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Metamaterials for Photonic Applications Natalia Dubrovina Metamaterials for photonic applications Natalia Dubrovina To cite this version: Natalia Dubrovina. Metamaterials for photonic applications. Other [cond-mat.other]. Université Paris Sud - Paris XI, 2014. English. NNT : 2014PA112088. tel-01522399 HAL Id: tel-01522399 https://tel.archives-ouvertes.fr/tel-01522399 Submitted on 15 May 2017 HAL is a multi-disciplinary open access L’archive ouverte pluridisciplinaire HAL, est archive for the deposit and dissemination of sci- destinée au dépôt et à la diffusion de documents entific research documents, whether they are pub- scientifiques de niveau recherche, publiés ou non, lished or not. The documents may come from émanant des établissements d’enseignement et de teaching and research institutions in France or recherche français ou étrangers, des laboratoires abroad, or from public or private research centers. publics ou privés. UNIVERSITE PARIS-SUD ECOLE DOCTORALE : Ondes et M atiere Institut d’Electronique Fondamentale (IEF) DISCIPLINE PHYSIQUE THÈSE DE DOCTORAT Soutenue le 14.05.2014 par Natalia Dubrovina M etamaterials for photonic applications Directeur de thèse : Anatole LUPU Chargé de recherche CNRS, Insititut d’Electronique Fondamentale Composition du jury : Président du jury : André DE LUSTRAC Professeur, Université Paris Ouest Rapporteurs : Andrei LAVRINENKO Professeur, Technical University of Denmark Yannick DE WILDE Directeur de recherche, Institut Langevin, ESPCI-ParisTech Examinateurs : Alexandre BOUHELIER Chargé de recherche, Institut Carnot de Bourgogne Anatoly ZAYATS Professeur, King's College London this thesis I dedicate to the memory of my father, V yatcheslav !"#$%& " !%&'( $)"&* )%+ &,$, -".% '$!$ Acknowledgments This thesis would not have been written without number of people to whom I am deeply thankful and to whom I would like to express my greatest gratitude. First of all and foremost I want to acknowledge my advisor Anatole Lupu for suggesting this topic to me and for being such a remarkable mentor. Without his guidance and support through my PhD years this work would never have been possible. His advanced ideas and confidence in obtained results were always encouraging me to continue the study. He has taught me not only how to make precise optical measurements, how to retrieve maximum information from a graph, how to make oral presentations, how to be creative keeping feet on the ground and many other scientific tricks, but also he was the one who had helped me a lot with accommodation in France. I wish to thank my committee members for being generous with their expertise. I would like to offer my special thanks to the reviewers Andrei Lavrinenko and Yannick de Wilde for the time they have spent reading the manuscript and for their remarks and suggestions. I would like to thank the other members of the committee Alexandre Bouhelier and Anatoly Zayats for finding the time in their schedule and André de Lustrac for accepting the role of the jury president. Their comments and questions were very beneficial in the complementation of the manuscript. This thesis would hardly been completed without help of Aloyse Degiron who has aided me both with simulation part of the work and with experimental aspects of the samples fabrication. His perfectionism in a good sense is an exemplar to me and a high standard to strive for. I am very grateful for the stimulating discussions we have had during three and a half years and all experience I have earned from him. I would particularly like to acknowledge all clean room technical staff of In st itu t d ’El ect ronqu e Fon dament al e (CTU-MINERVE) for the trainings and technological recommendations. I owe my deepest gratitude to Jean-René Coudevylle who has helped me a lot on all levels of the lithography process. I also have had a chance to work with Nathalie Isac and I thank her for sharing with me her experience in optical lithography fabrication and her positive humor. I still have her funny notices in my clean room notebook with the recipe “how to become a winner”. It is a pleasure to extend my appreciation to Xavier Leroux from whom I have greatly benefited in handling of Nanobeam machine. The fine adjustments he has helped me to make were the key point to win nanosized structures where separation distance between two elements could be no more than 30 nm. I am deeply grateful to the collaborators from the group PHODEV of Laboratoi re de Phot on iqu e et d e N anost ru ctu res for the proposed samples with split ring resonators and their i Acknowledgments optical characterization, to Bruno Gallas from Inst itu t d es N an oSciences de Pari s for the ellipsometry measurements and to the collaborators from L aborat oi re de N an otechn ol ogie et In st rumen tat ion Opti qu e for the near field measurements. I have had the support and encouragement from the CRIME group members of In stit ut d ’El ect ronqu e Fondament al e to whom I would also like to express my appreciation. I appreciate the feedback offered