Electromagnetoelastic Actuator for Nanomechanics and Nanotechnology

Crimson Publishers Mini Review Wings to the Research

Afonin SM* National Research University of Electronic Technology, MIET, Russia

Abstract The characteristics of an electromagnetoelastic actuator for nanomechanics and nanotechnology ISSN: 2640-9690 are received. The structural diagram of an electromagnetoelastic actuator for nanomechanics and

nanotechnology is obtained. The structural diagram of an electromagnetoelastic actuator has a difference in the visibility of energy conversion from Cady and Mason electrical equivalent circuits of a piezo vibrator.Keywords: The Electromagnetoelasticmatrix transfer function actuator; of an electromagnetoelastic Characteristics; Structural actuator is obtained.diagram; Piezo actuator;

Deformation; Matrix transfer function; Nanomechanics and nanotechnology Introduction An electromagnetoelastic actuators in the form of piezo actuators or magnetostriction actuators are used in nanomechanics and nanotechnology for nanomanipulators, laser systems, nano pumps, scanning microscopy [1-5]. The piezo actuator is used for nano displacements in photolithography, microsurgical operations, optical-mechanical devices, adaptive optics *Corresponding author: Afonin Sergey Mikhailovich, National Research University of Electronic Technology, MIET, systems and adaptive telescopes, fiber-optic systems [6-15]. The electromagnetoelasticity 124498, Moscow, Russia electromagnetoelastic actuator. The structural diagram of an electromagnetoelastic actuator equation and the differential equation are solved to obtain the structural model of an Submission: Published: June 3, 2021 has a difference for from Cady and Mason electrical equivalent circuits of a piezo vibrator April 06, 2021 in the visibility of energy conversion. The structural diagram of an electromagnetoelastic electromagnetoelasticity [4-12]. Volume 3 - Issue 4 actuator for nanomechanics and nanotechnology is obtained by applying the theory of

How to cite this article: Afonin SM. Elec- Characteristics of Electromagnetoelastic Actuator tromagnetoelastic Actuator for Nanome- The structural diagram of an electromagnetoelastic actuator for nanomechanics and chanics and Nanotechnology. Evolutions nanotechnology is changed from Cady and Mason electrical equivalent circuits [4-8]. The DOI: 10.31031/EME.2021.03.000 equation of electromagnetoelasticity [1-15] has the form of the equation of the reverse effect Mech Eng. 3(4). EME.000567. 2021. for the actuator Copyright@ Afonin SM, This article567 is Creative distributed under the terms of the Ψ T License, which permits unrestricted use where Si , , Ψm , sij and j are the relative deformation, the module, the control Commons Attribution 4.0 International original author and source are credited. and redistribution provided that the parameterLet us consideror the intensity in static of regime field, the the elastic characteristics compliance, of andan electromagnetoelastic the mechanical intensity. actuator for nanomechanics and nanotechnology. The mechanical characteristic [4-39] of an electromagnetoelastic actuator has the form

The regulation characteristic [4-39] an electromagnetoelastic actuator has the form

The mechanical characteristic of an electromagnetoelastic actuator has the form

∆l = ∆lmax (1− F Fmax )

Evolutions in Mechanical Engineering 1 EME.000567. 3(4).2021 2

where , are the transforms of Laplace displacement Ξ1(p) Ξ2 (p) where index max is used for the maximum value of parameter. of faces 1 and 2 for an electromagnetoelastic actuator. For the transverse piezoelectric effect the maximum values of form The system of the equations for the forces on faces of an parameters of the piezo actuator for nanobiotechnology have the electromagnetoelastic actuator is found [10-38]

2 M1 p Ξ1(p)+ F1(p) = S0 T j (0, p)

2 − M 2 p Ξ2 (p)− F2 (p) = S0 Tj (l, p) For the transverse piezo actuator for nanomechanics and

M F1(p) F (p) T j (0, p) T j (l, p) -10 5 -2 where M1 , 2 , , 2 , , , S0 are the masses of the nanotechnology at m/V, E3 V/m, h m, -5 2 -12 2 load, the transforms of Laplace the forces and the stress on faces 1 S m , m /N its parameters are found ∆hmax = 0 = 2∙10 = 0.2∙10 = 2.5∙10 100nm and F = 4N. and 2, the area of an actuator. = 1.5∙10 max = 15∙10 At elastic load the regulation characteristic of an The system of the equations the transforms of Laplace the electromagnetoelastic actuator for nanomechanics and stresses acting on faces of an electromagnetoelastic actuator has the form nanotechnology is obtained in the form

