TECHNOLOGY RESEARCH INSTITUTE

2019 SCIENTIFIC REPORT 2019 SCIENTIFIC REPORT

TECHNOLOGY RESEARCH INSTITUTE © Pierre Jayet T transfer toindustry, ultimately. technology on is focus overall our As programs, Leti major all in (HPC). computing high-performance bring to in advances the capacity major has program This research. scientific for center which France’snational CNRS, as well as CEA, program, the from computing and Leti from experts—both France’sleading of institute’s quantum some unites the to silicon scientists senior ambitious assigned have also We their and efforts havemadetheprogram oneofLeti’s program, flagships. intelligence artificial embedded our scientists, of research our Today engineers, andstaff are profoundly committedtothesuccess concerned. industries the stakeholders—global companies, SMEs and startups—in all of with partnerships long-term strong, our through applications services these of the knowledge deep broad, in acquired energy, have and We sector. aeronautics, industries automotive, agriculture the and in healthcare, found are opportunities AI biggest and for applications obvious most The energy- and (AI). intelligence artificial embedded enable day performance one will that the meet efficiency requirements of the will microcontrollers and processors devices these MEMS, NEMS, and biosensors. Assembled in very-low-power 3D to architectures, FD-SOI and memory resistive generation new- combining (SNNs) networks neural spiking in advances latest the from range innovations The forefront. the to years several past the over partners our with developed have we technologies semiconductor groundbreaking the bring will it that in foundational is program accelerate/boost This transition. will digital the that intelligence artificial embedded 4 LETI 2019ScientificReport © CEA-Leti and the institute is running a far-reaching program on on program far-reaching a running is institute the and core expertise, underpins advances in all of these fields, CEA-Leti’swith closely aligns which transition, digital he Sabonnadière Emmanuel Commission (CEA). by theFrench Energies Alternative andAtomicEnergy the environment, andthefuture ofmedicine—driven actively supportssociety’s digitaltransition—inenergy, fields ofmicro andnanoelectronics, CEA-Leti As oneofFrance’s leadingresearch institutesinthe Chief ExecutiveOfficer

The exciting new direction forourresearchers, an aswellforourpartners. represents medicine of future exciting the This into pathway microelectronics. and microbiology blend to We are also conducting innovative research on organs-on-chip in interface brain-computer the 2019—a area thatwillremain centraltoourwork. in advances major some including environment, its and brain the between interfaces in progress produced has brain the on research our fact, In scientists. our excites and motivates nature in found systems biological amazing the investigating and brain human the of source of inspiration and innovation. Exploring the functioning perpetual a humanity—is world—including natural The work. Finally, to environmental preservation is fundamental to all of our departments industry-specific and continuously application- improve power management and energy efficiency. our innovation of for passion the and equipment production Moore More-than- advanced most the with outfitted cleanrooms our of power the leverage we Here, applications. market specific to partners. These technologies are mature, and our R&D is tailored industrial researchour early-stage with of history long a have we which in area an domain, systems cyber-physical the in rooted are They 5G. and LiDAR integrated are programs two last Our environment. the and society, our economy, industrial our to difference a you to take part in creating the new innovations that will make inspire and curiosity your spark will pages following the that are thrilled to be able to share our work with you. It is our hope here everyone and Leti I at transition. digital the of support in are projects these of year.Many past the of publications and Albert Einstein HAVING FUN.” IS INTELLIGENCE “CREATIVITY 2019 Scientific Report presents our most significant results My warmest regards,My warmest Emmanuel O sustainability inmindateverystepoftheway. planet, wemustworktoward theseobjectiveswith as possible.And,withincreasing pressure onour “smart” insmartsystems)asclosetothedevice technologies tobringdataprocessing (the device designsandarchitectures whileinnovating integration. Thismeansinventingnewsystemand reality. Thechallengenow istoachievemuchfiner telecommunications, healthcare, andaugmented than everbefore infieldsliketransportation, technologyisexpandingfaster use ofinformation With thedigitalrevolution wellunderway, the you willfindtheirworkasexciting andinspirationalasIdo. that hope I and them, thank to opportunity this take to like would significant the year.the and of I course the over industry and academia from partners students, technicians, scientists, highlights our by made Report contributions Scientific The Leti2019 our nurture established companiesorwiththecreation we ofstartups. to transfer organization, with compatible maturity researchof degree a to technology technologies a as And, wide a integrate and variety ofemerging materialsintofuture generationsofsystems. to in science us position minds will finest that computing the technology—strengths of world- new some by and backed and equipment class is processing research groundbreaking data Our paradigms. secure and transmission to signal entire and processing collection the data across from technologies spectrum, tomorrow’sIT developing is Leti and materialsinanintegratedinterrelated manner. advanced tools and methods to optimize system bricks, components, At system. end Leti, we address the design and technology of simultaneously, characteristics and develop the by determined are level component at emerging are that technologies The advantage: real medd ehoois cos h vle hi, from chain, a is value this Moore than More of era the the In system. to material across technologies embedded ne of the things that makes Leti so unique is that we develop

© Benjamin Zwarts and Technology VP forScience Thomas Ernst My bestregards, LETI 2019ScientificReport Thomas 5 LETI 2019 Scientific Report LETI 2019 Scientific Report

Founded in Committed to Innovation, Leti at a glance 1,850 1967 researchers Leti Creates Differentiating Based in Solutions for its Industrial TECHNOLOGY RESEARCH 800 (Grenoble) 3,100 publications per year France patents in portfolio Partners INSTITUTE with offices in the US (San Francisco) and 10,000 sq. meters cleanroom space, IS0 9001 (Tokyo) eti is a research institute of CEA Tech and have sparked the creation of 64 start-ups. certified since 2000 Japan 100-200-300 mm wafers a recognized global leader in miniaturization Leti and its industrial partners work together technologies. Leti’s teams are focused on through bilateral projects, joint laboratories and L 300 startup created developing solutions that will enable future collaborative research programs. industrial partners 65 information and communication technologies, health and wellness approaches, clean and safe Leti maintains an excellent scientific level by energy production and recovery, sustainable working with the best research teams worldwide, CEA Tech is the technology research branch of the French transport, space exploration and cybersecurity. establishing partnerships with major research Alternative Energies and Atomic Energy Commission (CEA), technology organizations and academic a key player in research, development and innovation in For 50 years, the institute has built long- institutions. Leti is also a member of the Carnot defense & security, nuclear energy, technological research term relationships with its industrial partners, Institutes network*. for industry and fundamental physical and life sciences.

tailoring innovative and differentiating solutions *Carnot Institutes network: French network of 34 institutes to their needs. Its entrepreneurship programs serving innovation in industry. www.cea.fr/english

World-class scientific ou may be wondering just how a “minor” markets have located their R&D divisions in French city like Grenoble became Grenoble. The high concentration of tech- research in the heart Yan internationally-renowned hub for oriented businesses and a strong fabric of more A great place to study of the French Alps technological innovation. Grenoble has a long traditional manufacturing companies have The Shanghai Academic history of excellence in scientific research, but made Grenoble particularly fertile ground for Ranking of World Universities the tipping point was perhaps the advent of the collaborative innovation projects—often funded named Grenoble-Alpes University Minatec micro and nanotechnology innovation No matter how you measure it—from through EU and national instruments—designed no. 1 in France for: campus. Minatec pioneered a groundbreaking to rapidly bring novel concepts from lab to • Computer Science academic publications and patents to cluster model that unites sci-tech stakeholders market. • Electrical & Electronic Engineering startups and job creation—the Greater from education, research, and industry. Its success • Energy Science Grenoble area, known as “Grenoble- has inspired initiatives like the Clinatec biomedical Although Grenoble—a medium-sized city— • Water Resources Engineering Alpes”, is by far one of Europe’s most research center, the GIANT (Grenoble Innovation may not be a European capital, it is a wonderful • Nanoscience & Nanotechnology active and prolific science and technology for Advanced New Technologies) campus place to live. The city center is compact and • Instruments Science & Technology ecosystems. Grenoble may be small, but alliance of academic institutions and research very walkable, placing a wide range of everyday its student and business communities organizations, the EU Nano2022 program to activities within easy reach. The population is Grenoble’s student population of 62,000 are vibrant and very international. And develop a new generation of semiconductors, extremely cosmopolitan. In fact, Grenoble is stands out for its diversity and excellence: the breathtaking mountain environment and, most recently, MIAI (the Multidisciplinary home to the second-largest English-speaking • 42% in science, technology, and offers easy access to outdoor activities Institute in Artificial Intelligence)—all located population in France, second only to Paris. But engineering in Grenoble. Grenoble is also home to top-tier all year round. what people who live in Grenoble consistently • 3,700 PhD candidates academic institutions: Grenoble-Alpes University, rave about is the mountain environment. From • 180 nationalities Grenoble Institute of Technology, and Grenoble downtown Grenoble it is possible to access Ecole de Management have all earned top slots major hiking trails by car within minutes, and the …and launch a career! in the major international university rankings. suburbs (and even the city center) are dotted The Greater Grenoble area is home Finally, international large scientific instruments with trailheads that can be reached by public to a workforce of 340,000: like the European Synchrotron Radiation Facility transportation and, in some cases, on foot. Major • 28,000 engineers (ESRF) and the high-flux neutron beamline at the ski resorts are close enough to make hitting the • 23% management, well above Institute Laue-Langevin (ILL) are just down the slopes for a half a day during the week a reality. the national average of 17% street from Leti in Grenoble’s research district. A dynamic network of sports clubs is available to help newcomers discover all that is on offer. R&D-intensive industries like microelectronics, First place for R&D Second in France nanoelectronics, medtech, energy, and cleantech First in France for for engineering People come to Grenoble to study or conduct R&D jobs jobs are staples of the local economy. And a number research. But they stay for excellent career © Shutterstock large industrial corporations serving international opportunities and top-notch quality of life.

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2019 SCIENTIFIC Highlights REPORT pp. 16–79 — People pp. 80–91 — Collaborations pp. 92–100

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Jean-Baptiste Doré Towards multiqubit structures Digital 5G 5G Program Director

G deployments are rapidly gaining on advanced digital signal processing and traction around the globe, and the software solutions. 5era of cyber-physical systems is here. Traditional market players will draw the In mid-2018 we built a demonstrator contours of tomorrow’s 5G with beyond-state-of-the- integrated systems. However, the art components including automotive, smart cities, utilities, an electronically-steerable smart industry, and other vertical antenna at 26 GHz-28 GHz markets will also have a say. and the associated digital processing, a radio front-end For 5G networks to deliver sufficient module at 60 GHz, and a service quality amid an exponential multi-Gbps digital modem. increase in machines and users, This demonstrator will lead ultra-dense connectivity is a to the deployment of a 5G must. The low-latency responses network integrating a Gbps required for critical applications— Morel © CEA-Leti / Chr. link with mm-wave access on and desired for others—will depend on the the MINATEC campus by end-2019. We are proximity of computing resources to network also addressing 5G power modules, passive © CEA-Leti nodes. Microelectronics and integration components like filters, CMOS integration, technologies will play a key role. and the co-design and co-integration of digital, RF, and antenna technologies. Leti is positioned to run 5G trials and optimize the building blocks of sustainable business Looking ahead, we will explore the use of new Quantum © CEA-Leti applications for its partners. We are also spectrum bands (mm-wave, THz, and optical) computing maintaining a focus on innovative antenna and new network paradigms (non-terrestrial, designs and radio frequency systems built satellite, and vehicular communications). Maud Vinet Quantum Program Director 26GHz antenna eti’s quantum computing research benefits epitaxial layers with an isotopic purity greater from Grenoble, France’s pioneering than 99.992% on 300 mm wafers, at a level Linnovation ecosystem and its historic of quality compatible with standard CMOS synergies between basic and applied research, technology. We also implemented a design from physics lab to circuit fabrication line. In flow (DK Quantum MOS) appropriate for 2018 Leti launched a strategic program to quantum computing that includes all of the address the challenges of large-scale quantum essential design building blocks. In the area computing. of control electronics, we evaluated FD-SOI and demonstrated that local back-biasing Since the program’s inception, we have at low temperatures can compensate for Vt reached some major milestones. First, our increases and enable dynamic tuning of the QuCube project to develop a silicon quantum performance/consumption tradeoff. processor in collaboration with IRIG and Institut Néel won a €14 million ERC Synergy Grant From an EU ecosystem perspective, we in October 2018. We also founded an inter- signed one MOU with the Imec innovation institutes team (CNRS, CEA, UGA) to move cluster in Belgium to support European towards mastering quantum coherence at the economic and strategic sovereignty, with a macroscopic scale to design condensed matter special focus on quantum computing. The devices useful for quantum technologies three RTOs (Imec, FHG, and Leti), are also and large-scale quantum computing. Our willing to cooperate to support the transfer research results included utilizing spin-valley of quantum technologies to industry. coupling to generate electrically-induced spin Finally, we built an industrial ecosystem resonance in Si using solely a gate-induced with existing stakeholders to speed up electrical field. In technology, we created scientific and technological advances and © CEA-Leti a 28Si supply chain used to grow 28silicon tech transfer.

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iDAR (Light Detection and Ranging) mechanical scanning-based LiDARs currently on the has recently emerged as a key enabling > market, as well as newer systems based on MEMS mirrors LiDAR Ltechnology for tomorrow’s sensing and and flash illumination, which are still in the qualification vision systems. The future of LiDAR is on testing stage. the mass market, where it will enable semi- autonomous and autonomous mobility In 2018 the program leveraged expertise in silicon in drones, ADAS, autonomous driving photonics, III-V materials, heterogeneous technologies, systems, robots, and industrial automation. and 3D integration to achieve two major, fully CMOS- This mass-market appeal has garnered compatible advances on the path to fabricating low- hundreds of millions of dollars in investments cost, small-footprint chip-scale LiDAR systems. The in dozens of new companies. However, the first was a LiDAR source utilizing optimized integrated widespread adoption of LiDAR will hinge hybrid III-V materials on silicon single-mode lasers with

on lower system costs and smaller form America © 2019 Optical Society of a fully CMOS-compatible process on large-wafer format. factors. Further research is required to The second was the first-ever demonstration of laser reach these goals while increasing reliability scanning with 17.6° × 3° two-dimensional beam steering and robustness. in the near-infrared spectrum using a SiN integrated circuit containing optical phased arrays. To help its R&D partners stay ahead of the

© CEA-Leti LiDAR curve, Leti launched its strategic Leti’s unique expertise at the crossroads of chip-scale LiDAR for CPS program in 2018. Artist’s rendering of an integrated microelectronics, photonics, and software algorithms OPA. The output beam (white) François Simoens The program is developing agile chip-scale can be steered in two positions the institute at the top of the game towards the LiDAR Program Director LiDARs, which go a step further than the > dimensions (yellow). development of the third generation of LiDAR systems.

As one of the world’s leading institutes Frédéric Heitzmann Leti founding member of AI Program Director for semiconductor technology research Artificial intelligence ambitious new artificial and development with keen insights into intelligence community current and emerging market applications, eti’s artificial intelligence research is Networks Exploiting Hybrid CMOS Non- Leti is helping to build MIAI, the Grenoble- closely intertwined with a new initiative volatile Technologies” will investigate new Alpes University Multidisciplinary Lthat became official in 2019, the architectures based on emerging memory Institute in Artificial Intelligence. Grenoble-Alpes University Multidisciplinary technologies, a field in which Leti scientists Institute in Artificial Intelligence are driving major advances. eti is a founding partner of the newly-established (2019) (MIAI). As a member of MIAI, Leti “Patient Empowerment via a Multidisciplinary Institute in Artificial Intelligence will benefit from opportunities Participatory Health Project” L(MIAI), bringing together academic institutions, for cooperation on embedded will address the potential of AI government research organizations, private-sector AI, healthcare, and core AI algorithms for the processing corporations, and startups around joint research programs technologies. of health data, from data in artificial intelligence. Eric Gaussier, Director of Grenoble collection through to IT lab LIG and coordinator of MIAI, is looking forward More broadly, MIAI aims to extracting value from data to to working with Leti under this exciting new initiative. establish a vibrant AI community make healthcare systems more Gaussier said, “LIG and Leti had previously worked to bring together stakeholders efficient. “Edge Intelligence” together under the PERSYVAL-lab (Pervasive Systems

of all types and sizes, from will tackle the problem of © Spirit and Algorithms) initiative in Grenoble. In terms of artificial large government research © CEA-Leti distributed AI. Finally, “Toward intelligence, Leti’s expertise in hardware and embedded organizations and private-sector corporations Robust and Understandable Neuromorphic architectures is a real differentiator for MIAI.” MIAI officially launched in the spring to startups and schools around joint research Systems” will explore novel neural network PARTNER: activities, networking events, and educational architectures and functions in collaboration MIAI, the Grenoble-Alpes University of 2019. For Leti, membership in MIAI outreach. Leti’s experience bringing new with neuroscience research groups. Multidisciplinary Institute in Artificial will provide opportunities to cooperate technologies from the lab to the market will Intelligence. with academic research labs and tech add value to this burgeoning community. Leti will play a unique role in MIAI, companies on a variety of AI topics. Leti coupling the capabilities of semiconductor OBJECTIVES: Investigate how Leti’s scientist Frédéric Heitzmann said, “Coupling A total of 28 endowed research chairs technologies—Leti’s core area of expertise— semiconductor technologies can be hardware, software, and advanced Learning have been established under MIAI, and with new concepts coming out of academic applied to new AI concepts developed algorithms is one area where we are looking Leti is directly involved in four of them. research labs to address a variety of market by academic research laboratories. for synergies with academic experts in AI”.

Eric Gaussier © MIAI “Hardware for Spike-Coded Neural applications.

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Working to make François Martin Leti scientist and rare-materials expert the electronics industry When we decide whether or not to pursue a technology, we look at the impact critical materials like precious or semi-precious metals and III-V materials more sustainable will have. We either try to reduce the amount of these materials used in our processes or find alternative materials. These efforts are a constant source of The energy and digital revolutions are here, making more sustainable electronics innovation. And the new EU raw materials import laws have caused us to look more important than ever. At Leti, our research focuses on solutions to reduce the at our entire supply chain to identify risks and orient our More than Moore amount of critical materials used in electronics manufacturing and to lower electronic and photonics research strategies accordingly. The goal is to find solutions devices’ energy consumption. Our work encompasses the entire value chain, to materials supply risks in the medium to long term so that the devices we from novel materials implementation techniques like thin-layer transfer, atomic- develop are as sustainable as possible. layer deposition, etching, and local transfer and/or deposition through to energy efficiency, with ultra-low-power solutions and energy harvesting. We also strive to use as little water as possible in our processes, and we recycle our research wafers. Read on to learn more about how our programs and partnerships are supporting a more sustainable electronics industry.

Jean-Pierre Raskin Bernard Comte Karine Samuel Ernesto Quisbert Trujillo Professor of Management Science, Professor of Information and Communication Technical Supervisor, Leti cleanrooms PhD candidate, Leti Grenoble Institute of Technology Technologies, Electronics and Applied Mathematics, UC Louvain (Belgium) We have a comprehensive policy to I am doing my PhD dissertation on reduce the environmental impacts of our design methodology for sustainable The ‘Need for IoT’ project is addressing issues Sometimes the best thinking happens outside cleanrooms now and ensure that we grow IoT devices. As the IoT gains traction, crucial to the sustainability of the electronics of the classroom. I was on a fact-finding trip to sustainably moving forward. We keep a the number of connected devices and industry. The project’s multidisciplinary Burundi in 2014 when I had a realization about particularly close watch over our water the volumes of data circulating will partners—which include Leti—are looking at how deeply technology affects us—for better consumption. We have implemented explode, and today’s design and eco- product lifecycle management from design to and for worse. I was pleased to learn—over measures to reduce the nitrogen content design approaches will reach their limits. end-of-lifecycle issues. Rare materials—which drinks this time—that Thomas Ernst of Leti of our liquid effluent emissions. We also My model includes an environmental will pose a threat to the industry within the shared this view. We decided right then and control silicon emissions. In 2018 and 2019 assessment not only of the IoT device next decade if alternatives are not found—are there to take action, and ENCOS (European we made improvements that drastically itself, but also of the infrastructure that also being addressed. Specifically, the project Nanoelectronics COnsortium on Sustainability) reduced our silicon emissions and started supports it. I will be working with DSYS partners will find solutions to limit or replace was born. Researchers from Grenoble-Alpes collecting and treating the water from our to apply the model to three IoT projects, critical materials like indium, platinum, and University, UC Louvain, and Leti are working washers. Finally, we are already planning where it will be used to improve the gallium in communicating devices and create together under the consortium to make ahead for the arrival of a substantial tradeoff between local (edge devices partnerships between academic researchers tomorrow’s micro and nanoelectronics more amount of new equipment in the coming like sensor systems, relays, base stations, and microelectronics industry stakeholders to sustainable from design to materials to years so that we can continue to mitigate and local servers) and shared resources bring real change and foster agility in research business models, something I feel is vital to the our environmental impacts. (internet and cloud computing). practices and design. future of the industry in Europe.

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Highlights 03 I Technology with the power to improve human health pp. 42–55 I 01 I New advanced materials 04 Innovative devices and architectures and processes, for a power-efficient society pp. 56–67 the fuel of innovation pp.18–29 02 I The virtues of photons 05 I Efficient, reliable interaction

CONTENTS for the connected society pp. 30–41 with complex systems pp. 68–79 02 05 03

01 04 © Shutterstock

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01 Leti’s CoolCube 3D sequential integration technology New advanced materials overcomes major hurdles to market release 20 Sub-10 nm technology: Leti process and materials know-how and processes, leads to new approach to patterning 21 the fuel of innovation Robust 3D hybrid bonding process paves the way toward denser, faster smart imagers 22 Advanced materials and processes are crucial to Leti’s device development and innovation activities. This chapter showcases a selection of the year’s highlights. However, our materials Algorithms enable more accurate electron holography, and processes are also key enablers of the technologies featured in the other chapters of a crucial need for future generations of semiconductor devices 24 this report and, especially, the GeSn epitaxy for laser applications in Chapter 2. This year we Statistical analysis enables dramatic improvement to RRAM reliability 25 made major breakthroughs in 3D sequential integration and hybrid bonding, developed a new approach to advanced lithography, and made promising developments in OxRAM Optically transparent 100%-solid-state inorganic thin-film battery ideal for IoT applications 26 memory and thin-film batteries. None of these advances would have been possible without the development of advanced nanocharacterization techniques suitable for small complex New characterization capabilities for tomorrow’s devices. Looking forward, 2020 will be a big one for advanced SiC substrates, with a major miniaturized microelectronics and memory devices 27 collaboration and pilot just over the horizon.

