in the feedline and connected to a commercial MW signal gen- Z-shaped trapping wire and other external homogeneous erator (Rohde & Schwarz SMF100A) with a linewidth fields. Additional bias fields are used to finally position < 1 Hz. The MW electric field in the resonator is then the cloud close to a coplanar waveguide resonator. Using standard absorption imaging, we verify that the cloud √P is trapped at 130 µm distance to the chip surface. The Ec , (1) ∝ κ/2 i(ωMW ωc) trapping potential has a parabolic shape with trap − − frequencies ω = 2π 61Hz. The offset field at where P is the power of the injected into the resonator x,y,z × the trap center is about 3.4G. The atom cloud has MW field at frequency ωMW. spherical shape with a cloud diameter (full width at half maximum) of 60 µm. The atom number in the cloud 4 11 3 M2 RYDBERG EXCITATION is 7 10 , the peak density is 2.7 10 cm− and the temperature× is 1 µK. More details× on the loading and trapping procedure are given in Ref. [27]. Surface fields. The adsorbates on the chip surface produce an inhomogeneous electric field. We approxi- Rydberg lasers. The atoms are excited from the mate the z component of this adsorbate field perpendic- z/ζ ground state 5S1/2 to the Rydberg states by a pair of ular to the chip surface as Ead,z(z) = E0e− , where ζ laser pulses with| wavelengthsi 780 nm and 480 nm and is a decay length. This component is partially compen- duration of 1 µs, while the intermediate state 5P3/2 sated by a homogeneous field Eh between the extraction is detuned by 160MHz. Both laser beams are centered| i electrode and the grounded atom chip surface. The com- at the atomic cloud. With beam waists (1/e2-radii) pensation field can be freely adjusted by the voltage U of 5.45mm and 0.025mm and laser powers of 0.5 mW applied to the extraction electrode, Eh/U = 3 (V/cm)/V. and 25 mW, the peak intensities of the red and blue The inhomogeneous adsorbate distribution leads to an lasers are 0.001 W/cm2 and 2500W/cm2, respectively. additional field component parallel to the chip surface, The red laser is phase locked to a commercial frequency Ead,xy, which can not be compensated for in our system. comb with an absolute frequency accuracy of 2kHz and The total electric field linewidth below 10 kHz. The blue laser is stabilized E(z)= (E e z/ζ E )2 + E2 (2) with a wavelength meter (HighFinesse WSU) to an 0 − − h ad,xy absolute frequency accuracy better than 2 MHz and a q linewidth better than 200 kHz. In zero field conditions, can then be tuned via Eh and has a parabolic form the single-photon Rabi frequencies for individual tran- around the field minimum E(zmin) = Ead,xy at E0 zmin = ζ ln . sitions 5S1/2 5P3/2 and 5P3/2 48D5/2, averaged Eh over all magnetic− sub-states and− possible transitions, are 2π 3.6 MHz and 2π 36MHz, respectively. The Excitation layers. The Stark shifts of the atomic resulting× effective two-photon× Rabi-frequency for the Rydberg levels in a DC electric field depend only on the absolute field strength. Within the atomic cloud, there Rydberg excitation 5S1/2 48D5/2 is 2π 400 kHz. Taking into account the external− fields and× applying can be two layers where the electric field has a specific the selection rules for appropriate laser polarization, value Er > E(zmin) = Ead,xy. These layers are posi- the two-photon Rabi-frequency for the transition tioned on both sides of the field minimum at 5S , F =2,m =2 r and r is reduced to 1/2 F 1 x E2 E2 about| Ω =2π 30kHz;i → the | ratioi a between| i these Rabi r ad,xy gr zr, = zmin ζ ln 1 − . (3) × ± 2 frequencies depends on the unknown direction of the −  ± s Eh  lateral surface field (see Sec. M2 below) and is assumed   a 1. With this Rabi frequency and