Teledyne's High Performance Infrared Detectors For
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TELEDYNE’S HIGH PERFORMANCE INFRARED DETECTORS FOR SPACE MISSIONS Paul Jerram and James Beletic ICSO October 2018 Teledyne High Performance Image Sensors Teledyne DALSA Teledyne e2v Space Imaging Waterloo, Ontario (Design, I&T) Chelmsford, England (Design, Fab, I&T) Bromont, Quebec (CCD fab) Grenoble, France (Design, I&T) • Teledyne utilizes leading CMOS foundries for Teledyne Imaging Sensors Teledyne Judson Technologies fabrication of CMOS image sensors Camarillo, California Montgomeryville, Pennsylvania • Including staff who work in machine vision (Design, Fab, I&T) (Design, Fab, I&T) (locations not shown on map), Teledyne employs 100 CMOS image designers and 7 CCD designers 2 Teledyne Image Sensors ‐ Products • Infrared and visible sensors • Custom cameras • Focal plane electronics • Laser eye protection & sensor protection Photodiode 1‐D Photodiode Array 320×256 Thermoelectrically • Infrared detectors, photodiodes & arrays Array cooled packaging • Detector packaging • Custom sensors for tactical and space • Infrared cameras • Camera electronics • Integration and test of IR camera systems Custom Visible & IR Arrays for DoD Space Applications Space Flight Packaging NASA JWST 4 Mpixel High Speed (1600 Hz) Long‐Wave IR camera for Lab Instrumentation Compact Camera Electronics TM Micro‐Cam Aircrew Laser Eye Protection Infrared Microscope 16 Million Pixel Camera Infrared Astronomy Array High Speed Camera for Tactical Application 3 Tunable Wavelength: Unique property of HgCdTe 4 Hg1-xCdxTe Modify ratio of Mercury and Cadmium to “tune” the bandgap energy 5.3 HgCdTe crystal is grown by MBE on CdZnTe Substrates 2 3 4 E g 0.302 1.93x 0.81x 0.832 x 5.35 10 T 1 2x G. L. Hansen, J. L. Schmidt, T. N. Casselman, J. Appl. Phys. 53(10), 1982, p. 7099 Teledyne’s High Performance IR Sensors for Space Missions Hybrid CMOS Image Sensor Readout Circuit Input signal • Flux – object and background Operating Mode • Integration time • Frame readout time • Shutter (rolling, snapshot) • Multiple storage cells per pixel • Windows • Reset (pixel, line, global) • Event driven Interface • Input (analog, digital) • Output (analog, digital) Detector • # of readout ports The functionality Environment • Wavelength (λ) (“the brains”) of • Temperature • Quantum Efficiency a CMOS‐based • Radiation sensor is • Dark current & Noise Other Requirements • Radiation environment provided by the • Linearity • Persistence readout circuit • Anti-blooming Teledyne’s High Performance IR Sensors for Space Missions Substrate removed HgCdTe 6 Cosmic Ray Incident Photons Note that the incident photons must first pass through the CdZnTe substrate CdZnTe Substrate Cosmic rays in the CdZnTe substrate give fluorescence that creates signal in the HgCdTe Bulk n-type HgCdTe The substrate will also decrease QE below 1.3µm p-type HgCdTe p-type HgCdTe NB schematic is not to scale indium bump epoxy ROIC input silicon multiplexer Output Signal Substrate removed HgCdTe 7 Note that the incident photons must first pass through the CdZnTe substrate AR Coating Incident Cosmic rays in the CdZnTe substrate give Photons fluorescence that creates signal in the HgCdTe Bulk n-type HgCdTe The substrate will also decrease QE below 1.3µm The substrate is removed down to the HgCdTe p-type HgCdTe p-type HgCdTe layer An AR Coating can now be applied to give excellent QE down to below 400nm indium bump epoxy ROIC input silicon multiplexer Output Signal Substrate removed HgCdTe Provides Simultaneous UV‐Vis‐IR Light Detection Atmospheric water vapor absorption bands at 1400 and 1900 nm 2510 nm 380 nm JPL AVIRIS‐NG Imaging Spectrometer Teledyne’s High Performance IR Sensors for Space Missions Promise of Fully Depleted HgCdTe Teledyne’s high quality HgCdTe is getting even better! Applications will soon benefit from a major reduction in HgCdTe dark current • For high flux (300K scenes), will double operating temperature • Less expensive cooling options • Longer cooler operating lifetime • Able to operate LWIR with mini cryo-coolers • For low flux applications • Lower dark current at standard oper. Temp. • Higher operating temperature • Longer cooler operating lifetime • Status • Demonstrated 10X to 100X reduction in dark current • LWIR 128x128, 1280x480, and 640x512 arrays have been tested • MWIR operated up to 250K • LWIR operated up to 160K • Strong funding for development • Developing partnerships with aerospace primes for system insertion • Will utilize for commercial instrumentation products 9 CHROMATM (Configurable Hyperspectral Readout for Multiple Applications) Optimized for imaging spectrometers (hyperspectral imaging) Programmable, digital input: clocks and biases generated on‐chip CHROMA 1280×480 Sensor Chip Analog output, one output