materials Article Microstructure, Hardness, and Elastic Modulus of a Multibeam-Sputtered Nanocrystalline Co-Cr-Fe-Ni Compositional Complex Alloy Film Péter Nagy 1,2, Nadia Rohbeck 2, Zoltán Heged ˝us 3 , Johann Michler 2,László Pethö 2,János L. Lábár 1,4 and Jen˝oGubicza 1,* 1 Department of Materials Physics, Eötvös Loránd University, P.O. Box 32, H-1518 Budapest, Hungary;
[email protected] (P.N.);
[email protected] (J.L.L.) 2 EMPA Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, CH-3602 Thun, Switzerland;
[email protected] (N.R.);
[email protected] (J.M.);
[email protected] (L.P.) 3 Deutsche Elektronen-Synchrotron DESY, Notkestr. 85, 22603 Hamburg, Germany;
[email protected] 4 Institute for Technical Physics and Materials Science, Centre for Energy Research, Konkoly Thege Miklós út 29-33, H-1121 Budapest, Hungary * Correspondence:
[email protected]; Tel.: + 36-1-372-2876; Fax: +36-1-372-2811 Abstract: A nanocrystalline Co-Cr-Ni-Fe compositional complex alloy (CCA) film with a thickness of about 1 micron was produced by a multiple-beam-sputtering physical vapor deposition (PVD) technique. The main advantage of this novel method is that it does not require alloy targets, but rather uses commercially pure metal sources. Another benefit of the application of this technique is that it produces compositional gradient samples on a disk surface with a wide range of elemental Citation: Nagy, P.; Rohbeck, N.; concentrations, enabling combinatorial analysis of CCA films. In this study, the variation of the Heged˝us,Z.; Michler, J.; Pethö, L.; phase composition, the microstructure (crystallite size and defect density), and the mechanical Lábár, J.L.; Gubicza, J.