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Safety Data Sheet Material Name: BORON TRIFLUORIDE, ISOTOPICALLY ENRICHED BORON SDS ID: 0055 (ISRAEL) 11, ADSORBED

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Safety Data Sheet Material Name: BORON TRIFLUORIDE, ISOTOPICALLY ENRICHED BORON SDS ID: 0055 (ISRAEL) 11, ADSORBED Safety Data Sheet Material Name: BORON TRIFLUORIDE, ISOTOPICALLY ENRICHED BORON SDS ID: 0055 (ISRAEL) 11, ADSORBED SECTION 1: Identification of the substance/mixture and of the company/undertaking Product identifier Material Name BORON TRIFLUORIDE, ISOTOPICALLY ENRICHED BORON 11, ADSORBED Synonyms Boron Trifluoride, Enriched; Trifluoroborane-11B; SDS3 BF3; Boron Trifluoride B-11 Enriched; BF3 Chemical Family boron, halides, fluoride Product Description This gas may be packaged in an SDS® or SAGE® gas source package. The package may contain an adsorbent media which allows the gas to be stored at sub-atmospheric pressures. There is no possibility of contact or exposure to the adsorbent. This SDS addresses only the hazards of the gas. Details of the supplier of the safety data sheet Entegris, Inc. 129 Concord Road Building 2 Billerica, MA 01821 USA Telephone Number: +1-952-556-4181 Telephone Number: +1-800-394-4083 (toll free within North America) Emergency Telephone Number: Chemtrec Local in Country (Tel Aviv) (972)-37630639 Chemtrec International 1-703-527-3887 E-mail: [email protected] SECTION 2: Ingredients CAS Component Name Percent 20654-88-0 [11b]Boron trifluoride 100 Impurities and stabilizing additives contributing to the GHS Classification None SECTION 3: Hazard Identification GHS Classification Acute Toxicity - Inhalation - Gas - Category 2 Skin Corrosion/Irritation - Category 1 Serious Eye Damage/Eye Irritation - Category 1 Specific target organ toxicity - Single exposure - Category 2 ( cardiovascular system , respiratory system ) Specific target organ toxicity - Single exposure - Category 3 ( central nervous system ) Specific Target Organ Toxicity - Repeated Exposure - Category 1 ( kidneys , respiratory system ) ____________________________________________________________ Page 1 of 11 Issue date: 2019-01-31 Revision 1.4 Print date: 2019-01-31 Safety Data Sheet Material Name: BORON TRIFLUORIDE, ISOTOPICALLY ENRICHED BORON SDS ID: 0055 (ISRAEL) 11, ADSORBED Specific Target Organ Toxicity - Repeated Exposure - Category 2 ( skeletal system , teeth ) Hazardous to the Aquatic Environment - Acute - Category 3 Label elements Hazard symbols Signal word Danger Hazard statements H330 Fatal if inhaled. H314 Causes severe skin burns and eye damage. H371 May cause damage to organs. (cardiovascular system , respiratory system ) H336 May cause drowsiness or dizziness. H372 Causes damage to organs through prolonged or repeated exposure. (kidneys , respiratory system ) H373 May cause damage to organs through prolonged or repeated exposure. (skeletal system , teeth ) H402 Harmful to aquatic life. Precautionary statements Prevention P260 Do not breathe gas. P264 Wash thoroughly after handling. P270 Do not eat, drink or smoke when using this product. P271 Use only outdoors or in a well-ventilated area. P280 Wear protective gloves/protective clothing/eye protection/face protection. P284 Wear respiratory protection. P273 Avoid release to the environment. Response P308+P311 If exposed or concerned: Call a POISON CENTER or doctor/physician. P310 Immediately call a POISON CENTER or doctor/physician. P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing. P320 Specific treatment is urgent (see label). P303+P361+P353 IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. P363 Wash contaminated clothing before reuse. P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. P301+P330+P331 IF SWALLOWED: Rinse mouth. Do NOT induce vomiting. Storage P403+P233 Store in a well-ventilated place. Keep container tightly closed. P405 Store locked up. Disposal P501 Dispose of contents/container in accordance with local/regional/national/international regulations. Other Hazards Which Do Not Result in Classification None known. ____________________________________________________________ Page 2 of 11 Issue date: 2019-01-31 Revision 1.4 Print date: 2019-01-31 Safety Data Sheet Material Name: BORON TRIFLUORIDE, ISOTOPICALLY ENRICHED BORON SDS ID: 0055 (ISRAEL) 11, ADSORBED SECTION 4: First aid measures Description of Necessary Measures Inhalation If gas is inhaled, move victim to fresh air. If breathing has stopped, give artificial respiration. If breathing is weak, give oxygen. Get medical attention without delay. Skin contact If this chemical contacts the skin, immediately flush the contaminated skin with soap and water. If clothing is contaminated, immediately remove and flush the skin with soap and water. Get medical attention immediately. Assume victim has also been exposed by inhalation. Treat as HF exposure. Consider the use of