Inkjet for 2D and 3D Meyer Burger Netherlands Jan 2016 Meyer Burger Netherlands products For flexible electronics - From Research to Production PECVD / ALD ™

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IP410 JETx LP50 Functional inkjet What is functional inkjet printing?

. Piezo element presses on a fluid channel channel and ejects a droplet of functional material Nozzle plate . Advantages of technique: . Additive (instead of subtractive): . less process steps 0 . optimal use of precious materials . Direct digital (without mask or master): . little pre-production costs . better economy-of-scale . inline correction and yield improvement . Contact-less: . minimizing breakage . printing on non-flat topology

. 3-dimensional Distance nozzle to plate (mm) 1 Inkjet Types and Operating Conditions

Main types of ink Solvent-based Source: Annu. Rev. Mater. Res. 40:395, 2010 Particle dispersion UV and/or monomer Polymers Too viscous Viscosity* 8 – 20 cPoise (mPa.s)

Surface tension 24 – 36 Dyne/cm (mN/m) Satellite droplets Typical ingredients Functional material Carrier liquids/solvents Surfactants Viscosity modifiers Insufficient energy Adhesion promoters Dispersants Particle size < ~1 µm *Viscosity references Post treatments Drying Wide selection of materials:Water = 1 cP UV-curing conductive, dielectric, adhesive,Olive oil = 80 cP Sintering (thermal, laser, Honey = 10,000 cP photonic) resist, biologic, ceramic, optical,.. Conductive Inks

Applications Printed electronics, Antennas Photovoltaics Silver nano-particle Dispersion in solvent Up to 40% solid content Layer thickness 100 nm up to several µm

Conductivity Up to 50% of bulk silver

Feature size > 25 µm

Silver particle size < ~1 µm (5% of nozzle size)

Post treatments Sintering (thermal, photonic, laser) Dielectric Inks

Applications Electrical isolation Protection and sealing Stress buffer Solder mask Layer thickness 5 – 30 µm

Ink types Polyimide (solvent-based) Acrylate, Feature size > 30 µm

Properties Solder mask < 290 oC Pencil Hardness up to 4H Resistivity up to 1016 Ω.cm Post treatments Drying Baking UV curing

6 Adhesive Inks

Applications Die bonding Image sensor assembly Glass bonding Layer thickness 5 – 80 µm

Ink types Acrylate Epoxy (solvent-based) Feature size > 30 µm

Adhesion Silicon Glass Die attach on leadframe PET/PEN foil Metals Post treatments Baking Drying UV curing

Die attach on foil

7 Masking Inks

Applications Plating and masks (replacement of photo resist) Protective masks Layer thickness 5 – 20 µm

Ink types Hotmelt UV-curable Hybrids Polyimide Feature size > 50 µm (positive) > 20 µm (negative) Properties Etch resistant (acid, alkaline)

Post treatments Drying UV curing

8 Next step in functional inkjet: from 2D...

In traditional electronics (solar, and in printed and hybrid pcb, semicon, sensor, etc) electronics To 3D: combining different materials with different functionality in one object

PiXDRO JETx 3D

• 6 print heads • 6 individual ink supplies • IR curing • UV curing • 25 x 25 x 25 cm building volume Princeton

UTEP Inkjet printing of conductive inks

2D Inkjet printing of conductive tracks on 3D printed structures Fully printed flexible electronics

Flexible substrates were printed and UV cured. Conductive tracks of silver nanoparticles and conductive PEDOT:PSS polymer inks were used to print strain gauge patterns. PEDOT:PSS conductive polymer inkjet printed on a glass substrate.

Flexible conductive track printed in a single process using silver and dielectric inks.

Silver ink printed and sintered on a flexible UV curable inkjet printed substrate. 3D inkjet printing of conductive inks

5000 layers of a commercial silver ink sintered using IR heat source Complete inkjet printed demonstrator

All 3D-printed capacitive touch sensitive hand. . UV curable polymeric ink forms the hand structure. . Touch sensitive silver tracks were printed within the hand structure connecting a data line to a microprocessor at the bottom of the hand. . The conductive track acts as a capacitive touch sensor to activate embedded LEDs. Complete inkjet printed demonstrator High-end solutions for high-tech industries

Meyer Burger (Netherlands) B.V.

Luchthavenweg 10 5657 EB Eindhoven Netherlands

T: +31 40 25 81 581 M: [email protected] www.meyerburger.com