3D-Integrated Metasurfaces for Full-Colour Holography Yueqiang Hu 1, Xuhao Luo1, Yiqin Chen1, Qing Liu1,Xinli1,Yasiwang1,Naliu2 and Huigao Duan1
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Hu et al. Light: Science & Applications (2019) 8:86 Official journal of the CIOMP 2047-7538 https://doi.org/10.1038/s41377-019-0198-y www.nature.com/lsa ARTICLE Open Access 3D-Integrated metasurfaces for full-colour holography Yueqiang Hu 1, Xuhao Luo1, Yiqin Chen1, Qing Liu1,XinLi1,YasiWang1,NaLiu2 and Huigao Duan1 Abstract Metasurfaces enable the design of optical elements by engineering the wavefront of light at the subwavelength scale. Due to their ultrathin and compact characteristics, metasurfaces possess great potential to integrate multiple functions in optoelectronic systems for optical device miniaturisation. However, current research based on multiplexing in the 2D plane has not fully utilised the capabilities of metasurfaces for multi-tasking applications. Here, we demonstrate a 3D-integrated metasurface device by stacking a hologram metasurface on a monolithic Fabry–Pérot cavity-based colour filter microarray to simultaneously achieve low-crosstalk, polarisation-independent, high-efficiency, full-colour holography, and microprint. The dual functions of the device outline a novel scheme for data recording, security encryption, colour displays, and information processing. Our 3D integration concept can be extended to achieve multi-tasking flat optical systems by including a variety of functional metasurface layers, such as polarizers, metalenses, and others. Introduction dimensional (3D) integration of discrete metasurfaces. For 1234567890():,; 1234567890():,; 1234567890():,; 1234567890():,; Metasurfaces open a new paradigm to design optical example, anisotropic structures or interleaved subarrays elements by shaping the wavefront of electromagnetic have been specifically arranged in a 2D plane to obtain – waves by tailoring the size, shape, and arrangement of multiplexed devices10,16 18. To reduce crosstalk, plas- – subwavelength structures1 3. A variety of metasurface- monic effects19,20, Pancharatnam–Berry phase (PB phase) – based devices, such as lenses4 8, polarisation converters9, conversion efficiency selectivity10,18, multiple angle off- – holograms10 12, and orbital angular momentum (OAM) axis illumination16, and chromatic aberration21 have been – generators13 15, have been demonstrated. The perfor- demonstrated. However, shortcomings such as the low mance of metasurface-based devices can even surpass that efficiency of plasmonic nanostructures, incidence polar- of conventional refractive elements because more isation requirements, large crosstalk, extra angle freedom, extreme, arbitrary, and multiplexing wavefronts can be and complexity of readout of the Fresnel hologram result modulated in subwavelength pixels. in degraded performance for multi-wavelength and Among the various advantages of metasurface-based broadband optical devices. In addition, 2D multifunction devices, the most fascinating property is their capability to integration has the bottlenecks of limited design freedom achieve flat and ultrathin optical elements, which offers a due to space constraints. Compared to 2D integration, 3D great opportunity to realise compact optical devices with stacking of metasurface-based devices with different multiple functions via two-dimensional (2D) and three- functions in the vertical direction can combine the advantages of each device, reduce the processing difficulty of each device, increase design freedom, and generate new Correspondence: Huigao Duan ([email protected]) 1State Key Laboratory of Advanced Design and Manufacturing for Vehicle features to improve the integration of optical devices and Body, College of Mechanical and Vehicle Engineering, Hunan University, achieve compact multifunctional devices. ’ 410082 Changsha, People s Republic of China Vertically stacked metasurfaces for potential 3D- 2Kirchhoff Institute for Physics, University of Heidelberg, Im Neuenheimer Feld 227, 69120 Heidelberg, Germany integrated optical devices have attracted much attention. These authors contributed equally: Yueqiang Hu, Xuhao Luo © The Author(s) 2019 Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a linktotheCreativeCommons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/. Hu et al. Light: Science & Applications (2019) 8:86 Page 2 of 9 Various devices, such as wavelength multiplexed len- for 3D integration and represents substantial progress in