a pulse duration A Rydberg state r that is resonant at a specific field of≈ 1 µs applied to the ensemble of 7 104 ground state strength E is thus| i excited in two excitation layers at × r 9 position zr, . For a field Er = Ead,xy both layers merge ζ = 70 µm and Ead,xy = 3.482V/cm. Rydberg excita- ± at zr, = zmin, while no excitation can take place for tions mostly occur in the resonant excitation layers of ± states that are resonant in fields Er < Ead,xy. the two states r1 and rx , as other states can be res- The local field gradient in a resonant excitation layer onantly excited| ini different| i electric fields, at positions is outside of the atomic cloud. For a compensation field of Eh = 7.2 V/cm, the two dE 1 E2 h excitation layers for state r1 (resonant with the ex- αr, = = (β βr) (4) | i ± dz ζ Er ∓ citation laser at total field E = 3.625V/cm) are lo- zr,± r1 p cated at zr1,+ = 108 µm and zr1, = 128 µm. With the − 2 2 two-photon excitation linewidth ∆ωlas = 2π 2 MHz, with βr = Er Ead,xy/Eh. Assuming the two-photon × − the Stark gradient dr1 = 300 MHz/(V/cm) and the Rabi frequencyq Ωgr is small compared to the linewidth − field gradients αr1, , the corresponding layer widths are of the excitation laser ∆ωlas, the width of the excitation ± ∆zr1,+ = 0.21 µm and ∆zr1, = 0.28 µm. Since the layer can be estimated as atomic cloud is centered at z =− 130 µm, dominant exci-

tation takes place in the zr1, layer. Energetically close ∆ωlas − ∆zr, = , (5) states are excited in layers at different distances from ± drαr, ± the chip. They contribute to the ion signal, but do not participate in the MW transition between the Rydberg where d is the Stark gradient, or static dipole moment, r states and therefore only affect the contrast in the Rabi of state r . | i oscillation measurements. Excitation probability With the excitation layers oriented parallel to the chip surface, the Rydberg exci- M3 MICROWAVE RYDBERG TRANSITION tation probability of the atoms within a single layer at z is proportional to the atomic line density and the laser intensity profile, Matrix elements. The energy spectrum of Rydberg states in external fields can be calculated by diagonal- (z z )2 ization of the atomic Hamiltonian, including the interac- n(z) exp − cloud , (6) ∝ − 2σ2 tions with the magnetic and electric fields, in the basis of   zero-field states n,l,j,m [39]. We compute the energy 2(z z )2 | ji I(z) exp − beam , (7) eigenvalues and the corresponding eigenvectors ∝ − w2   n,l,j,mj r = β n,l,j,mj , (9) where zcloud is the position of the atomic cloud, σ is | i | i n,l,j,mj the cloud radius, zbeam is the laser beam center and X w is the beam waist. For a two-photon transition, where βn,l,j,mj are the normalized amplitudes of the basis Ωgr √I780I480, the effective beam waist is w = states. The dipole moment for the transition between a ∝ 2 2 w780w480/ w780 + w480 with the individual beam waists pair of Rydberg states ri and rf is then [40] w780,480 assumed to overlap at the same position. The | i | i p q′ q total Rydberg excitation probability is given by the sum d~ = e r ~r r = e β ∗β q′ ~r q (10) h f | | ii f i h | | i over all possible transitions in the corresponding excita- q q′ tion layers: X X where e is the electron charge and ~r is its position vec- ( ) PRy = Ar,s n(zr,s) I(zr,s) (8) tor, while q ′ denote the full set of quantum numbers r s= n,l,j,mj. Note that for an atom subject to only a mag- X X± netic or electric field, only a subset of basis states, de- where the strength coefficients Ar, depend on the termined by the selection rules, can be used for the di- dipole matrix element of the corresponding± transition. agonalization. But in combined electric and magnetic fields, all