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Sub-10 nm technology: Leti process and materials know-how leads to new approach to patterning

Guido Rademaker, n a post-Moore’s Law world, the by the spacer deposition thickness. Maxime Argoud cost of continued miniaturization We demonstrated a process Leti scientists Ihas become a fundamental window for BCP alignment using challenge—one that will require both electron beam and optical taking innovative new routes to immersion lithography. A cost-effective sub-10 enhanced performance while nm patterning process maintaining affordability. We also developed advanced metrology techniques to respond flow was successfully

© CEA-Leti Our research addressed a promising to the challenges of the ultra-small demonstrated in the lithography technique—chemo- critical dimensions and high aspect TM First demonstration of Smart Cut over CMOS Low-temperature silicon epitaxy lab and could meet the epitaxial directed self-assembly ratios in the presence of polymers. future needs of CMOS (DSA) of block copolymers (BCP)— These included ultra-sharp tip logic, metal layers, novel to create dense line-space patterns tapping mode AFM; special by surface energy contrast from preparation techniques to prevent memories, photonics, and a chemical template. This allows damage to the polymers during TEM Leti’s CoolCube 3D sequential biosensors. for linewidths in the range of 7 imaging; advanced backscattered nm–20nm, much denser than electron imaging to detect the most advanced patterning nanometric etching residuals and integration technology overcomes THE BREAKTHROUGH: A new chemo-epitaxial techniques currently employed in buried DSA defects; and advanced major hurdles to market release DSA process flow for semiconductor manufacturing. image analysis for extraction of the sub-10 nm linewidth was power spectral density (PSD) of developed and successfully We developed the ACE (Arkema- linewidth roughness (LWR). Claire Fenouillet-Béranger, sequential integration demonstrated the integration of a low- demonstrated. CEA) process flow with Arkema. The Laurent Brunet (3DSI) is a type of temperature SiCO spacer deposited flow consists of a sidewall image Now that we have a better transfer (SIT) process—an advanced understanding of the process flow, Leti scientists 3Dintegration in which at 400 °C in both standard and low- WHY IT MATTERS: devices are fabricated sequentially temperature CMOS FDSOI annealing A wide range of applications patterning technique—followed by we will focus on improvements, on different layers, transferred by process flows—a first. Equivalent require cost-effective ultra- DSA. The idea was to obtain a larger in particular to our control of the With advantages like high low temperature molecular wafer static performance (Ion/Ioff trade-off, low-linewidth patterning. process window by multiplying the spacer morphology and surface interconnect densities bonding, that are stacked on a single SCE, DIBL, access resistance, EOT, pitch and controlling the lateral energies, and implement 3D dimension of the chemical template metrology techniques. and enhanced energy wafer. This approach enables very mobility) was obtained, confirming NEXT STEPS: Fine-tune small 3D contact pitches and yields the potential of SiCO as a low-k and efficiency, 3D sequential the process using state- gains in both power and performance, low-temperature offset spacer for 3D of-the-art fabrication, or “monolithic” integration making it an excellent candidate for sequential integration. Finally, we metrology, and defectivity RESEARCH PARTNERS: holds great promise for heterogeneous material integration, utilized an ingenious BEOL to FEOL measurements. Arkema and Brewer Science for in-memory, neuromorphic, and strategy at the bottom wafer edge (materials); academic research More Moore and More labs LTM (Grenoble-Alpes than Moore devices. quantum computing, as well as for and completed characterization of University) and LCPO (Bordeaux sensor array interfaces. However, ULK/copper iBEOL compared to University); Screen and Applied improvements must be made to thermal treatment. In addition, the Materials (DSA process scale-up) TM several process steps to successfully Smart Cut process was used for Further reading: • “Spacer patterning THE BREAKTHROUGH: bring the technology to the market. the first time ever on a SOI substrate lithography as a new process to induce Breakthroughs in several above a CMOS wafer. block copolymer alignment by chemo- 3DSI process steps. epitaxy,” Proceedings of SPIE Advanced Our research made several advances Lithography (2019). that address 3D sequential low- These advances will help boost A. Paquet, A. Le Pennec, A. Gharbi, WHY IT MATTERS: temperature challenges. We achieved the performance and reliability of T. J. Giammaria, G. Rademaker, © CEA-Leti These advances have made low gate access resistance while 3D sequential integration while M.-L. Pourteau, D. Mariolle, C. Navarro, a major contribution to C. Nicolet, X. Chevalier, K. Sakavuyi, preserving bottom level integrity and reducing costs, ultimately helping DSA of a BCP of L = 30 nm after PMMA readying 3DSI for industrial L. Pain, P. Nealey, R. Tiron. 0 completed full raised source/drain to bring this technology to a wide removal (1 μm x 1 μm) scale-up. silicon epitaxy at 500 °C. We also range of applications. NEXT STEPS: Investigate application-specific stack processes. RESEARCH PARTNERS: STMicroelectronics (interconnect reliability measurement and testing); Screen/LASSE (ns laser annealing); AMAT (low-temperature epitaxy); LAM Research (SiCO spacer deposition)

Further reading: • “Breakthroughs in 3D Sequential technology”, IEEE IEDM 2018. Laurent Brunet, Claire Fenouillet-Béranger, Perrine Batude, Sylvain Beaurepaire. • “Integration of Low-k Low Temperature 400°C SiCO as Offset Spacer in view of 3D Sequential Integration”, SSDM 2018. Claire Fenouillet-Béranger et al.

DSA of a BCP of L0 = 18 nm before PMMA © CEA-Leti removal (500 nm x 500 nm) 20 21 LETI 2019 Scientific Report I Highlights 01 LETI 2019 Scientific Report I Highlights 01

Robust 3D hybrid bonding process paves the way toward denser, faster smart imagers

A wafer-to-wafer hybrid bonding process

delivered outstanding alignment precision, TEM cross-section of 3D stacked image sensor with 8.8 (left) and 1.44 µm pitch (right) and Cu-Cu bonding. Lucile Arnaud performance, and robustness at an All BEoL levels are visible. Leti scientist interconnect pitch of 1.4 µm. a) b)

he potential applications for 3D imaging are virtually THE BREAKTHROUGH: limitless. From manufacturing automation and quality Mature direct hybrid wafer- control through to medicine, 3D imaging is driving to-wafer bonding process T wafer 1 wafer 1 some major shifts in how humans and human-engineered achieves 3D interconnect systems perceive the world. One of the ways to enable the pitch record of 1.4 µm, new architectures that tomorrow’s imagers will require is to enabling new imager achieve finer interconnect pitches—a field in which Leti is wafer 2 wafer 2 architectures. a pioneer.

WHY IT MATTERS: We decided to investigate 3D direct hybrid wafer-to- Finer interconnect pitches wafer with Cu-Cu bonding—a technology that is mature (1 µm) will meet the needs for imager applications at pitches between 5 µm and 10 of new smart imager µm—to better understand the effects of finer pitches on architectures, including imager electrical and optical performance. Working in for 3D vision systems. partnership with STMicroelectronics, we demonstrated that the transition from 9 µm to 1.4 µm did not alter the NEXT STEPS: Explore performance of a 14 megapixel imager. chip-to-wafer bonding and the bonding of Finer pitches create new demands in terms of bonding heterogeneous substrates. surface flatness and alignment. Our research leveraged surface preparation processes developed by Leti suitable for these finer pitches. Leti also completed physico-chemical analyses Pictures taken with 3D stacked image sensor with a resolution of 14 MPixels 1.5 µm pixel pitch, monochrome array. of the bonding interfaces to make sure they were appropriate for the smaller dimensions. Special equipment at Leti supplied by EVG in 2017 ensured precision alignment.

Electrical testing was completed after bonding to validate the alignment, and overall electrical measurements were taken. We also used multi- scale optical interferometry to complete topological characterization. The resulting measurements will be useful in determining the appropriate surface preparation process for different interconnect dimensions and product designs.

• “Fine pitch 3D interconnection with hybrid bonding technology: from process RESEARCH robustness to reliability,” Proceedings of IEEE IRPS 2018. PARTNERS: L. Arnaud, S. Moreau, A. Jouve, I. Jani, D. Lattard , F. Fournel, C. Euvrard, STMicroelectronics, Y. Exbrayat, V. Balan, N. Bresson, S. Lhostis, J. Jourdon, E. Deloffre, S. Guillaumet, EVG A. Farcy, S. Gousseau, M. Arnoux.

• “Hybrid bonding for 3D stacked image sensors: impact of pitch shrinkage on interconnect robustness,” Proceedings of IEEE IEDM 2018. J. Jourdon, S. Lhostis, S. Moreau, J. Chossat, M. Arnoux, C. Sart, Y Henrion, P. Lamontagne, L. Arnaud, N. Bresson, V. Balan, C. Euvrard, Y. Exbrayat, D. Scevola, E. Deloffre, S. Mermoz, A. Martin, H. Bilgen, F. Andre, C. Charles, D. Bouchu, A. Farcy, S. Guillaumet, A. Jouve, H. Fremont, S. Cheramy.

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A B Statistical analysis enables dramatic improvement to Resistive RAM (RRAM) reliability

Gabriel Molas oday’s data-centric computing the programming energy to achieve © CEA-Leti Leti scientist has made energy consumption— a substantial increase in performance. whether it is for data transfer Maximum endurance was improved by Experimental and simulated map of the T (A) between the logic and memory blocks approximately 2 decades, ensuring a conduction band in 2.2 nm InGaN quantum or for data storage—a major issue. With stable median window margin at 107 wells in GaN accounting for the presence or C If Resistive RAM (RRAM) dopants and piezoelectric fields. is to become the memory advantages like speed, endurance, cycles that was maintained at 95% after (B) Magnetic map of a MRAM device. scalability, and compatibility with 106 cycles at 50μA. A specific program (C) Model of a MoS2 monolayer compared to of choice for tomorrow’s integration into the back end of line verification sequence was employed to experimental maps of the electric field and computing systems, and in dense crossbar or 3D vertical achieve reliability of more than 99.99% charge density measured by high-resolution electron holography. reliability must be memory arrays, RRAM could break with acceptable latency. This level improved dramatically. through the memory bottleneck, but of performance meets the needs of Optimized programming only if it can be made more reliable. storage-class applications. Finally, we patterns and programming implemented aggressive optimized We studied RRAM arrays (in particular patterns and specific circuits to bring Algorithms enable more accurate electron energy have made major oxide-based RRAM, also referred to energy consumption down to sub-pJ progress toward reliable as OxRAM) using statistical analysis. levels, opening the door to low power holography, a crucial need for future RRAM and oxide-based Specifically, we looked at the applications. RRAM (OxRAM). physical mechanisms that underpin generations of semiconductor devices endurance failure and came up with a Leti’s leadership in emerging resistive methodology to effectively optimize memory, from materials through to David Cooper n a semiconductor device, the availability of state-of-the-art TEMs, the memory stack for the target integration, and the institute’s 200 performance requirements. We also mm and 300 mm cleanrooms played Leti scientist internal fields—which control we developed and introduced novel electron movement and mobility— reconstruction algorithms combined developed a model for predictive an important role in our research. We I extrapolation. This provided us with a will continue to take full advantage of are essentially the working parts. with microscope automation to To understand the properties of significantly improve the capabilities preliminary understanding of the failure Leti’s circuit design, modelling, testing, Electron holography can THE BREAKTHROUGH: mechanisms at work. and integration capabilities to develop now deliver sub-nanometer a device, information is needed of electron holography. A substantial improvement to about the distribution of these OxRAM and RRAM reliability. RRAM-plus-selector solutions for high- resolution due to advanced fields. Powerful transmission Specifically, we wrote software Next, we made improvements to the density memory arrays for storage- reconstruction methods programming patterns and tweaked class and computing memory. electron microscopes (TEMs) can to control a double-aberration- WHY IT MATTERS: and computer-controlled measure these at high-resolution. corrected TEM so that large stacks of Reliable RRAM has the microscopes, opening However, given the increasingly electron holograms could be acquired potential to break through tiny dimensions of devices and combined. Software was written RESEARCH PARTNERS: the door to new strain the memory bottleneck in IMEP-LaHC (CNRS); IM2NP (Universities of Aix-Marseille and Toulon) and dopant analysis currently being developed—2 to correct microscope aberrations computing. nm for LED quantum wells—even as well as drifts in the specimen, Further reading: • “Hybrid-RRAM Towards Next Generation of Non-volatile Memory: capabilities. higher spatial resolutions and electron beam, and biprism. We Coupling of Oxygen Vacancies and Metal Ions”, Advanced Electronic Materials, 1800658, NEXT STEPS: Co-integrate 2018. Cécile Nail, Gilbert Sassine, Philippe Blaise, Benoit Sklenard, Rémy Gassilloud, Aurélie sensitivities are needed to address then implemented novel hologram RRAM with a back-end Marty, Marc Veillerot, Christophe Vallée, Etienne Nowak, Gabriel Molas. the semiconductor industry’s reconstruction algorithms that again selector to achieve dense • “Novel Computing Method for Short Programming Time and Low Energy Consumption THE BREAKTHROUGH: development needs. doubled the spatial resolution. memory arrays. in HfO2 Based RRAM Arrays”, IEEE Journal of the Electron Device Society, 6, pp. 696-702, Improved spatial resolution, 2018. Gilbert Sassine, Carlo Cagli, Jean-François Nodin, Gabriel Molas, Etienne Nowak.

high-sensitivity field mapping Our research, which focused This enhanced technique is already compatible with latest- on improvements to electron being used on a daily basis to generation semiconductor holography, was part of the broader measure the dopant fields in tunnel devices. ERC Holoview project to develop junctions, the piezoelectric fields atomic-resolution field mapping. in LEDs, and the magnetic fields in

WHY IT MATTERS: TEMs are becoming increasingly MRAM devices; the measurement of It is now possible to powerful, making computer control electrostatic potential in a monolayer characterize the “moving of these microscopes crucial to fully of MoS2 was also demonstrated. The parts” of even the tiniest utilizing their potential. Building next step will be to use the technique devices. upon Leti’s extensive experience on working devices operated in situ with field mapping and the in the TEM. NEXT STEPS: Conduct in situ TEM observations of working devices. RESEARCH PARTNERS: Spintec, EPFL, CNRS-CRHEA

Further reading: • “Direct comparison of off-axis holography and differential phase contrast for the mapping of electric fields in semiconductors by transmission electron microscopy”, Ultramicroscopy 198, 58-72 (2019). 4KB RRAM array map: A red dot indicates that the cell was not programmed Benedikt Haas, Jean-Luc Rouvière, Victor Boureau, Remy Berthier, David Cooper. efficiently (cell resistance too far from target value); a blue dot indicates • “Off-axis electron holography combining summation of hologram series with double- Successful programming. Improved programming increases the programming exposure phase-shifting: theory and application”, Ultramicroscopy 193, 52-63 (2018). yield with respect to the standard programming scheme (single pulse). With Victor Boureau, Robert McLeod, Benjamin Mayall, David Cooper. the optimized programming solution, failures are minimal.

24 25 LETI 2019 Scientific Report I Highlights 01 LETI 2019 Scientific Report I Highlights 01

New characterization capabilities for tomorrow’s miniaturized microelectronics and memory devices Zineb Saghi, Jean-Paul Barnes s device architectures to provide a comprehensive Leti scientists become increasingly complex morphological and chemical and heterogeneous, more analysis of an arsenic-doped silicon (a) Top grid structure A and (b) cross-section accurate 3D characterization is fin-shaped structure. Electron characterizations of A multi-technique approach required at a variety of length tomography (ET) is routinely transparent TFBs using and smart algorithms scales. Combining techniques that employed for the 3D structural SEM (left) and elemental produce reliable morphological and morphological assessment EDS mapping (right). are driving advances in information with ones that supply of semiconductor devices (in Layers of interest and nanocharacterization elements are indicated in compositional information is crucial HAADF-STEM mode). The state-

© CEA-Leti the figures. that will benefit the to reducing measurement artefacts of-the-art microscopes at the CEA semiconductor industry. and delivering robust 3D data. Grenoble nanocharacterization Actual photograph of a 25 × 25 mm2 transparent thin-film battery (TFB). platform were used to extend We explored how time-of-flight ET to spectroscopic modes to THE BREAKTHROUGH: secondary ion mass spectrometry deliver valuable 3D chemical A correlative, multi- (ToF-SIMS) and atomic force information at the nanoscale. To Optically transparent 100%-solid- technique approach to 3D microscopy (AFM) can be combined reduce the long exposure times chemical and morphological to provide accurate 3D chemical and high beam currents this state inorganic thin-film battery ideal reconstructions. composition of a GaAs/SiO2 technique requires, we optimized heterostructure by factoring in the the acquisition parameters for IoT applications WHY IT MATTERS: topography of the sample. Using and developed sophisticated Nanoscale 3D chemical this approach, the 3D compositional tomography algorithms, including Sami Oukassi rends like the Internet of variations on the electrode analysis can now be used data morphology can be corrected compressed sensing algorithms Leti scientist Things and wearables are thickness balance, and even the for complex structures such and piezoelectric, resistance, that can effectively leverage prior Tdriving the emergence of implementation of the approach on as phase-change memory mechanical, and other properties information about the sample. a wide range of new electronic ultra-thin transparent substrates. devices, gate-all-around can be correlated with composition. The technique performed better An award-winning* products, from implantable medical stacked-nanowire FETs, and than conventional approaches on advance in lithium-ion devices to environmental monitoring The battery produced obtained lab GaAs-based heterostructure For characterization at smaller chemically-sensitive datasets. sensors. Conventional batteries results with superior electro-optical batteries could lead to devices. scales, we showed how high angle cannot be integrated effectively into performance (60% transmission, annular dark field scanning TEM The approach developed will be of smaller, lighter, longer the architectures of these often tiny 0.15 mAh capacity at C/2). Given its NEXT STEPS: Work with (HAADF-STEM) tomography and interest to microelectronics-industry lasting, and more flexible devices. In addition, IoT devices are excellent performance and flexibility, NeuroSpin to establish energy dispersive X-ray (EDX)- stakeholders and will also be used power sources that can be often located in remote or hard-to- this technology will help broaden a new state-of-the art STEM tomography can be coupled in other CEA research programs. seamlessly integrated into reach locations, so they have to be the scope of possible form factors in electron tomography IoT devices. able to run for a very long time off and integration schemes. and broaden the field of of their own internal power sources. RESEARCH PARTNERS: potential applications. NeuroSpin, CosmoStat, Arizona State University, INSA Lyon, CNRS-LTM This has created a pressing need We are already investigating a variety for a long-lasting, cost-effective of approaches to increasing areal Further reading: • “Correlative HAADF-STEM and EDX-STEM Tomography for the 3D THE BREAKTHROUGH: power source that can be seamlessly storage capacity, including further Morphological and Elemental Analysis of FinFET Semiconductor Devices,” Microscopy and The fabrication of optically Microanalysis, 24(S1), 388-389 (2018). integrated into the final product improving the electrode material’s J. Sorel, M. Jacob, T. Sanders, A. Grenier, R. Pinheiro, F. Mazen, Z. Saghi. transparent 100%-solid-state while performing an additional microstructure and stacking multiple • “Combined ToF-SIMS and AFM protocol for accurate 3D chemical analysis and data inorganic thin-film batteries structural function. devices. The TFB performance visualization,” Journal of Vacuum Science & Technology B 36, 03F122 (2018). capable of delivering we obtained is compatible with M. Moreno, I. Mouton, N. Chevalier, J. P. Barnes, F. Bassani, B. Gautier. excellent electrochemical We produced an optically integration into wearable electronics, performance. transparent solid-state inorganic imperceptible electronics, electronic thin film battery to respond to the skin, and smart eyewear. HAADF-STEM EDX-STEM WHY IT MATTERS: power needs of new and emerging RMS roughness 3nm No 3 3 We developed advanced electronic devices. Our approach *IDTechEX 2019 “Best Technical Development Mean cluster size 15 nm 20 nm within Energy Storage Award” microfabrication techniques involved photolithography and Implantation depth No 20 nm effective on hygroscopic etching process blocks developed lithium-based materials that specifically for lithium-based 3D morphological and elemental are compatible with standard materials on existing MEMS analysis of an As-doped Si structure microelectronics-industry production equipment. These new RESEARCH PARTNERS: by correlative HAADF-STEM and EDX-STEM tomography. processes. processes address the hygroscopic n/a aspect of the materials during Further reading: • “Transparent Thin Film NEXT STEPS: Increase areal and after fabrication. In addition, Solid-State Lithium Ion Batteries,” energy storage without a versatile architecture will enable ACS Applied Materials & Interfaces 2019, compromising the batteries’ 11, 1. further developments, such as S. Oukassi, L. Baggetto, C. Dubarry, L. Le optical characteristics. optimized pattern design, stacks Van-Jodin, S. Poncet, R. Salot. © CEA-Leti containing multiple devices, HAADF-STEM tomography EDX-STEM tomography

26 27 LETI 2019 Scientific Report I Highlights 01 LETI 2019 Scientific Report I Highlights 01

Market news from our R&D partners

Soitec announces joint development program with Applied Materials on next- generation silicon carbide substrates

Program aims to provide technology and products to improve the performance and availability of silicon carbide to address surging demand from electric vehicles, telecommunication and industrial applications. Bernin, France, November 18th, 2019 — Soitec (Euronext Paris), an industry leader in designing and manufacturing innovative semiconductor materials, announced a joint development program with Applied Materials on next- generation silicon carbide substrates. Demand for silicon carbide-based chips has been rising, particularly in electric vehicles, telecommunication and industrial applications; however, adoption has been limited due to challenges related to supply, yield and cost of silicon carbide substrates. Soitec will be working with Applied Materials to develop substrates that can overcome these challenges and bring increased value to the industry. The development program will combine Soitec’s leadership in engineered substrates with that of Applied Materials, the leader in materials engineering solutions (…) Under the development program, the companies will install a silicon carbide engineered substrate pilot line at the Substrate Innovation Center located at CEA-Leti. The line is expected to be operational by the first half of © Soitec 2020, with the goal of producing silicon carbide wafer samples using Soitec’s TM Smart Cut technology in the second half of 2020. Learn more: https://bit.ly/2Olj5No

CEA-Leti extends 300mm wafer line and adds avenues for developing disruptive memory, photonics, 3D and quantum technologies

Execution relies on CEA-Leti’s fully implemented technology with module-level innovations & devices and their architectures.