ses22,23, monochromatic aberration correctors24,25, and exploring the irreplaceable applications of metasurfaces. retroreflectors26, have been demonstrated. Among them, The concept of 3D-integrated metasurfaces could be the wavelength-multiplexed lens has been achieved by extendable by stacking more metasurfaces, such as stacking a couple of monochromatic lenses with multiple polarizers and metalenses, in the vertical direction to form overlay fabrication processes. Its principle is essentially other multifunctional ultrathin optical systems. the same as that of the interleaved subarrays in the 2D plane, but this device allows for the utilisation of com- Results paratively simple structures in each lens, thus enabling Design and fabrication of a 3D-integrated full-colour more freedom of design and a wider process window in metasurface fabrication. The monochromatic aberrations corrector Figure 1 illustrates the schematic diagram of the 3D- and retroreflector, obtained by combining two meta- integrated metasurface that is composed of microscale surfaces with different functionalities, can achieve a more stepwise structures and a hologram metasurface for full- complicated function, which is similar to the concept of a colour holography. The microscale stepwise structures compound lens in current optical systems but greatly consist of an array of metal/dielectric/metal Fabry–Pérot reduces the size of the device. These examples have (MDMFP) cavity resonators, which act as colour filters, demonstrated the advantages of ultrathin and flat meta- with varied dielectric thicknesses. MDMFP colour filters surfaces for 3D stacking and show great potential for are proven to have high transmission efficiency, wide future compact optics applications. However, most of the colour gamut, and narrow spectral linewidth compared to – current research has focused on 3D integration of meta- that of plasmonic colour filters28 30. The hologram lenses and has not fully utilised the capabilities of meta- metasurface is composed of isotropic dielectric nanos- surfaces for multi-tasking applications. Very recently, an tructures, which can manipulate the propagation phase of attempt has been made to achieve holographic colour light at the subwavelength scale and generate high-quality prints based on 3D-printed stacked microscale diffractive far-field hologram images. As Fig. 1b shows, when the optics and nanostructured colour filters27, but this device is illuminated by RGB lasers, the lasers only go approach suffers from a small field-of-view (FOV), mul- through the filters with their closest resonance wave- tiple diffraction orders, low data density, relatively large lengths and subsequently shine on the hologram meta- crosstalk, and limited fabrication accuracy, leading to a surface, generating three independent far-field great challenge for full-colour holography applications. monochromatic greyscale hologram images. By carefully In this work, we demonstrate using 3D integration of mixing RGB channels, a full-colour hologram image can metasurfaces to realise full-colour holography by stacking be achieved. The metasurface is carefully designed to form a monolithic colour filter microarray and hologram a projection at the desired wavelength and encode the metasurface. Such an integrated device provides a possible holographic information on the specifically arranged solution to solve the bottleneck problems (e.g., large colour filters, including the colour microprint informa- crosstalk, small FOV, extra angle freedom, and strict tion. Compared to existing metasurface-based colour polarisation requirements) of full-colour holography. holography using the wavelength multiplexing concept Simultaneously, the function of microprints enabled by a with plasmonic and PB phase-based nanostructures, the monolithic colour filter microarray are still maintained for current design of integrating a colour filter microarray various multifunction applications. A colour microprint with a hologram metasurface has several advantages. First, image is observed when the device is illuminated by white the FP cavity colour filters and the dielectric metasurface light, while a full-colour hologram image can be projected ensure higher transmission and diffraction efficiency for into the far field under red (R), green (G), and blue (B) far-field holography than those of transmissive plasmonic laser illumination by mixing three independent greyscale holography. Second, due to the narrower resonances of FP hologram images. Compared to the