the zero-field basis states with different quan- Fit to the data. We use Eq. (8) to fit the exper- tum numbers l and mj should be included, and already imental data in Fig. 2c taking into account all states for small fields a set of more than 15000 basis states are and their corresponding excitation layers. For each state required for the results of diagonalization to converge. r , we determine the resonance field value Er from the The precise polarization of the MW field with respect Rydberg| i Stark map calculations in Fig. 2a with the ex- to the directions of the electric and magnetic fields at the citation laser detuning set to 130MHz with respect to excitation position is difficult to measure or simulate. − the zero-field 48D5/2 state. Atomic cloud and beam pa- Our calculations of the Rydberg state energies and rameters are zcloud = zbeam = 130 µm, σ = 25 µm and transition dipoles as per Eqs. (9) and (10), assuming w w = 25 µm, leaving only the strength coefficients the magnetic field of 3.4 G along the y-direction, the ≈ 480 Ar and the adsorbate field parameters E0, ζ and Ead,xy as electric field of 3.625V/cm in the x-direction and a free fitting parameters. We then obtain E0 = 37.2 V/cm, MW field polarization in z-direction, well reproduce 10 the observed transition frequencies, and we obtain the interactions with the magnetic field during the SFI field dipole moment d 30ea for the Rydberg transition ramp. The SFI signal for different m states can then be ≃ 0 j r1 r2 . Changing the field strengths and directions calculated separately. |cani change→ | i the resulting transition dipole moment. The initial Rydberg states correspond to the Stark eigenstates in the combined magnetic and electric fields. Vacuum Rabi frequency. The electric field energy The state r1 has sizable contributions only from the 2 ~ | i in the cavity per MW photon is CUc = ωc. With the mj = 5/2 ... 5/2 substates of the 48D5/2 state, while cavity length l = 9.3 mm and the capacitance per unit the state− r is given by a linear combination of zero- | 2i length C/l = 164 pF/m, the (rms) ground state voltage field states with different l and mj values of the n = 47 on the central conductor is Uc = 3 µV. The resulting manifold. The resulting signal is then given by the sum electric field per cavity photon at the position of the over individually calculated (interpolated for all l and atoms z = 130 µm below the chip surface and 0.85 mm mj values) ion signals weighted by the initial population (0) away from the antinode is Ec (z) = 0.015 mV/cm distribution. and varies by about 30% over the extent of the cloud. With the MW polarization along the transition dipole moment, the vacuum Rabi frequency is then M5 CAVITY DRIVEN RYDBERG TRANSITION (0) Ωvac = dEc /~ =2π 0.6 kHz. × Steady-state Rydberg spectrum. We model the interaction of an atom on the Rydberg transition r Rydberg transition linewidth. The Stark gra- | 1i → dients (static dipole moments) of the Rydberg states r2 with the MW field by a driven two-level system. |Withi the Rabi frequency Ω, the decay rate Γ and the r1 and r2 are dr1 = 300 MHz/(V/cm) and dr2 = | 463i MHz/(V/cm),| i leading− to a differential Stark shift resonant Rydberg transition frequency ω12, the steady − state population of r2 is [50] coefficient ∆dr = dr2 dr1 = 163 MHz/(V/cm). As de- | i scribed above, a laser− with linewidth− ∆ω =2π 2 MHz las × Ω 2/4 excites the atoms to the Rydberg state r1 in a layer of ρ22 = | | . (12) 2 2 2 | i (ωMW ω12) +Γ /4+ Ω /2 width ∆zr1, = 0.28 µm, where the electric field varies − | | by ∆z α− = ∆ω /d , as per Eqs. (4) and (5). r1, r1, las r1 To account for the Rydberg transition linewidth, we as- Hence, the− Rydberg− transition r r