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Safety Data Sheet Material Name: TRIFLUORIDE, ISOTOPICALLY ENRICHED BORON SDS ID: 0055 (ISRAEL) 11, ADSORBED

SECTION 1: Identification of the substance/mixture and of the company/undertaking

Product identifier Material Name BORON TRIFLUORIDE, ISOTOPICALLY ENRICHED BORON 11, ADSORBED Synonyms Boron Trifluoride, Enriched; Trifluoroborane-11B; SDS3 BF3; Boron Trifluoride B-11 Enriched; BF3 Chemical Family boron, halides, Product Description This gas may be packaged in an SDS® or SAGE® gas source package. The package may contain an adsorbent media which allows the gas to be stored at sub-atmospheric pressures. There is no possibility of contact or exposure to the adsorbent. This SDS addresses only the hazards of the gas. Details of the supplier of the safety data sheet Entegris, Inc. 129 Concord Road Building 2 Billerica, MA 01821 USA

Telephone Number: +1-952-556-4181 Telephone Number: +1-800-394-4083 (toll free within North America)

Emergency Telephone Number: Chemtrec Local in Country (Tel Aviv) (972)-37630639 Chemtrec International 1-703-527-3887 E-mail: [email protected]

SECTION 2: Ingredients

CAS Component Name Percent

20654-88-0 [11b]Boron trifluoride 100 Impurities and stabilizing additives contributing to the GHS Classification None

SECTION 3: Hazard Identification

GHS Classification Acute - Inhalation - Gas - Category 2 Skin Corrosion/Irritation - Category 1 Serious Eye Damage/Eye Irritation - Category 1 Specific target organ toxicity - Single exposure - Category 2 ( cardiovascular system , respiratory system ) Specific target organ toxicity - Single exposure - Category 3 ( central nervous system ) Specific Target Organ Toxicity - Repeated Exposure - Category 1 ( kidneys , respiratory system )

______Page 1 of 11 Issue date: 2019-01-31 Revision 1.4 Print date: 2019-01-31

Safety Data Sheet Material Name: BORON TRIFLUORIDE, ISOTOPICALLY ENRICHED BORON SDS ID: 0055 (ISRAEL) 11, ADSORBED

Specific Target Organ Toxicity - Repeated Exposure - Category 2 ( skeletal system , teeth ) Hazardous to the Aquatic Environment - Acute - Category 3 Label elements Hazard symbols

Signal word Danger Hazard statements H330 Fatal if inhaled. H314 Causes severe skin burns and eye damage. H371 May cause damage to organs. (cardiovascular system , respiratory system ) H336 May cause drowsiness or dizziness. H372 Causes damage to organs through prolonged or repeated exposure. (kidneys , respiratory system ) H373 May cause damage to organs through prolonged or repeated exposure. (skeletal system , teeth ) H402 Harmful to aquatic life. Precautionary statements Prevention P260 Do not breathe gas. P264 Wash thoroughly after handling. P270 Do not eat, drink or smoke when using this product. P271 Use only outdoors or in a well-ventilated area. P280 Wear protective gloves/protective clothing/eye protection/face protection. P284 Wear respiratory protection. P273 Avoid release to the environment. Response P308+P311 If exposed or concerned: Call a POISON CENTER or doctor/physician. P310 Immediately call a POISON CENTER or doctor/physician. P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing. P320 Specific treatment is urgent (see label). P303+P361+P353 IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. P363 Wash contaminated clothing before reuse. P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. P301+P330+P331 IF SWALLOWED: Rinse mouth. Do NOT induce vomiting. Storage P403+P233 Store in a well-ventilated place. Keep container tightly closed. P405 Store locked up. Disposal P501 Dispose of contents/container in accordance with local/regional/national/international regulations. Other Hazards Which Do Not Result in Classification None known.

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Safety Data Sheet Material Name: BORON TRIFLUORIDE, ISOTOPICALLY ENRICHED BORON SDS ID: 0055 (ISRAEL) 11, ADSORBED

