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United States Patent (19) 11 Patent Number: 5,838,480 Mcintyre Et Al

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United States Patent (19) 11 Patent Number: 5,838,480 Mcintyre Et Al USOO583848OA United States Patent (19) 11 Patent Number: 5,838,480 McIntyre et al. (45) Date of Patent: Nov. 17, 1998 54) OPTICAL SCANNING SYSTEM WITH D. Stephenson, “Diffractive Optical Elements Simplify DIFFRACTIVE OPTICS Scanning Systems”, Laser Focus World, pp. 75-80, Jun. 1995. 75 Inventors: Kevin J. McIntyre, Rochester; G. Michael Morris, Fairport, both of N.Y. 73 Assignee: The University of Rochester, Primary Examiner James Phan Rochester, N.Y. Attorney, Agent, or Firm M. Lukacher; K. Lukacher 57 ABSTRACT 21 Appl. No.: 639,588 22 Filed: Apr. 29, 1996 An improved optical System having diffractive optic ele ments is provided for Scanning a beam. This optical System (51) Int. Cl. ............................................... GO2B 26/08 includes a laser Source for emitting a laser beam along a first 52 U.S. Cl. .......................... 359/205; 359/206; 359/207; path. A deflector, Such as a rotating polygonal mirror, 359/212; 359/216; 359/17 intersects the first path and translates the beam into a 58 Field of Search ..................................... 359/205-207, Scanning beam which moves along a Second path in a Scan 359/212-219, 17, 19,563, 568-570,900 plane. A lens System (F-0 lens) in the Second path has first 56) References Cited and Second elements for focusing the Scanning beam onto an image plane transverse to the Scan plane. The first and U.S. PATENT DOCUMENTS Second elements each have a cylindrical, non-toric lens. One 4,176,907 12/1979 Matsumoto et al. .................... 359/217 or both of the first and second elements also provide a 5,031,979 7/1991 Itabashi. diffractive element, which provides not only astigmatic 5,086,350 2/1992 Nishihata. 5,208,701 5/1993 Maeda. correction, but may further provide chromatic aberration 5,247.385 9/1993 Takanashi. correction of the Scanning beam. This astigmatic correction 5,270,850 12/1993 Mochizuki et al.. is achieved without the presence of any lens having a 5,270.851 12/1993 Makino et al.. toroidal (toric) surface. The system may further have a third 5,329,399 7/1994 Ho. element in the first path of the beam prior to the deflector. 5,486,694 1/1996 Harris. This third element provides a lens having another diffractive OTHER PUBLICATIONS element. This diffractive element can correct chromatic and R. Hopkins & R. Hanau, “Geometrical Optics” and R. Spherical aberration of the Scanning beam in the croSS-Scan Hopkins Optical Design, U.S. Military Standarization Hand plane, a plane perpendicular to the Scan plane. book for Optical Design, Sinclair Optics, pp. 9-1-9-11, Mar. 1987. 18 Claims, 10 Drawing Sheets U.S. Patent Nov. 17, 1998 Sheet 1 of 10 5,838,480 SCOn Plone 9 FG. A SCOn Plone 8 7 Image Plane CrOSS SCCIn 9 SCCIn Plone 9 F.G. B X 7 aCrOSS-SCOn Plone 8 Imoge Plane U.S. Patent Nov. 17, 1998 Sheet 2 of 10 5,838,480 4C (PRIOR ART) AC 9 6 SCCIn Plone FG. 3A (PRIOR ART) U.S. Patent Nov. 17, 1998 Sheet 3 of 10 5,838,480 BeOm POth CrOSS-SCOn Plone BeOm POth II - - - - FG. 3B (PRIOR ART) 8 782 S. S 2780 CDg gO 77778 O 2O 3O Temperoture (Celsius) F.G. 6 U.S. Patent Nov. 17, 1998 Sheet 4 of 10 5,838,480 CrOSS-SCOn Plone U.S. Patent Nov. 17, 1998 Sheet 5 of 10 5,838,480 us are as we a Ph. 775mm O - SCOn Angle (degrees) FG. 7 asses a 775mm SCOn Angle (degrees) FIG. 8 U.S. Patent Nov. 17, 1998 Sheet 6 of 10 5,838,480 O & SCOn Angle (degrees) FIG. 9 O SCOn Angle (degrees) FIG. O U.S. Patent Nov. 17, 1998 Sheet 7 of 10 5,838,480 O SCOn Angle (degrees) FIG. O 0.8 0.6 0.4 0.2 -0.2 -0.4 -0.6 -0.8 -10 SCOn Angle (degrees) FIG. 2 U.S. Patent Nov. 17, 1998 Sheet 8 of 10 5,838,480 X 34C 35C FIG 4A \ \ \ \ SCOn Plone 34o 35o FIG.4B CrOSS-SCOn Plone U.S. Patent Nov. 17, 1998 Sheet 9 of 10 5,838,480 F.G. 5 4 78Onm O 3 c 2 O O O 9 - 3 -2 to -3 O O -4 SCOn Angle (degrees SCCIn Angle (degrees F.G. 6 U.S. Patent Nov. 17, 1998 Sheet 10 of 10 5,838,480 O O,8 O.6 0.4 0.2 O -0,2 -0.4 -0.6 -0.8 - O SCOn Angle (degrees) FG. 7 5,838,480 1 2 OPTICAL SCANNING SYSTEM WITH second principle point of F-0 lens 15 in the scan plane to the DIFFRACTIVE OPTICS image plane. Since beam 