SAN FRANCISCO, CA – Dec. 3, 2018 – Leti, a research institute at CEA Tech, today announced during IEDM an extension of its 300mm silicon-based wafer line to open new R&D avenues for its industrial partners. This Jayet © CEA-Pierre extension will allow new innovative technological modules to be inserted in, or made compatible with, industrial flows up to completely pioneered technology routes that enable edge AI, HPC, in memory computing, photonics, Learn more: power electronics and other high-end applications. https://bit.ly/2OljKOS

28 29 LETI 2019 Scientific Report LETI 2019 Scientific Report © Shutterstock

02 Lasing in high-Sn-content germanium alloys obtained The virtues of photons up to 230 K, bringing a room temperature laser within reach 32 New long-wave infrared chemical-sensing platform for the connected society could expand applications and bring costs down 33

From the terahertz band to X-rays, photonic technologies generate, emit, detect, collect, transmit, High-yield manufacturing of low-cost quantum cascade lasers within reach 34 modulate, and amplify photon beams. Behind the science lies an exciting and rapidly-growing field that is closely intertwined with our day-to-day lives. Photons are present in everything from lighting, imaging, Leti detector could bring advanced imaging displays, and land transportation to fiber optic data transmission, medical diagnostics, environmental to European Space Agency observation mission 36 monitoring, industrial processes, and aerospace. Free-space optical communications and atmospheric LiDAR to benefit from microlensed HgCdTe APDs 37 This year’s highlights represent a fraction of what Leti is doing in photonics. Our scientists are creating High-performance silver dielectric interference technologies that allow us to observe phenomena in the terahertz, infrared, and visible wavelengths with filters create new RGBIR imaging capabilities 38 unrivalled degrees of precision and developing new generations of ultra-compact environmental sensors that leverage the power of miniaturization and merge legacy infrared technology with the latest silicon Antenna-coupled microbolometer arrays bring THz imagers to new levels of performance 39 microelectronics fabrication processes.

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Lasing in high-Sn-content germanium alloys obtained up to 230 K, bringing a room temperature laser within reach

1 2 3

(1) Tilted SEM image of GeSn 16% heterostructure micro-disk cavity (1). (2) Tilted SEM image of GeSn heterostructure defectless photonic crystal cavity (4). New long-wave infrared chemical- 4 (3) Tilted SEM image of GeSn heterostructure H photonic crystal cavity. © CEA-Leti sensing platform could expand Long-wave infrared multiplexer integrated circuit. © CEA-Leti Vincent Reboud, rom laser-based sensors the running to overcome silicon’s applications and bring costs down Jean-Michel Hartmann for industrial, automotive, limitations. Thanks to recent Leti scientists Fenvironmental, and medical progress in chemical vapor deposition (CVD), it is now possible applications through to short-range Jean-Marc Fédéli as detection technologies are we designed, fabricated, and optical communications for data to incorporate substantial amounts Leti scientist utilized to ensure health, safety, characterized array waveguide of tin (Sn) into the Ge crystalline Obtaining a high crystalline centers, lasers are in high demand. and regulatory compliance in a grating (AWG) devices with arrays Tomorrow’s laser-based devices will matrix. And, if the conditions are G quality tin-germanium wide range of fields, from industry and of QCL sources to simultaneously right—high Sn content and low require a high level of integration Leti’s leadership in transportation to healthcare, defense, detect multiple gases. The design heterostructure is one of residual compressive strain—these and, to keep product costs down, and environmental monitoring. The of the AWG in the mid-IR range the keys to efficient MIR heterostructures are efficient light silicon germanium drove they must be compatible with cost-effective miniaturization of was well-conceived, and the device emitters. a major advance in gas light sources for integrated CMOS foundries. gas sensors is a prerequisite to the obtained almost flat transmission optical sensing and data sensing technology that development of solutions for these over a full 200 cm-1 operational range We used step-graded GeSn buffers transmission. Silicon photonics presents the could enable multi-gas markets. with peak-to-valley modulation of -5 advantages of being fully CMOS to grow homogeneous and high- detection and analysis at dB. These results enable operation crystalline-quality GeSn layers over compatible. However, silicon’s indirect Given the recent advances in at wavelengths beyond 8 µm, where the entire 200 mm wafer surface. a cost compatible with THE BREAKTHROUGH: and relatively high bandgap limits its integrated silicon photonics and gases like ammonia, acetone, ozone, Lasing was achieved from 25 K the needs of industry, First-ever demonstration usefulness for light emission functions. the advent of efficient quantum and benzene can be detected. to 230 K in microdisk cavities at of lasing in high-Sn- Group-IV lasers are garnering interest healthcare, defense, and cascade lasers, we felt the time was wavelengths around 3.1 µm, with content SiGeSn/GeSn as an alternative to the complex environmental monitoring. right to investigate integration on This advance opens the door to 16% of Sn in the optically active heterostructures up to 230 K. integration of III-V lasers on silicon. planar Si substrates as a path to new more advanced gas sensors at a GeSn layers and SiGeSn barriers. To meet the needs of tomorrow’s gas sensors selective and sensitive cost compatible with the demands These emission wavelengths bode WHY IT MATTERS: applications, these Group-IV lasers enough to be used for multi-gas of numerous markets. The next well for IR sensing applications. This demonstration marks a must be able to operate at substantially THE BREAKTHROUGH: sensing and atmosphere analysis. challenge will be to develop even major advance toward room higher temperatures. We also observed lasing in GeSn Successful demonstration of more compact devices built on suspended photonic crystal temperature lasers into SWIR a multiplexer with up to 63 Using a new platform of Ge cores Ge-core waveguides. However, the cavities—proof that the optical and MIR Si photonic systems Germanium (Ge)-based materials, input channels in the LWIR clad in thick SiGe layers developed upper and lower cladding could gains obtained are robust. for future sensing and data also CMOS-compatible, are in with integrated SiGe-clad Ge based on Leti’s deep knowledge of be improved, and chalcogenide transmission solutions. waveguides. the epitaxial growth and reactive materials developed at Leti could RESEARCH PARTNERS: ion etching of SiGe compounds, play a key role. NEXT STEPS: Nicolas Pauc, Vincent Calvo, IRIG (formerly INAC); Paul Scherrer WHY IT MATTERS: Reduce the laser threshold, Institue Villigen (Switzerland), ETH Zurich (Switzerland) This advance will enable operation at wavelengths increase lasing operating Further reading: • “GeSn heterostructure micro-disk laser operating at 230 K,” Optics temperature, and Express 26, 32500 (2018). Selected as “Editor’s Pick.” Q. M. Thai et al. beyond 8 µm, creating the electrically inject carriers • “Growth and characterization of SiGeSn pseudomorphic layers on 200mm Ge virtual potential to detect gases like into high-Sn-content GeSn substrates,” Semicond. Sci. Technol. 33, 124011 (2018). R. Khazaka et al. ammonia, acetone, ozone, • “2D hexagonal photonic crystal GeSn laser with 16% Sn content,” Applied Physics Letters heterostructure layers. 113, 051104 (2018). Q. M. Thai et al. and benzene. RESEARCH PARTNERS: • “Impact of Pt on the phase formation sequence, morphology, and electrical properties n/a of Ni(Pt)/Ge0.9 Sn0.1 system during solid-state reaction,” Journal of Applied Physics 124, NEXT STEPS: 085305 (2018). A. Quintero et al. Further reading: • “Mid-Infrared (Mid-IR) Silicon-Based Photonics,” Proceedings of the • “Growth and structural properties of step-graded, high Sn content GeSn layers on Ge,” Explore Ge photonics— IEEE (Dec. 2018). J.-M. Fedeli, S. Nicoletti. Semicond. Sci. Technol. 32, 094006 (2017). J. Aubin et al. the next paradigm—with • “Ge/SiGe photonic devices for the long mid-infrared,” Proceedings of SPIE 10686, • “Optically pumped GeSn micro-disks with 16 % Sn lasing at 3.1 µm up to 180K,” Applied chalcogenide-clad Ge cores. Silicon Photonics: From Fundamental Research to Manufacturing (May 22, 2018). Physics Letters 111, 092101 (2017). V. Reboud et al. J.-M. Fédéli, P. Labeye, A. Marchant, O. Lartigue, M. Fournier, J. M. Hartmann.

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High-yield manufacturing of QCLs on 200 mm silicon wafer being tested on prober station. All lasers are electro-optically low-cost quantum cascade characterized at wafer level. lasers within reach

Jean-Guillaume Quantum cascade lasers are powerful tools in Coutard mid-infrared spectroscopy, which is employed in a Leti scientist vast range of applications from gas monitoring to medicine. Leti research has overcome a major barrier to massive rollout of the technology: cost.

uantum cascade laser (QCL) sources use the mid- THE BREAKTHROUGH: infrared range, where molecules’ absorption peaks Fabrication and testing are highest. This “chemical footprint” is the most of quantum cascade laser Q efficient way to identify a substance, making QCL akey sources on a CMOS line enabling technology for spectroscopic measurements of with excellent yields. virtually all kinds. The main barrier to the massive rollout of QCL technology is the high manufacturing cost of the WHY IT MATTERS: laser sources. This advance will bring today’s costs down from Utilizing standard microelectronics-industry CMOS thousands of euros for processes is one way to bring QCL costs down. In addition, a single InP QCL to just manufacturing on silicon makes it possible to co-integrate a few euros, creating mid-infrared sources with Si waveguides to obtain opportunities on a very miniaturized spectroscopic devices fully integrated on a wide range of markets. planar substrate.

NEXT STEPS: Improve We developed a 100% CMOS-compatible process flow and performance through an automated wafer-level electro-optical testing process coupling heating with the step on a prober station. We fabricated and measured Si substrate and coupling thousands of devices showing average threshold current light between the laser densities from 2.5 kA/cm² to 3 kA/cm² with a relative and photonic function on dispersion of around 5%. The devices’ optical power was silicon. measured at 1 mW at ambient temperature for a 1.5% duty cycle. FWHM was measured at 0.16 cm-1 in the same operating conditions. Our DFB QCL sources operated at 7.4 µm on a silicon substrate on a 200 mm CMOS/MEMS pilot line. In short, we achieved state-of-the-art performance for this fabrication run, in line with the performance of the much costlier QCL sources fabricated on an InP substrate. And, with yields of up to 98% our work has strong potential to enable affordable QCL sources. © CEA-Leti

Publication forthcoming

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Free-space optical communications and atmospheric LiDAR to benefit from microlensed HgCdTe APDs

Johan Rothman gCdTe avalanche photodiodes We drew on Leti’s deep have the capacity to observe understanding of optimized optical Leti scientist Hmeso-photonic light at the coupling for FSO communication infrared wavelength, making it a and atmospheric LiDAR to develop Leti leveraged its in-depth prime candidate for atmospheric a reproducible process for shaping LiDAR, which is used to survey free-form refractive micro-optical

© ESA/Herschel Gould Belt Survey © ESA/Herschel knowledge of photonics and elements in the high-index substrate optical systems to develop a greenhouse gases in the atmosphere, and for the free-space optical (FSO) of HgCdTe detectors. We obtained reproducible process that will communications that will enable good spatial alignment with the bring higher bandwidths and tomorrow’s satellite constellations to photodetector so that light can be Leti detector could bring lower noise to tomorrow’s provide global telecommunications coupled over a large active optical optical communication and coverage. Both of these applications area onto small detectors with low advanced imaging to European LiDAR systems. demand the highest levels of dark noise. performance. Space Agency observation The process is currently being used to THE BREAKTHROUGH: Our research addressed the coupling develop groundbreaking detectors © ESA/Herschel Gould Belt Survey © ESA/Herschel A precise, reproducible of light onto the photodetector, an for FSO and LiDAR, where the goal mission process for shaping free- issue that affects meso-photonic is to be able to form monolithically- form refractive micro-optical applications in particular, where the integrated microlenses in HgCdTe elements in the high-index objective is to transfer or capture APDs. Once these advances are Laurent Dussopt he millimeter (mm) and sub- of radiation simultaneously—a substrate of HgCdTe information contained in just a few mature, they should benefit a Leti scientist mm wave frequency bands major advance over unpolarized detectors. photons—sometimes just one. Here, wider range of applications in Tare useful in astrophysics or single-polarization detectors, most of the detector’s light must be materials science, microelectronics, and cosmology research. “Cosmic which require external polarization WHY IT MATTERS: coupled in conditions where the size biomedicine, and space. Further rays,” which contain traces of the selection devices. It could also help This advance will bring of the detector has been reduced as developments are in progress as A millimeter-wave detector early evolution of our universe, make imaging instruments more the technology in line with much as possible to minimize thermal part of the EU Horizon 2020 project developed by Leti is in are made up of diffuse radiation sensitive (with operation at very low specifications for emerging and photonic dark noise. HOLDON. the running for ESA’s 2030 in the millimeter-wave spectrum. temperatures), accurate, compact, technologies like FSO and And dust clouds in our galaxy and lightweight, and energy efficient. atmospheric LiDAR. space observation mission, RESEARCH PARTNERS: SPICA. The detector could neighboring galaxies, which contain Finally, we developed 16 x 16 pixel Further CNES, ESA, Airbus DS, Mynaric, Ecole Polytechnique make the satellite’s B-BOP information on star formation arrays representative of future NEXT STEPS: that can provide insights into how imager focal planes. developments to enable larger Further reading: • “HgCdTe APDs detector developments at CEA/Leti for atmospheric polarimetric imager two galaxies evolve, are opaque in the lens areas, microlens arrays, LiDAR and free space optical communication”, Proc. SPIE 11180, 111803S (2019). J. Rothman et al. times more sensitive than infrared and visible wavelengths but This development leveraged the and new functions machined • “HgCdTe APDs for free space optical communications”, Proc. SPIE 10524, 1052411 (2018). instruments on board the can be observed in the millimeter knowledge we have continued to into the HgCdTe APDs. J. Rothman et al. agency’s Herschel mission. and sub-millimeter frequency accumulate since the European bands. Space Agency’s Herschel space observatory. Our results supported THE BREAKTHROUGH: Our lab worked with fellow CEA our proposal for a sub-mm imaging A millimeter-wave cryogenic lab IRFU to design a novel silicon instrument for the SPICA (SPace bolometer with dual bolometer detector for imaging IR telescope for Cosmology and polarization detection. at millimeter wavelengths in Astrophysics) observatory satellite, telescopes used in astrophysics which has been shortlisted by ESA WHY IT MATTERS: and radio-astronomy. The for a mission to be launched in the This advance will enable detector, manufactured in Leti’s early 2030s. Our detectors will be at high-performance detectors 200 mm cleanrooms, offers the the heart of the B-BOP polarimetric for astrophysics and advantage of measuring the imager, one of the satellite’s three cosmology research. two polarization components instruments.

NEXT STEPS: Develop a sub-millimeter-wave RESEARCH PARTNERS: polarimetric imager for the IRFU (CEA Institute of Research into the Fundamental Laws SPICA space telescope. of the Universe). Further reading: • “Fabrication and characterization of cooled silicon bolometers for mm wave detection”, SPIE Astronomical Telescopes + Instrumentation Conference, Austin, TX, June 10-15, 2018. V. Goudon et al. • “Superconducting Ti/TiN Thin Films for mm-Wave Absorption”, Journal of Low Temperature Physics, 193:655–660, 2018. A. Aliane et al. © Shutterstock

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High-performance silver dielectric Antenna-coupled microbolometer interference filters create new RGBIR arrays bring THz imagers to new imaging capabilities levels of performance

GBIR imaging combines high- Special filter arrays are placed on top Hz imagers have the capacity dedicated THz vacuum package. Laurent Frey performance color imaging with of the image sensor so that several Jérôme Meilhan to enhance performance in The array is run by compact, Leti scientist up to several near-IR channels spectral channels can be detected Leti scientist R a number of detection and efficient electronics. With an MDP and offers filter mosaics with small simultaneously. Specifically, we drew T imaging situations, from standoff under 10 pW, the array performs pixels. This gives the technology on Leti’s materials characterization imaging used in security screening to better than the state of the art in some unique capabilities. For expertise and built on previous Leti researchers have The number of potential medical imaging, food quality control, room-temperature THz imagers in example, the fusion of RGB and IR research to come up with new filter applications for RGBIR put their modelling and and anti-counterfeiting measures. the THz range. images can bring image dehazing, architectures and improve the optical design know-how to work, With advantages like the ability to imaging is virtually skin smoothing, shadow detection, constants of the silver by working on penetrate non-metallic, nonpolar Our imager offers a number limitless. However, even and object segmentation to the interfaces between the silver and successfully demonstrating materials, high sensitivity to water of benefits that will make it an the best RGB organic enhanced photography. Additionally, dielectric layers. a fully-integrated THz content, spatial resolution ten times attractive solution for imaging and the availability of both types of imager that could meet resists can only detect that of millimeter-wave radiation, and spectroscopy applications. Standard images means that a single imager For the first time ever, we up to three channels and the needs of a wide range unique spectral fingerprints for many Si technology keeps production can provide both day and night vision. demonstrated high transmission rates of imaging and detection substances, THz technology offers costs down while maintaining high require an IR-cut filter that For automotive applications, an IR (around 80%) on thin film multilayer applications from security vast potential. However, the market yields; a monolithic design ensures makes implementation LED can illuminate the passenger optical filters with small pixels (as is lacking imagers that are compact, a compact form factor; a 2D array on very small pixels cabin while the IR channel handles small as 1.4 µm) using a single-filter to medicine. easy to use, sensitive, and affordable. configuration could enable a wide detection in low-light conditions. approach that consists of stacks of challenging. Leti’s FoV and limit the need for raster Finally, the technology can enhance alternating Ag and dielectric layers remarkable filter helps We drew on Leti’s modelling know- scanning; and, because it operates endoscopy systems, with their tiny and that is suitable for four or more solve this problem. how and the high-end imager at room temperature, the detector cameras and active imaging systems, spectral channels (typically RGB and THE BREAKTHROUGH: expertise of our partner, I2S, to is cost-effective to run. Finally, by using the IR channel to identify IR). Our next step will be to investigate A fully-integrated THz imager optimize a 320x240 pixel antenna- if pixels are processed above a tissues and organs with specific the complete etching of the full with minimum detectable coupled microbolometer array CMOS readout integrated circuit, spectral signatures. multilayer stack with close-to-vertical power under 10 pW in real- THE BREAKTHROUGH: with a 50 µm pitch, which we then the imager can provide real-time edges at the pixel level to enable time imaging conditions. The first-ever demonstration successfully integrated into a acquisition. of high-transmission silver/ The focus of our research was thin-film filterless pixels and improve imager optical filters for advanced imaging sensitivity. The technology could also WHY IT MATTERS: dielectric multilayer filters Compact, easy-to-use, highly- patterned on small pixels applications. Color image sensors be combined with amorphous silicon RESEARCH PARTNERS: are made up of CCD or CMOS multilayers to obtain combined color sensitive THz imagers will compatible with four-plus respond to the needs of a I2S (high-end imager operation) channels. photodiode arrays with megapixel and depth ranging and develop resolution fabricated on silicon chips. multispectral applications. wide range of markets. Further reading: • “Shape-from-focus for real-time terahertz 3D imaging”, Opt. Lett., OL, vol. 44, no. 3, p. 483‑486, Feb. 2019. J.-B. Perraud, J.-P. Guillet, O. Redon, M. Hamdi, F. Simoens, P. Mounaix. WHY IT MATTERS: NEXT STEPS: This technology provides high- • “Towards industrial applications of terahertz real-time imaging”, in Terahertz, RF, RESEARCH PARTNERS: Enable sourceless passive Millimeter, and Submillimeter-Wave Technology and Applications XI, 2018, vol. 10531, p. performance color imaging STMicroelectronics for the 2011 research that contributed to this detection capabilities to 105310T. F. Simoens et al. advance. in an unprecedentedly small further simplify THz imaging • “Uncooled Terahertz real-time imaging 2D arrays developed at LETI: present status and form factor for applications perspectives”, in Micro- and Nanotechnology Sensors, Systems, and Applications IX, 2017, Further reading: • “High-performance silver-dielectric interference filters for RGBIR systems and encourage vol. 10194, p. 101942N. in photography, automotive imaging”, Optics Letters 43, 1355 (2018). their development. F. Simoens et al. perception, and medical Laurent Frey, Lilian Masarotto, Loubna El Melhaoui, Sophie Verrun, Stéphane Minoret, imaging. Guillaume Rodriguez, Agathe André, Frédéric Ritton, Pascale Parrein.

Determine the Example of IR image that a camera sensor TZcam (I2S) TeraHertz camera equipped with NEXT STEPS: optics designed specifically for the THz including Ag filters could potentially feasibility of etching the full range and offering a wide aperture (F/0.8). multilayer stack with vertical capture (source: EPFL). The camera is fitted with a THz sensor based on antenna-coupled bolometers developed edges to eliminate pixel-level at Leti. filters and increase sensitivity. Sensor pictured after packaging and assembly on the electronic circuit board. © Clement Fredembach © CEA-Leti

38 39 LETI 2019 Scientific Report I Highlights 02 LETI 2019 Scientific Report I Highlights 02

Market news from our R&D partners

Scintil Photonics enables better- performing and more cost-effective optical communications

Startup Scintil Photonics, a spinoff of Leti, a CEA Tech institute, is developing optical communications technologies capable of achieving speeds of 800 Gbit/s at a very competitive cost. The company won the Bpifrance i-lab award in 2018. CEO Sylvie Menezo told us more.

© ktsdesign - Fotolia.com Learn more: https://bit.ly/2OmZwnX

CEA-Leti combines integrated optics TVs and smartphones that project digital images emit light all around them, as quasi- and holography in novel lens-free, isotropic sources. Because the images are augmented reality technology projected generally over the air without directivity, many viewers see the same image. In typical AR glasses, images are transmitted Leti, an institute of CEA-Tech, has developed a novel close to the eyes (high directivity) by a retinal-projection concept for augmented reality (AR) microdisplay that includes an optical system uses based on a combination of integrated optics and an optical combiner. and holography. The lens-free optical system uses disruptive technologies to overcome the limitations of existing AR glasses, such as limited field-of-view Learn more: https://bit.ly/2KQoXfF and bulky optical systems. © Halfpoint - Fotolia.com

40 41 LETI 2019 Scientific Report LETI 2019 Scientific Report © FDD Clinatec / Juliette Treillet

Technology with the power to improve Algorithms improve Diabeloop’s artificial pancreas 03 and enable more personalized type-1 diabetes treatment 44 Optomechanical biosensing makes major advance toward 45 human health a blood test for cancer According to the World Health Organization (WHO), “Health is a state of complete physical, Nanomedicine could hold the key to an effective HIV vaccine 46 mental and social well-being and not merely the absence of disease or infirmity.” And when Non-contact evanescent acoustic tweezers successfully human health is addressed from a position that encompasses not only a person’s physiological manipulate cells and bacteria 47 state, but also his or her interactions with the environment, prevention—measures to prevent Disabled patient moves thanks to brain-controlled or reduce the occurrence and severity of disease, accidents, and disabilities—becomes crucial. exoskeleton powered by Leti technology 48

Among the technologies under development in Leti labs are the preparation of complex Microfluidics automates blood sample preparation, bringing proteomics to the patient bedside 50 biological samples for diagnostics, the treatment of chronic diseases like diabetes, the prevention of acute diseases, and rehabilitation. Our scientists are bringing their knowledge Nanoresonators go where mass spectrometers can’t of micro and nanotechnology to the design of advanced sensors and actuators, exploring in the analysis of particles of biomedical interest 52 the potential of artificial intelligence, investigating nanomedicine, and creating cyber-physical Innovative biological particle separation technology systems to improve human health. to benefit medical diagnostics 53

42 43 LETI 2019 Scientific Report I Highlights 03 LETI 2019 Scientific Report I Highlights 03

The DBLG1® System includes a continuous glucose monitor, an insulin pump, and a handset Optomechanical biosensing makes major advance toward a blood test for cancer

Thomas Alava simple blood test capable We then utilized a reference of diagnosing cancer in its functionalization protocol to graft Leti scientist Aearliest stages is just one biological modules onto the of the potential applications for microdisks for a specific biological A recent advance in highly-sensitive, minimally-invasive, target. The resonator-instrumentation low-cost biological microsensors. system obtained delivered silicon optomechanical Optomechanical resonators are unprecedented sensitivity in terms of microdisk resonators will considered the best candidates for transducing the motion of the disks enable precision biological biological sensing in biologically- into an electrical signal even in the analysis of fluid samples relevant fluid samples like blood. Until presence of viscous liquid. Algorithms improve like blood. This technology now, however, only gallium arsenide

© D iabeloop SA optomechanical resonators—which The mechanical resonance of the will open the door to are difficult to mass-fabricate and to microdisks in water was demonstrated Diabeloop’s artificial pancreas the development of functionalize—have been successfully in the lab with unprecedented motion biological sensing devices demonstrated to vibrate in the sensitivity for silicon resonators in and enable more personalized for tomorrow’s medical presence of viscous fluids. Silicon viscous media. Finally, we were able diagnostics. resonators would open the door to detect albumin proteins, a world type-1 diabetes treatment to the development of innovative first for optomechanical resonating biological sensing devices. microdisks.