SECTION 4: First aid measures

Description of Necessary Measures Inhalation If gas is inhaled, move victim to fresh air. If breathing has stopped, give artificial respiration. If breathing is weak, give oxygen. Get medical attention without delay. Skin contact If this chemical contacts the skin, immediately flush the contaminated skin with soap and water. If clothing is contaminated, immediately remove and flush the skin with soap and water. Get medical attention immediately. Assume victim has also been exposed by inhalation. Treat as HF exposure. Consider the use of calcium gluconate. Eye contact In case of eye contact, immediately flush eyes with plenty of water for at least 30 minutes, occasionally lifting the lower and upper lids. Get medical attention immediately. Ingestion Ingestion is not a route of exposure. Most Important Symptoms/Effects Symptoms: Immediate Fatal if inhaled, respiratory tract burns, skin burns, eye burns, mucous membrane burns, central nervous system depression, cardiovascular system damage, respiratory system damage, hypocalcemia Symptoms: Delayed kidney damage, respiratory system damage, bone damage, tooth decay, fluorosis, hypocalcemia Self-protection of the first aider Wear suitable protective clothing. Perform first aid measures in a safe area. Note to Physicians For inhalation, consider oxygen. Skin: Consider the use of calcium gluconate. Indication of any immediate medical attention and special treatment needed Treat symptomatically and supportively.

SECTION 5: Firefighting measures

Suitable extinguishing media regular dry chemical, carbon dioxide. Large fires: Use water spray, fog or regular foam. Unsuitable Extinguishing Media Do not direct water at source of leak or safety devices; icing may occur. Specific hazards arising from the chemical Negligible fire hazard. Containers may rupture or explode if exposed to heat. Heating of cylinder beyond pressure relief. Protective Equipment and Precautions for Firefighters Wear full protective fire fighting gear including self contained breathing apparatus (SCBA) for protection against possible exposure. Fire Fighting Measures Apply cooling water to sides of container exposed to flame until well after fire is out. Isolate area until gas has dispersed. Move container from fire area if it can be done without risk. Do not get water inside container. Damaged cylinders should be handled only by specialists. Fight fire from maximum distance or use unmanned hose holders or monitor nozzles. Withdraw immediately in case of rising sound from venting safety device or any discoloration of tanks due to fire. Hazardous Combustion Products boric , , oxides of boron ______Page 3 of 11 Issue date: 2019-01-31 Revision 1.4 Print date: 2019-01-31

Safety Data Sheet Material Name: BORON TRIFLUORIDE, ISOTOPICALLY ENRICHED BORON SDS ID: 0055 (ISRAEL) 11, ADSORBED

SECTION 6: Accidental release measures

Personal precautions, protective equipment and emergency procedures Wear personal protective clothing and equipment. Environmental precautions Avoid release to the environment. Methods for Containment Isolate area until gas has dispersed. Use appropriate protective equipment including self-contained breathing apparatus. Be certain to flush lines and enclosures with inert gas before repairing. Fully encapsulating, vapor protective clothing should be worn for spills and leaks with no fire. Cleanup Methods Do not touch or walk through spilled material. Do not direct water at spill or source of leak. Stop leak if possible without personal risk.

SECTION 7: Handling and storage

Precautions for safe handling Handle this material only in a sealed, purged system. Do not heat cylinder by any means to increase discharge rate of product from the cylinder. In order to maintain the subatmospheric (<760 Torr) package, SDS cylinder temperature should not exceed 24 C. If subject to temperature greater than 24 C container may become pressurized which increases the risk of leakage and possible exposure to toxic gas. Do not breathe gas. Wash thoroughly after handling. Do not eat, drink, or smoke when using this product. Use only outdoors or in a well-ventilated area. Wear protective gloves/clothing and eye/face protection. Wear respiratory protection. Conditions for safe storage, including any incompatibilities Store in a well-ventilated place. Keep container tightly closed. Store locked up. Store in accordance with all current regulations and standards. Protect from physical damage. Avoid direct sunlight. Store in a cool, dry, well ventilated area of non-combustible construction. Keep away from cylinders of oxygen or other highly oxidizing or flammable materials. Ship and store cylinders with outlet plug in place. Store below 52 C. Keep separated from incompatible substances. Incompatible Materials alcohols, alkali metals, alkyl mercaptans, alkyl nitrates, aluminum bromide, ALUMINUM CHLORIDE, amines, calcium oxide, hydrogen sulfide, metals, nitrates, organic solvents and compounds, slaked lime

SECTION 8: Exposure controls/personal protection

Exposure Guidelines Component Exposure Limits [11b]Boron 20654-88-0 trifluoride

ACGIH: 2.5 mg/m3 TWA as F (related to )

0.7 ppm Ceiling (related to Boron trifluoride)

NIOSH: 1 ppm Ceiling ; 3 mg/m3 Ceiling (related to Boron trifluoride)

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Safety Data Sheet Material Name: BORON TRIFLUORIDE, ISOTOPICALLY ENRICHED BORON SDS ID: 0055 (ISRAEL) 11, ADSORBED

OSHA (US): 2.5 mg/m3 TWA as F (related to Fluorides)

1 ppm Ceiling ; 3 mg/m3 Ceiling (related to Boron trifluoride)

