Background Statement for SEMI Draft Document 5002B

Background Statement for SEMI Draft Document 5002B NEW STANDARD: SPECIFICATION FOR EDA COMMON METADATA

Notice: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this Document.

Notice: Recipients of this Document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.

What is the problem being solved?  The Equipment Data Acquisition (EDA) standards (SEMI E125, E134, and supporting standards) have entered a second freeze, based on the 0710 standards release, in preparation for widespread commercial use. The equipment metadata specified by SEMI E125 plays an important role in allowing the factory client to largely self-configure in support of rapid deployment and on-the-fly adjustment of data collection. Experience from initial EDA implementation showed that more direction is needed to attain the consistency of metadata definitions needed to optimize the data collection management process in a factory. SEMI E120 provides the basic building blocks to model the equipment structure in metadata. SEMI E125 adds the definitions of state machines, objects, parameters, and exceptions. These general requirements provide a solid basis for metadata definitions. However, experience shows that much of the metadata model's concepts are already covered in other SEMI standards. This includes those most typically used for 300 mm process equipment. A consistent rendering of ProcessJobs, Substrates, Load Ports, and other such concepts specified in these standards would make the job of the EDA clients simpler. A standard definition of these concepts acceptable to all users would also make the job of the equipment-side implementer much easier. EDA standards E125 and E120 define the structure and format of the metadata. What is needed is a specification that provides a definition of the metadata content commonly found on most equipment. This document proposes a new specification for that purpose. This specification does not conflict with SEMI E125. This means that an implementation can conform to both SEMI E125 and this specification. This specification is expected to be synchronized with SEMI E125 so that if and when SEMI E125 changes, this specification will be changed to accommodate it.

What is the history of this issue and ballot?  This subject was first addressed by publicly available ISMI-published guidance and sample metadata. This material was refined through public input and various ISMI activities. The resulting content was brought into the SEMI standards process to undergo the global consensus process for the purpose of creating a specification acceptable to all. This is the third time this document has been balloted. It has undergone close scrutiny by standards members in multiple regions.

Who will this affect? How? Why?  This document will affect implementers and users of the 0710 version of EDA. All known EDA implementations to date are of the 1105 version. The industry is expected to transition to 0710 EDA beginning in 2012, a process that had begun. This specification is timely and if approved promptly, will aid this transition. Many implementers are already aware of the ISMI version of EDA Common Metadata and are using it to influence their current work. Is this a change to an existing solution, or, is it a new activity?  This is a new activity that is related the existing E125 Equipment Self-Description specification.

Revision Control This revision control records activity within the task force as well as formal submit and resubmit dates and results per SEMI. Entries have been made by the task force. Date Version Name Edits 1/11/2012 2.1 Lance Rist First draft of 5002B for DDA TF review. Issues addressed noted in issues list at top. 1/17/2012 2.2 Lance Rist Second draft of 5002B for DDA TF review. Updated XML files included with this draft. Issues addressed noted in issues list at top. 1/24/2012 2.3 Lance Rist Third draft of 5002B for DDA TF review. Incorporated new I&C- Japan inputs and feedback from telecons on 1/19. 1/30/2012 2.4 Lance Rist Fourth draft of 5002B for DDA TF review. Most issues resolved. 2/2/2012 2.5 Lance Rist Fifth draft of 5002B. This version was approved for Cycle 2 ballot by the DDA TF pending final edits. 2/3/2012 3.0 Lance Rist Sixth draft of 5002B. This version includes the final edits and modifications approved by the DDA TF.

A Note on Requirements ID’s Requirements ID’s are included in the proposed new standard by direction of the North America Information & Control Committee. The Requirements Identification section of the conventions, ¶6.1 describes how these are delimited. All requirements are clearly marked. No other text should be considered a requirement. Sections near a requirement may provide examples or other supporting text that can help with interpreting the requirement. Note that the word “should” is used in some non-requirements text and it denotes a recommendation or a suggestion, not a requirement. The authors of this proposal have suggested requirement id numbers, but the final assignment will be made by SEMI. Corrections to the requirement numbers are considered editorial by agreement of the Information & Control Committee.

Review and Adjudication Information Task Force Review Committee Adjudication Group: Diagnostic Data Acquisition Task Force North America I&C Committee Date: Tuesday, April 3, 2012 Wednesday, April 4, 2012 Time & Timezone: 8:00 AM to 3:00 PM, Pacific Time 8:00 AM to 4:30 PM, Pacific Time Location: SEMI Headquarters SEMI Headquarters City, State/Country: San Jose, California San Jose, California Leader(s): Gino Crispieri (ISMI) Jack Ghiselli (Ghiselli Consulting) Brian Rubow (Cimetrix) David Bricker (Applied Materials) Lance Rist (RistTex) Standards Staff: Paul Trio (SEMI NA) Paul Trio (SEMI NA) 408.943.7041 /[email protected] 408.943.7041 / [email protected] This meeting’s details are subject to change, and additional review sessions may be scheduled if necessary. Contact Standards staff for confirmation. Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900, Fax:408.943.6900, Phone:408.943.7943 CASan 95134-2127 Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and Standards staff.Standards contact please meetingsin to wouldlike attend but to these by beperson telephone/web, participate not able you the willmeetingdate partiesIf web interested approaches. be to as information distributed and Telephone emsin i rne t erdc ado itiue hs dcmn, i woe r i pr, ny wti h soe f EI nentoa Sadrs cmite (document committee Standards International SEMI of scope the within only part, in or whole in document, Guideline. this Safety or distribute Standard adopted or and/or official reproductiondevelopment) All and/oractivity. other theprior withoutconsent distribution SEMI written prohibited.ofis an reproduce as construed be to to is granted page this is on material No Permission program. Standards International SEMI the of Document Draft a is This Page jn l jn 3 Document Document Number: Doc. Date:  SEMI 5/8/2018 DRAFT 

LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900, Fax:408.943.6900, Phone:408.943.7943 CASan 95134-2127 Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and SEMI E116 SEMI E94 SEMI E90 SEMI E87 SEMI E40 SEMI E39 SEMI E30 4.1 4 3.2.2 3.2.1.2 Privileges exist specifications. SEMI or data. accessspecific by limit other to may grant that 3.2.1.1 limitations. 3.2.1 may exist. 3.2 data associated be wouldnot its required.implemented, 3.1.1 3.1 3 and practices, health and safety other ofprior thelimitations use. applicability regulatoryor to determine appropriate establish to Documents the of users the of responsibility the is It use. NOTICE: emsin i rne t erdc ado itiue hs dcmn, i woe r i pr, ny wti h soe f EI nentoa Sadrs cmite (document committee Standards International SEMI of scope the within only part, in or whole in document, Guideline. this Safety or distribute Standard adopted or and/or official reproductiondevelopment) All and/oractivity. other theprior withoutconsent distribution SEMI written prohibited.ofis an reproduce as construed be to to is granted page this is on material No Permission program. Standards International SEMI the of Document Draft a is This standards these that reference. those specifications XML/SOAP 5.1.1 5.1 5 NOTICE: SEMI E157 SEMI E148 SEMI E145 SEMI E138 SEMI E134 SEMI E132 SEMI E128 SEMI E125 SEMI E120 Referenced Standards Referenced Documents and Limitations Terminology SEMI Standards SEMI security data for mechanism A collection. data related is that issue known a is protection property Intellectual SEMIcommunicationstandards. selected data representations for metadata from defines specification This Acronyms andAbbreviations Acronyms Data security and intellectual property protection mechanisms scopethis arebeyond andprotection specification. of intellectualproperty the security Data user-controlled to subject be may metadata equipment’s an in specified items the to access client’s EDA An not is standard aIf equipment. in implemented be standards those require to intended not is specification This EDA Client-by-client data access limitations are not within the scope this within accessarenot document. limitations of Client-by-client the data and suppliers equipment by Privileges of definition the for provides 10.2.10.1) (Section E132-0310 SEMI — Object Services Standard: Concepts, Behavior, and Services Standard: Concepts, Behavior, Services —Object Unless otherwise indicated, all documents cited shall be theversions. latestpublished otherwise documents all cited be shall Unless indicated, their with associated issues safety all address to purport not do Guidelines Safety and Standards SEMI qimn aa Aqiiin — Rfr o te cleto f SM tnad ht dfn the define that standards SEMI of collection the to Refers — Acquisition Data Equipment — — Specification for Control for JobManagement— Specification Substrate Tracking for — Specification (CMS) Carrier Management for — Specification for Management— Standard Processing Communications of Modeland for (GEM) Manufacturing Control Equipment — Generic — TimeSynchronization Object the for TS-Clock and— Specification Definition of Symbols MeasurementXML Unit in for — Classification Semiconductor Common Components — XML (DCM) Data Management for Collection — Specification EquipmentAuthentication and for Authorization Client — Specification XML MessageStructures for — Specification Equipment for Self-Description(EqSD)— Specification theModel Common(CEM) for Equipment — Specification Equipment for (EPT) Tracking Performance — Specification - based data collection interface and consists of SEMI E125, SEMI E132, SEMI E134, SEMI E120, and E120, SEMI E134, SEMI E132, SEMI E125, SEMI of consists and interface collection data based Specification for for Specification Module Process Tracking Page jn l jn 5 Document Document Number: Doc. Date:  SEMI 5/8/2018 DRAFT 