Maeva Doron anaging type-1 diabetes is monitoring facility. We used VLSI silicon technology We now plan to demonstrate the Leti scientist a huge burden for patients to mass-fabricate microdisks parallel analysis of multiple biological and their caregivers. The purpose of our research THE BREAKTHROUGH: with a precisely-controlled shape factors in a single test on a small M First-ever demonstration of Blood glucose is regulated with was to improve the product’s and dimensions. Leti’s advanced biological sample, an approach that biological sensing in liquid subcutaneous insulin injections—a algorithm to enable more characterization capabilities were could be used to develop a blood Leti assisted Diabeloop by a silicon optomechanical treatment protocol that involves advanced personalization of instrumental in measuring the discs test for early cancer detection. with advanced algorithms microdisk resonator. making many complex decisions treatment based on the real-time with a high degree of precision. to make the company’s every day. Patient responses to processing of patient-dependent artificial pancreas more treatment vary widely, making it and time-dependent information. WHY IT MATTERS: This technology will enable effective. A first-ever out- difficult to stabilize blood glucose Our model uses the continuous highly-sensitive biological RESEARCH PARTNERS: in practice. The effects range glucose measurement history, Laboratoire Matériaux et Phénomènes Quantiques (MPQ lab); Institut of-hospital clinical trial analysis that will benefit from fainting to health- and life- insulin delivery history, meals, and de biologie intégrative de la cellule (I2BC Lab). was completed on the medical diagnostics and threatening complications and, physical activity. We had previously improved device. research. Further reading: • “Ultra-sensitive optomechanical microdisk resonators with very large ultimately, premature death. completed in-hospital clinical trials, scale integration process”, IEEE Micro Electro Mechanical Systems (MEMS), 2018. but this was the first out-of-hospital Maxime Hermouet, Marc Sansa, Louise Banniard, Alexandre Fafin, Marc Gély, Pierre Etienne Use several Allain, Eduardo Gil Santos, Ivan Favero, Thomas Alava, Guillaume Jourdan, Sébastien Diabeloop developed an artificial trial of the device. NEXT STEPS: of these devices to analyze Hentz. THE BREAKTHROUGH: pancreas (or hybrid closed-loop) • “1 Million-Q Optomechanical Microdisk Resonators with Very Large Scale Integration”, The first out-of-hospital clinical multiple biological factors for adults that is among the first Leti’s know-how in signal processing, Proc. SPIE 10491, Microfluidics, BioMEMS, and Medical Microsystems XVI, 2018. trial of Diabeloop’s DBLG1 simultaneously, with potential Maxime Hermouet, Louise Banniard, Marc Sansa, Alexandre Fafin, Marc Gély, Sébastien algorithm development, and wearable artificial pancreas on devices of this kind to enter the application in the early Pauliac, Pierre Brianceau, Jacques-Alexandre Dallery, Pierre Etienne Allain, Eduardo Gil The wearable closed-loop systems was crucial to type-1 diabetes patients. market in Europe. diagnosis of cancer. Santos, Ivan Favero, Thomas Alava, Guillaume Jourdan, Sébastien Hentz. system consists of a continuous our research. This out-of-hospital glucose sensor and a miniature clinical trial marks a major step

WHY IT MATTERS: patch insulin pump connected toward easier and more effective Beyond its impact on Artist’s rendering of a by Bluetooth to a dedicated treatment of type-1 diabetes. We patients and their families, resonating optomechanical smartphone equipped with plan to pursue development with disk vibrating in liquid diabetes is a public health algorithms developed by Diabeloop the goal of further reducing the media and bearing issue in that it results in life- a specific biological in partnership with Leti to calculate amount of information patients must threatening complications, functionalization comprised insulin doses, send the information input and, ultimately, developing an hospitalizations, and of immunoglobulin attached to the pump automatically, and artificial pancreas for children and to the disk surface. premature death. transfer the data to a patient teens. NEXT STEPS: Further reduce the amount of information RESEARCH PARTNERS: the wearer has to input Diabeloop; CERITD (a diabetes research center); and a dozen and, ultimately, develop an university medical centers and hospitals in France.

artificial pancreas specifically Further reading: • “Closed-loop insulin delivery in adults with type 1 diabetes in real-life eti © CEA-L for children and teens living conditions: a 12-week multicentre, open-label randomised controlled crossover trial,” with type-1 diabetes. The Lancet Digital Health (May 2019). P-Y Benhamou et al. Scanning Electron Micrograph of an optomechanical resonating disk as fabricated in Leti clean room. Radius is 10 µm. On top of the image the optical waveguide ensuring the travel of light from the laser to the vibrating disk. 44 45 LETI 2019 Scientific Report I Highlights 03 LETI 2019 Scientific Report I Highlights 03

Non-contact evanescent acoustic tweezers successfully manipulate cells and bacteria

Cédric Poulain coustic tweezers and their we gained a deeper understanding Leti scientist microfluidic implementation of the physics at play. We were then Aon labs-on-chip have garnered able to demonstrate the potency of increasing interest from researchers evanescent sound waves to exert The contactless over the past decade due to the forces upon tiny particles without manipulation of fluids potential use of the technology for resorting to the use of high-frequency ultrasound. Specifically, we generated is useful in a number of biomedical applications. Acoustic tweezers are a powerful tool for an evanescent Bessel beam in the biomedical applications. Leti contactless cell sorting, patterning, low-frequency ultrasound range. The Nanomedicine could hold the key researchers have overcome lysing, and mixing at small scales. enhanced radiation force arising from some of the hurdles to However, several challenges issues the evanescent field makes it possible to an effective HIV vaccine eti © CEA-L commercial use of the must be overcome for the technology to pattern living organisms as small as technology with a low-cost to be viable for commercial bacteria along concentric circles on a applications. simple substrate, for example. solution that is easy to Fabrice Navarro he HIV pandemic has claimed the lymph nodes directly after manufacture and implement. One of these challenges is the fact The solution is simple and cost- Leti scientist the lives of tens of millions injection, and then interact with of people around the globe, immune cells, where they can that the high-frequency surface effective to produce in non- T acoustic waves (SAW) used in cleanroom environments, is more and scientists have been working deliver either protein antigens or Engineered drug delivery tirelessly to come up with an immunostimulatory molecules or THE BREAKTHROUGH: conventional solutions are difficult energy-efficient and easier to to generate and decay rapidly, which implement than conventional SAW, systems have the capacity effective vaccine for decades. One both. This new adjuvant delivery Creation of an evanescent of the reasons behind the failed system is of a great interest: The acoustic Bessel beam of makes implementation difficult. We and, because the energy is confined to boost the efficacy of clinical trials that have plagued adjuvants appear to mimic their order zero by low-frequency decided to address this challenge by in the vicinity of the emitter, the vaccines. Leti scientists HIV vaccine research is the poor viral counterparts and are relatively ultrasound. using evanescent waves—a strategy required sample volume is lower, recently used Lipidots® immunogenicity of HIV antigens. easy to produce in large volumes. that echoes what has been done with which is an advantage for biological lipid nanodroplets to These clinical trials have, however, WHY IT MATTERS: optical tweezers, which were initially applications. obtained with propagative laser deliver protein antigens highlighted gaps like new ways of This approach could enable novel This technology could replace conventional propagative beams, but which evolved toward Next, we will investigate breaking the and vaccine components. identifying relevant antigens and vaccine formulations and, especially, adjuvants capable of triggering “cocktail” treatments based on a SAW technologies for the evanescent sources. Bessel beam symmetry to be able Their results could an effective and broad immune combination of several antigens on manipulation of tiny particles to apply both force and torque with overcome some of the response and more effective one or several lipid nanodroplets. and create opportunities We reinvestigated observations the same beam to be able to rotate challenges that have vaccine delivery methods. The process for preparing the in commercial biomedical made during previous research until individual objects. hobbled HIV vaccine droplets can be utilized in large- applications. development for decades. We felt that technological scale production scenarios without innovation could help fill these cellular hosts or bioproduction NEXT STEPS: Modify the gaps and overcome some of the methods. technique to enable the flexible challenges facing HIV vaccine trapping and spinning of research. Specifically, sub-unit The potential uses include individual living cells in culture. vaccines, which use aluminum- preventing or treating diseases for THE BREAKTHROUGH: Delivery of protein antigens hydroxide-based adjuvants or which there is no available vaccine and vaccine components immunostimulatory molecules, or for which existing vaccines are using 100 nm stabilized lipid suffer from a lack of efficacy. And less effective on some types of RESEARCH PARTNERS: nanodroplets. viral particles raise safety and cost patients, as well as for developing issues. We demonstrated that, new immunotherapies, which n/a with adequate safety controls, are playing an increasing role in Further reading: • “Near-field WHY IT MATTERS: engineered particles can reach medicine. acoustic manipulation in a confined This new form of drug evanescent Bessel beam”, Nature delivery opens the door Communications Physics, 2019. to new safe, effective, and Pierre-Yves Gires, Cédric Poulain. RESEARCH PARTNERS: • “A simple acoustofluidic chip affordable vaccines to INSERM (immunology); IDMIT (HIV and animal model). for microscale manipulation using prevent the spread of serious evanescent Scholte waves”, Lab on a infectious diseases like HIV. Further reading: • “Overcoming immunogenicity issues of HIV p24 antigen by the use of Chip, 2016. innovative nanostructured lipid carriers as delivery systems: evidences in mice and non- Vivian Aubert, Régis Wunenburger, human primates”, Npj Vaccines 3, 2018. Tony Valier-Brasier, David Rabaud, NEXT STEPS: Place other Emilie Bayon, Jessica Morlieras, Nathalie Dereuddre-Bosquet, Alexis Gonon, Leslie Gosse, Jean-Philippe Kleman, Cédric Poulain. antigens on the surface of Thomas Courant, Roger Le Grand, Patrice N. Marche, Fabrice P. Navarro. • “Chladni Patterns in a Liquid at the lipid nanodroplets and • “Tailoring nanostructured lipid carriers for the delivery of protein antigens: Microscale”, Physical Review Letters, Physicochemical properties versus immunogenicity studies”, Biomaterials, 2017. 2016. test their efficacy against Thomas Courant, Emilie Bayon, Hei Lanne Reynaud-Dougier, Christian L. Villiers, Patrice N. Gaël Vuillermet, Pierre-Yves Gires, pathogens. Marche, Fabrice P. Navarro. Fabrice Casset, Cédric Poulain. eti / Chr. Morel eti / Chr. © CEA-L

46 47 LETI 2019 Scientific Report I Highlights 03 LETI 2019 Scientific Report I Highlights 03

Disabled patient moves thanks to brain-controlled exoskeleton powered by Leti technology

Guillaume Charvet The Brain-Computer Interface (BCI) project at Clinatec Leti scientist (Leti’s biomedical research lab operated in conjunction with Grenoble-Alpes University Medical Center) reached a major milestone with a successful proof-of- concept that enabled a tetraplegic patient to control all four limbs via a brain implant—a world first.

he purpose of Clinatec’s Brain-Computer Interface THE BREAKTHROUGH: (BCI) project is to demonstrate that, with training, The first-ever proof-of- Tpatients with severe motor disabilities (tetraplegic concept of a four-limb patients) can control complex functional substitution exoskeleton controlled via devices (a four-limb exoskeleton in this study) by decoding a brain-computer interface. the brain’s electrical activity recorded via a fully implantable medical device. WHY IT MATTERS:

Advances in brain-controlled The BCI project recently reached a major milestone that © FDD Clinatec / Juliette Treillet devices could compensate was published in The Lancet Neurology. For the first time for motor disabilities and ever, a tetraplegic subject was able to walk and control Neural signal recording integrated allow patients to live more his arms using the WIMAGINE® implant, designed to circuit developed at Leti. independently. record brain signals (ElectroCorticoGraphy, or ECoG) over the long term, and a four-limb exoskeleton. The system NEXT STEPS: Develop features Leti-designed electronic circuit boards that more precise and robust contain the ECoG acquisition and digitalization systems. algorithms to enable more Artificial intelligence (machine learning) algorithms and complex movements dedicated software were also developed to decode ECoG (holding objects) and signals and translate them into commands to control the integrate new effectors to exoskeleton in real time. address clinical applications other than paralysis. In this groundbreaking clinical trial, two of the devices were © FDD Clinatec / La Breche implanted on the patient’s brain. The patient then spent 27 months training the system and learning to control the exoskeleton, both in virtual environments at home, and with the actual exoskeleton at Further reading: • “An exoskeleton controlled by an epidural wireless brain–machine interface Clinatec. The patient successfully controlled eight degrees of freedom RESEARCH in a tetraplegic patient: a proof-of-concept demonstration,” The Lancet Neurology, 2019. with bimanual control of the exoskeleton, more than ever before. PARTNERS: Alim-Louis Benabid et al. Grenoble-Alpes University Medical The successful clinical trial will open the door to new developments • “Recursive exponentially weighted n-way partial least squares regression with recursive- Center; Grenoble-Alpes validation of hyper-parameters in brain-computer interface applications,” Scientific Reports, to modify the technology for out-of-lab use. Applications other University; List, a CEA 2017. Andrey Eliseyev, Vincent Auboiroux, Thomas Costecalde, Lilia Langar, Guillaume than paralysis (communication for patients suffering from locked-in Tech institute. Charvet, Corinne Mestais, Tetiana Aksenova, Alim-Louis Benabid. syndrome, post-stroke rehabilitation) are also on the drawing board.

48 49 LETI 2019 Scientific Report I Highlights 03 LETI 2019 Scientific Report I Highlights 03

Microfluidics automates blood sample preparation, bringing proteomics to the patient bedside

Marie-Line Cosnier Leti scientist eti © CEA-L eti © CEA-L

Work on blood samples in L2 biosafety lab. Disposable microfluidic cartridge.

Proteomics is heralded ersonalized medicine and point- microtechnology and the associated as the new genomics for of-care diagnostics are two manufacturing processes played an of the major trends shaping important role in our research. its capacity to speed up P the healthcare industry. Mass- both the diagnosis and spectrometry-based proteomics The prototype successfully eti © CEA-L treatment of diseases like holds great promise in both of these automated management of the fields. Currently, however, preparing blood sample, reducing the process cancer. Using proteomics V AT I O N O T N E a blood sample for proteomic time from two days down to two N in clinical settings has, I A hours. The quality of the plasma and Pep’s advances point-of-care M biomarker analysis can take up to two

B

however, proven to be a E

days, with a number of manual steps peptides obtained was high, and the S

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challenge. Leti scientists diagnostics and personalized P

that must be performed by a highly- quantity of peptides was sufficient D R

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I A C

S have developed a solution qualified lab technician with special for 5 analyses using targeted mass E that makes blood sample training. spectrometry and for 50 analyses medicine using discovery mass spectrometry. preparation fast, reliable, Leti Senior Researcher and Project Manager Marie-Line Cosnier brought the We worked with Clinatec, IRIG, Specifically, we achieved complete and portable—ideal for “Innovation Team Best Practices Award” home from the Paris Innovation Directors’ and DIP to design and prototype a integration and automation of all Club on September 5, 2019. The award recognizes a noteworthy advance in point- personalized and point-of- transportable microfluidics laboratory of the process steps necessary for of-care diagnostics achieved thanks in part to funding from the Carnot Network. care applications. that integrates and automates all whole-blood-sample preparation Marie-Line Cosnier and her team developed Pep’s (Peptide Saver), an integrated of the steps involved in sample prior to MS analysis directly at the and automated microfluidic instrument for whole blood sample preparation in preparation: injection of whole patient’s bedside. proteomics analysis. Pep’s reduces the time it takes to prepare a sample for mass blood, separation of red blood cells, spectrometry from two days to just two hours, opening up new possibilities in point- calibration of the plasma volume, Sample preparation is one of the of-care diagnostics and personalized medicine. Marie-Line Cosnier said that the depletion of albumin, digestion bottlenecks hindering the widespread THE BREAKTHROUGH: award recognizes the contributions of all partners* and highlights the results of An automated sample- of proteins, and purification and development of personalized exemplary teamwork. preparation solution that storage of peptides. The system, medicine. Our advance will bring a will speed up proteomics called PEP’s, consists of a disposable level of quality and reproducibility *Biological protocol integration: Myriam Cubizolles, Patricia Laurent, and Mathilde analysis. microfluidics card and the associated to blood proteomics that should Louwagie. instrumentation. Leti’s expertise facilitate the use of the technique Microfluidic and instrumentation development: Remco den Dulk, Camille in biological process integration, in point-of-care and personalized WHY IT MATTERS: Echampart, Frédéric Revol-Cavalier, and Manuel Alessio. This advance will promote the instrumentation, microfluidics, and medicine. Proteomics: Virginie Brun, Benoît Gilquin, Yohann Couté, and Annie Adrait. use of proteomics in clinical Design and electronics development: Charles-Elie Goujon, Gorka Arrizabalaga. settings by enabling the Project management: Fabrice Navarro and Marie-Line Cosnier. automation and integration of all pre-analytical blood RESEARCH PARTNERS: sample preparation steps at Clinatec and IRIG (proteomics for biomedical applications, cutting- the patient bedside. edge mass spectrometry facility, biochemical preparation of clinical samples); DIP (modular architecture design, market research, 3D NEXT STEPS: Scale up the printing). technology and transfer it to Further reading: One article forthcoming; • “Innovation Best Team Practices 2019” a manufacturer. award from the Paris Innovation Directors’ Club.

50 51 LETI 2019 Scientific Report I Highlights 03 LETI 2019 Scientific Report I Highlights 03

Innovative biological particle separation technology to benefit medical diagnostics

© Sashkin - Adobe Stock Eloïse Pariset, he detection of nanoparticles We connected silicon-based © Pascale Boulanger / I2BC CEA CNRS Boulanger © Pascale Aurélie Thuaire, like viruses and exosomes is DLD components designed The “nano-weighing” system published in Science was tested to measure the mass of Vincent Agache Tuseful for a broad range of and fabricated in Leti’s 200 a virus capsid, the bacteriophage T5, whose theoretical mass could only be estimated Leti scientists medical diagnostics. The aim of mm cleanrooms in series on an previously. With a size of 93 nm, this viral capsid weighs ~ 105 megadaltons. our research was to develop a new automated platform. The modules modular approach to purify complex are temporarily isolated with Leti’s microelectronics, biological samples and fractionate valves and deformable chambers

eti © CEA-L microfluidics, and advanced the particles in the sample by size into built using membranes previously materials know-how several sub-populations. Specifically, developed at Leti so that they can Nanoresonators go where mass A network of 20 silicon we implemented deterministic operate independently, one after the nano resonators contributed to a major lateral displacement (DLD), a passive other. We validated the approach on connected by metallic advance in biological sample spectrometers can’t in the analysis lines. Successive zoom microfluidic technique that utilizes a model sample, and then tested it in on an individual preparation for medical a slanted pillar array, to sort the on the isolation of bacteria from a resonator (typically diagnostics. Our researchers particles in a sample. complex blood sample containing of particles of biomedical interest about ten microns long cancer cells. and a hundred nm thick). used cascaded deterministic DLD is a widely-used sample lateral displacement to sort preparation technique, primarily at Now that the proof-of-concept has omorrow’s medical treatments mass range. They do not require Sébastien Hentz complex biological samples the micrometer scale, where it can been validated, the next steps will be will require very advanced ionization to measure mass: Like a Leti scientist into sub-populations based be used to detect cells and bacteria, to test it on the target applications. characterization techniques guitar string that changes tone when T on size. for example. And, at the nanometer we have already obtained a dynamic capable of controlling the quality of a finger is placed on it, the vibration scale, DLD can detect exosomes. range of 4; this could be improved drugs produced before the drugs frequency of a resonator changes Leti researchers have However, the fractionation of complex to isolate smaller particles like can be used. Phage therapy, which when a mass lands on it. We utilized eliminated ionization from samples into several sub-populations nanoparticles, for example. Finally, uses viruses to infect and fight these tiny nanoresonators, which are remains a challenge. Effective throughput must also be improved nanomechanical mass pathogenic bacteria, is one example. 150 times smaller than the width of THE BREAKTHROUGH: fractionation requires connecting for faster sample preparation and spectrometry, enabling New techniques will also be required a human hair—to develop the first- Separation of biological several DLD components in series to enable the processing of larger the characterization of to analyze the nanoparticles used in ever instrument that can quickly and particles in a modular while maintaining a constant flow sample volumes, which would be targeted drug delivery. The methods efficiently analyze species in the platform of cascaded DLD biological particles like velocity across the DLD outlets so as useful in diagnosing sepsis, for currently used to characterize MDa to GDa mass range. modules. “bacteria-eating” viruses not to disturb the particles’ trajectory. instance. for the first time ever. The these particles are based on size— they cannot provide functional or Entirely devoid of ionization, the WHY IT MATTERS: advance will fuel progress structural information. Mass is a instrument nebulizes the particles The capacity to isolate toward alternatives to more useful measurement, because in solution, aspirates them into biological particles has antibiotics. it can identify specific species. But the system under vacuum, and, potential applications in today’s mass spectrometers, which using an aerodynamic lens, focuses diagnosing sepsis and use ionization to sort particles with the particles onto an array of 20 isolating nanoparticles like electromagnetic fields, cannot weigh nanoresonators. This system is viruses and exosomes, also objects in the intermediate range. vastly more efficient and faster for diagnostic purposes. Unfortunately, this applies to many than previous nanoresonator-based objects of biomedical significance, systems, analyzing a sample in just a NEXT STEPS: Test the including viruses. few hours rather than a few weeks. modular platform on the THE BREAKTHROUGH: Isolation Removal The system was able to measure isolation of specific particles Measurement of the Stage 2 of bacteria of red blood Leti has developed and fabricated the mass of a bacteriophage T5 and improve dynamic range cells (RBCs) highest molecular mass and throughput. nanomechanical resonators that are capsid—a virus that holds promise eti © CEA-L Stage 1 ever measured (an entire © CEA-Leti ND Outlet D Outlet bacteriophage virus capsid). ideal for objects in this intermediate as a future alternative to antibiotics. Cascaded deterministic lateral displacement modules: Stage 1: removal of cancer cells WHY IT MATTERS: RESEARCH PARTNERS: Stage 2: removal of red blood cells (deviated outlet) and isolation of bacteria (non deviated outlet) This advance overcomes one CEA Science, BIG, IRIG (mass spectrometry, sample preparation, of the challenges hindering nebulization of particles in solution); CNRS-I2BC (T5 assembly). ND Outlet D Outlet ND Outlet D Outlet the development of phage Further reading: • “Single-particle mass spectrometry with arrays of frequency-addressed therapy by providing new nanomechanical resonators”, Nature Communications 9 (2018). 0.2% RBCs 99.8% RBCs 56% Bacteria 44% Bacteria analysis capabilities. Eric Sage, Marc Sansa, Shawn Fostner, Martial Defoort, Marc Gély, Akshay K. Naik, Robert Morel, Laurent Duraffourg, Michael L. Roukes, Thomas Alava, Guillaume Jourdan, Eric Colinet, Christophe Masselon, Ariel Brenac, Sébastien Hentz. NEXT STEPS: Improve • “Neutral mass spectrometry of virus capsids above 100 megadaltons with the instrument’s sensitivity, nanomechanical resonators”, Science 23 (2018). Sergio Dominguez-Medina, Shawn Fostner, Martial Defoort, Marc Sansa, Ann-Kathrin Stark, speed, and resolution and Mohammad Abdul Halim, Emeline Vernhes, Marc Gely, Guillaume Jourdan4 Thomas Alava, miniaturize the system. Pascale Boulanger, Christophe Masselon, Sébastien Hentz. eti © CEA-L