OSHA 2.5 mg/m3 TWA (related to Fluorides) (Vacated):

1 ppm Ceiling ; 3 mg/m3 Ceiling (related to Boron trifluoride)

Israel: 2.5 mg/m3 TWA as F (related to Fluorides)

0.7 ppm Ceiling (related to Boron trifluoride)

2 mg/g Creatinine Medium: urine Time: prior to shift Parameter: Fluorides (background, nonspecific ); 3 mg/g Creatinine Medium: urine Time: end of shift Parameter: Fluorides (background, nonspecific ) (related to Fluorides) Biological limit value 2 mg/l Medium: urine Time: prior to shift Parameter: Fluoride (background, nonspecific ); 3 ACGIH: mg/l Medium: urine Time: end of shift Parameter: Fluoride (background, nonspecific ) (related to Fluorides) IDLH 25 ppm Appropriate engineering controls Exhausted process enclosure recommended to meet published exposure limits. Use only in a well ventilated area. PERSONAL PROTECTIVE EQUIPMENT Respiratory Protection Respirators depend on exposure level. SCBA with full face piece recommended during change outs and available in case of emergency. Hand protection Wear appropriate chemical resistant gloves. Eye/face protection Wear splash resistant safety goggles with a faceshield. Contact lenses should not be worn. Provide an emergency eye wash fountain and quick drench shower in the immediate work area. Skin and Body Protection Wear appropriate chemical resistant clothing. Hygiene Measures Use in accordance with good industrial hygiene practices.

SECTION 9: Physical and chemical properties

Appearance gas Physical State gas Colorless (fumes white Odor pungent Color smoke upon exposure to air)

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Safety Data Sheet Material Name: BORON TRIFLUORIDE, ISOTOPICALLY ENRICHED BORON SDS ID: 0055 (ISRAEL) 11, ADSORBED

Odor Threshold 1.5 ppm pH (Strong acid gas ) -128.4 °C Boiling Point -99.8 °C Boiling Point Not available Freezing point Not available Range Flammability (solid, Evaporation Rate Not available Not Flammable gas) Autoignition Not available Flash Point (Not flammable ) Temperature

Lower Explosive Decomposition Not available Not available Limit temperature Upper Explosive <760 mmHg (SDS® & Not available Vapor Pressure Limit SAGE® packages ) Vapor Density Specific Gravity 2.4 @ 20 °C (Not applicable ) (air=1) (water=1) (hydrolyzes, Partition coefficient: Water Not available Reacts ) n-octanol/water 0.0171 cp @ Viscosity Kinematic viscosity Not available 25 °C

Solubility (Other) Not available Bulk Density 3.07666 g/L Density Not available Log KOW 0.22 Physical Form gas Molecular Formula BF3 Molecular Weight 67.81 Solvent Solubility Soluble concentrated , concentrated nitric acid, , dichlorobenzene, , carbon tetrachloride, carbon disulfide, aromatic solvents, halogenated solvents, mercury

SECTION 10: Stability and reactivity

Reactivity May react on contact with water. Releases toxic and/or corrosive gases. Chemical stability May react on contact with water. Releases toxic and/or corrosive gases. Possibility of hazardous reactions Will not polymerize. Conditions to avoid Minimize contact with material. Avoid inhalation of material or combustion by-products. Containers may rupture or explode if exposed to heat. Exposure to air. Materials to Avoid (Incompatibilities)

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Safety Data Sheet Material Name: BORON TRIFLUORIDE, ISOTOPICALLY ENRICHED BORON SDS ID: 0055 (ISRAEL) 11, ADSORBED

alcohols, alkali metals, alkyl mercaptans, alkyl nitrates, aluminum bromide, ALUMINUM CHLORIDE, amines, calcium oxide, hydrogen sulfide, metals, nitrates, organic solvents and compounds, slaked lime Hazardous decomposition products Thermal decomposition products , fluoroboric acid, oxides of boron Air/Organic Compounds acid halides, halogenated compounds, , organic

SECTION 11: Toxicological information

Information on Likely Routes of Exposure Inhalation Fatal if inhaled, burns, central nervous system depression, cardiovascular system damage, kidney damage, respiratory system damage Skin burns Eye burns Ingestion bone damage, tooth decay Component Analysis - LD50/LC50 The components of this material have been reviewed in various sources and the following selected endpoints are published: [11b]Boron trifluoride (20654-88-0) Inhalation LC50 Rat 1180 mg/m3 4 h (related to Boron trifluoride) Acute Toxicity Estimate Inhalation - Gas 425.531 ppm Immediate Effects Fatal if inhaled, respiratory tract burns, skin burns, eye burns, mucous membrane burns, central nervous system depression, cardiovascular system damage, respiratory system damage, hypocalcemia Delayed Effects kidney damage, respiratory system damage, bone damage, tooth decay, fluorosis, hypocalcemia Irritation/Corrosivity Data respiratory tract burns, skin burns, eye burns, mucous membrane burns Respiratory Sensitization No data available. Dermal Sensitization No data available. Component Carcinogenicity [11b]Boron trifluoride 20654-88-0