calcium gluconate. Eye contact In case of eye contact, immediately flush eyes with plenty of water for at least 30 minutes, occasionally lifting the lower and upper lids. Get medical attention immediately. Ingestion Ingestion is not a route of exposure. Most Important Symptoms/Effects Symptoms: Immediate Fatal if inhaled, respiratory tract burns, skin burns, eye burns, mucous membrane burns, central nervous system depression, cardiovascular system damage, respiratory system damage, hypocalcemia Symptoms: Delayed kidney damage, respiratory system damage, bone damage, tooth decay, fluorosis, hypocalcemia Self-protection of the first aider Wear suitable protective clothing. Perform first aid measures in a safe area. Note to Physicians For inhalation, consider oxygen. Skin: Consider the use of calcium gluconate. Indication of any immediate medical attention and special treatment needed Treat symptomatically and supportively. SECTION 5: Firefighting measures Suitable extinguishing media regular dry chemical, carbon dioxide. Large fires: Use water spray, fog or regular foam. Unsuitable Extinguishing Media Do not direct water at source of leak or safety devices; icing may occur. Specific hazards arising from the chemical Negligible fire hazard. Containers may rupture or explode if exposed to heat. Heating of cylinder beyond pressure relief. Protective Equipment and Precautions for Firefighters Wear full protective fire fighting gear including self contained breathing apparatus (SCBA) for protection against possible exposure. Fire Fighting Measures Apply cooling water to sides of container exposed to flame until well after fire is out. Isolate area until gas has dispersed. Move container from fire area if it can be done without risk. Do not get water inside container. Damaged cylinders should be handled only by specialists. Fight fire from maximum distance or use unmanned hose holders or monitor nozzles. Withdraw immediately in case of rising sound from venting safety device or any discoloration of tanks due to fire. Hazardous Combustion Products boric acid, fluoroboric acid, oxides of boron ____________________________________________________________ Page 3 of 11 Issue date: 2019-01-31 Revision 1.4 Print date: 2019-01-31 Safety Data Sheet Material Name: BORON TRIFLUORIDE, ISOTOPICALLY ENRICHED BORON SDS ID: 0055 (ISRAEL) 11, ADSORBED SECTION 6: Accidental release measures Personal precautions, protective equipment and emergency procedures Wear personal protective clothing and equipment. Environmental precautions Avoid release to the environment. Methods for Containment Isolate area until gas has dispersed. Use appropriate protective equipment including self-contained breathing apparatus. Be certain to flush lines and enclosures with inert gas before repairing. Fully encapsulating, vapor protective clothing should be worn for spills and leaks with no fire. Cleanup Methods Do not touch or walk through spilled material. Do not direct water at spill or source of leak. Stop leak if possible without personal risk. SECTION 7: Handling and storage Precautions for safe handling Handle this material only in a sealed, purged system. Do not heat cylinder by any means to increase discharge rate of product from the cylinder. In order to maintain the subatmospheric (<760 Torr) package, SDS cylinder temperature should not exceed 24 C. If subject to temperature greater than 24 C container may become pressurized which increases the risk of leakage and possible exposure to toxic gas. Do not breathe gas. Wash thoroughly after handling. Do not eat, drink, or smoke when using this product. Use only outdoors or in a well-ventilated area. Wear protective gloves/clothing and eye/face protection. Wear respiratory protection. Conditions for safe storage, including any incompatibilities Store in a well-ventilated place. Keep container tightly closed. Store locked up. Store in accordance with all current regulations and standards. Protect from physical damage. Avoid direct sunlight. Store in a cool, dry, well ventilated area of non-combustible construction. Keep away from cylinders of oxygen or other highly oxidizing or flammable materials. Ship and store cylinders with outlet plug in place. Store below 52 C. Keep separated from incompatible substances. Incompatible Materials alcohols, alkali metals, alkyl mercaptans, alkyl nitrates, aluminum bromide, ALUMINUM CHLORIDE, amines, calcium oxide, hydrogen sulfide, metals, nitrates, organic solvents and compounds, slaked lime SECTION 8: Exposure controls/personal protection Exposure Guidelines Component Exposure Limits [11b]Boron 20654-88-0 trifluoride ACGIH: 2.5 mg/m3 TWA as F (related to Fluorides) 0.7 ppm Ceiling (related to Boron trifluoride) NIOSH: 1 ppm Ceiling ; 3 mg/m3 Ceiling (related to Boron trifluoride) ____________________________________________________________
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