52 53 LETI 2019 Scientific Report I Highlights 03 LETI 2019 Scientific Report I Highlights 03

Market news from our R&D partners

Diabeloop completes record-breaking European fundraising effort with its autonomous diabetes management solutions

Diabeloop announced today that it has completed a €31-million Series B round of funding, setting a European fundraising record in the area of

therapeutic artificial intelligence. © CEA-Leti This funding will allow Diabeloop to accelerate its international commercial deployment in both Europe and the US, and will support the award-winning CEA-Leti breakthrough opens path company’s innovative programs. to new vaccine for HIV using The solutions developed by Diabeloop leverage artificial intelligence to automate and personalize diabetes management. lipid-nanoparticle-delivery technology The core of the company’s first Automated Insulin Delivery (AID) system is a self-learning algorithm hosted in a dedicated handset. In combination with a continuous glucose measurement system and an insulin pump, the device – a breakthrough technological innovation – almost completely automates the treatment of Type 1 diabetes. GRENOBLE, France – Feb. 27, 2019 – Leti, a research institute of CEA Tech, in collaboration with CEA’s Fundamental Research Division, has developed a new Learn more: https://bit.ly/34cEAVE vaccine approach for HIV based on engineered lipid nanoparticles that deliver p24 - a viral protein that is key to an HIV vaccine- and optimize the CpG adjuvant’s effect.

Until now, p24-based vaccines have shown limited effectiveness because of an insufficient immune response to this antigen in HIV patients. Based on its Lipidots® delivery platform, CEA-Leti’s new approach improves immunogenicity against the p24 HIV protein by loading it and an immunostimulant agent onto nanostructured lipid carriers (NLCs). This may be a first step for a new HIV vaccine that also would include additional components of the virus. Lipidots® is a versatile nano-delivery platform that encapsulates drugs and/or imaging agents in tiny droplets of oil and delivers them to targeted cells in the body for patient treatment or diagnosis. The small size of the Lipidots NLCs, approximately 100nm in diameter, allows them to enter the body’s lymphatic vessels, which carry them to the lymph nodes where they trigger © Pierre Jacquet-CEA © Pierre a stronger immune response.

Learn more: https://bit.ly/37OqHjs

54 55 LETI 2019 Scientific Report LETI 2019 Scientific Report © Shutterstock 04Innovative devices OTS selector technology for resistive crossbar memory brings brain-inspired computing within reach 58 and architectures Monolithic Noff GaN MIS HEMT now in the running for a power-efficient society for tomorrow’s post-silicon power converters 59 Leti and international partners develop new RRAM memory The age of data is upon us. And, as the delivery of services in just about every field capable of supporting tomorrow’s embedded AI 60 depends on the ability to access and utilize constantly-increasing volumes of data, Gate-reflectometry-based dispersive spin readout issues like data protection and the efficient use of both energy and raw materials holds promise for scalable quantum computing 62 must be addressed urgently. Today’s technology development is multi-scale, encompassing devices, systems, and architectures. Self-powering sensors could soon benefit from compact, robust vibration energy harvesters 63 Leti is developing and scaling up innovative devices, systems, and architectures High-performance computing: that will effectively respond to these challenges. Most notably, we are working Novel manycore architecture enables up to on breakthrough memory technologies that will increase reliability and energy 1,000 processor cores 64 efficiency through advanced materials and tighter integration.

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Monolithic Noff GaN MIS HEMT Simplified scheme of a Phase-Change Memory (PCM) co-integrated with an Ovonic Threshold Switching (OTS) now in the running for tomorrow’s selector developed and fabricated in Leti. TOP Electrode post-silicon power converters

OTS layer Intermediate Electrode Marc Plissonnier lectronic devices are ubiquitous in the Normally OFF (Noff) (Head of Power Component in the lives of most consumers, configuration. It offers features OTS selector technology for Laboratory) and Luca Perniola Eand the IoT revolution is fueling similar to those of a conventional PCM layer (Head of Power, Energy & continued growth. New “always on” silicon-based MOS, but with a better resistive crossbar memory Connectivity Component Section) devices are creating higher than tradeoff between drive and leakage ever demand for efficient power currents compared to a P-GaN brings brain-inspired management technologies. Most gate architecture. We drew on a Gallium nitride could be a of the power management systems broad range of expertise available more efficient replacement integrated into today’s electronic at Leti and, more broadly, the CEA, computing within reach devices are based on Si and SiC and work with outside partners like © CEA-Leti / KAM Production with respect to silicon for technologies. STMicroelectronics, LTM, G2ELab, certain applications in the Ampere, LAAS, and others, either high-frequency domain of A new class of power components directly or through the Labex power electronics. Leti and based on Gallium Nitride (GaN) has GANEX initiative. Our research Gabriele Navarro esistive memory technologies increase the material’s compatibility its partners are pursuing the capacity to deliver excellent encompassed the entire value power performance and could meet chain from material to system, with Leti scientist are expected to power the next with different applications. We an ambitious GaN on Si revolutions in computing and studied leakage current and the need for smaller, more energy- work on GaN epitaxy, device and R roadmap that encompasses efficient power converters that cost packaging technologies, integrated storage. To respond to the advanced threshold voltage—the main OTS Leti’s know-how in neuromorphic systems integration electrical parameters—and gained the entire value chain from less to manufacture. In the quest circuits, system architecture, and requirements of tomorrow’s brain new insights into the material’s material to complete system. to replace silicon technologies functional and reliability testing. materials played a major with something more efficient, role in the engineering of inspired computers and deliver physics. We investigated the causes the real time processing and of endurance failures in OTS— several manufacturers have already We will pursue our GaN roadmap an OTS material capable of massive scalability that memory first material aging during cycling— THE BREAKTHROUGH: developed GaN power devices. with further research on epitaxy, improving the reliability of database applications will demand, and engineered a carbon-based Position MIS HEMT architectures TSMC, Infineon, and Panasonic have devices, passive components, resistive crossbar memory. resistive crossbar memory (or RCM), electrode to delay failures. Finally, in the GaN technology developed their own proprietary co-integration, and system This advance will help with its intrinsic parallel structure and we demonstrated the feasibility arena and help expand GaN solution based on a P-GaN gate architectures to develop a GaN technology penetration in a architecture. technology that allows switching fuel the development of high density, offers high potential. of innovative co-integrations with And the future of RCM will depend different resistive memory devices market dominated by silicon frequencies in the MHz and power tomorrow’s computing and on making the selector device more (e.g. phase-change memory). components. We chose to develop a MIS High- densities ten times those of silicon— memory architectures. reliable. Electron-Mobility Transistor (MIS all using standard CMOS processes Leti’s vast experience with WHY IT MATTERS: HEMT) GaN device architecture to keep costs down. We focused on GeSe-based ovonic chalcogenide characterization and This research will help threshold switching materials deposition was vital to our research. pave the way toward the THE BREAKTHROUGH: commercialization of a more Enhanced OTS selector (amorphous chalcogenides) to make We used a number of techniques more reliable back-end selectors available at the nanocharacterization efficient replacement for silicon materials and co-integration power conversion systems and with resistive memory and enable their integration into platform (Raman and infrared RCM architectures. spectroscopy, etc.) during the enable the design of smaller, technologies for more more efficient devices. reliable back-end crossbar project. In addition, Leti’s broad, arrays. The OTS material we engineered deep knowledge of resistive memory led to enhanced RCM device devices—from physics through to NEXT STEPS: Pursue our programming and read endurance— manufacturing—played a major role roadmap toward monolithic WHY IT MATTERS: crucial to reliably accessing the stored in this advance. Our successful co- solutions and systems-in-package Back-end resistive to achieve high switching crossbar memory enables information. We also improved the integration with resistive memory OTS material’s robustness under devices is evidence of the maturity of frequency and higher power revolutionary architectures density than silicon using CMOS like storage-class memory temperatures typical of CMOS Leti’s OTS technology and its readiness back-end fabrication processes to for prototyping and manufacturing. processes. The introduction of this and neuromorphic new technology will lead to cost computing systems. reductions at system level. © CEA / Vincent Guilly / Vincent © CEA NEXT STEPS: Further improve OTS selector RESEARCH PARTNERS: reliability, develop new OTS STMicroelectronics RESEARCH PARTNERS: materials, explore innovative DOCC Toulouse (functional and reliability testing); LTM; G2ELab; Ampere; LAAS; STMicroelectronics. electric field activated OTS- Further reading: G. Navarro et al., • "Innovative PCM+OTS device with high sub-threshold based devices, and fabricate non-linearity for non-switching reading operations and higher endurance performance," 2017 Symposium on VLSI Technology, Kyoto, 2017, pp. T94-T95. Further reading: •“The 2018 GaN Power Electronics Roadmap,” Journal of Physics D: Applied Physics, 2018. Léa Di Cioccio et al. back-end high density A. Verdy et al. • "Optimized Reading Window for Crossbar Arrays Thanks to Ge-Se-Sb-N- • “III-N Epitaxy on Si for Power Electronics,” (book chapter) in High Mobility Materials for CMOS Applications, 2018. M. Charles crossbar arrays. based OTS Selectors" IEDM 2018.

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Leti and international partners

develop new RRAM memory RRAM integrated on silicon CMOS capable of supporting tomorrow’s embedded AI

Elisa Vianello, Leti, Stanford University, and Nanyang Technological Pascal Vivet University designed, fabricated, and validated Leti scientists a circuit that integrates multiple-bit non-volatile memory, giving edge-AI a needed boost in resiliency and capacity.

esistive RAM, a type of non-volatile memory, has THE BREAKTHROUGH: advanced by leaps and bounds in recent years. A revolutionary RRAM chip RHowever, major challenges remain—such as the for edge-AI. limited endurance of RRAM cells before a permanent write failure. For RRAM to work as an on-chip memory capable WHY IT MATTERS: of supporting data-intensive deep learning, it must offer As artificial intelligence greater resilience and higher storage density. makes inroads into the Internet of Things, more This innovation, which entailed monolithically integrating resilient, higher-capacity two heterogeneous technologies, grew out of the idea that memory will be needed combining RRAM programming and system-level resilience to enable energy-efficient solutions could effectively solve density issues and improve smart-sensor nodes. RRAM resilience. The approach was validated for machine learning, control, and security applications on a proof-of- NEXT STEPS: concept chip consisting of a non-volatile microcontroller Develop domain-specific with 18 KB of on-chip RRAM on a commercial 130 nm accelerators, bit-cost CMOS with a 16-bit general-purpose microcontroller core scalable 3D vertical with 8 KB of SRAM. RRAM, and monolithic © CEA-Leti 3D integration of multiple This world-first is the fruit of an international collaboration RRAM layers. of partners whose expertise spans technology, circuits, architecture, and applications: Stanford University designed the chip; Nanyang Technological University in Singapore helped determine which techniques would make the best Further reading: • “Resistive RAM Endurance: Array-Level Characterization and Correction use of RRAM features and led the system-level simulations; and Leti Techniques Targeting Deep Learning Applications”, IEEE Transactions on Electron Devices, contributed its Memory Advanced Demonstrator (MAD200), a testing Year: 2019 Volume: 66, Issue: 3, Pages: 1281–1288. platform that brings versatility and robustness to component and Alessandro Grossi, Elisa Vianello, Mohamed M. Sabry, Marios Barlas, Laurent Grenouillet, interface assessment and that allows researchers to explore memory Jean Coignus, Edith Beigne, Tony Wu, Binh Q. Le, Mary K. Wootters, Cristian Zambelli, Etienne Nowak, Subhasish Mitra. performance from both design and technology angles. • “Resistive RAM With Multiple Bits Per Cell: Array-Level Demonstration of 3 Bits Per Cell,” IEEE Transactions on Electron Devices, Year: 2019 Volume: 66, Issue: 1, Pages: 641–646. The highly-resilient multiple-bit RRAM offers 2.5 times the capacity Binh Q. Le, Alessandro Grossi, Elisa Vianello, Tony Wu, Giusy Lama, Edith Beigne, H.-S. Philip RESEARCH Wong, Subhasish Mitra. of current RRAM with energy consumption five times lower than that PARTNERS: • “14.3 A 43pJ/Cycle Non-Volatile Microcontroller with 4.7μs Shutdown/Wake-up Integrating of standard embedded flash memory. In addition to enabling a ten- Stanford University 2.3-bit/Cell Resistive RAM and Resilience Techniques,” 2019 IEEE International Solid-State (chip design); Nanyang Circuits Conference (ISSCC). year lifetime for neural network inference applications, the chip also Technological improves neural network inference accuracy, essential to artificial Tony F. Wu, Binh Q. Le, Robert Radway, Andrew Bartolo, William Hwang, Seungbin Jeong, University (system- Haitong Li, Pulkit Tandon, Elisa Vianello, Pascal Vivet, Etienne Nowak, Mary K. Wootters, H.-S. intelligence. The technology can currently be purchased through level simulations) Philip Wong, Mohamed M. Sabry Aly, Edith Beigne, Subhasish Mitra. Multi-Project Circuit (CMP), a nonprofit prototyping and low-volume production service provider.

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Gate-reflectometry-based Self-powering sensors dispersive spin readout 6 could soon benefit from holds promise for scalable compact, robust vibration quantum computing energy harvesters 2 1 Louis Hutin, Gaël Pillonnet 7 Leti scientists 3

When it comes to quantum Gaël Pillonnet 1_Digital computing, high speed and Leti scientist 2_MPPT 5 4 reliability are paramount 3_Analog 4_Drivers to running fault-tolerant 5_Bulk reg. 1mm calculations. Gate-based Vibration energy harvesters 6_Cold start © CEA-Leti reflectometry spin readout turn ambient vibration into A radiofrequency wave is sent along a charge-confining was implemented by IRIG Gate to probe the spin state of neighboring qubits, electrical energy, making and Institut Néel on Si determined through the analysis of the reflected signal. © CEA them ideal for self-powering MOS qubits fabricated by devices like sensors. Leti nergy harvesters will be crucial a mismatch between the frequency Leti with results that bode i-based quantum computing and fabricated on Leti’s 300 mm line. researchers have recently to many of tomorrow’s self- of the harvester resonance and the well for the future of QC. research is still a relatively new The results were very encouraging made an advance that will Epowering electronic devices environmental vibration excitation Sfield. We are currently hoping to in terms of fidelity (>98% for enable harvesters that are and, especially, sensors. Our (due to aging, temperature obtain fault-tolerant, universal gate- 0.5ms). Our technique analyzes a more compact and that research set out to overcome one of changes, or unpredictable ambient based quantum computers capable radiofrequency signal reflected off vibration). We drew on Leti’s know- THE BREAKTHROUGH: can operate efficiently in the main hurdles to using vibration Successful implementation of offering exponentially higher the qubit or an auxiliary quantum energy harvesters in sensors: narrow how in electromechanical coupling of gate-reflectometry-based speeds than conventional computers dot. The implementation offered the fluctuating conditions. frequency bandwidth. Harvesters modelling for energy harvesting spin readout schemes on Si on some classes of algorithms. low power dissipation and minimal with larger frequency bandwidths applications and developed high- MOS qubit devices. thermal noise required at energy would operate more effectively coupling piezoelectric harvesters Although the fundamental and scales this small. THE BREAKTHROUGH: amid fluctuating ambient vibration that get maximum efficiency out WHY IT MATTERS: engineering limits to Si quantum The indirect piezoelectric and be more resilient to dynamic of our strategy. The figure of merit A potentially-scalable computer size and power are not yet In addition to Leti’s resources, we drew coupling effect and controlled shift due to aging and temperature (which includes power density and solution to reliably read known, our aim is to engineer devices on our long-standing partnerships short-circuit phase were changes. Another challenge facing bandwidth) we obtained is the best large-scale qubit registers. for the coherent manipulation of with IRIG and Institut Néel to make used to tune the mechanical energy harvesters is compactness. ever reported in lab conditions. information encoded as a quantum the necessary adaptations to the dynamic of a vibration energy We posited that electrical tuning NEXT STEPS: Further superposition of basis states, or dimensions and materials of the nano- harvester. could be used to control an easy- The next step is to explore the improve speed and fidelity quantum bits. The state of a qubit objects, which were initially designed to-implement short-circuit phase, limitations of our strategy with and achieve fully-integrated is mapped to the spin of a charged to operate at room temperature, and WHY IT MATTERS: eliminating bulky mechanical tuning very low ambient energy. We have large qubit arrays and particle confined in a quantum to refine our approach and obtain This overcomes the main systems. since developed a custom low- control/readout electronics. dot. We opted for electrostatic quantum dots that perform well at hurdle to implementing power integrated circuit with a confinement by MOS gates in a low temperatures. vibration energy harvesters in We developed a novel energy positive energy harvesting point silicon channel. self-powering sensors. extraction strategy called SC-SECE below 1 µW. The circuit is currently As we continue to explore the limits of (Short-Circuit Synchronous Electric being tested. Our strategy could We implemented gate-based what quantum computing can do, we NEXT STEPS: Charge Extraction) to maximize the also be applied to electrodynamic reflectometry on Si MOS qubit will pursue further improvements to Test the limitations of the energy extraction of piezoelectric- or electrostatic vibration energy prototypes based on a slightly altered our scalable readout method, a must technology on very-low-power based harvesters over a large harvesters. Finally, a PhD research SOI nanowire MOSFET process flow for expandable QC architectures. ambient energy and apply the frequency bandwidth. Existing project is investigating an improved technology to other types of vibration energy harvester systems mechanical design to increase energy harvesters. suffer from low mechanical-to- coupling without the need for high- A PORTFOLIO OF CRYOGENIC INTEGRATED electrical power transfer if there is coupled piezoelectric materials. RESEARCH PARTNERS: CIRCUITS TO SUPPORT LETI’S QUANTUM IRIG and Institut Néel (modeling, COMPUTING PROGRAM simulation, cryogenics, spin physics). Leti’s goal is to design a large portfolio of cryogenic Further reading: • “Gate-reflectometry dispersive readout of a spin integrated circuits to support massive quantum qubit in silicon,” Nature Communications (accepted), 2019A. RESEARCH PARTNERS: device characterization and address the challenge SYMME Lab, Savoie Mont Blanc University; Elie Lefeuvre, Paris Sud University, DSYS (Leti). Crippa, R. Ezzouch, A. Aprà, A. Amisse, L. Hutin, B. Bertrand, of qubit matrix readout. Specifically, we are M. Vinet, M. Urdampilleta, T. Meunier, M. Sanquer, X. Jehl, Further reading: • “Frequency tuning of piezoelectric energy harvesters thanks to a short-circuit synchronous electric charge extraction”, R. Maurand, S. De Franceschi. investigating tradeoffs between power consumption, Smart Materials and Structures, 2018. • “Gate-based high fidelity spin readout in a CMOS device,” bandwidth, and noise to maintain circuit operation Adrien Morel, Gaël Pillonnet, Pierre Gasnier, Elie Lefeuvre, Adrien Badel. Nature Nanotechnology (accepted), 2019. below 1 Kelvin with a set of analog, RF, and digital • “Short Circuit Synchronous Electric Charge Extraction (SC-SECE) Strategy for wideband vibration energy harvesting”, M. Urdampilleta, D. Niegemann, E. Chanrion, B. Jadot, C. Spence, functions. Finally, we are building a cryogenic design IEEE International Symposium on Circuits and Systems, 2018. P.-A. Mortemousque, C. Bäuerle, L. Hutin, B. Bertrand, S. Barraud, Adrien Morel, Pierre Gasnier, Yohan Wanderoild, Gaël Pillonnet, Adrien Badel. R. Maurand, M. Sanquer, X. Jehl, S. De Franceschi, M. Vinet, T. Meunier. kit for FDSOI based on a novel sub-Kelvin cryogenic MOS characterization platform.

