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Emerging Research Devices INTERNATIONAL TECHNOLOGY ROADMAP FOR SEMICONDUCTORS 2005 EDITION EMERGING RESEARCH DEVICES THE ITRS IS DEVISED AND INTENDED FOR TECHNOLOGY ASSESSMENT ONLY AND IS WITHOUT REGARD TO ANY COMMERCIAL CONSIDERATIONS PERTAINING TO INDIVIDUAL PRODUCTS OR EQUIPMENT. THE INTERNATIONAL TECHNOLOGY ROADMAP FOR SEMICONDUCTORS: 2005 THE INTERNATIONAL TECHNOLOGY ROADMAP FOR SEMICONDUCTORS: 2005 TABLE OF CONTENTS Scope ..............................................................................................................................................1 Difficult Challenges..........................................................................................................................1 Introduction...................................................................................................................................................1 Device Technologies ....................................................................................................................................2 Materials Technologies ................................................................................................................................3 Nano-information Processing Taxonomy.........................................................................................4 Emerging Research Devices ...........................................................................................................5 Memory Devices...........................................................................................................................................5 Introduction .............................................................................................................................................................5 Memory Taxonomy .................................................................................................................................................6 Memory Devices—Definition and Discussion of Table Entries ............................................................................. 12 Logic Devices .............................................................................................................................................14 Introduction ........................................................................................................................................................... 14 Logic Devices—Definition and Discussion of Table Entries.................................................................................. 18 Emerging Research Materials .......................................................................................................23 Introduction.................................................................................................................................................23 Critical Properties .......................................................................................................................................23 1D Charge State Materials.........................................................................................................................25 Key Challenge ...................................................................................................................................................... 25 Growth with Controlled Properties and Location................................................................................................... 25 Nanotube Purification and Directed Assembly...................................................................................................... 26 1D Charge State Material Interfaces..................................................................................................................... 26 Critical Metrology for Carbon Nanotubes.............................................................................................................. 27 Molecular State Materials...........................................................................................................................27 Key Challenge ...................................................................................................................................................... 27 Introduction ........................................................................................................................................................... 27 Transport and IV Non-linearity .............................................................................................................................. 27 Bi-stable States..................................................................................................................................................... 28 Molecular State Contacts...................................................................................................................................... 28 Metrology.............................................................................................................................................................. 28 Spin State Materials ...................................................................................................................................28 Key Challenges..................................................................................................................................................... 28 Introduction ........................................................................................................................................................... 28 Ferromagnetic Semiconductor Devices ................................................................................................................ 29 Spin Injection Materials......................................................................................................................................... 29 Strongly Correlated Electron State Materials.............................................................................................30 Background........................................................................................................................................................... 30 Definitions ............................................................................................................................................................. 30 Key Challenge ...................................................................................................................................................... 30 Material Properties................................................................................................................................................ 30 Synthesis .............................................................................................................................................................. 31 Interface Materials ................................................................................................................................................ 31 Characterization and Modeling ............................................................................................................................. 31 Material Synthesis ......................................................................................................................................32 Introduction ........................................................................................................................................................... 32 Molecular Synthesis (Molecules and Macromolecules) ........................................................................................ 32 Thin Film Synthesis............................................................................................................................................... 32 Self and Directed Assembly.................................................................................................................................. 32 THE INTERNATIONAL TECHNOLOGY ROADMAP FOR SEMICONDUCTORS: 2005 Contact Material Issues........................................................................................................................................ 33 Characterization .........................................................................................................................................33 Introduction........................................................................................................................................................... 33 3-Dimensional, Angstrom Resolution, Atomic Sensitivity (structure and composition) ......................................... 33 Profiling of Local Properties.................................................................................................................................. 33 Metrology for Characterization of Band Structure and State Properties of Nanoscale Materials.......................... 34 Modeling and Simulation............................................................................................................................34 Emerging Research Architectures .................................................................................................35 Introduction ................................................................................................................................................35 Architectures—Definition and Discussion of Table Entries........................................................................36 Fine-Grained Parallel Implementations in Nanoscale Cellular Arrays .................................................................
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