19 incident on F-0 lens 15 is collimated or nearly collimated in the Scan plane and diverg FIELD OF THE INVENTION ing in the croSS-Scan plane, the F-0 lens must provide greater 5 optical power in the croSS-Scan plane than in the Scan plane The present invention relates to an optical lens System for in order to form a small focused spot at substrate 16. This Scanning a beam, and more particularly to, an improved requires the use of anomorphic optics, which includes both optical System having a F-0 lens System with a diffractive cylindrical and toroidal surfaces, in F-0 lens 15. Toroidal optic element for correction of the Scanning beam which Surfaces refer to lens Surfaces having different curvatures in avoids the need for toric optics. mutually orthogonal planes. BACKGROUND OF THE INVENTION Anomorphic optics are used in F-0 lens 15 due to the focusing of a line image on polygonal mirror 14. Such Typically, F-0 lenses are used to correct and focus a laser focusing of a line image is needed to reduce croSS-Scan beam as it Scans acroSS a photoSensitive Substrate, Such as errors. For instance, if the planes containing reflecting photographic film or a photoSensitive drum. These lenses 15 mirror facets 14a in rotating polygonal mirror 14 are titled, have the unique property that the lateral position of the laser i.e., not parallel to the axis of rotation, due to, for example, Spot on the SubStrate is proportional to the Scan angle, the fabrication errors or mirror 14 wobble, the reflected beam angular displacement of the beam from the center of Scan. will be deviated laterally in the croSS-Scan plane, thereby The beam is deflected at the Scan angle by a Scanning resulting in an undesirable shift of the Spot image on deflector, Such as a rotating polygonal mirror. Substrate 16. Forming a line image at mirror facets 14a tends A plane geometry model of the laser beam deflected from to negate this image shift and allows for Significantly larger a scanning deflector is defined in reference to FIGS. 1A and tolerances in the construction of polygonal mirror 14. This 1B. Using an X, y, Z coordinate System, FIG. 1A illustrates tilt invariance effect is illustrated in FIGS. 3A and 3B which the orientation of a Scan plane 6, a croSS-Scan plane 7 and an show the beam path from one of mirror facets 14a to image plane 8 for a beam at the center of Scan (Zero Scan 25 Substrate 16 in the Scan and the croSS-Scan planes, respec angle) from a Scanning deflector (not shown) Such that the tively. In the scan plane shown in FIG. 3A, the laser beam central ray of the beam propagates along the Z-axis. AS will reflected from mirror facet 14a is collimated or nearly be shown later, the F-0 lens is located in the beam path from collimated. F-0 lens 15 focuses beam 19 to an image spot at the Scanning deflector to image plane 8. At the center of Scan the image plane of Substrate 16. The Scan angle of the of the beam, Scan plane 6 is an y-Z plane, croSS-Scan plane reflecting mirror facet 14A in the Scan plane corresponds to 7 is a X-Z plane, and image plane 8 is a plane perpendicular the rotation of the polygonal mirror 14 to achieve a Scanning to both Scan and croSS-Scan planes 6 and 7. A Scan line 9 is effect. However, in the cross-scan plane shown in FIG. 3B, a line along which the imaged beam Scans on image plane the laser beam appears to diverge from a point on mirror 8 and defines a line segment parallel to the y-axis. FIG. 1B facet 14a Surface. F-0 lens 15 forms a real image of this illustrates planes 6-8 for non-Zero Scan angles of the laser 35 point at the image plane of Substrate 16. Two beam paths I beam from the Scanning deflector, in which croSS-Scan plane and II are shown in FIG. 3B to illustrate the tilt invariance 7 has rotated with respect to the X-axis by Scan angle 0 from effect. Beam path I (shown as a solid line) is the path from the X-Z plane to the X-Z plane. In other words, the central an un-tilted mirror facet 14a, i.e., the plane of the mirror ray of the beam enters the F-0 lens (not shown) along the facet 14a is parallel to the axis of rotation 17. Beam path 2 Z-axis which is tilted with respect to the Z-axis by Scanning 40 (shown as a dashed line) is the beam path from a tilted mirror angle 0.
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