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Power efficient computing: Novel manycore architecture enables up to 1,000 processor cores

Séverine Cheramy, he expansion of high- particular contributing to our work Eric Guthmuller performance computing on the CAD flow for 3D testability. Leti scientists Tto data centers around the globe is spurring demand for We came up with an architecture high-performance processors capable of supporting up to a A chiplet developed for applications from physics to thousand cores, improving the by Leti and academic finance. To overcome the power energy efficiency and performance and industrial partners and frequency limitations of mono- of general-purpose computing. And, will pave the way to core processors, today’s processors by using 3D technologies, we were are manycore. able to bring costs down, add larger more powerful, energy- caches, and improve power delivery. efficient, cost-competitive Our research was conducted under processing solutions the IRT Nanoelec 3D integration The research will feed into the EU for high-performance program in conjunction with Horizon 2020 European Processor computing. STMicroelectronics; Mentor, a Initiative to develop a processor Siemens Business; EVG; SET; and for exascale-level European high- the Pierre and Marie Curie University performance computing. The LIP6 laboratory. We also drew on chiplet will be integrated onto THE BREAKTHROUGH: Leti’s expertise in 3D circuit design. an active interposer to build a The first-ever implementation Our goal was to demonstrate 3D manycore processor. Later, as of a chiplet with 3D-ready the feasibility of a scalable cache we move to finer pitches, we will scalable cache coherent coherent 3D architecture using need to develop new 3D stacking processor architecture. state of the art 3D technologies technologies like hybrid bonding. developed by Leti and improve 3D This could help achieve much WHY IT MATTERS: circuit design tools, with Mentor in higher 3D connection densities. As we move toward exascale computing, this advance demonstrates the maturity of both 3D technologies RESEARCH PARTNERS: and 3D design tools to meet Pierre and Marie Curie University LIP6 Laboratory; STMicroelectronics; tomorrow’s power-efficiency Mentor, a Siemens Business; EVG; SET and high-performance computing needs. Further reading: •“A 29 Gops/Watt 3D-ready 16-core computing fabric with scalable cache coherent architecture using distributed L2 and adaptive L3 caches,” ESSCIRC 2018-IEEE Integrate 44th European Solid State Circuits Conference (ESSCIRC). IEEE, 2018. NEXT STEPS: E. Guthmuller, C. Fuguet, P. Vivet, C. Bernard, I. Miro-Panades, J. Durupt, E. Beigne, the chiplet onto an active D. Lattard, S. Cheramy, A. Greiner, Q. Meunier, P. Bazargan Sabet. interposer to build a 3D manycore processor • “Active Interposer Technology for Chiplet-Based Advanced 3D System Architectures,” th leveraging Leti’s 3D 2019 IEEE 69 Electronic Components and Technology Conference (ECTC). IEEE, 2019. P. Coudrain, J. Charbonnier, R. Vélard, A. Garnier, D. Lattard, P. Vivet, F. Ponthenier, technology portfolio. T. Mourier, A. Farcy, J. Beltritt, D. Campos. © Shutterstock

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Market news from our R&D partners

CEA-Leti moves 3d sequential integration closer to commercialization

SAN FRANCISCO – Dec. 4, 2018 – Leti, a research institute at CEA SIGMA CELLS AT CES: smart Tech, has reported breakthroughs in six 3D-sequential-integration battery for electric cars, bikes, process steps that previously were considered showstoppers in terms of manufacturability, reliability, performance or cost. robots & smartphones powers on even when cell fails CoolCubeTM, CEA-Leti’s 3D monolithic or 3D sequential CMOS technology allows vertically stacking several layers of devices with a unique connecting-via density above tens of million/mm2. GRENOBLE, France – Dec. 5, 2018 – This More Moore technology decreases dice area © CEA / Pierre Jayet © CEA The standard multi-cell battery has SIGMA CELLS TECHNOLOGY by a factor of two, while providing a 26 percent had a critical makeover: No longer gain in power. The wire-length reduction enabled INDEPENDANT CELLS by CoolCubeTM also improves yield and lowers will the battery fail if a cell fails. costs. In addition to power savings, this true 3D integration opens diversification perspectives CEA-Leti and CEA-Liten’s Sigma Cells battery, which will be thanks to more integration of functions. From a demonstrated at CES 2019 – CEA Tech booth - can be used performance optimization and manufacturing- for electric equipment ranging from laptop to an electric enablement perspective, processing the top vehicle and is the world’s first three-in-one battery solution layer in a front end of line (FEOL) environment with integrated inverter, charging and battery-management with a restricted thermal budget requires process functions. This revolutionary technology serves as the battery’s modules optimization. brain, governing the smart use of battery cells. If a cell is about to fail, Sigma Cells finds an alternative pathway, activating the

“best” cells and, in the process, preventing downtime. © CEA

Learn more: Learn more: https://bit.ly/2DeV8RN https://bit.ly/2QUgTOG

Flash Memory Summit, held annually in Silicon Weebit Nano and CEA-Leti to demonstrate Valley, is the world’s premiere flash memory conference and expo. It showcases the mainstream brain-inspired neuromorphic demo applications, technologies, vendors and innovations in the multi-billion dollar non-volatile 18 July 2019 – Weebit Nano (ASX: WBT), the Israel-based semiconductor memory and SSD markets that include demanding company seeking to develop and commercialize the next generation enterprise storage applications, smartphones, of memory technology, and CEA-Leti, a global leader in miniaturization tablets, and mobile and embedded systems. technologies enabling smart, energy-efficient and secure solutions for industry, will demonstrate a new neuromorphic demo able to perform precise object Learn more: recognition tasks in an energy-efficient manner at Flash Memory Summit 2019. https://bit.ly/2sc5z6a © AdobeStock ©

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05Efficient, reliable interaction Automated software brings protection against side-channel attacks to the masses 70 PROSE delivers fast, easy cybersecurity testing to IoT devices 71 with complex systems The digital world is now a tangible reality. Users are at the center of a brain-like ecosystem that offers New Binary Edwards Curves provide IoT devices with “by design” protection against physical attacks 72 virtually-zero-latency services, unlimited storage, and massive cognition capabilities. The widespread growth of this digital world will depend on the ability to efficiently connect humans, objects, SIGMAFUSION™ brings real-time machines, intelligence, and the environment and deliver reliable, resilient, and secure solutions. sensor fusion processing to automotive-certified Electronic Control Units for tomorrow’s autonomous vehicles 73 Leti’s research is at the center of the digital world. Our scientists have developed an ultra-fast imager Compact digital burst-image sensor delivers high frame rate, for specific applications, multi-sensor fusion algorithms implemented on micro-controllers for the substantial storage, and energy efficiency 74 next generation in automotive perception, and a fully -automated generic compiler framework to “Virtual” bandwidth brings precision radio positioning to IoT 76 protect software against side channel attacks. We are also working on IoT-empowered, robust low- capacity/long distance connectivity and innovative architectures for high-capacity/short distance 5G field tests at MINATEC and in Scotland confirm benefits communications. Finally, we are tackling the growing threat of cybersecurity to interconnected of novel approaches 77 objects and their data, and on new security attacks and characterization tools.

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PROSE delivers fast, easy cybersecurity testing to IoT devices

Thomas Maurin, he manufacturers of IoT communication channels (Bluetooth Laurent-Frédéric Ducreux devices have typically focused LE, ZigBee, Wi-Fi, and TCP/IP) Leti scientists Ttheir development efforts and uses black-box testing to look on features, energy efficiency, at how a system behaves without and communication capabilities— knowledge of the system’s structure. IoT devices can be this can be to the detriment of In addition, PROSE tests are vulnerable to cyberattacks. security. Today, the IoT is present repeatable and reproducible and The PROSE integrated and in everything from consumer do not require expert knowledge of electronics to industrial equipment cybersecurity. automated test suite makes to medical devices, making it more assessing the security of IoT pressing than ever to effectively PROSE is designed to be both devices fast and easy, even address the security vulnerabilities scalable and customizable, for non-experts. As the IoT of connected electronic devices that making it simple to integrate new grows, the market will need exchange data over interconnected interfaces, test suites, and Common Automated software brings protection networks. Vulnerabilities and Exposures secure devices—with the (CVE) test cases as needed. In its against side-channel attacks to the masses tests to prove it—in order We drew on Leti’s knowledge current form it can be used to scan

© CEA-Leti to gain consumers’ trust. of cybersecurity and embedded for vulnerabilities, check security software and systems and its broad compliance, and measure the experience assessing the security of security of any connected object’s THE BREAKTHROUGH: shared and/or secure hardware and communication channels—the first Electromagnetic signature of the Code polymorphism—the capacity of a program Automated, repeatable, execution of an AES encryption, embedded software to develop line of defense. component to vary its observable behavior at runtime reproducible cybersecurity with code polymorphism. a dedicated (PROSE) test bench testing for mainstream IoT without altering its functional properties—effectively in cooperation with certification This solution is an example of the products. dissimulates information about a system’s physical organization Bureau Veritas. What kind of tool and approach needed properties from hackers trying to launch side-channel makes PROSE so innovative is that for emerging certification schemes

WHY IT MATTERS: it seamlessly integrates security as per the new European attacks. List has developed a toolchain to automate This innovative test bench test suites for heterogeneous Cybersecurity Act. countermeasures against these attacks. addresses a crucial gap in the development of connected Damien Couroussé n computer security, side-channel We used code polymorphism to make devices—security—that attacks gather information a component’s behavior unpredictable RESEARCH PARTNERS: CEA-List scientist is essential to gaining Bureau Veritas with LCIE and 7Layers. about a system’s physical to the attacker. Our work built on consumers’ trust. I Further reading: • “IoT security assessment through the interfaces P-SCAN test bench parameters—power consumption, previous research conducted under electromagnetic radiation emissions, two projects backed by the ANR platform,” 2018 Design, Automation & Test in Europe Conference & Exhibition (DATE). NEXT STEPS: Continue Thomas Maurin, Laurent-Frédéric Ducreux, George Caraiman, Philippe Sissoko. THE BREAKTHROUGH: execution times—and use the (France’s national research agency): to work with IoT device A toolchain to automate the information to hack cryptographic COGITO on runtime code generation manufacturers and analyze implementation of cybersecurity algorithms. Many software and to secure devices (2013-2017) and emerging cybersecurity software to protect against side- hardware countermeasures against PROSECCO on formally-proven threats to effectively update channel attacks. side-channel attacks have been protections for secured compiled the test suites in PROSE. developed. However, most of code (2015-2019). Here, we combined WHY IT MATTERS: them, like masking, are ad hoc and lightweight specialized runtime code Demand for automated require additional development generation with the optimization solutions to the problem of for the specific hardware or code capabilities of static compilation to side-channel attacks against they are designed to protect. create a highly-configurable solution increasing numbers of Security components are now that can meet a variety of performance electronic devices is high. found in everything from computer and security requirements. Test results bootloaders to household objects showed that programs protected NEXT STEPS: Port the like light bulbs, creating a need for using this solution are very secure and toolchain to the RISC-V automated solutions to the problem meet the performance requirements architecture. of side-channel attacks that can be of systems with very limited memory implemented anywhere. and processing power.

RESEARCH PARTNERS: Karine Heydemann, Associate Professor at the Sorbonne Université and Laboratoire d’informatique de Paris 6.

Further reading: • “Automated Software Protection for the Masses Against Side-Channel Attacks”, ACM Transactions on Architecture and Code Optimization (TACO), 2019. Nicolas Belleville, Damien Couroussé, Karine Heydemann, Henri-Pierre Charles. © CEA-Leti

70 71 LETI 2019 Scientific Report I Highlights 05 LETI 2019 Scientific Report I Highlights 05 SIGMAFUSION™ brings real-time sensor fusion processing to automotive- certified Electronic Control Units for tomorrow’s autonomous vehicles

s autonomous vehicles in-depth knowledge of embedded Tiana Rakotovao gain traction, automotive software and systems. Specifically, Leti scientist Aperception systems are we were able to come up with a garnering increased interest from mathematical solution while factoring researchers and manufacturers in the integration requirements of Sensor fusion—crucial to alike. Crucial to safety, perception the target system. SIGMAFUSION™ systems leverage sensors—LiDAR, can be integrated into low-cost, automotive perception radar, and cameras—to monitor the low-power automotive-certified systems—is now environment. Sensor fusion is used hardware, where it enhances the Side-channel (electromagnetic) measurements compatible with the to process high-bandwidth data from safety of sensor fusion hardware and

during a cryptographic calculation. Morel © CEA-Leti / Chr. low-cost, low-power these sensors in real time. However, software integration. requirements of the until now, sensor fusion has only automotive industry. been implemented on desktops or We will now shift our focus to high-end GPUs, which do not meet developing additional functions for New Binary Edwards Curves provide IoT devices SIGMAFUSION™ will automotive safety requirements. To tomorrow’s automotive perception make sensor fusion safer move autonomous vehicles forward, systems with the goal of building a and tomorrow’s sensors the automotive industry needs to complete perception system based with “by design” protection against physical attacks smarter. bring these capabilities to low-cost, on SIGMAFUSION™. We will then low-power hardware certified for move the system as close as possible Antoine Loiseau, lliptic Curves Cryptography security standards (284-bit security) automotive applications. to the sensors—enabling lower system Jacques Fournier (ECC) is perhaps best known and compatible with IoT devices with costs and energy consumption. The Leti scientists for its recent use in the world embedded 32-bit general-purpose We developed SIGMAFUSION™, closer the system is to the sensors, E THE BREAKTHROUGH: of cryptocurrency. This type of processors. Specifically, we leveraged a patented mathematical and the “smarter” the sensors become: A patented mathematical and cryptography, known as asymmetric, Leti’s expertise in algebra, number algorithmic framework that enables These smart sensors directly provide algorithmic framework for is utilized for public-key and digital theory, and cryptography as well as the real-time processing of sensor high-level information—like a Elliptic Curves Cryptography processing sensor fusion data signature protocols. Despite a knowledge of physical attacks like fusion on certified automotive kinematic analysis of obstacles in the in real time. is a fast, low-power, and rapidly-evolving environment shaped side channel and fault attacks. Leti’s Electronic Control Units (ECUs). We environment—instead of raw data secure technology capable by advances in the mathematics expertise in embedding software on drew on Leti’s capacity to combine that must be processed to extract

that underpin elliptic curves and the 32-bit processors was also crucial. WHY IT MATTERS: early-stage scientific research with actionable information. of meeting the immediate SIGMAFUSION™ will make advent of new physical attacks, ECC Finally, Leti’s computing clusters were security needs of the IoT— hardware and software standards have remained pretty much used to generate the new curves’ but only if it is inherently integration safe, crucial to the same for decades. In addition, parameters. The BEC protocol the future of automotive resistant to physical attacks. ECC is computationally “slow” and developed offers the advantage of perception systems. does not meet the performance being intrinsically secure with regard needs of IoT applications. To meet to physical attacks. the growing security demands of NEXT STEPS: THE BREAKTHROUGH: Develop additional the IoT and, specifically, the urgent We implemented the BEC protocol New elliptic curves (Binary functions like free space need for fast, low-power, securely- on RISC-V architectures. The next Edwards Curves) for asymmetric assessment, safety zone implemented cryptography, we step will be to implement it on more cryptography in IoT devices estimation, and estimation looked at a promising variation on mainstream ARM processors. with limited computing of obstacle dynamics; elliptic curves: Binary Edwards Curves resources. make sensors “smarter” by (BEC). During the course of the research, increasing sensor/computing we successfully tested a new type WHY IT MATTERS: integration. Low-power, high- We drew on a broad range of know- of attack based on machine learning performance cryptographic how available at Leti to come up with for template analysis, which would implementations for IoT a new set of Binary Edwards Curves suggest that new countermeasures devices will facilitate the capable of meeting the highest are needed. widespread adoption of © chombosan - Fotolia.com powerful cryptography to protect IoT systems. RESEARCH PARTNERS: N/A NEXT STEPS: Further reading: • “General Inverse Sensor Model for Probabilistic Occupancy Grid Maps Using Multi-Target Sensors,” in Proceedings of the Third International Symposium on Improve the implementation Further reading: • “Binary Edwards Curves for intrinsically secure ECC implementations Mathematical Theory of Networks and Systems (MTNS), 2018. for the IoT,” SECRYPT 2018. of the technology to protect R. Dia, S. Lesecq, J. Mottin, D. Puschini. Antoine Loiseau and Jacques J. A. Fournier. • “Evaluation of Occupancy-Grid Resolution through a Novel Approach for Inverse Sensor against new classes of side- • “Méthode cryptographique sur courbes elliptiques binaires d’Edwards,” Patent: Modeling,” 20th IFAC World Congress, 2017. channel attacks based on FR3071081. September 2017. R. Dia, J. Mottin, T. Rakotovao, D. Puschini, S. Lesecq. machine learning. Antoine Loiseau and Jacques J. A. Fournier.

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Microchip of the 3D stacked burst image sensor.

Compact digital burst-image sensor delivers high frame rate, substantial storage, and energy efficiency

Laurent Millet By doing away with the analog capacitances Leti scientist traditionally used to store burst-image sensor data, Leti researchers are enabling higher performance slow-motion video capture—a boon to research and industry. © CEA-Leti

low-motion video capture is useful in both research Two 3-frame sequences to THE BREAKTHROUGH: and industrial environments. It can be employed to evaluate beam persistence First-ever burst-image observe and analyze high-speed physical events like on A-type and B-type pixels, S showing a small persistence sensor with integrated cracks propagating or bubbles bursting, as well as in the digital storage. study of plasma. Currently, however, the length of slow- on the A-type pixel. motion video footage—captured at frame rates in excess WHY IT MATTERS: of several millions images per second—is limited to what At five million frames can be stored in memory embedded in the sensor. per second, this advance will enable new analysis We designed a novel 3D stacked burst-image sensor with capabilities for research integrated digital storage. This is the first-ever digital burst and enhance industrial imager. Our innovation allows the use of digital memory productivity. like RAM, which is more compact than analog capacitance- based storage and provides much better immunity to NEXT STEPS: Increase the parasite effects like signal leakage or photo-current sensor’s frame rate and reaching analog memory. storage capacity. In conventional sensors the analog capacitances are either inside the pixel, where storage capacities—and thus video length—are restricted by space, or outside the pixel in peripheral memory. Peripheral memory offers more space, but creates data Pixel cross-section detail, transmission issues that limit the frame rates of larger sensors. This with the photodiode and architecture is also plagued by high power consumption. readout circuits (top) and memories (bottom). Leti’s multi-layer design, simulation, and verification capabilities and hybrid bonding technology positioned us to use 3D stacking: We designed a matrix of 50 µm x 50 µm photodiodes with a fill factor of 80% on the top tier, a per-pixel readout and ADC circuit to perform high-speed conversion, and data storage in the bottom tier.

We completed an initial prototype and are now investigating ways to RESEARCH increase the sensor’s frame rate and storage capacity—possibly by PARTNERS: STMicroelectronics Further reading: •"A 5 Million Frames Per Second 3D Stacked Image Sensor with In-Pixel using digital signal compression. (imaging and advanced Digital Storage," IEEE ESSCIRC Conference 2018. digital node); Icube L. Millet, M. Vigier, G. Sicard, N. Margotat, F. Guellec, S. Martin, W. Uhring. (testing and optical characterization).

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IoT

François Dehmas, Florian Wolf, Sébastien de Rivaz Leti scientists © Shutterstock “Virtual” bandwidth brings precision radio positioning to IoT One of the challenges to owerful positioning systems “virtual” bandwidth increase. And radio-based positioning can bring a number of larger bandwidth means better 5G field tests at MINATEC technology is a narrow Penhancements to IoT devices ranging and positioning. Specifically, and open the door to completely we determined the specifications bandwidth that limits new applications, from asset tracking for the physical layer in the target and in Scotland confirm benefits ranging and, therefore, and smart city solutions to wildlife, system, developed algorithms to precision. Leti researchers livestock, and environmental receive the RF signal, and tested of novel approaches Morel © CEA-Leti / Chr. came up with a novel monitoring. Our research at the the system’s performance using a solution for increasing Smart Objects Communication software-defined hardware platform Laboratory includes low-power modified for the experiment. Jean-Baptiste Doré omorrow’s 5G access network unlicensed 5 GHz band to maximize bandwidth that delivers wide-area (LPWA) networks and, Leti scientist will utilize spectrally-efficient throughput by aggregating carriers. positioning accurate to specifically, radio-based positioning Our solution performed 20 times Twaveforms and new (or new Similarly, building on earlier cognitive within 10 meters. technology. One of the challenges better than conventional time- ways of using) spectra. In terms of radio research, the use of the BF- presented by LPWA networks is the based ranging, corresponding to Leti is staying ahead of waveforms, our research built on OFDM waveform in the 700 MHz use of a narrow-band signal, which a level of accuracy of around 10 the state of the art in 5G earlier work on filtered waveforms to band was studied for high-speed THE BREAKTHROUGH: makes precise positioning difficult. meters. Now that our solution has telecommunications by develop a new BF-OFDM waveform and long-range communications. A ranging estimation protocol to enable multiple-in, multiple- A transmission, performed on a and algorithm accurate to been tested, we plan to explore developing new waveforms We developed a solution that multi-antenna systems that could to enable multi-service out (MIMO) communications fragmented spectrum, was tested in within 10 meters with a with good frequency-localized Scotland at 700 MHz, where a range LPWA physical layer. exchanges a series of packets over improve ranging precision in harsh scenarios. The institute drew different frequencies resulting in a environments. waveforms. A thorough comparison of 20 km was achieved. on know-how covering the of the waveforms proposed for 5G WHY IT MATTERS: entire wireless transmission showed the interest of our proposed Finally, we also explored millimeter This advance will create new RESEARCH PARTNERS: chain to successfully waveform for application to 5G waveforms, studying communication opportunities in IoT and, Part of PhD research conducted by Florian Wolf, supervised by Jean-Pierre Cances of the University of Limoges. complete groundbreaking services (very high bandwidth, low- systems for terrestrial or satellite especially, low-power indoor 5G field tests. latency communications and IoT). backhaul links in the 26 GHz to 28 and outdoor positioning Further reading: • “Improved multi-channel ranging precision bound for narrowband Our waveform was also implemented GHz band. We kicked off a study of systems. LPWAN in multipath scenarios”, IEEE Wireless Communications and Networking Conference (WCNC), 2018. and deployed on the MINATEC new architectures and modulations Florian Wolf, Christophe Villien, Sébastien de Rivaz, François Dehmas, Jean-Pierre Cances. THE BREAKTHROUGH: campus, and the experiment dedicated to the so-called sub-THz NEXT STEPS: • “Coherent Multi-Channel Ranging for Narrowband LPWAN: Simulation and New insights into the entire confirmed the coexistence of the spectrum (90 GHz to 300 GHz) to fuel Improve performance Experimentation Results”, IEEE 15th Workshop on Positioning, Navigation and wireless transmission chain three types of services without using the design of communication systems in harsh environments Communications (WPNC), 2018. spanning digital, analog, and guard bands between the spectra that are inherently robust to spectral with multiple antennas. Florian Wolf, Jean-Baptiste Doré, Xavier Popon, Sébastien de Rivaz, François Dehmas, Jean-Pierre Cances. antenna signal processing. allocated to the different services. increase related to phase noise.