Conventions Requirements Identification Requirements Definitions Format Notation Format The following notation specifies the structure of requirement identifiers. requirement notation following theof structure The specifies location undocked equipment buffer internal bufferinternal equipment buffer fixed location FIMS standards content camelcase Unique ISO/IEC11578. Identifier —Definedin —Universally uuid identifier onuuid. IdentifierE120Nameable —SEMI instance based Uid —Unique Mechanical Standard. —Front-OpeningFIMS Interface EFEM 1 Requirement Identifiers Requirement Requirements in the body text are highlighted with a border and light green background (may appear gray in gray appear background (may green light border and awith highlighted text are body the in Requirements used. is thesuffix thetext following requirement the end format of To mark See text. requirement of beginning the at used is format prefix requirements following The   — Equipment Front-End Module — A hardware component that provides access for carriers to the to carriers for access provides that component hardware A — Module Front-End Equipment — [/RQ] [ Esss.ss — the practice of writing compound words or phrases in which each word is capitalized and all and capitalized is word each which in phrases or words compound writing of practice the — — a set of locations within the equipment to store carriers. within locations load ports. —alocationsexclude store the setequipmentto These of — the "docked" position of a FOUP at a Load Port where the FOUP may be opened and opened be may FOUP the where Port Load a at FOUP a of position "docked" the — -RQ- ] Requirement [/RQ] text. ] — for the purpose of this specification, the term term the specification, this of purpose the for — — the position of a FOUP at a load port where the FOUP may be loaded or unloaded from unloaded or loaded be may FOUP the where port load a at FOUP a of position the — nnnnn-nn Indicates the of requirementend a version a of requirement) Two-digit that number indicates level the version of requirement used the (.00 is for first SEMI. Unique number this five-digit within specification. are 90000-99999 reserved use for by Indicates is this a identifier. requirement SEMI specificationstandards identifier.E087.00, E134.00 Examples: E087.01, — production equipment that has only fixed load ports and no internal buffer for buffer internal no and ports load fixed only has that equipment production — — equipment that uses an internal buffer. uses —equipmentthat ] ] Page jn l jn 6 9.1 Purpose for a list of athe contentfor list standards. content standards content refers to the collection the to refers Document Document Number: Doc. Table 1 Table Date:  SEMI 5/8/2018 for the for DRAFT 

provides an example of requirements in a table. Note that in this example, the same requirement is requirement same the example, this in that Note table. a in requirements of example an provides Parmeter1 EDA Parameter shall no colorbe similar in light the panel. [Esss.ss-RQ-nnnnn-nn]The light be shall blue. the panel.light The light typicallyblue is placed the at leftmost in position The shall bluelight be Req Y Statement Unrestricted isTransient Page jn l jn 7 [/RQ] DataVariable1 SECS Variable SECS There 1 . Where a parent requirement includes requirement parent a Where . light panel. There beshall no color the similar in panel. the position the leftmost in light The light typicallyblue is placed at Type N/S Table 3 Table See E999-0707, ¶4.3.5. Additional Detail Additional . . Document Document Number: Table 4 Table Doc. Explanation Date:  explains the explains SEMI 5/8/2018 DRAFT 

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LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900, Fax:408.943.6900, Phone:408.943.7943 CASan 95134-2127 Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 9 9 8.1.1 8.1 8 the byfollowing directions versions be in Other can supported standards. content the of each of version one support files These metadata. equipment E125 into files content the of renderings 7.6 E90 SEMI and Ports), listed standards ¶ in of Each the(Substrates). content Load and (Carriers E87 SEMI (ProcessJobs), E40 SEMI as such standards communication in 7.5.2 specified is EventID the for format The report. event E134 ¶ SEMI each of part key a are EventIDs example, 7.5.1 of for the metadata. parts selected content specifies 7.5 not of Itcontent. does thespecify metadata. form 7.4 byreference. and type included definitions, exceptions, unitsmachines, separately aredefined and state objects, SEMI The component. equipment each to machines state and objects, SEMI exceptions, parameters, 7.3.1 one the in contents responseto theof metadata response. another from references 7.3 emsin i rne t erdc ado itiue hs dcmn, i woe r i pr, ny wti h soe f EI nentoa Sadrs cmite (document committee Standards International SEMI of scope the within only part, in or whole in document, Guideline. this Safety or distribute Standard adopted or and/or official reproductiondevelopment) All and/oractivity. other theprior withoutconsent distribution SEMI written prohibited.ofis an reproduce as construed be to to is granted page this is on material No Permission program. 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LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900, Fax:408.943.6900, Phone:408.943.7943 CASan 95134-2127 Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and oue usse, IDvc, MtraLcto, ad Lgcllmn. Ec aebe i ikd t an to linked is Nameable Each 9.2.3.3 LogicalElement. and MaterialLocation, EquipmentNodeDescription. IODevice, Subsystem, Module, 9.2.3.2.1 9.2.3.2 discussion. See components. structural its to function equipment the relate should It accuracy. sacrificing without data the to accessibility and equipment the of understanding promotes model metadata the that important is It view. and data of sources as components its and point ofmodels should that a equipmentstructure the equipmentit of functional metadata from match The behavior. equipment the about information context static the provides structure 9.2.3.1 9.2.3 and behavior dynamic components provide thethat data. metadata to structure 9.2.2.1 9.2.2 equipment. 9.2.1.3 equipment. 9.2.1.2 metadata. throughin E134services, not areprovided because the theirSEMIObjTypes values 9.2.1.1.1 accurate contain they that useful information. and important is it metadata, the in supplied are strings such When EquipmentElement. for emsin i rne t erdc ado itiue hs dcmn, i woe r i pr, ny wti h soe f EI nentoa Sadrs cmite (document committee Standards International SEMI of scope the within only part, in or whole in document, Guideline. this Safety or distribute Standard adopted or and/or official reproductiondevelopment) All and/oractivity. other theprior withoutconsent distribution SEMI written prohibited.ofis an reproduce as construed be to to is granted page this is on material No Permission program. Standards International SEMI the of Document Draft a is This 9.2.3.5.2 ¶ in discussed in ¶ objects object EPTTracker E116 SEMI the also and sections, following immediately the in discussed are which JobManager, and MaterialManager the include LogicalElements 9.2.3.5.1 9.2.3.5 components. 9.2.3.4.1 9.2.3.4 context. other need provide whenattributes to needed included, which, 9.2.3.3.1 [/RQ] and "N/A", "None". [/RQ] "Unknown", "NA", donot that the beintentthe attribute, not orincluding shall zerolengthstrings values metadata satisfy of Unless elements string the SEMIE125orallows[Esss.00-RQ-00003-00] it,in SEMIE120explicitly included that can change independently from the main equipment control software. [/RQ] from theequipmentcontrol main changeindependently can that be shall software software.SoftwareModules any included components Additional for other equipment control Supplier forModel attributes. [/RQ] values the and ImmutableID accurate hasincluded that also Any shall have an EquipmentElement value [Esss.00-RQ-00006-00] the attribute. Supplier [/RQ] for value accurate also shall have Modelattribute value has that Any an a included EquipmentElement [Esss.00-RQ-00005-00] [Esss.00-RQ-00004-00] The metadata shall not describe optional Modules that donot Modules that describe optional not Theshall onthe exist equipment. metadata [Esss.00-RQ-00004-00] [Esss.00-RQ-00007-00] The equipment metadata shall contain a SoftwareModule to represent SoftwareModuleto the main contain Theshall a equipmentmetadata [Esss.00-RQ-00007-00] Equipment Structure EquipmentNodeDescription LogicalElement SoftwareModule EquipmentElement Nameable equipment The definition. structure equipment the create to how specifies standard E120 SEMI The equipment static the links It metadata. equipment the of heart the at is EquipmentNodeDescription The the on exist not do that IODevices and Subsystems optional describe not should metadata the cases, most In the of instance that on included components the only model to intended is metadata equipment’s An A LogicalElement defines a persistent, non-structural element in the equipment structure. Examples of Examples structure. equipment the in element non-structural persistent, a defines LogicalElement A software equipment the to changes identify help to used is attribute version SoftwareModule The elements some are there However, excluded. be to allowed are EquipmentElement for attributes Several Equipment, include Nameable of Types Nameable. of type a is structure equipment the in node Each and NodeDescriptions for defined Parameters of values the to apply not does RQ-00003 that Note Material 9.3.2.5.5 . Page jn l jn 10 9.3.8 . See also the discussion of persistent of discussion the also See . Document Document Number: Doc. Date:  SEMI 1 for more for 5/8/2018 DRAFT 

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SubstrateDestinationUnknown SubstrateDestinationNotAccessible SetUpName (Configuration) QueueAvailableSpace QueuedCJobs CtrlJobID (Transient) 9.3.6.5 Parameters Exceptions . Document Document Number: Doc. Date:  SEMI 5/8/2018 DRAFT 

LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900, Fax:408.943.6900, Phone:408.943.7943 CASan 95134-2127 Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and [Esss.00-RQ-00035-00] [Esss.00-RQ-00034-00] 9.3 more one Parameters.to or 9.2.8.2 the to Events and Alarms, Variables, the equipmentmetadata. in corresponding constructs Data SECS of mapping requires and supports E125-0710 well. as interface 9.2.8.1 9.2.8 9.2.7.4 9.2.7.3.4.5 9.2.7.3.4.4 databases.by most 9.2.7.3.4.3 xmltype definitions files String80, contain Common for andSee Metadata String128, String255. also ¶ 9.2.7.3.4.2 possible,maximum specified. size be the should Wherever 9.2.7.3.4.1 9.2.7.3.4 emsin i rne t erdc ado itiue hs dcmn, i woe r i pr, ny wti h soe f EI nentoa Sadrs cmite (document committee Standards International SEMI of scope the within only part, in or whole in document, Guideline. this Safety or distribute Standard adopted or and/or official reproductiondevelopment) All and/oractivity. other theprior withoutconsent distribution SEMI written prohibited.ofis an reproduce as construed be to to is granted page this is on material No Permission program. Standards International SEMI the of Document Draft a is This 9.3.2.5.2 an the aidreader. to the arenoted results.of hereas in Some theseconsistency conventions 9.3.2.5.1 9.3.2.5 Table the standards. than one of more apply to 9.3.2.4 9.3.2.3 RQ-00037¶ in see example, 9.3.2.2 standards ofE125equipmentmetadata. in the content of theaddress modeling each 9.3.2.1 9.3.2 ¶ in arelisted standards 9.3.1 [Esss.00-RQ-00032-00] Combined besyntaxin shall using defined formed [Esss.00-RQ-00032-00] units SEMIE145.[/RQ] the [/RQ] applicable. SEMI E145wherever from unit employ The shall prefixes,and powers, equipmentmetadata symbols, names [Esss.00-RQ-00031-00] arrays withinincludes [/RQ] structures. = XML). (MaxElements 0in be as Parametersnot shall defined This unlimited[Esss.00-RQ-00030-00] arrays [/RQ] usingcan data contain. this type Parameter that the maximum of any and characters represents number numeric xis or"Stringx" more characters one where type includestring Theshall definitions simple the format metadata using [Esss.00-RQ-00029-00] named in in metadatathe typeand Alldefinitions units the use files[Esss.00-RQ-00033-00] shall in listed defined equipment Table 5 Table Content StandardsContent Requirements RequirementID Mapping toEquipment SECSMetadata E125 Data EDA Common MetadataXML FilesEDA Common (¶ section this within included are standard content each to relating requirements The 5 XML Files The ApplyMultipleContentStandards To XMLFilesThe Included in the XML file collection are two files, listed in in listed files, two are collection file XML the in Included .zipincluded. structure format directory XML relative a fileswith in are delivered The For content. file XML the address to included is filesrequirement separate a standards, These content the of each For files. XML attached the of contents the are standard this for requirements the in Included mapped metadata equipment the in appear typically should identifier) (variable VID SECS each result, a As EDA the via available be typically should interface SECS-II the via available are that variables Data Units Conventions Used in the EDA Common Metadata XML Files Used EDA Common inConventions the MetadataXML Unlimited Strings and Strings Unlimited Arrays General promote to used were conventions some files, XML Metadata Common EDA the constructing When as they apply to the content standard-specific XML file content. [/RQ] XML standard-specific file content. as theythe applycontent to Any use of andAny unlimitedbebythe supplier. strings,should justified documented "Stringx"shouldof used place data the datain unlimitedThe length"string" type. be types EDA inefficiently handled The are strings large Very practical. as characters. small as kept be 80 should length maximum of The maximum a have would String80 type of Parameter a example, For handle. to systems database many for difficult are size undetermined an of are that constructs Data 9.1 . CommonGetUnits.xml CommonGetTypeDefinitions.xml 9.3.3 . File Name File Page jn l jn 16 \EDA Common 0710 Metadata \EDA Common 0710 Metadata Table 5 Table File Location collection File Within , that hold type definitions and units that units and definitions type hold that , Document Document Number: 9.3 Doc. ). The content The ). Date:  9.3.2.4 SEMI 5/8/2018 DRAFT . 

LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900, Fax:408.943.6900, Phone:408.943.7943 CASan 95134-2127 Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and Unrestricted) parameter in the Attributes collection of the SEMIObjType. Where the object is taken from one of the of one from taken is object the Where SEMIObjType. the of collection Attributes the in parameter Unrestricted) 9.3.2.5.4.3 ¶ 9.3.2.5.4.2 themodule. process in located Location Substrate E90 SEMI the as such equipment, the on present consistently are that those are objects Persistent 9.3.2.5.4.1 9.3.2.5.4 parameters. translated transient to were DVVALs are these 9.3.2.5.3.4 of Some data. same the for existed DVVAL and single into parameter. a combined EDA SV SECS a standards content some (unrestricted) In non-transient EDA into parameters. translated are DVVALs SECS each many reason for this For defined source. that be for event report the can in included be can plans source each for collection parameters data unique that data means This event. separate the of source possible that so defined are StateMachineInstances Independent 9.3.2.5.3.3 of style this or support object To an report.event instance. of single instances a all represents represent it particular a of subject the is instance whichever sent, for reported (CEIDs) be can value a that so created were DVVALs is reporting, events report model event state the When cases, many component. In equipment variable. data a of source 9.3.2.5.3.2 ¶ in tables various in noted is This parameters. see example, EDA into translated were attributes object and variables 9.3.2.5.3.1 9.3.2.5.3 element. the corresponding 9.3.2.5.2.2 prevents that standard it. requirement content 9.3.2.5.2.1 emsin i rne t erdc ado itiue hs dcmn, i woe r i pr, ny wti h soe f EI nentoa Sadrs cmite (document committee Standards International SEMI of scope the within only part, in or whole in document, Guideline. this Safety or distribute Standard adopted or and/or official reproductiondevelopment) All and/oractivity. other theprior withoutconsent distribution SEMI written prohibited.ofis an reproduce as construed be to to is granted page this is on material No Permission program. Standards International SEMI the of Document Draft a is This the theinstanceevent. specific for generated that data provides report event each but instances), all to applying is, (that SEMIObjType the of terms in defined typically are 9.3.2.5.4.5 definitions. the SEMIObjType only specifies metadata ¶7.2.5.5).The E125.1-0710, SEMI (see ObjID the includes which Source, the using differentiated is instance object specific a for attribute The SEMIObjType. the in supplied are and object the of instance each for same the are names attribute The collection. data hoc ad or reporting for available always are attributes its instance, 9.3.2.5.4.4 in formatted but attribute, standard the match to named CamelCase. typically is parameters these of each standards, content 9.1 . Dynamic ObjectsDynamic Parameters As shown in in shown As object the of lifetime the During instance. object an to relation in non-transient are values attribute The = (isTransient non-transient a as defined been has attribute SEMIObjType each specification, this In in listed standards content the in defined objects dynamic model to used are SEMIObjTypes E125 SEMI ProcessJobs. E40 SEMI as such time, over destroyed and created are that those are objects Dynamic SECS Some EDA. in needed are parameters transient where cases some remain there that Note provided. is structure equipment The equipment. the of view sophisticated more a provides EDA the is that component equipment the specify not does It equipment. the of view simplistic a uses SECS data SECS files, Metadata Common EDA the in standards content the of representations the create To specifies that standard content the from text including populated are fields description possible, Where a is there unless notation CamelCase using populated are strings as formatted fields id and name All Table 7 ). ). Figure 3 Figure , the SEMIObjType is a template for each object instance. Data collection plans collection Data instance. object each for template a is SEMIObjType the , Page jn l jn 17 Document Document Number: Doc. Date:  SEMI 5/8/2018 9.3 DRAFT  (for

9.3.2.5.3 ). Document Document Number: Doc. Date:  SEMI 9.2.3.5 5/8/2018 DRAFT  ),

LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900, Fax:408.943.6900, Phone:408.943.7943 CASan 95134-2127 Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and standards. The files contain the Parameter, StateMachine, Exception, SEMI Object, and SimpleEvent definitions. SimpleEvent and Object, SEMI Exception, StateMachine, Parameter, the contain files The standards. 9.3.2.6.1 9.3.2.6 9.3.2.5.8 might be not cases. knownall in state previous the since required not are parameters state previous The above. as same the is xxx where “xxxPrevState” is convention naming Its the metadata. in also defined is parameter state previous states, a morewith StateMachines 9.3.2.5.7.4 ProcessJobCurrState. will StateMachine named yielda the E40ProcessJob parameter For example, standard. content the in model state the of name the = xxx where “xxxCurrState”, convention the follows parameter 9.3.2.5.7.3 PreviousStateattributes. CurrentState and these by referenced parameters the for taken is approach consistent a files, XML Metadata Common EDA the For state. 9.3.2.5.7.2 valuesareinconsistent. contained theand naming the However, 9.3.2.5.7.1 9.3.2.5.7 zero. number transition assigned often most are transitions initial These transitions. initial exclusively almost are These numbers. 9.3.2.5.6.1 9.3.2.5.6 corresponding EquipmentNodeDescriptions. 9.3.2.5.5.3.4 specification. ObjType The 9.3.2.5.5.3.3 E90). SEMI from name variable data descriptive itMaterialLocation MaterialType value. implied includedis not because byattribute the is more the (using parameter SubstLocID the by representedis attribute ObjID The MaterialLocation. representing the EquipmentNodeDescription of the parameters 9.3.2.5.5.3.2 emsin i rne t erdc ado itiue hs dcmn, i woe r i pr, ny wti h soe f EI nentoa Sadrs cmite (document committee Standards International SEMI of scope the within only part, in or whole in document, Guideline. this Safety or distribute Standard adopted or and/or official reproductiondevelopment) All and/oractivity. other theprior withoutconsent distribution SEMI written prohibited.ofis an reproduce as construed be to to is granted page this is on material No Permission program. Standards International SEMI the of Document Draft a is This as upon acted and carefully read 9.3.2.6.6 be should comments All process. from should comments removed of the These finalthe metadata. version be appropriate. implementation the during make should 9.3.2.6.5.2 process. wouldbe during the removed merging Any such EDA. Parameters required in are not 9.3.2.6.5.1 required or mustincludeareconditionally optional. that whichto among the items determine items implementer 9.3.2.6.5 suggested described merger here. is addingprocess theA equipment-specific metadata. andstandards then 9.3.2.6.4 named file a contain not does set file XML 30 SEMI the notobjects. because any E30does define E30GetSEMIObjTypes.xml example, For files. six as many as and three as few as ¶ in 9.3.2.6.3 (listed service E125 E30GetEquipmentStructure.xml). SEMI each to 9.3.2.6.2 alsofor contain definitions supporting andThey Units TypeDefinitions. 1. Constructing An Equipment's Metadata From The EDA Common TheConstructing MetadataFrom Equipment's An EDA Identify the content standards that will be implemented. Begin with thein XML bewith files Begin implemented. provided will the that this contentIdentify standards specification for those standards. those standards. for specification To construct the final metadata for the equipment manually, the user should take the following take theshould equipmentmanually, thesteps: thefor user final metadata To construct The equipment. the of substance the fit to modified be must files XML Metadata Common EDA The content supported the of each for metadata the merging requires equipment for metadata the Constructing have They standard. that by affected are that files those only contains set metadata standard content Each multiple corresponding in XML constructsfiles eachcontentareprovided –one metadata standard for The content the of each for defined constructs metadata the contain files XML Metadata Common EDA The files. the metadata in arealso contentincluded standard’sstate parameters The ParametersState TransitionsStateMachine Most of the metadata files contain embedded comments that explain actions or choices the implementer the choices or actions explain that comments embedded contain files metadata the of Most interface SECS the in implemented not parameters standard content that says RQ-00002 Requirement For obvious. is state previous the then NoState), (excluding states two only has StateMachine the If the of name The metadata. the in defined is parameter state current a StateMachineInstances, all For previous and current for parameters reference can that attributes provides StateMachineInstance The state. previous the sometimes and state the report to parameters define standards content the of Most transition assigned are numbered not are that transitions standards, content the for metadata the In A similar process was used to map the attributes and variable data of other persistent objects to the to objects persistent other of data this variable and attributes the to map to used unique was process similar A requirements on based included are SubstrateLocationCurrState and MaterialID as represented are DisableEvents and SubstLocState, SubstID, attributes Location Substrate The 7.2 o oti h eaaa fo h qimn fr example (for equipment the from metadata the obtain to ) Page jn l jn 19 Document Document Number: Doc. Date:  SEMI 5/8/2018 DRAFT 

LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900, Fax:408.943.6900, Phone:408.943.7943 CASan 95134-2127 Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and emsin i rne t erdc ado itiue hs dcmn, i woe r i pr, ny wti h soe f EI nentoa Sadrs cmite (document committee Standards International SEMI of scope the within only part, in or whole in document, Guideline. this Safety or distribute Standard adopted or and/or official reproductiondevelopment) All and/oractivity. other theprior withoutconsent distribution SEMI written prohibited.ofis an reproduce as construed be to to is granted page this is on material No Permission program. Standards International SEMI the of Document Draft a is This reviewofeasier. implementation. the helps examples forcommercial make This a expected 9.3.2.7.3 set. metadata complete to the detailnecessary specific 9.3.2.7.2 9.3.2.7.1.2 9.3.2.7.1.1 internal an is example TrackSysInternalBuffer The equipment. buffer equipment. buffer fixed a is example TrackSysFixedBuffer 9.3.2.7.1 9.3.2.7 merge withprocess. toedit instructions additional the and help 9.3.2.6.6.1 4. 3. 2. 5. Example EquipmentExample MetadataSets complete the equipmentmetadata.complete metadatato any elements standards'equipment-specific add the various metadata, After combining supported responses,combinefrom content thestandards. seven metadata the For eachof resolve. the implementer that requirements must optional conditional for represent and These eachstandard. file the following directions as eachmetadata embedded commentsin files and theby metadata reading Update standard.that provided provided, in the accordinginstructions theto modify XML files directly supported. willversion that standard eachstandard Forany thenot versionbe Identify supported of The number of process parameters and exceptions included in these examples is far lower than would be would than lower far is examples these in included exceptions and parameters process of number The equipment additional and standards content the of representations required the combine examples These The sets. metadata equipment E125 complete of examples are files XML attached the with included Also Neither example is intended to represent any particular commercial process equipment. process particularcommercial intendedrepresent is to any example Neither the \EDA zipthe in filefolder 0710Common under Metadata\TrackSys. files arefound These contain that comments include files GetEquipmentNodeDescription and GetEquipmentStructure All g. f. e. d. c. b. a. for nodes of that type that for nodes particularstandard.for of that etc. StateMachineInstances, providesneeded the Parameters, NodeDescription IODevice). Each of anode representative or type(Equipment,Module, Subsystem, of NodeDescriptions are association the equipmentstructure, –By with GetEquipmentNodeDescriptionsResponse where they apply. the corresponding elements and equipmentstructure, add actual the forcorresponding to nodes contentthe Matchstandards in the supported the templates node. of particularcontentona standard particulartype focus of that the onthe effect are templates case,the provided the supported equipmentcomponents In standards. eachof each for Metadata the Common thein equipmentstructure examine being modeled. is equipment that Then the specific for equipmentstructure the –Construct basic GetEquipmentStructureResponse first. thenumber lowestwith standard bebystandard recommendedgrouped contentItthe is that SEMIObjTypes standard. supported theprovided collectionseach of for SEMIObjTypes GetSEMIObjTypesResponse –Concatenate first. thenumber lowestwith standard be by recommendedstandard contentItthegrouped is that StateMachines standard. supported each StateMachinesfor the collections provided – Concatenate of GetStateMachinesResponse id be suggested It is sortedstandard. the that list Exception attribute. using theprovided listseachsupported of for content Exceptions –Concatenate GetExceptionsResponse EDA. be suggested It is sortednameof the that list TypeDefinition using attribute. from this thefile neededentries CommonGetTypeDefinitions.xml for version Addstandard. any content the lists provided ofeachsupported units for ResponseGetTypeDefinitions –Concatenate the listunit that using besuggested sorted symbol. the from any It is thethisof neededentries CommonGetUnits.xmlfile for EDA. Add version units thecontent lists –Concatenate standard. of provided eachsupported GetUnitsResponse for iii. ii. i. MaterialLocation nodes (i.e., Substrates or for Carriers).MaterialLocation nodes types theMaterialLocationnodesof common similar for to Apply the elements set definestypesit that metadata standard theaffects. node only eachcontent that Modules,Note Subsystems, thefor process and LogicalElements. IODevices, Repeat node. Equipment and the actual thestandards applyto other them those supported from thewith content standards nodeeachof the elementsthe Equipment for Combine for Page jn l jn 20 2 that are applicable to to areapplicable that Document Document Number: Doc. Date:  SEMI 5/8/2018 DRAFT 

and other Parameter tables in Section Section in tables Parameter other and PPChangeName Clock ControlState State PreviousProcess ProcessState EDA Parameter Table 7 E30GetTypeDefinitions.xml E30GetStateMachines.xml E30GetEquipmentStructure.xml E30GetEquipmentNodeDescriptions.xml contents shall modified bythe appropriatein instructions contents be Req File Name File Y C C C C Unrestricted Unrestricted Unrestricted Unrestricted isTransient Transient Table 6 Page 9.3 jn l jn list the SECS Data Variables from the content standards content the from Variables Data SECS the list 21 . The content of the files listed content of in the . The PPChangeName Clock ControlState tate PreviousProcessS ProcessState SECS Variable SECS \EDA Common 0710 Metadata\E30-0307 \EDA Common 0710 Metadata\E30-0307 \EDA Common 0710 Metadata\E30-0307 \EDA Common 0710 Metadata\E30-0307 Table 7 File Location Collection File Within . In the case where a different the casewhere a . In DVVAL Type SV SV SV SV process programs equipment supporting Requiredonly on See E30-0307,¶5.2. Clock capability equipment supports E30 Requiredonly if See E30-0307,¶5.2. See E30-0307,¶5.2 simpleevent is defined ProcessingStateChange Requiredonly if the See E30-0307,¶5.2. simpleevent is defined ProcessingStateChange Requiredonly if the See E30-0307,¶5.2. Document Document Number: 2 Table 6 Table , if any. [/RQ] Doc. Explanation Date: shall be shall  SEMI 5/8/2018 DRAFT 

[/RQ] and Req File Name Y Y N Y Table 10 Table Unrestricted Unrestricted Unrestricted Unrestricted isTransient Table 8 Page . In the case where a different version supported, is athe . Indifferent the casewhere jn l jn 23 . The content of the files listed content of in the . The PRJobState PauseEvent ObjType ObjID SECS Variable SECS \EDA Common 0710 Metadata\E40-0709 \EDA Common 0710 Metadata\E40-0709 \EDA Common 0710 Metadata\E40-0709 \EDA Common 0710 Metadata\E40-0709 \EDA Common 0710 Metadata\E40-0709 File Location Collection File Within Type 2 Attr Attr Attr Attr , if any. [/RQ], if any. needed EDA.in PRJobState is DVVAL not ¶ See 2,E40-0709, Table needed EDA.in PauseEvent is DVVAL not ¶11.2, ¶7.1.E40.1, See 2,E40-0709, Table ¶ See 2,E40-0709, Table needed EDA.in PRJobID is DVVAL not ¶ See 2,E40-0709, Table 8.2.2.4, E40.111.2, 8.2.2.4, Document Document Number: Table 8 Table Doc. Explanation ¶ ¶ 11.2, E40.111.2, E40.111.2, Date: shall be shall ¶  7.1 SEMI 5/8/2018 DRAFT ¶ ¶  7.1. 7.1.

[/RQ] File Name File Req N Y Y N Y Y Req N Y Unrestricted Unrestricted Unrestricted Unrestricted Unrestricted Unrestricted isTransient Table 11 Page Unrestricted Unrestricted isTransient jn l jn 24 . The content of the files listed content of in the . The RecVariableList RecID PRRecipeMethod PRProcessStart PRMtlType PRMtlNameList SECS Variable SECS \EDA Common 0710 Metadata\E87-0709 \EDA Common 0710 Metadata\E87-0709 \EDA Common 0710 Metadata\E87-0709 \EDA Common 0710 Metadata\E87-0709 \EDA Common 0710 Metadata\E87-0709 \EDA Common 0710 Metadata\E87-0709 n/a n/a Variable SECS File Location Collection File Within Type Attr Attr Attr Attr Attr Attr Type n/a n/a ¶11.2, ¶11.2, ¶7.1.E40.1, See 2,E40-0709, Table EDA. DVVAL not in is needed ¶11.2, ¶7.1.E40.1, RecID See 2,E40-0709, Table is needed EDA.not in PRRecipeMethod DVVAL ¶11.2, ¶7.1.E40.1, See 2,E40-0709, Table not in needed EDA. PRProcessStart is DVVAL ¶11.2, ¶7.1.E40.1, See 2,E40-0709, Table needed EDA.in PRMtlType is DVVAL not ¶11.2, ¶7.1.E40.1, See 2,E40-0709, Table not in needed EDA. is PRMtlNameList DVVAL ¶11.2, ¶7.1.E40.1, See 2,E40-0709, Table not in needed EDA. RecVariableListDVVAL is Document Document Number: Table 11 Table Doc. See ¶ See ¶ Explanation Explanation Date: 9.3.2.5.7 9.3.2.5.7  shall be shall SEMI 5/8/2018 DRAFT 

LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900, Fax:408.943.6900, Phone:408.943.7943 CASan 95134-2127 Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and [Esss.00-RQ-00130-00] [Esss.00-RQ-00129-00] [Esss.00-RQ-00126-00] [Esss.00-RQ-00125-00] [Esss.00-RQ-00122-00] [Esss.00-RQ-00121-00] [Esss.00-RQ-00120-00] [Esss.00-RQ-00119-00] 9.3.5.7 Table 9.3.5.6.1 9.3.5.6 emsin i rne t erdc ado itiue hs dcmn, i woe r i pr, ny wti h soe f EI nentoa Sadrs cmite (document committee Standards International SEMI of scope the within only part, in or whole in document, Guideline. this Safety or distribute Standard adopted or and/or official reproductiondevelopment) All and/oractivity. other theprior withoutconsent distribution SEMI written prohibited.ofis an reproduce as construed be to to is granted page this is on material No Permission program. Standards International SEMI the of Document Draft a is This Table 9.3.5.8 Table MaterialType = Carrier shall conform to =to Carrierconform shall MaterialType supports with MaterialLocations the Parameters Where for the[Esss.00-RQ-00124-00] equipment E87-0709, Carrier. [/RQ] MaterialType = MaterialLocation with a in represented E87Carrieras SEMI Location the metadata Each be shall [Esss.00-RQ-00123-00] is the version supported, the EFEM to conform shall representing EquipmentNodeDescription supportsthe the Parameters Whereof the[Esss.00-RQ-00118-00] equipment E87-0709, [/RQ]mechanisms. and Ports associated of of andthe parent the theis equipment'sLoad aEquipment that is node that child setinclude shall with a equipmentmetadata = Subsystem Each "EFEM" ElementType [Esss.00-RQ-00117-00] contents shall modified bythe appropriatein instructions contents be to conform shall LogicalElement supports the theMaterialManager Parameters Wherefor the[Esss.00-RQ-00128-00] equipment E87-0709, [/RQ] ofPort. Equipmentmodeled a as Load nodes child an be shall out Carriersinto MaterialLocations) Locations usedtransferring All or (i.e., for of [Esss.00-RQ-00127-00] Carrier 16 Requirement ID Requirement ID Requirement ID Requirement contents shall modified bythe appropriatein instructions contents be 15 17 16 MaterialManager Node Parameters from NodeSEMI E87 Parameters MaterialManager Carrier E87 Location SEMI EFEM E87 SEMI Node MaterialManager NodeParametersfromSEMI E87 MaterialManager ParametersfromSEMIE87CarrierLocations MaterialLocation fromSEMIE87 EFEMNodeParameters See ¶ See 5.1.2 for a list of the components that should be included in ofEFEM. athebe components should for list that included an Matrix CarrierLocation CarrierID MaterialID LocationID StateList PortAssociation StateList LoadPortReservation PortTransferStateList PortStateInfoList EDA Parameter EDA Parameter EDA Parameter Table 15 Table 17 Table contents shall modified bythe appropriatein instructions contents be Req Req Table 16 Y Y Y Y . In the case where a different version supported, is athe . Indifferent the casewhere Req Y Y Y Y Unrestricted Unrestricted Unrestricted isTransient isTransient Transient . In the case where a different version is the different version thesupported, casewhere a . In Page Unrestricted Unrestricted Unrestricted Unrestricted isTransient jn l jn 27 2 , if any. [/RQ] Matrix CarrierLocation CarrierID CarrierID LocationID 2 SECS Variable SECS Variable SECS , if any. [/RQ] Table 15 StateList LoadPortReservation PortTransferStateList PortStateInfoList List PortAssociationState i SECS Variable SECS i . In the case where a different the casewhere a . In DVVAL Type SV SV Type SV Table 37 See E87-0709, ¶10.3.6 and See 37 E87-0709, Table E87.1, 4 Table See 37,E87-0709, Table E87.1, 4 Table See 37,E87-0709, Table Type N/S N/S N/S Document Number: N/S 2 , if any. [/RQ] Doc. Explanation Explanation Table 17 Table Date: 37 ¶19.2.1 Table See E87-0709, 37 ¶19.2.1 Table See E87-0709, 37 ¶19.2.1 Table See E87-0709, 37 ¶19.2.1 Table See E87-0709,  Explanation SEMI Table

5/8/2018 DRAFT 

LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900, Fax:408.943.6900, Phone:408.943.7943 CASan 95134-2127 Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and [Esss.00-RQ-00134-00] [Esss.00-RQ-00133-00] [Esss.00-RQ-00145-00] [Esss.00-RQ-00144-00] [Esss.00-RQ-00143-00] [Esss.00-RQ-00142-00] [Esss.00-RQ-00141-00] [Esss.00-RQ-00140-00] [Esss.00-RQ-00139-00] [Esss.00-RQ-00138-00] [Esss.00-RQ-00137-00] [Esss.00-RQ-00136-00] [Esss.00-RQ-00135-00] Table and a StateMachine StateMachineInstance.a or IODevice Subsystem. a as not separate only simpleis It showsthe metadata beas upin it to a device, represented 9.3.5.9.2 = "Carrier".MaterialType 9.3.5.9.1.3 number SEMI Location, notin specified is however, the E87. Carrier formally 9.3.5.9.1.2 location. arethe FIMSthe undocked Locations locationand 9.3.5.9.1.1 9.3.5.9.1 9.3.5.9 emsin i rne t erdc ado itiue hs dcmn, i woe r i pr, ny wti h soe f EI nentoa Sadrs cmite (document committee Standards International SEMI of scope the within only part, in or whole in document, Guideline. this Safety or distribute Standard adopted or and/or official reproductiondevelopment) All and/oractivity. other theprior withoutconsent distribution SEMI written prohibited.ofis an reproduce as construed be to to is granted page this is on material No Permission program. Standards International SEMI the of Document Draft a is This [/RQ] version supported, is the different the Load Subsystem Port to representing conform EquipmentNodeDescription shall supports the the Parameters Wherefor the[Esss.00-RQ-00132-00] equipment E87-0709, [/RQ] = with “Carrier”. at Port”)least one MaterialType “Load and MaterialLocation contain shall = (ElementType an be shall equipmentSubsystem Port modeled Theas SEMIE87Load [Esss.00-RQ-00131-00] object Requirement ID 18 SEMI E87 Load E87 PortSEMI Load Port Load ParametersfromSEMI E87 tends it Because port. load the of part undifferentiated an as modeled been has CarrierIDReader E87 The Load aretwotypes Ports. SEMIE87,there of According to hs are oain r oee n te EA Cmo eaaa a aeiloain with MaterialLocations as Metadata Common EDA the in modeled are Locations Carrier These equipment. This of other Load forinternalLoad typeis buffer has typically The Port type of Port one an Carrier two These Locations." Carrier different two "has equipment buffer fixed a for Port Load A AccessModeCurr State AssociationCurr LoadPortCarrier ionCurrState LoadPortReservat PrevState LoadPortTransfer CurrState LoadPortTransfer BypassReadID LocationID PortID PortStateInfo AccessMode State PortAssociation ReservationState LoadPort PortTransferState EDA Parameter EDA Table 18 Table Req Y Y Y Y Y Y Y Y Y N Y Y C contents shall be modified by the appropriate instructions contents be shall modifiedby thein appropriate Unrestricted Unrestricted Unrestricted Unrestricted Unrestricted Unrestricted Unrestricted Unrestricted Unrestricted Unrestricted Unrestricted Unrestricted isTransient Transient Page jn l jn 28 n/a n/a n/a n/a n/a BypassReadID LocationID PortID PortStateInfo AccessMode State PortAssociation ReservationState LoadPort PortTransferState SECS Variable i i i i i i DVVAL Type SV SV SV SV SV SV SV n/a n/a n/a n/a n/a Table 18 See ¶ See ¶ See ¶ See ¶ See ¶ See not level, but both. or Load Equipment at Port be atMust included E87-0709,Table See 37; E87-0709,Table See 37 EDA.in DVVAL not PortID is needed E87-0709,Table See 37; in needed EDA. DVVAL not PortStateInfo is E87-0709,Table See 37; in needed EDA. AccessMode is DVVAL not E87-0709,Table See 37; not in is needed EDA. DVVAL PortAssociationState E87-0709,Table See 37; EDA. is needed DVVAL not in LoadPortReservationState E87-0709,Table See 37; needed EDA.not in DVVAL PortTransferState is E87-0709,Table See 37; . In the casewhere a . In Document Document Number: 9.3.2.5.7 9.3.2.5.7 9.3.2.5.7 9.3.2.5.7 9.3.2.5.7 Doc. Explanation Date:  2 SEMI , if any. , if any. 5/8/2018 DRAFT 

[/RQ] Req Req C N N N N N Y File Name File Unrestricted Unrestricted Unrestricted Unrestricted Unrestricted Unrestricted Unrestricted isTransient isTransient Table 21 Page jn l jn 30 . The content of the files listed content of in the . The PartitionCapacity Unallocated PartitionCapacity Capacity AvailPartition PartitionType PartitionID Info BufferPartition Enabled SubstrateReader SECS Variable SECS SECS Variable SECS i \EDA Common 0710 Metadata\E90-0707 \EDA Common 0710 Metadata\E90-0707 \EDA Common 0710 Metadata\E90-0707 \EDA Common 0710 Metadata\E90-0707 \EDA Common 0710 Metadata\E90-0707 i i Table 22 i File Location Collection File Within i i Type ECV . In the case where a different the case where a . In Type SV SV SV SV SV SV Substrate Reader. if equipment the provides a 5.1Table Required 5. only See E90-0707, 8.3; E90.1, BufferPartitionInfo contained in See 37; E87-0709, Table BufferPartitionInfo contained in See 37; E87-0709, Table BufferPartitionInfo contained in See 37; E87-0709, Table BufferPartitionInfo contained in See 37; E87-0709, Table BufferPartitionInfo contained in See 37; E87-0709, Table See 37 E87-0709, Table Document Document Number: 2 Table 21 Table , if any. [/RQ] Doc. Explanation Explanation Date:  shall be shall SEMI 5/8/2018 DRAFT 

shows some EDA Parameters representing both a status variable and an attribute from the E90 the from attribute an and variable status a both representing Parameters EDA some shows CurrState SubstrateLocation MaterialID SubstLocState SubstID DisableEvents SubstLocID CurrState SubstrateLocation MaterialID SubstLocState SubstID DisableEvents ObjType ObjID EDA Parameter EDA EDA Parameter contents shall be modified by the appropriate instructions contents be shall modifiedby thein appropriate EDA Parameter EDA Table 26 Table Req and Req Req Y Y Y Y Y Y Y Y Y Y Y Y Y Table 27 Table Unrestricted Unrestricted Unrestricted Unrestricted Unrestricted isTransient Unrestricted Unrestricted isTransient Unrestricted Unrestricted Unrestricted Unrestricted Unrestricted Unrestricted isTransient Page . In the case where a different version supported, is athe . Indifferent the casewhere jn l jn 34 SubstLocState SubstID DisableEvents ObjType ObjID n/a SubstID SECS Variable SECS n/a SubstID SubstLocState SubstLocState or SubstrLocSubstrID SubstID or DisableEvents SubstLocID ObjID or SECS Variable SECS Variable i i Type i Attr Attr Attr Attr Attr Type Attr n/a 2 Type , if any. [/RQ], if any. Attr Attr Attr Attr Attr SV SV SV n/a needed EDA.in is SubstLocState DVVAL not See 5.E90-0707, Table is needed EDA.not in SubstrLocSubstrID DVVAL See 5.E90-0707, Table Configuration parameter See 5; E90-0707, Table See 5 E90-0707, Table needed EDA.in SubstLocID is DVVAL not See 5. E90-0707, Table See ¶ Table 16. See 5 E90-0707, Table and See ¶ See 5.E90-0707, Table is needed EDA.not in SubstLocState DVVAL and 18.Table See 5 E90-0707, Table EDA. DVVAL not in is needed SubstrLocSubstrID and 18.Table See 5 E90-0707, Table Configuration parameter See 5; E90-0707, Table not in needed EDA. SubstLocID is DVVAL and 18.Table See 5,E90-0707, Table Document Document Number: 9.3.2.5.7 Explanation Doc. Explanation 9.3.2.5.7 Explanation Date:  SEMI 5/8/2018 DRAFT 