every 160 columns (10 MHz pixel rate) Assembly (SCA) Snapshot, integrate‐while‐read, nearly 100% duty cycle CTIA unit cell + 30 x 30 micron pixel pitch + High linearity (>99% linear over full range) + Full well sizes (700 ke‐, 1 Me‐, or 5 Me‐) Focal Plane Formats (columns by rows; spatial by spectral pixels) Electronics (FPE) + 640 × 480 Delivered in 2012 + 1280 × 480 Delivered in 2014 CHROMA used by: + 1600 × 480 ROICs fabricated • Several JPL Focal plane electronics (16 bit, 10 MHz ADCs, CameraLink interface) spectrometers Windowing available in row direction • CLARREO Pathfinder Frame readout time scales with number of rows read out on ISS + Row readout time is 16.8 microsec + Full‐frame rate (480 rows) is 125 Hz + Half‐frame rate (240 rows) is 250 Hz Low power: 90, 150, 180 mW for CHROMA 640, 1280 and 1600 formats Performance (advertised specs): Well capacity & Readout Noise Power ROIC No. Array Format CDS Noise CDS Noise CDS Noise dissipation at dimensions Outputs Well = 0.7M e‐ Well = 1M e‐ Well = 5M e‐ 125 Hz [mW] [mm] Available support equipment: CHROMA‐320 120 e‐ 145 e‐ 600 e‐ 70 14.4 x 19.4 2 – Focal Plane Electronics (FPE): CHROMA‐640 120 e‐ 145 e‐ 600 e‐ 90 24.4 x 19.5 4 engineering/lab grade only CHROMA‐1280 120 e‐ 145 e‐ 600 e‐ 150 43.2 x 19.6 8 – Flex Cables: warm and cold cables, CHROMA‐1600 120 e‐ 145 e‐ 600 e‐ 180 52.8 x 19.7 10 engineering/lab grade only Actual noise performance is 15%-20% lower (better) than listed above Teledyne’s High Performance IR Sensors for Space Missions 1 0 GeoSnap‐18 (Stichable to 3k x 3k) GeoSnap / CHROMA‐D Design • 18 micron pitch pixel • CTIA unit cell with 2 gains / full well • 100 ke- and 1 Me- or 180 ke- and 2.7 Me- • Stitchable design, up to 3K×3K pixels • Snapshot, integrate while read • Fully digital chip, 14 bit ADCs • Full frame rate: 120 Hz for 2K×2K, 250 Hz for 3K×512 • ROIC formats fabricated: 2K×2K, 2K×512, 3K×512 • Focal plane arrays made and tested with several types of detectors: • Visible (Silicon), MWIR (5.3 µm HgCdTe), VLWIR (14.5 µm HgCdTe) GeoSnap GeoSnap 3K×3K 2K×2K ROIC Focal Plane Module • ROIC passed radiation tests (no latchup) CHROMA‐D • GeoSnap 2K×2K space flight package developed 3K×512 • GeoSnap 2K×2K in production (TRL 6) • Being used for Visible, MWIR, VLWIR • CHROMA‐D 2K×512 and 3K×512 being developed CHROMA‐D for Earth Science applications 1K×512 11 Detectors and missions Teledyne Visible and IR detectors for Euclid • Euclid is the European Space Agency’s next flagship astronomy mission. • Target launch date is 2021. • Euclid has a 1.2‐m diameter large field of view telescope with visible and infrared arrays produced by Teledyne: • 600 million visible pixels • 36 4K×4K (16 Mpix) CCDs • 64 million infrared pixels • 16 H2RG (4 Mpix) SWIR arrays • 16 SIDECAR ASIC modules • Largest IR focal plane array when it launches • 24 flight candidate H2RGs delivered to NASA • NASA tested and delivered 20 flight grade H2RG arrays to ESA, all of which greatly exceed requirements Quantum Efficiency of 24 flight candidate H2RGs Measured by Goddard SFC Detector Characterization Laboratory e2v CCD 273‐84 Teledyne Imaging Sensors H2RG 2K×2K pixels, 18µm pitch 13 H2RG IR Detectors for Euclid Dark Current at 100K Readout Noise Median = 0.012 e‐/pix/sec Median = 6.8 e‐ More than 5X better 40% better than specification (11.5 e‐) than specification (0.07 e‐/pix/sec) 2.3 µm cutoff wavelength 14 NASA WFIRST Mission • H4RG‐10: 4K×4K pixels, 10 µm pixel pitch 2.4 meter telescope • Technology Maturation (2014‐2018) achieved all goals • Reduced H4RG‐10 noise • Increased operability of 16 megapixel IR arrays • Demonstrated H4RG‐10 flight performance • Demonstrated yield for flight production • Made the arrays flatter (smaller peak‐to‐valley) • Reduced image persistence • Flight Production commenced in June 2018 Measured by the Detector Characterization Lab, Goddard Space Flight Center 15 Missions for Jupiter and it’s neighborhood JUICE MAJIS Lucy Europa VIS‐IR Spectrometer L’Ralph Clipper Vis‐IR MISE Jupiter + Ganymede, Calisto & Europa spectrometer Vis‐IR Trojan Asteroids spectrometer Europa Europa Image Here • MWIR CHROMA‐A • 1 H1RG SWIR array 320×480 • 1 H1RG MWIR array • Focal Plane • 2 SIDECAR ASIC Modules • 1 H2RG MWIR array Electronics 16 NEOCam Asteroid Survey Mission Image Sensor Requirements Wavelength (µm) 6 – 10 Operating temperature range (K) 35 – 40 Integration time (s) 10 Dark current (e‐/s/pixel) <200 Read noise (correlated double sample; e‐) <30 Quantum efficiency (%) >60 Well depth (e‐) >45,000 Pixel operability (%) (with all above properties) >90 • NEOCam will fly two mosaics • 2K×8K MWIR (5 µm cutoff) • 2K×8K LWIR (10 µm cutoff) • MWIR H2RG produced for several years for ground-based astronomy and JWST • LWIR now made in 2K×2K format (H2RG) • Largest high performance LWIR detectors ever made