N D ’ R O O R T From a spectrum usage Some of this work has reached the C 2 WHY IT MATTERS: E 0 L 1 5G telecommunications perspective, we completed design prototyping stage, bringing us a E 8

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Leti scientist David Lachartre won an Electron d’Or (Gold will be a key enabler on and implementation work on a major step closer to real signal

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’ D the “Connected Objects and Smart Buildings” category, was presented by Frédéric Gilbert, who heads the French Directorate technology will be the silicon industry’s main growth driver. UNB transceiver General for Enterprise Nanoelectronics Bureau. It recognized RESEARCH PARTNERS: the contributions of Lachartre and his team* to ultra-narrowband Supervision of a PhD candidate at CNAM Paris. wins top French communications and, specifically, the development of an ultra- NEXT STEPS: Explore new narrowband CMOS 65 nm transceiver for SigFox. The device bands from millimeter-wave Further reading: • “Block-Filtered OFDM: A new promising waveform for multi-service electronics award solves several of the technical challenges that affect ultra- scenarios”, Proc. IEEE International Conference on Communications (ICC), 2017. narrowband signaling: It is resistant to CFO offsets and drifts of to THz to optical and new Best paper award, wireless symposium. in Connected ±75 Hz (i.e. 150% of the 100 Hz channel) and 35 Hz/s, respectively, network paradigms including Robin Gerzaguet, David Demmer, Jean-Baptiste Doré, Dimitri Kténas. Objects and Smart with sensitivity losses of just 1 dB, allowing the circuit to function non-terrestrial access, • “5G Multi-Service Field Trials with BF-OFDM”, IEEE Globecom Workshops, 2017. without a TCXO. In DBPSK 100 b/s transmission mode, an error satellite networks, and Robin Gerzaguet, Simon Bicais, Patrick Rosson, Jeremy Estavoyer, Xavier Popon, Buildings category vector magnitude (EVM) better than 5% was measured for David Dassonville, Jean-Baptiste Doré, Benoit Miscopein, Manuel Pezzin, David Miras, output powers up to 10 dBm. For Lachartre, the award is proof vehicular communications. Dimitri Kténas. that years of teamwork with his Leti colleagues has paid off.

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Market news from our R&D partners

CEA’s precise localization technology boosts quality control and efficiency in Desoutter’s products

GRENOBLE, France – June 26, 2019 – Desoutter Industrial Tools and CEA-Leti & EFI Automotive CEA-Leti today announced a precise, new indoor-location system launch project to improve that enables factories to monitor tools in real time and help manage reliability and speed of low-cost their use by workers to improve efficiency, safety, security and quality control on assembly lines. electronic devices for autos Based on a CEA-Leti algorithm, embedded receptor © folienfeuer - Fotolia.com architecture and ultra-wide-band (UWB) technology, the system has been optimized and customized for GRENOBLE and BEYNOST, France – a variety of essential factory-floor jobs supported by Model predictive control (MPC) is an advanced method of Desoutter, a global leader in industrial electric and Sept. 18, 2018 – Leti, a research institute process control that makes use of a model of the system pneumatic assembly tools and other equipment. Easy of CEA Tech, and EFI Automotive, a to predict its behavior. The control law is based on an to use deployment efforts have been significantly leading international supplier of sensors, optimization technique that computes the system inputs, reduced with optimized automated functions actuators and embedded smart modules taking into account the reference that the system output has compared to competing systems. for the automotive industry, today to follow, together with the effort (energy) that is applied on the system inputs and some constraints that may exist within announced a project to dramatically the system, typically saturation of the system inputs. Learn more: (Jérome Deduytsche) © UtopikPhotoCEA improve reliability and response time https://bit.ly/33o3L6Y of low-cost automotive components by equipping the devices with sophisticated Learn more: https://bit.ly/2KTLmIM model predictive control techniques.

CEA-Leti & Radiall to design innovative RF components for 5G networks and photonics components for harsh environments CEA-Leti and Orolia announce FlexFusion, GRENOBLE, France – June 26, 2019 – Leti, a research institute of CEA a powerful positioning & navigation technology Tech, and Radiall, a global manufacturer of leading-edge interconnect solutions, announced a five-year common lab to design innovative GRENOBLE, France – June 26, 2019 – Leti, a research institute of antennas, radio frequency (RF) to meet infrastructure requirements CEA Tech, and Orolia, a leader in accuracy and performance for of 5G networks and photonics components for harsh environments. terrestrial, aeronautic and naval transportation positioning, navigation Announced during Leti Innovation Days in Grenoble, the common lab will develop low profile, & timing applications, today announced a new sensor-data-fusion millimeter-wave antenna solutions for backhaul/fronthaul applications. 5G networks require high-speed, point-to-point communication at millimeter-wave frequencies. The explosive engine that ensures resilient positioning and navigation even in cases increase in ultra-dense 5G infrastructure systems required to accommodate high-speed of global navigation satellite system (GNSS) jamming or spoofing. mobile data traffic and Internet of Things data is fueling a demand for low-cost, robust and Called FlexFusion, the algorithm technology processes data from GNSS, inertial management reliable RF subsystems. These include compact and reconfigurable antennas that can be © UtopikPhotoCEA © UtopikPhotoCEA units (IMU) and odometers to provide precise positioning in all conditions. integrated on urban buildings and street furniture with minimal deployment cost. Learn more: MoreLearn more:details : https://bit.ly/2DffKJE http://bit.ly/2zZauZhhttps://bit.ly/2XLt5Tq © fotolia

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Awards pp. 82–85 — Management p. 87 — People PhD research pp. 88–91 © Shutterstock

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Awards Leti engineer helps bring greater safety to the visually impaired

High-density memory The Design Automation Conference (DAC) has been bringing the IC chip design and research wins Best Poster design automation community together for five decades. Held in San Francisco, DAC 2018 featured sessions on design, of course, but also on embedded software and systems and Award at NVMTS2018 automotive technology, security and privacy, IoT, design infrastructure, and smart systems. Leti engineer Olivier Debicki brought home the 2018 Designer Track Best Presentation in Japan Award for his talk on the EU H2020 project INSPEX, which applies multi-sensor obstacle detection technologies originally developed for automotive applications to navigation for the visually impaired. The CEA’s SigmaFusionTM sensor fusion technology was used to Leti PhD candidate Rana Alhalabi won the Best Poster Award at the 18th Non-Volatile develop a model of the environment from LiDAR, radar, and ultrasound sensors on a white Memory Technology Symposium in October 2018 in Sendai, Japan. This high-level cane, effectively creating a buffer zone to keep the user safe. Assisted living solutions for international event brings together leading memory technology experts to discuss the the disabled are not something you encounter every day at tech conferences. The entire state of the art in FLASH, FeRAM, PCRAM, RRAM, and MRAM. The award-winning project team can be proud not only of the award, but also of contributing to a project that poster presented the development of a high-density SOT-MRAM memory array will make a positive impact on the lives of the visually impaired. using a single transistor by Alhalabi and her team*. They replaced one of the usual two transistors with a unidirectional diode. This improved the area density by 20% “Integrated Portable Multi-sensor Obstacle Detection Device. and required less control logic, making the array suitable for high-density memory Application to Navigation for Visually Impaired People.” architectures. Alhalabi, who is investigating logic circuits and memory design with Olivier Debicki, Nicolas Mareau, Laurent Ouvry, Julie Foucault, Suzanne Lesecq, Spintec and Leti, came to the CEA to pursue her PhD after completing a Master’s Gabriela Dudnik, Marc Correvon. degree in Nanoelectronics and Nanotechnology at Grenoble-Alpes University.

*Etienne Nowak, Ioan-Lucian Prejbeanu, and Gregory di Pendina

Nanocharacterization platform contributes to tomorrow’s non-volatile memory

ERC Consolidator Grant W A R D S A S D A R W will drive advances in A

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at Leti S organization also actively supports innovation and achievement through awards, one of which went to Munique Kazar Mendes, who was completing her PhD at Leti at the time of the award. She came in second in the Solid State Ionics Symposium Best Poster European Research Council Consolidator Grants provide investigator-led funding competition for her research on the electrochemistry of resistivity changes in Te-based to mid-career researchers with the goal of boosting the impact of their work and, conductive-bridge memories. The overriding purpose of her work is to pave the way ultimately, fueling innovation in Europe. Leti scientist François Andrieu, who leads for conductive bridge resistive memories (CBRAMs), currently in the running for the the institute’s advanced CMOS lab, was awarded a Consolidator Grant in 2018 for his next generation of non-volatile memory. Kazar Mendes came to Grenoble from Brazil to My-CUBE project on 3D integration of a logic/memory cube for in-memory computing. complete her Master’s in Electrochemistry at Grenoble Institute of Technology (2015) and His research will leverage non-volatile resistive memory, new energy-efficient nanowire her PhD at Leti (2018). Her thesis on subquantum resistive memories investigated the transistors, and 3D monolithic technology to develop a functionality-enhanced system electrochemical reactions and ionic transport involved in resistive switching. According to with advanced integration of logic and memory. The capacity to bring logic to memory/ Kazar Mendes, the Nanocharacterization Platform’s ability to perform advanced analyses storage will be a game changer for artificial intelligence, machine learning, data of complex structures like resistive memories helped position her research as a major analytics, and any data-abundant computing system. More broadly, it will serve as a key contribution to the development and optimization of this technology. computational kernel for the next generation of low-power, energy-efficient integrated circuits developed in Europe. Just 12% of the proposals received by the ERC were “Electrochemistry of resistivity changes in Te-based conductive-bridge memories.” selected for funding in 2018, proof that Leti research is at the head of the class in Europe. Munique Kazar Mendes, Eugénie Martinez, Olivier Renault, Rémy Gassilloud, M. Bernard, J.M. Ablett, N. Barrett.

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Awards Leti and STMicroelectronics support award-winning PhD research

Novel research on The SPIE Advanced Lithography conference is the leading global lithography event, showcasing a comprehensive lineup of lithography and patterning topics crucial to the nanopillar growth wins future of many technologies. Charles Valade brought home the Karel Urbanek Best Student Paper Award, sponsored by KLA Corporation, from the 2019 SPIE Advanced Lithography student award conference (Metrology, Inspection, and Process Control for Microlithography session) in at international San Jose, California. Valade, who is currently completing his PhD in 3D SEM computational metrology with Leti’s Computational Lithography Group and STMicroelectronics’ Resolution Enhancement Techniques conference team, developed a model to improve the 3D reconstruction of images captured using tilt-beam SEM. The results were coherent with conventional 3D measurement techniques and reliable reconstructions on patterns of various heights were The Americas International Meeting on Electrochemistry and Solid State Science completed using a single calibrated model. This award is proof that the kind of cooperation between scientific research (AiMES 2018), a joint conference of the 234th Meeting of the Electrochemical Society and industrial R&D that Leti is known for is an effective strategy. As a young researcher at Leti, Valade is already making a (ECS) and the XXXIII Congreso de la Sociedad Mexicana de Electroquimica (SMEQ) name for himself in the international lithography community. was held in Cancun, Mexico. AiMES meetings provide a valuable opportunity for researchers from government labs, academic institutions, and industry to share their “Tilted beam SEM, 3D metrology for industry.” latest results in a unique environment at the crossroads of electrochemical and solid Charles Valade, Jérôme Hazart, Sébastien Bérard-Bergery, Elodie Sungauer, Maxime Besacier, Cécile Gourgon. state science. Marouane Mastari won the Best Student Presentation Award at the SiGe, Ge, and Related Compounds: Materials, Processing, and Devices Symposium for his research on the coalescence of SiGe nano-pillars. Mastari took advantage of the wide range of state-of-the-art resources at Leti to characterize SiGe pillars grown on a A W A R D S A SiO2 based nano-template at different stages of the coalescence process. This type of S W

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A “Nano-Heteroepitaxy: An Investigation of SiGe Nano-Pillars Coalescence.” Marouane Mastari, Matthew Charles, Yann Bogumilowicz, Patricia Pimenta-Barros, breaks new Maxime Argoud, R. Tiron, Anne-Marie Papon, Denise Muyard, Nicolas Chevalier, ground in Didier Landru, Youngpil Kim, Jean-Michel Hartmann. Grenoble’s quantum positioning computing ecosystem technology for IoT earns recognition from the applications European Research Council International junction The 2018 15th Workshop on Positioning, Navigation and technology community Communications (WPNC) brought together stakeholders Leti’s Maud Vinet, IRIG’s Silvano De Franceschi, and spanning industry and academia to discuss hot tech recognizes Leti advances Institut Néel’s Tristan Meunier won a European Research topics like IoT, Industry 4.0, autonomous vehicles, and 5G Council (ERC) Synergy Grant for their QuCube project to communications. Florian Wolf, a PhD candidate at Leti, in materials develop a quantum processor. The award-winning principal received the WPNC Best Paper Award for research that investigators’ home institutions will receive ERC funding could lead to an alternative to Global Navigation Satellite Leti research won one of two Best Paper Awards at the 19th International Workshop on of up to €14 million over a maximum of six years starting System positioning for a wide range of IoT applications. Junction Technology 2019. IWJT is a high-level international event showcasing the latest in 2019. The team will pursue their groundbreaking work The joint award recognized research Wolf conducted advances in research on junction formation technology for semiconductor applications. scaling up the single Si CMOS qubit they developed with Jean-Baptiste Doré, Xavier Popon, Sébastien de Leti’s Philippe Rodriguez and his team explored the impact of alloying elements Co in 2016. To do so, they will draw on the wide array of Rivaz, François Dehmas (Leti), and Jean-Pierre Cances and Pt on Ni-based contact technology with the goal of increasing the thermal stability interdisciplinary skills available in Grenoble’s renowned sci- (the University of Limoges) on a new location technique of Ni-GeSn contacts. In particular, they studied the effects on the solid-state reaction tech community. Leti will provide access to VLSI technology that utilizes phase-coherent multi-channel processing of and on surface roughness and electrical properties. Rodriguez attributes the win to the and vertical CMOS integration at the nanoscale. IRIG, narrowband signals. According to Wolf, Leti’s capacity to relentless determination, investment, and talent of PhD candidate Andrea Quintero, which has been studying the quantum properties of Leti innovate at all stages, from theoretical research through who joined Rodriguez’s team in April 2017. Rodriguez was in good company at IWJT: devices for fifteen years, will contribute knowledge of to proof-of-concept implementations, was instrumental the other Best Paper Award went to acclaimed international advanced materials the physics of electrons. Finally, Institut Néel, which has in this award-winning work. scientist Sigefusa Chichibu of Tohoku University. been a pioneer since the early days of electron spin qubits, will bring expertise in electron spin qubit manipulation in “Coherent Multi-Channel Ranging for Narrowband “Effects of alloying elements (Pt or Co) on nickel-based contact technology semiconductors. For Vinet, the ERC Synergy Grant will LPWAN: Simulation and Experimentation Results.” for GeSn layers.” provide an opportunity to broaden her scientific scope and, especially, collaborate with basic research scientists. F. Wolf, J.-B. Doré, X. Popon, S. de Rivaz, Andrea Quintero, Patrice Gergaud, Jean-Michel Hartmann, Vincent Reboud, F. Dehmas, J.-P. Cances. Eric Cassan, Philippe Rodriguez.

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Emmanuel Sabonnadière Jean-René Lèquepeys Ludovic Poupinet Laurent Clavelier

Chief Executive Officer Deputy Director - Deputy Director - Chief Executive VP – Chief Technology Officer Operating Officer Chief Platform Officer

Head of the Architecture and IC Head of the Technical Design Embedded Software Division Platform Division © L. Godart - CEA © B. Zwarts Jayet © P. © L. Godart

Thomas Ernst Laurent Hérault Éric Dupont-Nivet Olivier Faynot

VP for Science VP for Europe VP for Institutional Relations Head of the Silicon and Technology Components Division © P. Jayet © P. © P. Jayet © P. © L. Godart Akunah © B. Ramain -

Agnès Arnaud Sébastien Dauvé Patrick Chaton Jean-Claude Royer

Head of the Optics Head of the Systems Division Head of the Health Division Head of Clinatec and Photonics Division © P. Jayet © P. Jayet © P. © Laurence Godart © Utopikphoto

Catherine Ogier Hughes Metras Carlo Reita Michael Tchagaspanian

Communications IRT Nanoelec Director, strategic partnerships Executive VP Sales & Manager and planning, CTO office Technical Marketing © CEA-Leti © Laurence Godart © L. Godart © P. Jayet © P.

Thomas Signamarcheix Fabrice Geiger Thierry Bosc Philippe Ruffin © CEA-Leti / G. Cottet Startup Program Manager VP Strategic development, Head of Investment and Clinatec Endowment Fund CTO office Supplier Partnership Group

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PhD research at Leti

Leti, a partner of Grenoble-Alpes University, welcomes young scientists with a passion for research and a desire to advance knowledge and make a positive impact on society. PhD students from around Interdisciplinary research the world come to Leti for the opportunity to embrace disruptive for tomorrow’s quantum computers scientific inquiry and develop breakthrough concepts for real-world applications. Loïck Le Guevel is currently doing his PhD research at Leti, where he is designing cryogenic-proof CMOS circuits fabricated at STMicroelectronics through CMP Grenoble, testing them on state-of- At Leti, PhD students work alongside some of the best minds in the-art equipment at CEA basic research lab LaTEQS, and applying science and collaborate with global tech companies in an international them to co-integrated quantum devices like qubits. Leti’s far-reaching environment. And, as the following testimonials from past and current research capabilities are preparing Le Guevel for a bright future Leti PhDs show, their experiences are as diverse as our research. in quantum computing.

fter studying quantum mechanics “Access to IRIG’s state-of-the-art cryostats Aand completing an internship in to test our circuits is exceptional in the quantum information theory, Loïck Le Guevel was seeking field of microelectronics.” an interdisciplinary environment for his PhD research. Leti fit the bill, providing opportunities for Le Guevel to deepen his knowledge of integrated electronics, industrial R&D, and CMOS fabrication processes. Today, he is working with Advanced materials research scientists at Leti and IRIG who, together, cover all aspects of for future-generation CMOS devices the fabrication, characterization, and study of FDSOI qubits.

After completing a graduate degree in engineering, Léa Dagault was Leti’s partnerships have been particularly beneficial seeking a PhD opportunity that would allow her to pursue her growing to Le Guevel’s research. The circuits are designed at interest in semiconductor materials. She wanted to do lab research, Leti department DACLE, co-integrated with quantum but in an environment with close ties to the microelectronics industry. devices made at Leti department DCOS, and tested LETI ADVANTAGES Leti was the perfect match. at IRIG—a level of coordination made possible by • The availability of knowledge Quantum Silicon Grenoble, of which Leti is a member. in virtually any field anosecond laser annealing is a “I came to Leti for the wide After he completes his PhD, Le Guevel would like to • Experts willing to help fairly new method that brings range of materials characterization N stay in research and be part of developing a quantum with development processes the surface of a material to very high methods and expertise available, and what I found here lived up computer. Specifically, he would like to focus on and new platforms temperatures while maintaining to my expectations!” new solutions like cryogenic electronics toolboxes, • Opportunities to participate the rest of the material at a low temperature, making it a electronics-friendly cryogenic setups, and new readout in Leti partnerships like promising option for future generations of CMOS devices. processes and multiplexing schemes assisted by Quantum Silicon Grenoble Leti PhD candidate Léa Dagault is investigating the formation cryogenic electronics. and origins of defects in laser-annealed SiGe layers and the electrical activation and deactivation of dopants in SiGe layers subjected to nanosecond laser annealing. Depending on her findings, her research could contribute to the development of devices with laser-annealed SiGe.

Today, Dagault is taking advantage of the wide range of characterization equipment and multidisciplinary experts available at Leti to further her PhD research. And, LETI ADVANTAGES because her research is co-supervised by a Leti scientist • Co-supervision of PhD and a scientist from CNRS LAAS (the French National research by Leti scientist Research Agency’s Laboratory for Systems Analysis and and CNRS scientist to address Architectures), she is able to address her work from basic both fundamental physics and and applied research perspectives. application-driven approaches Dagault sees her future in new energy technologies. After • Access to a wide range she completes her PhD, she would like to move into R&D of advanced characterization in a field that supports the energy transition, such as equipment and electronic-waste recycling or solar energy. multidisciplinary experts

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> University of Glasgow and completing his Master’s thesis at ETH Zurich, Dalgaty came to Leti to From insect brains to advanced circuits conduct research for his PhD in neuromorphic computing and, specifically, to work on an advanced Thomas Dalgaty came to Leti to do his PhD research by chance— circuit design project. He didn’t know much about Leti then, but, after speaking with Leti scientists Elisa Vianello and Barbara de Salvo, he was won over by the multidisciplinary nature of the project or maybe it was serendipity. A Leti partnership with researchers and the opportunity of producing some innovative research. in Zurich is what ultimately led Thomas to Grenoble. Today, he is investigating technologically-plausible, insect-inspired While at Leti, Dalgaty has gained experience designing on a special wafer made by STMicroelectronics neuromorphic computing at an institute with multidisciplinary using standard CMOS processes, and then sent to Leti for integration of the resistive memory know-how that has expanded his scientific horizons. technology—something he feels he would not have had the opportunity to do elsewhere. He has also worked with Leti scientists in fields outside his own, like MEMS and cryptography. ith research at the interface between Welectronics, machine learning, and Today, Dalgaty is fiercely passionate about what he does. He is starting to develop his own ideas computational biology and day-to-day tasks about neuromorphic computing as a whole and fully intends to stick around to help shape the next that range from laying out circuits to performing big revolution in computing. “The next computing revolution will be at electrophysiological analyses on crickets—PhD the crossroads of technological plausibility, candidate Thomas Dalgaty’s work is nothing if not LETI ADVANTAGES machine learning, and brain-inspired concepts, varied! • Access to multidisciplinary know-how and I would like to be a part of it.” • The ability to develop large-scale processes and implement them on chips using technologies After earning his undergraduate and graduate not available elsewhere degrees in Electronics Engineering with a focus on • French language classes analog circuit design and machine learning at the > • A high-quality living environment with a variety of mountain and outdoor activities

Former Leti PhD right at home at medtech startup Leti is home to some of the greatest minds in microelectronics

Although he admits that he didn’t fully realize it back when he was a Julie Oziat knows how to seize opportunities when student, Pierre-Emmanuel Gaillardon rubbed shoulders with some of they arise. In fact, that’s exactly how she came to Leti the world’s leading microelectronics researchers during his PhD at Leti. for her PhD. After completing a student internship Now an Associate Professor at the University of Utah with two startups at DTBS, the CEA’s Department of Technology for under his belt, Gaillardon looks back on the experience that helped Biology and Health, she knew she wanted to do start his very active and successful career. research, and the CEA’s environment appealed to her. When another PhD candidate withdrew at the last ierre-Emmanuel Gaillardon “Everything we did at Leti was minute, Oziat jumped right in. Pcame to Leti to conduct his PhD industry-focused, so I learned a research on reconfigurable logic broad range of non-scientific skills that have served me well, especially architectures based on disruptive technologies. He took in my startup activities.” lectrochemistry is not a very common topic in medtech “During my PhD I learned about scientific away much more, however! ER&D. But Julie Oziat found a home for her somewhat methods and, more generally, how to unusual PhD research—using an electrode to identify conduct research. This has given me the In addition to working with world-class microelectronics confidence to hit the ground running in bacteria—at Leti. Her unique approach entailed growing my new position at a medtech startup.” researchers, Gaillardon collaborated with a wide range bacteria in a specially-developed macroporous electrode. of junior and senior engineers, learned about patents The electrode captures the electrochemically-active and IP protection, and gained project management and molecules that bacteria produce to communicate with leadership skills that have served him well in his subsequent each other. These molecules can then be used to identify roles in both academia and industry. the strains of bacteria present. The expectations for scientific excellence were high at From developing the electrode to coming up with a Leti and Gaillardon worked hard, of course. What made protocol to detect the electrochemically-active molecules, LETI ADVANTAGES the biggest impression on him, however, was how he was LETI ADVANTAGES Oziat found the support she needed among Leti’s • Access to multidisciplinary know-how and the immediately immersed in the lab activities. • The credibility of the Leti interdisciplinary team at every stage of her project. wider CEA ecosystem (DSV, Clinatec, CEA List, name when defending your After her PhD Oziat was very rapidly hired by medtech CNRS labs at Grenoble-Alpes University) After earning his PhD, Gaillardon went on to a research thesis startup Bioserenity in February 2017 for a newly-created • A big-picture view of the innovations being associate position at EPFL in Lausanne, Switzerland before • An opportunity to learn position. The fast-growing company develops and developed in Grenoble with lab meetings, starting his own lab at the University of Utah, where he project management and commercializes connected textiles for medical diagnostics. MINATEC lunch talks, and the CEA Tech manages a successful research program that investigates leadership skills you can use Oziat is doing R&D on the electrodes used to gather showroom. novel device technologies and design methodologies for beyond the lab electrophysiological signals (ECG, EEG, EMG, etc.) in all • Experience relevant to conducting R&D for a computing and sensor systems. He also co-founded two • A work environment where of Bioserenity’s systems. medtech startup. startups to commercialize the results of his research. you can form lasting friendships © Shutterstock

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Collaborations © Shutterstock

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The French Carnot seal stands for scientific excellence and Partnership professionalism in R&D partnerships with LTM moves GeSn closer to Leti is one of France’s 30 Carnot Institutes. Membership in the Carnot Network is granted to government research nanoelectronics organizations that successfully foster industrial innovation

through R&D partnerships that help improve the / Th. Baron © LTM © CEA-Leti / B. Salem applications competitiveness and growth of their business partners. Thierry Baron Dr. Bassem Salem Research organizations that earn the Carnot seal benefit from government funding aimed at maintaining their Director, LTM Research scientist at LTM © Lillie Paquette / MIT School of Engineering © Lillie Paquette / MIT scientific excellence and developing their professionalism.