ACGIH: A4 - Not Classifiable as a Human Carcinogen (related to Fluorides) Mutagenic Data No data available. Reproductive Effects Data No data available. Tumorigenic Data ______Page 7 of 11 Issue date: 2019-01-31 Revision 1.4 Print date: 2019-01-31

Safety Data Sheet Material Name: BORON TRIFLUORIDE, ISOTOPICALLY ENRICHED BORON SDS ID: 0055 (ISRAEL) 11, ADSORBED

No data available. Specific Target Organ Toxicity - Single Exposure respiratory system, central nervous system, cardiovascular system Specific Target Organ Toxicity - Repeated Exposure kidneys, respiratory system, skeletal system, teeth Aspiration hazard Not applicable. Medical Conditions Aggravated by Exposure eye disorders, kidney disorders, respiratory disorders, skin disorders

SECTION 12: Ecological information

Ecotoxicity Harmful to aquatic life. Component Analysis - Aquatic Toxicity [11b]Boron trifluoride 20654-88-0

Invertebrate: EC50 48 h Daphnia magna 21.3 mg/L IUCLID (related to Boron trifluoride) Mobility in soil No data available. Persistence and Degradability No data available. Bioaccumulative potential No data available. Other adverse effects This gas will be dissipated rapidly in well ventilated areas. Due to the corrosivity and toxicity of this gas, contact with animals, plants and aquatic life may cause damage or be fatal. Frost produced in the presence of rapidly expanding gases may adversely affect plant life. Will decompose on contact with water to form hydrogen fluoride.

SECTION 13: Disposal considerations

Disposal Methods Dispose in accordance with all applicable regulations. Contaminated packaging disposal Dispose in accordance with all applicable regulations.

SECTION 14: Transport information

IATA Information: Shipping Name: BORON TRIFLUORIDE, ADSORBED Hazard Class: 2.3 UN#: UN3519 Forbidden by Air

ICAO Information: Shipping Name: BORON TRIFLUORIDE, ADSORBED Hazard Class: 2.3

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Safety Data Sheet Material Name: BORON TRIFLUORIDE, ISOTOPICALLY ENRICHED BORON SDS ID: 0055 (ISRAEL) 11, ADSORBED

UN#: UN3519 Forbidden by Air

IMDG Information: Shipping Name: BORON TRIFLUORIDE, ADSORBED Hazard Class: 2.3 UN#: UN3519 Required Label(s): 2.3, 8 International Bulk Chemical Code This material does not contain any chemicals required by the IBC Code to be identified as dangerous chemicals in bulk. Special precautions None

SECTION 15: Regulatory information

Environmental Protection Law - Pollutant Release and Transfer Register (PRTR) - Threshold Quantities [11b]Boron trifluoride 20654-88-0

25 kg TQ (land ,seawater ,wastewater ,as total F ) (related to Fluorides) Risk Management for Hazardous Materials - Separation Distances in Stationary Hazardous Sources - Toxic Substances [11b]Boron trifluoride 20654-88-0

250 kg TQ (related to Boron trifluoride) Risk Management for Hazardous Materials - Policy of Accidental Release Prevention - Flammable Substances None of this product's components are on the list Risk Management for Hazardous Materials - Policy of Accidental Release Prevention - Propellant Substances None of this product's components are on the list Hazardous Substances Law Component Analysis - Inventory [11b]Boron trifluoride (20654-88-0) KR KR JP - JP - KECI KECI KR - VN A P C N M T US CA EU ENC ISH - - REAC (Draft U H N Z X W S L Anne Anne H CCA ) x 1 x 2

Ye NS EI N Ye No Yes Yes Yes No Yes No No No No s L N o s

SECTION 16: Other information

NFPA Ratings

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Safety Data Sheet Material Name: BORON TRIFLUORIDE, ISOTOPICALLY ENRICHED BORON SDS ID: 0055 (ISRAEL) 11, ADSORBED