F = Ce∆l The equation of the displacement of an electromagnetoelastic actuator at elastic load has the form The system of equations for the structural diagram on Figure 1 and model of an electromagnetoelastic actuator for nanomechanics and nanotechnology has the form For the transverse piezo actuator for nanomechanics and nanotechnology the equation of the displacement at elastic load has the form

where

-10 h δ Therefore, is at the transfer coefficient.m/V, N/m, Ce = 7 N/m, U = 200V, its parameters are found = 2.8nm/V and 7 = 2∙10 = 16, = 2.8∙10 steady-state displacement ∆h 0.4∙10 parameters are coincidences with an error of 10%. = 560nm. Theoretical and practical Let us consider in dynamic regime the characteristics of an electromagnetoelastic actuator for nanomechanics and nanotechnology. The differential equation of an electromagnetoelastic actuator has the form [4-32]

Figure 1: Structural diagram of electromagnetoelastic actuator for nanomechanics and nanotech- γ = Ψ + α p c nology. where Ξ(x, p) is the transform of Laplace for displacement;

p , γ , Ψ , α c are the operator of transform, the coefficient of wave propagation,The decision the speed of of sound,the thedifferential coefficient equationof attenuation of an electromagnetoelastic actuator has the form

where C , B where is H are theC , coefficientsB have the form the intensity of electric field, is the intensity of magnetic field. The coefficients The matrix equation for an electromagnetoelastic actuator with matrix transfer function has the form

communications systems. International Journal of Information and Communication Sciences 1(2): 22-29.

12. Afonin SM (2015) Structural-parametric model and transfer functions of electro elastic actuator for nano- and microdisplacement. Chapter 9 in Piezoelectrics and Nanomaterials: Fundamentals, Developments and Therefore, at the inertial load the steady-state displacements , Applications. In: Parinov IA (Ed.), Nova Science, New York, USA, pp. 225- 242. of an electromagnetoelastic actuator have the form 13. actuator for nano- and micro displacement of mechatronic system. ChapterAfonin SM8 in (2017)Advances A in structural-parametric Nanotechnology. In: Bartul model Z of& Trenor electro J elastic(Eds.), Volume 19, Nova Science, New York, USA, pp. 259-284. For the mechatronics control systems with an 14. Afonin SM (2018) Electro magnetoelastic nano- and microactuators for electromagnetoelastic actuator its characteristics are found. mechatronic systems. Russian Engineering Research 38(12): 938-944. 15. Afonin SM (2012) Nano- and micro-scale piezomotors. Russian Conclusion In work the characteristics of an electromagnetoelastic Engineering Research 32(7-8): 519-522. actuator for nanomechanics and nanotechnology are received. characteristics of composite piezoelectric transducers. Mechanics of 16. SolidsAfonin 42(1): SM (2007) 43-49. Elastic compliances and mechanical and adjusting The structural diagram of an electromagnetoelastic actuator for diagram of an electromagnetoelastic actuator has a difference 17. Afonin SM (2014) Stability of strain control systems of nano-and micro nanomechanics and nanotechnology is obtained. The structural from Cady and Mason electrical equivalent circuits of a piezo 18. displacement piezo transducers. Mechanics of Solids 49(2): 196-207. actuator nano displacement for mechatronics. International Journal of PhysicsAfonin SM 5(1) (2017): 9-15. Structural-parametric model electro magnetoelastic diagram of an electromagnetoelastic actuator is found from its vibrator in the visibility of energy conversion. The structural 19. Afonin SM (2019) Structural-parametric model multilayer electro magnetoelastic actuator for nanomechatronics. International Journal of transfer function of an electromagnetoelastic actuator is received. electromagnetoelasticity and differential equations. The matrix 20. Physics 7(2): 50-57. References and micro displacement for nanoscience. AASCIT Journal of Nanoscience 1. st edn), 3(3):Afonin 12-18. SM (2017) Structural-parametric model of piezoactuator nano-

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3. Mathematics 74(3): 943-948. 22. Afonin SM (2018) Structural-parametric model of electro magnetoelastic Uchino K (1997) Piezoelectric actuator and ultrasonic motors. Kluwer 4. AcademicAfonin SM Publisher, (2005) Boston,Generalized MA, USA, parametric p. 347. structural model of a 23. actuatorAfonin SM for nano(2019) mechanics. Structural-parametric Actuators 7(1): model 1-9. and diagram of a compound electro magnetoelastic transducer. Doklady Physics 50(2): multilayer electro magnetoelastic actuator for nano mechanics. Actuators 8(3): 1-14.