Susana Bonnetier ith the ultimate goal of 5G, cyber-physical systems and A long-standing Leti number of Leti departments (interfacial layers, surface cleaning, VP of the Carnot Network creating value through cybersecurity, power electronics partner, LTM develops new have worked with LTM on nanowire fabrication techniques) Carnot Program Manager Winnovation, the French and energy management systems, etching processes for the Asilicon components and to enhance the material’s electrical Carnot institutes establish research medical devices, connected health Leti Scientific Directorate microelectronics industry epitaxy since the partnership performance and structural partnerships with industry, from and personalized medicine. began in the early 2000s. Recently, properties. Leti’s ability to achieve start-ups and SMEs to large and explores innovative the partners have turned their state-of-the-art results on the Learn more about companies. Leti, a Carnot institute To pursue this mission and prepare materials and integration attention to GeSn alloys, which epitaxy of complex GeSn stacks— the Carnot Network: since the creation of the label in the next wave of disruptive approaches. The partners’ offer great promise for tomorrow’s Leti provided the GeSn/Ge stacks www.instituts-carnot.eu 2006, carries out R&D projects technologies for industry, Leti uses research on surface optoelectronic and nanoelectronic used in the research—makes the with approximately 220 enterprises its Carnot funding to encourage treatments to enhance devices. Specifically, electron institute a partner of choice for of all sizes and sectors to develop researchers to engage in early-stage the structural and electrical mobility is theoretically much higher LTM. LTM Directory Thierry Baron breakthrough technologies that research projects and ambitious properties of GeSn in GeSn alloys than in bulk Ge. said, “Collaborating with Leti allows address the major economic scientific collaborations. Specifically, has earned them two However, to effectively utilize the us to work on the development and societal challenges of the a biannual call for exploratory publications in top-tier material’s superior carrier mobility, of prospective materials and st projects stimulates the upsurge of 21 century’s digital, energy and journals. its surface must be prepared technologies with the potential for medical revolutions. new ideas from our researchers, properly to ensure optimal structural transfer to industrial partners.” and regular auditions of top- and electrical properties. Since its creation in 1967, Leti’s down multidisciplinary proposals The partners will continue to mission has been to co-develop lead to the production of generic PARTNER: Leti scientist Jean-Michel Hartmann, collaborate moving forward as LTM (Laboratoire des novel technologies with academic demonstrators that help mature who leads SiGeSn epitaxy research their research on GeSn gains technologies de la and business partners aiming to technological concepts into at Leti, is convinced of the benefits momentum. Dr. Bassem Salem, microélectronique), a research increase industrial productivity tangible and transferable results. of partnerships with academic a research scientist at LTM, said, unit of the French National in many different applicative The Carnot chairs of Excellence and research labs like LTM. “Back in “Working with Leti has also given Center for Scientific Research fields. Today those fields include the international PhD internship 2015 we were able to modify one us the opportunity to introduce (CNRS) and Grenoble-Alpes high performance computing, program are two other R&D boosters of our epitaxy chambers for GeSn new research topics, such as University housed at Leti. embedded artificial intelligence, made possible by Carnot funding. growth under a joint development improving the performance OBJECTIVES: agreement with Applied Materials, of nanoelectronic devices Explore various surface the manufacturer of the RP-CVD by leveraging the unique preparation schemes on GeSn machine. Since then I have been properties of GeSn to obtain the optimal structural investigating the potential for materials”. and electrical features and, photonics offered by this new class ultimately, lay the groundwork of semiconductors. I feel that our IN 2018, CARNOT PROJECTS OPENED NEW AVENUES These projects benefit from our numerous for advances in optoelectronics partnership with LTM will position OF RESEARCH IN: collaborations with national and international academic and nanoelectronics. us to emulate these successes in the • biodegradable electronics and thin film batteries, partners, among them CNRS-LTM, CEA basic research field of nanoelectronics.” laboratories, Spintec, the Grenoble-Alpes University, • monolithically integrated lasers operating RESULTS: The partners recently at room temperature in silicon CMOS wafers, other Carnot institutes, Stanford University, Caltech, co-authored two papers The partners certainly appear to • drug releasing structural hydrogels able to MIT, ETHZ, EPFL, Paul Scherrer Institute, FZ Jülich, (published in ACS Applied be on the right track, with some significantly reduce brain tumor recurrence, University of Twente, and Keio University, to name a Electronics Materials and exciting developments to their • bioinspired implementations of non-volatile few. Working in this way with some of the best teams Applied Physics Letters in 2019) credit. They have successfully memories to simulate human learning processes, in the world in our core research areas is strengthening presenting their research. tackled GeSn from several angles • new cybersecurity strategies made possible Leti’s scientific excellence and professionalism, while by the random nature of resistive memories. reinforcing an open mindset.

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A fruitful decade-long Leti partnership to collaboration between bring nanotechnology Leti and the IRIG/ to breast cancer Biomics research team diagnostics © IRIG / X. Gidrol

Dr. Xavier Gidrol Professor Gilles Favre

Leti’s Department of eti has been collaborating with The NEW DEAL concept combines a A collaboration with eti began working with Professor had been doing with Lipidots®. Leti Technologies for Biology the IRIG/Biomics research team particularly efficient siRNA designed internationally-renowned Gilles Favre in 2017 to initiate a had basically been working on the and Health has been Lfor nearly a decade. One of the by Dr. Gidrol’s team with a lipid cancer researcher Lresearch partnership with IUCT- same thing we had imagined two working with the IRIG/ topics of Leti’s work with Dr. Xavier carrier made by Leti. The carrier can Oncopole, Toulouse University’s decades ago with our nanovectors, Gidrol is siRNA delivery, which transport the siRNA across biological Professor Gilles Favre of Biomics research team cancer center. The idea was to which mimicked lipoproteins. They began back in 2011 with the joint barriers and deliver it locally to the IUCT-Oncopole, Toulouse ® for nearly a decade on bring Leti’s Lipidots nanocarrier had successfully developed stable supervision of a PhD dissertation, target cells.” University’s cancer center, technology to breast cancer nanoparticles compatible with a variety of topics from continued under the French National will help bring Leti’s proven diagnostics. Projects involving Leti, clinical applications. I immediately ® the design and testing Research Agency Facsbiomarker The NEW DEAL project is currently Lipidots nanocarrier IUCT-Oncopole, and biotech startup saw the potential.” of microfluidic systems project and Carnot PANACHE organ- in the preclinical stage. Leti worked platform to breast cancer VNano (and funded in part through for general and cellular on-chip project, and is currently with Gidrol’s team to design and diagnostics. The goal of government innovation financing Industrial transfer of the mature biology, siRNA delivery, ongoing under the EU-funded characterize lipid nanoparticles the project is to get the instruments and by VNano) are Lipidots® technology is well and organs-on-chip. Today, NEW DEAL project to develop a that are more robust in biological technology to a TRL of 4 now underway to prepare the underway with VNano, which has the partners are combining highly-selective local siRNA-based environments; the delivery of siRNA to 6 and produce marked technology for manufacturing and, invested heavily in a production their efforts to develop nanotherapy for inflammatory bowel using these lipid nanoparticles is batches for clinical trials in ultimately, clinical trials. facility to provide the nanocargo a targeted nanotherapy diseases. Gidrol said, “Our long being tested. Gidrol said, “Beyond batches necessary for clinical trials. and fruitful collaboration started investigating biology through partnership with biotech for inflammatory bowel The goal is to replace conventional Research to develop the innovative when I first came at the request of the lens of technology, perhaps startup VNano. ® diseases in EU-funded sentinel lymph node diagnostic Lipidots -based bimodal tracer for the CEA Life Sciences Division. One what interests me the most are techniques based on isotopic sentinel lymph node diagnostics research. of my missions was to work closely the potential benefits for patients. and colorimetric labelling, which has been approved for government with Leti. So, there was a top-down Collaborating with Leti creates new involve invasive surgeries and funding and is now in its early stages. element to it. However, there was a opportunities to bring our work out PARTNER: expose patients to radiation and Cancer researcher Professor PARTNER: ‘meeting of the minds’ between me of the lab and to take a more applied toxic chemicals, with a nanocargo Professor Favre, who also founded Dr. Xavier Gidrol’s IRIG/Biomics and Leti scientist Fabrice Navarro approach to our research.” Gilles Favre of IUCT-Oncopole. technique that will be both safer France’s first-ever nanomedicine research team (CEA/Inserm/ that has carried the partnership and more accurate. According startup, Biovector Therapeutics, OBJECTIVES: Grenoble-Alpes University). through its many iterations to the This long-term collaboration illustrates Develop the nanocargo (a novel to Leti scientist Pascal Mailley, in 1996, is a firm believer in the NEW DEAL project today.” Leti’s capacity to effectively bring bimodal tracer) for sentinel who heads Leti’s Health Research power of nanotechnology to OBJECTIVES: basic and applied research together lymph node diagnostics and Division, “This project is a prime revolutionize medicine. He said, The partners are currently Navarro is coordinating the NEW to develop new medical technologies example of Professor Favre’s “Partnerships with technology engaged in the EU NEW DEAL scale it up for batch fabrication DEAL project for the CEA. “This type and has resulted in advances in preparation for clinical trials. instrumental role in bringing Leti developers and startups are a key project (2017-2021) to develop of therapy could result in a major that will help structure Leti’s technologies to healthcare, both part of our strategy. Collaborating an siRNA-based nanotherapy advance in the treatment of IBD, medical technology roadmaps RESULTS: A minimally-invasive, in terms of building partnerships with institutes like Leti supports for patients suffering from which mainly affects young people. moving forward. highly-selective, non-toxic, with the medical community and value creation. And the work we are inflammatory bowel diseases and economically-competitive contributing to Leti scientific doing on breast cancer is just the like Crohn’s. diagnostic technique for breast committees in charge of developing beginning. Lipidots® technology Over the past cancer patients leveraging our healthcare roadmaps.” has the potential to improve the RESULTS: ® decade, the partners have Leti’s Lipidots nanocarrier Professor Favre said, “The first time diagnosis and treatment of many co-authored a number of technology (see p. 46). I went to Leti in 2017 I saw what they other diseases.” papers and patents on point- of-care diagnostics, microfluidic chips, and genetic screening and collaborated on joint projects funded by the French National Research Agency, the Carnot Network, and the EU.

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Better together: Stanford and Leti Leti and FZJ drive take memory-centric advances in laser computing nanosystems technology from concept to prototype

Dr. Detlev Grutzmacher Professor Subhasish Mitra

Leti and Germany’s Jülich ZJ and Leti have been tensile strain (obtained by depositing Leti has been working with eti has been collaborating with monolithic 3D (Leti’s CoolCube™ Research Center are working together on Group IV SiN stressors on freestanding GeSn Professor Subhasish Mitra Stanford’s Subhasish Mitra technology) and non-volatile pursuing their long-standing Fsemiconductors since 2005, first disks on Ge pillars) and yielded very of Stanford since 2017. The Lthrough a Carnot Chair of memory (RRAM) for ultra-dense and partnership, joining forces as partners in European research low thresholds. An article on the partnership brings together Excellence in NanoSystems since fine-grained integration of logic and projects and later through their own research is currently under review 2017. The Chair was established to memory to create new computing in the race to achieve lasing partnership agreements. for publication in Nature Photonics. the research Mitra’s group bring the best minds in nanosystems system architectures for coming in electrically-pumped They also investigated a multi- is doing on new computing research to Leti to provide scientific generations of applications and, MIR GeSn lasers at room Leti has been supplying samples quantum-well design that achieved concepts with Leti’s and strategic insights and engage especially, AI. They have already temperature—an advance to FZJ since the early days of the a lasing threshold almost ten times advanced technologies directly in research with Leti teams. produced a significant result, co- that would allow the lasers partnership. Leti’s state-of-the-art lower than that of bulk structures, and circuit demonstration According to Mitra, “I am deeply authoring a paper published at to be integrated into 200 mm reduced pressure CVD demonstrating the potential of capabilities. The goal is interested in using new technology the 2019 IEEE International Solid- complex photonic circuits. cluster has a chamber for the high- multi-quantum-well approaches to shape the future of concepts to drastically improve the State Circuits Conference on a temperature growth of Ge Strain for the next generation of CMOS- computing nanosystems. speed and energy of computing new computing system designed Relaxed Buffers and SiGe/Si stacks. compatible Group IV lasers. systems, so I immediately saw by Stanford and fabricated by Leti. The institute can also grow complex synergies with Leti. Over the past two Their work was also picked up by PARTNER: epitaxial stacks on demand. Since According to Leti scientist Jean-Michel PARTNER: years, our partnership has expanded Nature Electronics for a special Forschungszentrum Jülich 2013 Leti has been supplying thick Hartmann, conducting research Professor Subhasish Mitra to involve more researchers. We get research highlight. (FZJ) GmbH, one of Europe’s Ge Strain Relaxed Buffers (SRBs) on with more academic-oriented labs is of Stanford University’s to learn new things from these bright largest interdisciplinary research Si(001) used as templates by FZJ beneficial in several ways. “These labs Department of Electrical people and something magical The partners’ work on in-memory organizations, which focuses for the epitaxial growth of complex can focus more on novel materials Engineering and Department of happens—new ideas germinate. It’s a computing architectures is still on groundbreaking research in GeSn/SiGeSn heterostructures for and architectures, whereas we tend Computer Science. virtuous circle.” underway, with collaborative energy, information technology, mid-infrared lasers and other devices. to work more on devices that are past Stanford-Leti PhD students. They and the bioeconomy. the proof-of-concept stage. They OBJECTIVES: Leti scientist Pascal Vivet feels that will also create a joint research Together, the partners have also work on pieces of wafers, which Shape the future of computing the partnership has been particularly team to drive advances in-memory OBJECTIVES: published prolifically. Among their means that a single custom 200 mm by coupling computing beneficial. “I have personally gained computing architectures, seek Continue to improve the MIR more than 80 journal articles and wafer from Leti is a whole box of and memory more closely, a lot working with Stanford. Due higher RRAM densities through lasers developed previously by conference papers is a 2015 Nature samples for FZJ. We also benefitted inventing disruptive computing to the groundbreaking nature of both improvements in technology lowering their lasing threshold Photonics article that has been cited from FZJ’s pioneering earlier-stage paradigms, and leveraging our joint research, I have improved and design, and—ultimately— and increasing their operating more than 500 times. According research on GeSn and SiGeSn for advanced More-than-Moore how I formalize a new problem integrate RRAM into the memory- temperature; investigate a to FZJ’s Detlev Grutzmacher, lasers to know which topics we should technologies to achieve tighter and become better at focusing on compute cube. Mitra said, “With novel SiGe/Si gate-normal TFET “Beyond the conference invitations be investigating.” And working with integration. essential information in my academic the Chair, we are creating new with a pillar-shaped contact to and publications, this research has Leti has shaped the way FZJ sees the A revolutionary writing. I have also become a ideas that I am confident will the tunneling junction with the given our students an opportunity to future of its research. Grutzmacher RESULTS: stronger PhD supervisor.” Mitra enable the next generation of capacity to operate at ultra-low RRAM chip for edge-AI graduate with outstanding results, win said, “Whether it is improving energy applications (see p. 60). said, “The opportunity to be part of computing systems essential for operating voltages with sharp awards, and get their careers off to a efficiency or enabling quantum and a collaboration that brings design addressing global challenges such on/off capabilities. strong start. For me, this has been one neuromorphic computing, today’s and technology expertise together as the environment, energy, and of the most satisfying outcomes of our silicon research is too complex for so effectively has been especially healthcare. Getting people from RESULTS: A truly prolific partnerships with more than partnership with Leti.” a single academic or government rewarding for me. The way Leti diverse backgrounds working 80 publications. research lab to handle alone. This operates has facilitated this.” together is the first step, and that Today, the partners are ramping up makes cooperative approaches is exactly what the Stanford-Leti their laser materials, design, and involving partners at different levels Today the partners are exploring collaboration is doing.” integration research. Recently, they fundamental. We knew that working combined high-Sn-content (and thus with Leti had the potential to bring direct-bandgap) GeSn layers and major benefits.”

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EU RTOs cooperation for next-gen computing

Encouraged by the European Commission, the three major European RTOs in microelectronics research and development, CEA-Leti, Fraunhofer/FMD and imec, are collaborating to create a strategic alliance to develop the necessary compute platforms enabling new applications in healthcare, industry, mobility etc. where technologies for artificial intelligence, high-performance computing and cybersecurity become indispensable.

This unique world-leading collaboration focuses on full technology and engineering development on 300mm wafers to realize the European hardware for the new compute infrastructure. This new initiative opens up an affordable, fast-track access for SMEs and systems houses in Europe.

EU project TEMPO targets low-power chips for AI applications based on emerging memory technology

EMPO project brings together the three the Fraunhofer Group Microelectronics : “A top European RTOs, industrial fabrication key enabler for machine learning and pattern Tfacilities and leading application partners recognition is the capability of the algorithms in the domain of neuromorphic computing, to browse through large datasets. Which, in which features intense global competition terms of hardware, means having rapid access towards the vision of intelligent machines. The to large memory blocks. Therefore, one of the objectives of TEMPO is to design and combine key focal areas of TEMPO are energy efficient performing transistors and new emerging nonvolatile emerging memory technologies memories to realize new neural networks that and novel ways to design and process memory will be able to analyse complex situation like and processing blocks on chip.” object detection in real time (automotive, space, health,...multiple applications). Luc Van den hove, CEO imec: “We are delighted to enter in such broad European collaboration Emmanuel Sabonnadière, CEO at CEA-Leti: “It effort on Edge Artificial Intelligence, gathering is our aim to sweep technology options, covering the relevant stakeholders in Europe, including emerging memories, and attempt to pair them CEA-Leti and Fraunhofer, two of our most with contemporary (DNN) and exploratory renowned colleague research centers in (SNN) neuromorphic computing paradigms. Europe. Thanks to our combined expertise, The process- and design-compatibility of each we can scan more potential routes forward technology option will be assessed with respect than what would be possible by each of us to established integration practices and meet our individually, and as such, position Europe in the industrial partner roadmaps and needs to prepare driver seat for R&D on AI. Imec looks forward the future market of Edge IA where Europe is well to the progress we can make together in the positioned with multiple disruptive technologies.” TEMPO project and hopes this will lead to more similar collaborations in the future. Behind the Prof. Hubert Lakner, Director of the Fraunhofer scenes, we are already defining more public Institute for Photonic Microsystems (IPMS) and bilateral agreements with several of the and Chairman of the Board of Directors of partners involved.”

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Contacts

Pascal Vivet Thomas Ernst Scientific Advisor the Architecture, VP for Science and IC Design, and Embedded Software Division Technology [email protected] Acting Scientific Advisor the Silicon Technologies Emilio Cavanese Strinati and Components Division Scientific Advisor the Smart Devices, [email protected] Telecommunications and Security Division [email protected] Raluca Tiron Scientific Advisor the Pascal Mailley Technical Platform Division Scientific Advisor the Technology [email protected] for Biology and Health Division [email protected] Alexei Tchelnokov Scientific Advisor the Abdelmadjid Hihi Optics and Photonics Division Scientific Program Manager at Clinatec [email protected] [email protected]

MANAGING EDITOR: Thomas Ernst

COPYWRITING AND EDITING: Sara Freitas, SFM Traduction

COMMUNICATIONS: Hélène Vatouyas

DESIGN: Design by Eve

COVER PHOTO: Shutterstock

WITH ADDITIONAL CONTRIBUTIONS FROM: Susana Bonnetier, Léa Di Cioccio, Catherine Ogier-Falzon, Raluca Tiron, Alexei Tchelnokov, Pascal Vivet, Emilio Calvanese-Strinati, Pascal Mailley, Abdelmadjid Hihi, Camille Giroud, Sara-Lyle Dampoux

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