by Nawaz Burokur during the preparation to my viva voce and I thank him for his patience, time and constructive comments. I thank Tatiana Teperik for bringing me to sport classes; Alexandre Selier for his optimistic mood that he was spreading in the office every single day; Dylan Germain for his support and readiness to listen; Jianjia, Simon, Quynh, Paul-Henri, Rasta for making my days amusing and light. I would also like to thank my lovely friends: Lan, Maxim, Igor, Dmitry, Sergey N., Antoine, Giannis, Adam, Pierre, John, Andy, Paola, Leonid, Egor, Niraj, Andrey, Sergey M… Special thank I would like to send to Petr for checking on everyday basis the progress in manuscript writing. I owe my gratitude to all my family and especially to my grandmother, Galina, for giving me the direction in my education. Thanks to her I found myself in the place surrounded by brilliant teachers who have opened me the doors to science. Lastly but not least I want to thank Andrey Fedyanin, head of the Laboratory of N an ophotoni cs and M etamateri al s of M oscow State Uni versit y, without whom I would never have considered coming to France. ii Abstract The subject of the PhD thesis deals with metamaterials for photonic applications. The main objective is to investigate the potential of metallic metamaterials for building optical functions at near infrared optical frequencies ( λ = 1.5 µm). A significant part of the work is focused on the engineering of the metamaterials effective index associated with localized plasmon resonances. Two configurations of particular importance for fabrication technology are considered. • Free space light propagation, with the incident electromagnetic wave interacting with single metafilms at either normal or oblique incidence. • Guided wave configuration, with single metamaterial layer placed on top of dielectric waveguide. For the free space configuration, the validity of the effective medium approach was investigated both numerically and experimentally with the example of metamaterials composed of either gold cut wires on glass substrate or split ring resonators and continuous wires on silicon substrate. On the basis of these examples it was shown that the metafilm behavior is indeed analogous to that of a homogeneous layer. The thickness of this layer is that of the deposited metal. The validity of this conclusion was verified with respect to a number of criteria consistent with the Maxwell-Garnett approximation. It was shown in particular that near the resonance frequency the effective index of the metafilm layer can reach very high values neff ≈ 10 that cannot be attained with natural materials. The effective medium approach developed for a single metamaterial layer in free space configuration was further extended to a guided wave configuration. The objective is to achieve an efficient control over the flow of the light in the waveguide using effective index variation induced by metamaterial resonances. The possibility of achieving a significant effective index variation with a silicon slab waveguide covered by 200−50−50 nm gold cut wires was investigated by numerical modeling and confirmed by experimental results. The magnitude of local index variation in the vicinity of the resonance frequency deduced from experimental data is as high as ± 1.5. The possibility to control the local effective index at the nanoscale can be used in transformation optics applications. The hybrid metamaterial guided wave configuration may become a promising alternative to the bulk multi-layers metamaterial structures in the near infrared domain. Key words : metamaterials; nanophotonics; surface plasmons; integrated optics. iii Résumé L’objet de cette étude concerne l’exploration, à la fois sur le plan théorique et expérimental, de la possibilité d’utilisation des métamatériaux pour des applications dans le domaine de la photonique aux longueurs d’onde télécoms ( λ = 1.5 µm). L’un des principaux objectifs adressés dans le cadre de la thèse est de réaliser l’ingénierie de l’indice effectif en utilisant les résonances des plasmons de surface localisés des métamatériaux métallo-diélectriques. Deux cas particulièrement importants du point de vue de la réalisation technologique sont considérés. • Propagation en espace libre quand une onde lumineuse sous incidence normale ou oblique interagit avec une surface diélectrique recouverte d’une monocouche de métamatériaux. • Propagation dans une configuration guide d’onde avec une monocouche de métamatériaux à la surface d’un guide d’onde en Silicium. Les résultats des modélisations et les mesures expérimentales montrent que les propriétés optiques d’une mono-couche de métamatériau peuvent être décrites par celle d’une couche homogène avec un certain indice effectif. L’épaisseur de cette couche est égale à celle des motifs métalliques, à condition qu’elle soit inférieure à quelques dizaines de nm. Pour des faibles facteurs de remplissage en surface, l’indice de réfraction d’une telle couche suit l’approximation de Maxwell- Garnett.
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