Health: 4 Fire: 0 Reactivity: 1 Hazard Scale: 0 = Minimal 1 = Slight 2 = Moderate 3 = Serious 4 = Severe Summary of Changes 31/01/2019 - Update to Section(s) 9, 11, 12. Preparation Date 07/07/2015 Revision date 31/01/2019 Product Use semiconductor manufacture, general synthetic chemical Restrictions on Use None known. Key / Legend ACGIH - American Conference of Governmental Industrial Hygienists; ADR - European Road Transport; AU - Australia; BOD - Biochemical Oxygen Demand; C - Celsius; CA - Canada; CA/MA/MN/NJ/PA - California/Massachusetts/Minnesota/New Jersey/Pennsylvania*; CAS - Chemical Abstracts Service; CERCLA - Comprehensive Environmental Response, Compensation, and Liability Act; CFR - Code of Federal Regulations (US); CLP - Classification, Labelling, and Packaging; CN - China; CPR - Controlled Products Regulations; DFG - Deutsche Forschungsgemeinschaft; DOT - Department of Transportation; DSD - Dangerous Substance Directive; DSL - Domestic Substances List; EC – European Commission; EEC - European Economic Community; EIN - European Inventory of (Existing Commercial Chemical Substances); EINECS - European Inventory of Existing Commercial Chemical Substances; ENCS - Japan Existing and New Chemical Substance Inventory; EPA - Environmental Protection Agency; EU - European Union; F - Fahrenheit; F - Background (for Venezuela Biological Exposure Indices); IARC - International Agency for Research on Cancer; IATA - International Air Transport Association; ICAO - International Civil Aviation Organization; IDL - Ingredient Disclosure List; IDLH - Immediately Dangerous to Life and Health; IMDG - International Maritime Dangerous Goods; ISHL - Japan Industrial Safety and Health Law; IUCLID - International Uniform Chemical Information Database; JP - Japan; Kow - Octanol/water partition coefficient; KR KECI Annex 1 - Korea Existing Chemicals Inventory (KECI) / Korea Existing Chemicals List (KECL); KR KECI Annex 2 - Korea Existing Chemicals Inventory (KECI) / Korea Existing Chemicals List (KECL) , KR - Korea; LD50/LC50 - Lethal Dose/ Lethal Concentration; LEL - Lower Explosive Limit; LLV - Level Limit Value; LOLI - List Of LIsts™ - ChemADVISOR’s Regulatory Database; MAK - Maximum Concentration Value in the Workplace; MEL - Maximum Exposure Limits; MX – Mexico; Ne- Non-specific; NFPA - National Fire Protection Agency; NIOSH - National Institute for Occupational Safety and Health; NJTSR - New Jersey Trade Secret Registry; Nq - Non-quantitative; NSL – Non-Domestic Substance List (Canada); NTP - National Toxicology Program; NZ - New Zealand; OSHA - Occupational Safety and Health Administration; PEL- Permissible Exposure Limit; PH - Philippines; RCRA - Resource Conservation and Recovery Act; REACH- Registration, Evaluation, Authorisation, and restriction of Chemicals; RID - European Rail Transport; SARA - Superfund Amendments and Reauthorization Act; Sc - Semi-quantitative; STEL - Short-term Exposure Limit; TCCA – Korea Toxic Chemicals Control Act; TDG - Transportation of Dangerous Goods; TLV - Threshold Limit Value; TSCA - Toxic Substances Control Act; TW – Taiwan; TWA - Time Weighted Average; UEL - Upper Explosive Limit; UN/NA - United Nations /North American; US - United States; VLE - Exposure Limit Value (Mexico); VN (Draft) - Vietnam (Draft); WHMIS - Workplace Hazardous Materials Information System (Canada). Other Information Disclaimer: The information in this (Material) Safety Data Sheet ("(M)SDS") is believed to be current and accurate as of the time of shipment of the product by Entegris. Entegris makes no warranties, express or implied, with

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Safety Data Sheet Material Name: BORON TRIFLUORIDE, ISOTOPICALLY ENRICHED BORON SDS ID: 0055 (ISRAEL) 11, ADSORBED

respect to such information, including, without limitation, the implied warranties of merchantability and fitness for a particular purpose. Entegris assumes no liability for any loss or injury which may result from the use of the information contained in this (M)SDS. The chemical, physical and toxicological properties of the Entegris product described in this (M)SDS have not been thoroughly investigated. Users are responsible for exercising due care in using the Entegris product, and for conducting their own investigation to determine whether the product is fit for their particular purpose and suitable for their method of use or application. It is the user's responsibility to ensure that its activities comply with all applicable laws and regulations. Entegris is a registered trademark of Entegris Inc. or an affiliated company. © 2015 Entegris Inc. or affiliated company. All rights reserved. The information contained in this sheet is based on the best knowledge and experience currently available.

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