for the atoms 1 2 sume that the transition frequencies are distributed ac- in this layer is inhomogeneously| broadenedi → | i by the spa- cording to a Gaussian function tially varying electric field by 2 ω12 ω¯12 ∆dr S(ω12) exp ln 2 − , (13) ∆ω12 ∆zr1, αr1, ∆dr = ∆ωlas 2π 1.1 MHz. ∝ − ∆ω12/2 ≃ − − dr1 ≃ ×   ! (11) whereω ¯12 is the mean transition frequency of the atoms in the resonant layer, and ∆ω12 is the full width at half M4 IONIZATION SIGNAL maximum. The appropriately weighted Rydberg state population is then The selective field ionization (SFI) signal for a spe- ρ˜ = S(ω )ρ (ω ) dω . (14) cific Rydberg state and electric field ramp is calculated 22 12 22 12 12 by following the time evolution of the atomic population Z through the Stark map, using the diagonalization of the The atoms interact with the intracavity MW field with Rabi frequency Ω = dEc/~, where Ec is given by Eq. (1). Hamiltonian matrix with 2 ns step size. At each time step ¯ and for each state, an ionization rate is calculated using We denote by Ω Ω(ωMW =ω ¯12) the Rabi frequency of the injected MW≡ field resonant with mean transition a complex absorbing potential, CAP = iηW (ˆr, FE), added to the Hamiltonian, with the scaling− parameter frequencyω ¯12 of the atoms in the resonant layer. We can 10 then write η = 1.52 10− EH /a0 (with Hartree energy EH and · 6 Bohr radius a0), a r radius dependence and a shift with (¯ω ω )2 + κ2/4 Ω(ω ) 2 = Ω¯ 2 12 c . (15) the external electric field FE [49]. The time dependence MW − 2 2 | | | | (ωMW ωc) + κ /4 of the electric field corresponds to the voltage ramp at − the extraction electrode, while the SFI signal has a time The combination of Eqs. (12)-(15) then yields the model p delay of 1.53 µs equal to the time of flight of the ions in function p2 = 1+a ρ˜22 + p0 for the normalized ion counts the experiment. p2 which we use to fit the data in Fig. 4b with the To limit the number of basis states and speed up cal- offset p0, the amplitude p/(1 + a) and additional fitting culations, the magnetic field is neglected during the ion- parameters Ω,¯ ω ¯12 and ωc. From the fit we deduce ization process, avoiding thereby mixing the different mj ω¯12 = 2π 20.5513 GHz, ωc = 2π 20.5495 GHz, and states in the electric field. This is justified as the inter- p/(1 + a) ×0.2. × action with the electric field is much stronger than the ≈ 11

Resonant Rabi oscillations. For a resonantly population difference we then obtain driven two-level atom, neglecting the population decay and coherence relaxation, the population difference be- 2 2 −∞ γ t tween the states r1 and r2 is D¯(t)= n(x)D Ω(x),t dx = e cos(Ω¯t) (18) | i | i − Z−∞ D(Ω,t)= ρ11 ρ22 = cos(Ωt). (16)  − 2 2 σ 2 where γ = 2 Ω¯ . Hence, the spatial variation of the With the atomic cloud being laterally displaced by x0 2χ 50 µm from the cavity center (see the inset in Fig. 4c≃), MW field leads to damping of the resonant Rabi oscilla- the MW field strength varies in the resonant atomic layer. tions, even if we neglect the decay and coherence relations We assume that the corresponding Rabi frequency varies of the atoms. approximately linearly in space, From the MW field simulations, we estimate the rel- ative change of the Rabi frequency across the cloud x x Ω(x)= Ω¯ 1+ − 0 . (17) of width σ = 25 µm to be b = σ/χ . 0.3, consis- χ tent with the observations in Fig. 4c, where we have   1 1 1 γfit = 1.6 0.2 µs− , 2.7 0.6 µs− , and 7.5 1.3 µs− The atomic density distribution in the layer is Gaussian, ± ± ± 2 for Ωfit =2π 1.7 0.1 MHz, Ωfit =2π 4.3 0.2 MHz 1 (x x0) × ± × ± n(x) exp − 2 . For the spatially averaged and Ω =2π 7.7 0.3 MHz, respectively. ∝ √2πσ − 2σ fit × ±  

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