5. 77-82.Afonin SM (2008) Structural parametric model of a piezoelectric nano 24. of electro magnetoelastic actuators nano- and micro displacement for mechatronicAfonin SM (2016) systems. Structural-parametric International Journal models of Theoretical and transfer and functions Applied displacement transducer. Doklady Physics 53(3): 137-143. Mathematics 2(2): 52-59. 6. 313.Afonin SM (2006) Solution of the wave equation for the control of an 25. Afonin SM (2018) Structural-parametric model of electro elastic electro magnetoelastic transducer. Doklady Mathematics 73(2): 307-

st and Pharmaceutics 5(1): 8-12. applications of electromechanical phenomena in crystals. (1 edn) actuator for nanotechnology and biotechnology. Journal of Pharmacy 7. Cady WG (1946) Piezoelectricity: an introduction to the theory and Afonin SM (2010) Design static and dynamic characteristics of a piezoelectric nano micro transducers. Mechanics of Solids 45(1): 123- 8. McGraw-Hill Book Company, New York, USA, p. 806. 26. 132. Part A. methods and devices. Academic Press, New York, USA, p. 515. Mason W (Ed.) (1964) Physical acoustics: principles and methods. Vol.1. Afonin SM (2018) Electro magnetoelastic actuator for nano mechanics. 9. rd edn), 27. Zwillinger D (1989) Handbook of differential equations. (3 Engineering 18(2): 19-23. 10. Global Journal of Research in Engineering: A Mechanical and Mechanics Academic Press, Boston, USA, p. 673. 28. electro magnetoelastic converter for nano- and micrometric movement Afonin SM (2006) A generalized structural-parametric model of an systems of nanotechnology. Proceedings of the 2018 IEEE Conference EI control systems: III Transformation parametric structural circuits of an Afonin SM (2018) Multilayer electro magnetoelastic actuator for robotics electro magnetoelastic converter for nano- and micrometric movement control systems. Journal of Computer and Systems Sciences International 29. Con Rus pp. 1698-1701. nano displacement for communications systems. Transactions on Afonin SM (2018) A block diagram of electro magnetoelastic actuator 11. 45(2): 317-325. electro magnetoelastic actuator nano- and micro displacement for Networks and Communications 6(3): 1-9. Afonin SM (2016) Decision wave equation and block diagram of

30. 35. Afonin SM (2018) Structural-parametric model electro elastic of multilayer electro magnetoelastic actuator micro and nano actuator nano- and micro displacement of mechatronics systems for displacementAfonin SM (2019) for communications Decision matrix systems. equation Transactions and block on Networks diagram nanotechnology and ecology research. MOJ Ecology and Environmental

31. and Communications 7(3): 11-21. Sciences 3(5): 306-309. magnetoelastic actuator for communication equipment. Transactions on NetworksAfonin SM and (2020) Communications Condition absolute 8(1): 8-15.stability control system of electro 36. Afonin SM (2019) Condition absolute stability of control system with electro elastic actuator for nano bioengineering and microsurgery. 32. Afonin SM (2020) A Block diagram of electro magnetoelastic actuator SurgeryAfonin SM& Case (2020) Studies Multilayer Open Access engine Journal for 3(3): microsurgery 307-309. and nano for control systems in nanoscience and nanotechnology, Transactions on 37. 38. biomedicine. Surgery & Case Studies Open Access Journal 4(4): 423-425. 33. MachineAfonin SM Learning (2020) andOptimal Artificial control Intelligence of a multilayer 8(4): 23-33.electro elastic engine magnetoelastic actuator nano displacement for nano research in with a longitudinal piezo effect for nanomechatronics systems. Applied sciences.Afonin SM Novel (2020) Research Condition in Sciences absolute 5(1): stability 1-4. of control system electro 39. Nalwa HS (2004) Encyclopedia of Nanoscience and Nanotechnology. 25 34. SystemAfonin SMInnovation (2020) 3(4):Structural 1-7. scheme actuator for nano research. COJ Reviews and Research 2(5): 1-3. Volumes, Los Angeles: American Scientific Publishers, USA.

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