[/RQ] File Name Req Y Y Y Y N Y contents shall be modified by the appropriate instructions contents be shall modifiedby thein appropriate Unrestricted Unrestricted Unrestricted Unrestricted Unrestricted Unrestricted isTransient Page jn l jn 35 n/a n/a BatchLocID BatchLocState BatchSubstIDMap DisableEvents SECS Variable SECS \EDA Common 0710 Metadata\E90-0707\Batch \EDA Common 0710 Metadata\E90-0707\Batch \EDA Common 0710 Metadata\E90-0707\Batch \EDA Common 0710 Metadata\E90-0707\Batch Table 29 Table File Location Collection File Within Type Attr Attr Attr Attr n/a n/a . In the case where a. In the casewhere Table 28 See ¶ See ¶ and 17 Table See 7 E90-0707, Table and 17 Table See 7 E90-0707, Table and 17 Table See 7 E90-0707, Table Configuration parameter See 7; E90-0707, Table Document Document Number: . The content of . The Doc. 9.3.2.5.7 9.2.3.8.5 Explanation Date:  2 SEMI , if any. , if any. 5/8/2018 DRAFT 

[/RQ] and Req File Name Y Y Y Y Y N Table 32 Table Unrestricted Unrestricted Unrestricted Unrestricted Unrestricted Unrestricted isTransient Table 30 Page . In the case where a different version supported, is athe . Indifferent the casewhere jn l jn 36 . The content of the files listed content of in the . The MtrlOutSpec CarrierInputSpec DataCollectionPlan CurrentPRJob ObjType ObjID SECS Variable \EDA Common 0710 Metadata\E94-0309 \EDA Common 0710 Metadata\E94-0309 \EDA Common 0710 Metadata\E94-0309 \EDA Common 0710 Metadata\E94-0309 \EDA Common 0710 Metadata\E94-0309 \EDA Common 0710 Metadata\E94-0309 File Within Location Collection 2 Type Attr Attr Attr Attr Attr Attr , if any. [/RQ], if any. EDA. DVVAL not in is needed and ¶13.1.1.MtrlOutSpec See 1 E94-0709, Table EDA. DVVAL not in is needed CarrierInputSpec and ¶13.1.1. See 1 E94-0709, Table EDA. DVVAL not in is needed DataCollectionPlan and ¶13.1.1. See 1 E94-0709, Table not in needed EDA. CurrentPRJob is DVVAL and ¶13.1.1. See 1 E94-0709, Table See 1 E94-0709, Table needed EDA.in CtrlJobID is DVVAL not ¶13.1.1,and Table 15. See 1,E94-0709, Table Document Document Number: Table 30 Table Doc. Explanation Date:  shall be shall SEMI 5/8/2018 DRAFT 

[/RQ] Req Y Y Y N File Name Unrestricted Unrestricted Unrestricted isTransient Table 35 Table Transient Page Table 34 contents shall be modified by the appropriate contents be shall modified by the appropriate 9.2.6.4 jn l jn 38 SetUpName Space QueueAvailable QueuedCJobs CtrlJobID SECS Variable SECS . The content of the files listed content of in the . The ). \EDA Metadata\E116-0707 0710Common \EDA Metadata\E116-0707 0710Common \EDA Metadata\E116-0707 0710Common \EDA Metadata\E116-0707 0710Common DVVAL File Location Collection File Within Type ECV SV SV See E94-0709,See Table 15 E94-0709,See Table 15 E94-0709,See Table 15 Mode. Redirection Material supporting only on equipment included be should parameter Table 5;E94.1, This E94-0709, See Table 15and Table 35 Document Document Number: Explanation Doc. Table 34 Table Date: . In the . In  SEMI shall be shall 5/8/2018 DRAFT 

[/RQ] File Name Re C q Unrestricted isTransient Page Table 36 jn l jn 40 . The content of the files listed content of in the . The n/a SECS Variable SECS \EDA Common 0710 Metadata\E148-1109 \EDA Common 0710 Metadata\E148-1109 \EDA Common 0710 Metadata\E148-1109 File Location Collection File Within Typ n/a e level is EPTTracker Module ¶ See Document Document Number: 9.3.2.5.7 Doc. Table 36 Table Explanation Date:  . if . Required SEMI shall be shall 5/8/2018 DRAFT 

LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900, Fax:408.943.6900, Phone:408.943.7943 CASan 95134-2127 Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and [Esss.00-RQ-00326-00] [Esss.00-RQ-00325-00] [Esss.00-RQ-00324-00] [Esss.00-RQ-00323-00] [Esss.00-RQ-00320-00] [Esss.00-RQ-00319-00] [Esss.00-RQ-00318-00] [Esss.00-RQ-00317-00] [Esss.00-RQ-00316-00] [Esss.00-RQ-00315-00] [Esss.00-RQ-00314-00] [Esss.00-RQ-00313-00] 9.3.10 in listed 9.3.9.4 Table attribute. 9.3.9.3.1 emsin i rne t erdc ado itiue hs dcmn, i woe r i pr, ny wti h soe f EI nentoa Sadrs cmite (document committee Standards International SEMI of scope the within only part, in or whole in document, Guideline. this Safety or distribute Standard adopted or and/or official reproductiondevelopment) All and/oractivity. other theprior withoutconsent distribution SEMI written prohibited.ofis an reproduce as construed be to to is granted page this is on material No Permission program. Standards International SEMI the of Document Draft a is This String andString80, 128,String255, RecipeVariableArray. 9.3.10.2 GetUnits. 9.3.10.1 Table b) According to the additional instructions in Appendix 2 for adapting the files to the specific version specific instructionsto of the additional Accordingto SEMI Appendixadapting in the 2for files b) as those embedded thecommentsin files, instructions Accordingto anda) modified: listed of thein E157Common files Metadata content relatingE157with SEMI to constructs shall the metadata Implementers [Esss.00-RQ-00322-00] represent entitled [/RQ] Tracking. section, SEMIE157Module Process this Equipment thein implementrequirements to [Esss.00-RQ-00321-00] conform SEMIE157shall which 2 supported, is a the different version where theLogicalElementto TS-Clock conform shall representing EquipmentNodeDescription supports the the Parameters Wherefor the[Esss.00-RQ-00312-00] equipment E148-1109, version is the version supported, to eachModuleconform shall representing EquipmentNodeDescription supports the the Parameters Wherefor the[Esss.00-RQ-00327-00] equipment E157-0710, equipment. [/RQ] onthe E157 implemented , if any. [/RQ], if any. Requirement ID Requirement RequirementID 37 38 SEMI E157 Module E157 SEMI ProcessTracking SEMI E148 does not specify SECS data variables but does specify object attributes. The EDA Parameters EDA The attributes. object specify does but variables data SECS specify not does E148 SEMI Table 37 XMLFilesForSEMIE157 Attribute ParametersfromSEMIE148 TS-ClockObject The E157 metadata files need the following entries from the CommonGetTypeDefinitions.xml file: int, file: CommonGetTypeDefinitions.xml the from entries following the need files metadata E157 The or GetSEMIObjTypes, GetExceptions, for content required unique no is there E157, SEMI of case the In Note that the E148 TS-Clock object ObjType value of “TS-Clock” is contained in the ElementType the in contained is “TS-Clock” of value ObjType object TS-Clock E148 the that Note match the E148 TS-Clock attribute the E148TS-Clock names. match Status LastSyncTimeServer LastSyncTime TimeSyncInterval TimeServers Offset UseTimeSync DateTime EDA Parameter EDA E157GetTypeDefinitions.xml E157GetStateMachines.xml E157GetEquipmentStructure.xml E157GetEquipmentNodeDescriptions.xml Table 39 contents shall modified bythe appropriatein instructions contents be File Name File Table 37 Table Req N N N Y Y N Y Y contents shall be modified by the appropriate instructions contents be shall modifiedby the in appropriate Unrestricted Unrestricted Unrestricted Unrestricted Unrestricted Unrestricted Unrestricted Unrestricted isTransient Page Table 38 jn l jn 41 . The content of the files listed content of in the . The n/a n/a n/a n/a n/a n/a n/a n/a \EDA Common 0710 Metadata\E157-0710 \EDA Common 0710 Metadata\E157-0710 \EDA Common 0710 Metadata\E157-0710 \EDA Common 0710 Metadata\E157-0710 SECS Variable Table 39 Table File Within Location Collection . In the case where a different a. Indifferent the casewhere Type Attr Attr Attr Attr Attr Attr Attr Attr Table 37 See 2 148-1109, Table See 2 148-1109, Table See 2 148-1109, Table See 2 148-1109, Table Configuration Parameter See 2; 148-1109, Table See 2 148-1109, Table Configuration Parameter See 2; 148-1109, Table See 2 148-1109, Table Document Document Number: 2 , if any. Doc. Table 38 Table . In the case . In Explanation Date: 

SEMI [/RQ] shall be shall 5/8/2018 DRAFT 

(C/NC/WC/NA) Compliance  SEMI 5/8/2018 DRAFT 

 and

 and and

This criteria is used for each instance of a PreviousState parameter specified in this document. used each in criteria a this instanceof specified is for PreviousStateparameter This Name False True False True False True False True False True False True False True False True False True False True False True False True Values PreviousState PreviousState parameter implemented this not for StateMachine PreviousState forparameter StateMachine implemented this False The - ProcessingStateChange is definedevent not True The – ProcessingStateChange is event defined attribute ControlJob of False The – equipment not the PauseEvent does support E94 ControlJob True The – equipment the PauseEvent of supports E94 attribute E30 equipmentoperator constantevent change not supported E30 equipmentoperator constantevent change supported supported False The E30 – SEMI OperatorCommandIssued is event not True The E30 – SEMI OperatorCommandIssued is event supported False The – Parameter not numeric does data report True The – Parameter numeric data reports this Module False The – equipment process one can only Substrate in a at time this Module True Equipment – can simultaneouslymultiple substrates in process False One at– is ProcessJob afor Module supported time this True Multiple can– ProcessJobs affect Module this simultaneously False The – equipment not Material does support Redirection Mode. True The – equipment Material supports Redirection Mode. attribute the of TS False The – equipment not the LastSyncTime does support E148 the TS True The – equipment the LastSyncTime of supports E148 attribute LastSyncTimeServer attribute the of TS False The – equipment not the does support E148 attribute the of TS True The – equipment the LastSyncTimeServer supports E148 programs executionor recipes False The – equipment not uploading large does support of process programs executionor recipes True The – equipment uploading large supports of process - Clock object Clock Page - - Clock object Clock object Clock jn l jn 63 Description - Clock object Clock Document Document Number: Doc. Date:  9.3.7.5 ?? ?? 9.3.3 Various 9.3.3 9.3.7.4 9.3.3 9.3.3 9.2.7.3 9.3.10 9.3.10 SEMI Section 5/8/2018 DRAFT  2

LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900, Fax:408.943.6900, Phone:408.943.7943 CASan 95134-2127 Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and A2.2.3.1 A2.2.3.1 A2.2.3 to be updated must E30-1103. metadata A2.2.2.1 A2.2.2 A2.2.1 A2.2 A2.1.4 describedaccumulated. changes must one moving version, morebe When back the than version. A2.1.3 leftthe implementerdetermine. to to earlier versions neededfor 2003. Adjustments are March of in current those as early as standards content the of versions previous for adjust to needed information the provides Appendix This standards. those of versions earlier to conform to files XML the to basis per-standard a on A2.1.2 date). publication 0710SEMI 2010 (the A2.1.1 A2.1 responsible by approval of date [insert on procedures committee]. ballot standards regional letter full by approved was and code] (month-year) NOTICE DIFFERENT VERSIONSSTANDARDS ADAPTING TO 2 APPENDIX emsin i rne t erdc ado itiue hs dcmn, i woe r i pr, ny wti h soe f EI nentoa Sadrs cmite (document committee Standards International SEMI of scope the within only part, in or whole in document, Guideline. this Safety or distribute Standard adopted or and/or official reproductiondevelopment) All and/oractivity. other theprior withoutconsent distribution SEMI written prohibited.ofis an reproduce as construed be to to is granted page this is on material No Permission program. Standards International SEMI the of Document Draft a is This A2.3.4 to be updated must E40-0307. metadata A2.3.3.1 A2.3.3 to be updated must E40-1107. metadata A2.3.2.1 A2.3.2 A2.3.1 A2.3 A2.2.4.1.1 A2.2.4.1 A2.2.4 to be updated must E30-0703. metadata reference the needed version of that content standard. [/RQ] thatstandard. neededversion of content the reference to specificationupdated provided references this to all thewith be version shall standard, of aversion content provided different metadatathis changing with represent When to a a specification set [Esss.00-RQ-00341-00] values 5through 16.[/RQ]values for In Integer removeEnumeration[Esss.00-RQ-00343-00] the the PPFormatEnumTypeDefinition, elements the this toin perform the changesoutlined section.E30-0703 [/RQ] support E30-0303, versions or any E30-0307, of E30-1103, In set from changethe E30metadata [Esss.00-RQ-00342-00] orderto   SEMIMetadataE40 VersionsModificationsFor PriorE40-0709 To SEMIMetadataE30 VersionsModificationsFor PriorE30-0307 To MetadataModifications E40-1106 (from E40-0307) E40-0307 (from E40-1107) E40-1107 (from E40-0709) SEMIE40hasimplemented ontheversion: following The for been equipmentmetadata E30-0303 (from E30-0703) E30-0703 (from E30-1103) E30-1103 (from E30-0307) SEMIE30hasimplementedontheversion: following The for been equipment metadata standard version bethe metadata.In of changed must within the everycase,the version-by- backward metadata the adjust to provided are instructions standard, each of release each For made be can adjustments standards, content the of versions these on based not are that implementations For July, in current standard content each of representations contain files XML Metadata Common EDA The E40-0709 (latest release as (latestof 2010) release July E40-0709 as (latestof 2010) release July E30-0307 : The material in this appendix is an official part of SEMI [insert designation, without publication date publication without designation, [insert SEMI of part official an is appendix this in material The : The changes in this revision do not impact the metadata. However, all references to E40-1107 in the in E40-1107 to references all However, metadata. the impact not do revision this in changes The the in E40-0709 to references all However, metadata. the impact not do revision this in changes The to tobe within updated must references E30-0303. theAll E30-0703 metadata the within E30-1103 to references all However, metadata. the impact not do revision this in changes The the within E30-0307 to references all However, metadata. the impact not do revision this in changes The Only values 1, 2, 3, and 4shouldOnly values 1,2,3,and exist. Page jn l jn 65 Document Document Number: Doc. Date:  SEMI 5/8/2018 DRAFT 

LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900, Fax:408.943.6900, Phone:408.943.7943 CASan 95134-2127 Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and A2.3.6.1 A2.3.6.1 A2.3.6 to be updated must E40-0705. metadata A2.3.5.1 A2.3.5 to be updated must E40-1106. metadata A2.3.4.1 emsin i rne t erdc ado itiue hs dcmn, i woe r i pr, ny wti h soe f EI nentoa Sadrs cmite (document committee Standards International SEMI of scope the within only part, in or whole in document, Guideline. this Safety or distribute Standard adopted or and/or official reproductiondevelopment) All and/oractivity. other theprior withoutconsent distribution SEMI written prohibited.ofis an reproduce as construed be to to is granted page this is on material No Permission program. Standards International SEMI the of Document Draft a is This “ProcessComplete-NoState”, the source state is “ProcessComplete”, the target state is “NoState”, and the and state“NoState”, the is the sourcestate“ProcessComplete”,the target is “ProcessComplete-NoState”, newProcessid thename Notransition the 7for Set transition to State. transition “7”, is a Complete to o Create the"Material description complete". is: processing “ProcessComplete”, and istarget is state name the sourcestate “Processing”,is transition “Processing-ProcessComplete”, the Complete newtheid Processingthe transition the 6for Process Set transition to transition. “6”, a to o Create “ProcessJob:17:Stopping-Stopped.” the events “ProcessJob:16:Aborting-Aborted”and o Remove the transitions 17. the transitionIdo Remove with 6,7,16,and bythe specified PR Job".material all processing has the description: "Theresource completed processing and “Active.Executing.ProcessComplete”, with ProcessComplete.“ProcessComplete”,name statethe theastate id Executingfor Create new state,o In add PostActive remove and the ProcessJobchildren. all o In state, the state make In StateMachine, thechanges: following [Esss.00-RQ-00346-00] the ProcessJob 11. [/RQ] values Inthe enumerated remove for strings 10and[Esss.00-RQ-00345-00] the PRJobStateEnumTypeDefinition, this in performtheoutlined section. orchanges [/RQ] E40-0705 support E40-0304, 0307, E40-1106, to versions E40- any E40-0709, of E40-1107, Inset from changethe E40metadata [Esss.00-RQ-00344-00] orderto moved out as part of the error part recovery." of as the moved out are is equipmentthesubstrates andsome related processing procedure for complete "Processing abort resource is and “16”, the description name is “Aborting-NoState”, reference is the the transition event NoState”, is id transitionNo Aborting The to State. for “ProcessJob:16:Aborting- event 16from the event o Create material." onthe same job process another by completed, AND superseded OR post-conditioning departedresource the processing resource material "Job to nocontrolis job when the same specifies used." that job material process by another replaced is thejob process job process departsextinctbecause the equipmentor becomes the material from "Job “ProcessJob:7:PostActive-NoState” from the descriptionthe event for o Change complete.Jobis is Process procedure deleted.""Processing stop resource and state“NoState”, the is description the sourcestate“Stopping”,the target is is “Stopping-NoState”, newStoppingNo Settransitionthe to State. transition 17for “17”, is transition a to o Create id the name errorProcess part recovery. deleted". of Jobis as the moved out are isequipmentthesubstrates andsomerelated processing procedure for complete "Processing abort resource and state“NoState”, the is description the thetarget is sourcestate“Aborting”, is “Aborting-NoState,”, No newAbortingSettransitionthe to State. transition 16for “16”, is transition to a id o Create the name deleted." job when theJobis sameused. specifies is that nocontrol Process material job process by another replaced post job process departscomplete, isthe equipmentand is or processing is material the description from "Job E40-0304 (from E30-0705) E40-0705 (from E40-1106) All references to E40-0705 in the metadata must E40-0304. to metadata to in be references updated All E40-0705 the the in E40-1106 to references all However, metadata. the impact not do revision this in changes The the in E40-0307 to references all However, metadata. the impact not do revision this in changes The Page jn l jn 66 Document Document Number: Doc. Date:  SEMI 5/8/2018 DRAFT 

LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900, Fax:408.943.6900, Phone:408.943.7943 CASan 95134-2127 Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and A2.4.2.1 A2.4.2.1 A2.4.2 A2.4.1 A2.4 should made the reportedPRJobStatethe in equipmentmetadata. attribute.in No be change neverbe can A2.3.8.2.1.2 using is However, the equipmentmetadata. in EDA strings.Nobe changeshould no significantmade change. was numbers, there uses GEM Since enumeration. the forvalue legal a never is and state parent ais state Pause The state. Paused the match to it for was intent The variable. data PRJobState the for correctly defined was It attribute. A2.3.8.2.1.1 A2.3.8.2.1 A2.3.8.2 A2.3.8.1 A2.3.8 to be updated must E40-0703. metadata A2.3.7.1 A2.3.7 emsin i rne t erdc ado itiue hs dcmn, i woe r i pr, ny wti h soe f EI nentoa Sadrs cmite (document committee Standards International SEMI of scope the within only part, in or whole in document, Guideline. this Safety or distribute Standard adopted or and/or official reproductiondevelopment) All and/oractivity. other theprior withoutconsent distribution SEMI written prohibited.ofis an reproduce as construed be to to is granted page this is on material No Permission program. Standards International SEMI the of Document Draft a is This A2.4.4.1 A2.4.4 A2.4.3.1 A2.4.3 "Host or operator has executed a Change Access service with the value of Auto" the servicevalue with of Change has Access executed a or"Host operator description from changes Mode transitionThe thestate description machine. of 2ontheo Change Access AccessMode to following Make StateMachine the [Esss.00-RQ-00348-00] the changes outlinedsection. changes [/RQ] this in perform the to version E87-0709 In setsupport from E87-0707, changethe E87metadata [Esss.00-RQ-00347-00] orderto completed." is [/RQ] procedure stop is and name“17”, the description “Stopping-NoState”, is "The is thereference event the transition NoState”, is id transition StoppingNo The for to State. “ProcessJob:17:Stopping- event 17from the event o Create perform the changes outlinedsection. changes [/RQ] this in perform the to version E87-0706 Inset support from E87-1105, changethe E87metadata [Esss.00-RQ-00351-00] orderto elements. and [/RQ] Removeeventchildren the all simple [Esss.00-RQ-00350-00] “DuplicateCarrierInProcess” outlinedsection. changes [/RQ] this in perform the to version E87-0707 Inset support from E87-0706, changethe E87metadata [Esss.00-RQ-00349-00] orderto [/RQ]allowed." transfers Manual.arenot the servicevalue with Automated of Change has Access executed a or"Host operator to Manual" the servicevalue with of Change has Access executed a or"Host operator description from changes Mode transitionThe thestate description machine. of 3ontheo Change Access allowed." Auto.Manualarenot the servicevalue with deliveries of Change has Access executed a or"Host operator to  SEMIMetadataE87 VersionsModificationsFor PriorE87-0709 To E87-1105 (from E87-0706) E87-0706 (from E87-0707) E87-0707 (from E87-0709) SEMIE87hasimplementedontheversion: following The for been equipment metadata E40-1102 (from E40-0703) E40-0703 (from E30-0304) E87-0709 (latest release as (latestof 2010) release July E87-0709 All references to E87-0706 in the metadata must E87-1105. tometadata to in be references updated All E87-0706 the must E87-0706. tometadata in be references updated All E87-0707 the must E87-0707. tometadata in be references updated All E87-0709 the Definitions Parameter Type must E40-1102. to metadata to in be references updated All E40-0703 the the in E40-0304 to references all However, metadata. the impact not do revision this in changes The PRJobState The 1102 standard defined an enumerated value for the Executing state. This state is a parent state and parent a is state This state. Executing the for value enumerated andefined 1102 standard The PRJobState the on Paused than rather Pause for value enumerated an defined standard 1102 The Page jn l jn 67 Document Document Number: Doc. Date:  SEMI 5/8/2018 DRAFT 

LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900, Fax:408.943.6900, Phone:408.943.7943 CASan 95134-2127 Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and A2.6.2.1 A2.6.2.1 emsin i rne t erdc ado itiue hs dcmn, i woe r i pr, ny wti h soe f EI nentoa Sadrs cmite (document committee Standards International SEMI of scope the within only part, in or whole in document, Guideline. this Safety or distribute Standard adopted or and/or official reproductiondevelopment) All and/oractivity. other theprior withoutconsent distribution SEMI written prohibited.ofis an reproduce as construed be to to is granted page this is on material No Permission program. Standards International SEMI the of Document Draft a is This A2.6.5.1 A2.6.5 to be updated must E94-1107. metadata A2.6.4.1 A2.6.4 to be updated must E94-0308. metadata A2.6.3.1 A2.6.3 "Receive CJAbort command from host or operator through operator console and all process jobs under the control or under host and operatorjobs through process all CJAbortcommandoperator console from "Receive to state"PostActive entered commandthe CJAbort washave when thewerereceived controlthat Active the under job jobs process internally, CJAbort and orall the ahost operatora or CJAbortcommand from generated received "Equipment “ControlJob:12:Active-Completed” description the event fromo Change is processing stopped and been stopped" material have job the control or under host and operator jobs throughprocess CJStopall commandoperator console "Receive from to state"PostActive entered CJStopcommand the washave when thewere controlthat received Active the under job jobs process CJStopinternally, and or athe all host operatora CJStopor command received from generated "Equipment “ControlJob:11:Active-Completed” description the event fromo Change processing and aborted aborted" material is been have job the control or under host and operatorjobs throughprocess all CJAbortcommandoperator console from "Receive to state"PostActive entered commandthe CJAbort washave when thewerereceived controlthat Active the under job jobs process internally, CJAbort and orall the ahost operatora or CJAbortcommand from generated received "Equipment 12description the transition fromo Change is processing stopped and been stopped" material have job the control or under host and operatorjobs throughprocess CJStopall commandoperator console "Receive from to state"PostActive entered CJStopcommandthe washave when thewere controlthat received Active the under job jobs process CJStopinternally, and or atheall host operatora CJStop or command received from generated "Equipment 11description the transition fromo Change InStateMachine thechanges: following [Esss.00-RQ-00374-00] the ControlJob make MtrlOutSpec attribute and the MtrlOutSpec DV (since EDA and (since theallowsreports)". [/RQ] MtrlOutSpec attributes in MtrlOutSpec DV attribute E94ControlJob merges parameter This the from after processing. destination sourceto "Maps material to reports)"attributes in allows MtrlOutSpec MtrlOutSpecDV attributeEDA and the (since E94ControlJob the merges parameter the Inintegritylist fromafter processing. be destination shall slot sourceto empty.This "Maps material mode fromdescription Inobjectchangethe MtrlOutSpec definition, attribute[Esss.00-RQ-00376-00] the parameter ControlJob this to in performthe changesoutlined section.E94-1107 [/RQ] support E90-1106, versions or any E94-1108, of E94-0308, Inset from changethe E94metadata [Esss.00-RQ-00375-00] orderto processing [/RQ] and aborted aborted". material is been have job E94-1106 (from E94-1107) E94-1107 (from E94-0308) E94-0308 (from E94-1108) All references to E94-1107 in the metadata must E94-1106. tometadata in be references updated All E94-1107 the the in E94-0308 to references all However, metadata. the impact not do revision this in changes The the in E94-1108 to references all However, metadata. the impact not do revision this in changes The must E94-1108. to metadata to in be references updated All E94-0309 the Page jn l jn 72 Document Document Number: Doc. Date:  SEMI 5/8/2018 DRAFT 

LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900, Fax:408.943.6900, Phone:408.943.7943 CASan 95134-2127 Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and metadata must be updated to be updated must E116-0306. metadata A2.7.3.1 A2.7.3 to be updated must E116-0706. metadata A2.7.2.1 A2.7.2 A2.7.1 A2.7 to be updated must E94-0702. metadata A2.6.9.1 A2.6.9 emsin i rne t erdc ado itiue hs dcmn, i woe r i pr, ny wti h soe f EI nentoa Sadrs cmite (document committee Standards International SEMI of scope the within only part, in or whole in document, Guideline. this Safety or distribute Standard adopted or and/or official reproductiondevelopment) All and/oractivity. other theprior withoutconsent distribution SEMI written prohibited.ofis an reproduce as construed be to to is granted page this is on material No Permission program. Standards International SEMI the of Document Draft a is This appendix. A2.8.2 A2.8.1 A2.8 A2.7.4.1 A2.7.4 PostActive state".PostActive [/RQ] the received entered thecommand CJAbort have was ControlJob when under were that ProcessJobs Active the internally, CJAbort or orall the ahost operatora or CJAbortcommand from generated received "Equipment to state"PostActive the received entered thecommand CJAbort have was ControlJob when under were that ProcessJobs Active the internally, CJAbort and orall the ahost operatora or CJAbortcommand from generated received "Equipment from the event the description “ControlJob:12:Active-Completed” of o Change state"PostActive the received entered the CJStop command have ControlJobwas when under were that ProcessJobs Active the CJStopinternally, or or atheall host operatora CJStop or command received from generated "Equipment to state"PostActive the received entered the CJStop command have ControlJobwas when under were that ProcessJobs Active the CJStopinternally, and or atheall host operatora CJStop or command received from generated "Equipment from the event the description “ControlJob:11:Active-Completed” of o Change o On the event “EPTModule:EPTStateChange,” remove the transition reference “1c". reference the[/RQ] transition remove the event “EPTModule:EPTStateChange,” o On thestate initializationtransitionEPTModule machine. statewith transition “1c”from o Remove id is be or initialized, material a present" cannot Modulemodule initializationfault the exists, EPT "EPT complete, to EPTbe a Moduleinitialized" initializationfault or exists, cannot "EPT complete, module the 1bdescription the transition fromo Change make In definition, thechanges: StateMachine following [Esss.00-RQ-00384-00] the EPTModule outlinedsection. changes [/RQ] this in perform the to version E116-0306 In setsupport from E116-0705, changethe E116metadata [Esss.00-RQ-00383-00] orderto   SEMIE148 metadataforversions modifications prior toE148-1109 E116Metadata ModificationsVersions For PriorE116-0709 To No earlier versions of SEMI E148 are supported. Thus, no instructions for such changes are included in this in included are changes such for instructions no Thus, supported. are E148 SEMI of versions earlier No SEMIE148hasimplemented ontheversions: following The for been equipmentmetadata E116-0705 (from E116-0306) E116-0306 (from E116-0706) E116-0706 (from E116-0707) SEMIE116hasimplementedontheversion: following The for been equipment metadata E94-0702 (from E94-1104) E148-1109 (latest release as (latestof 2010) release July E148-1109 as (latestof 2010) release July E116-0707 All references to E116-0306 in the metadata must E116-0705. tometadata in be references updated All E116-0306 the the in E116-0706 to references all However, metadata. the impact not do revision this in changes The the in E116-0707 to references all However, metadata. the impact not do revision this in changes The the in E94-1104 to references all However, metadata. the impact not do revision this in changes The Page jn l jn 74 Document Document Number: Doc. Date:  SEMI 5/8/2018 DRAFT 

SEMIE157 metadataforversions modifications prior toE157-0710 E157-0211 (from E157-0710) SEMIE157hasimplementedontheversion: following The for been equipmentmetadata E157-0710 (latest release as (latestof 2010) release July E157-0710 The changes in this revision do not impact the metadata. However, all references to E157-0710 within the within E157-0710 to references all However, metadata. the impact not do revision this in changes The Page jn l jn 75 Document Document Number: Doc. Date:  SEMI 5/8/2018 DRAFT 

LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900, Fax:408.943.6900, Phone:408.943.7943 CASan 95134-2127 Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and should provide a clear statement of the purpose of the element it describes that is understandable to a user who has a has who user a to understandable is that describes it element the of purpose the of statement clear a provide should R1.2.3 R1.2.2.1 or the thisEDA in in specified standards.otherwise document R1.2.2 or “Pump” or “Valve” as MakeModel is information such or as discouraged.hardware-specific such values, attribute Name generic of Use “BleedValve.” and “VentValve” or “NH2” R1.2.1.2 (e.g., owns it. R1.2.1.1 fieldprovided,the applyID is to should this whofamiliarnoname is thefield.user equipment.If with approach R1.2.1 R1.2 wouldbe applied.it which to equipment specific the for appropriately act and listed suggestion each of implications the consider should R1.1.2 one from metadata the another. equipment to of uniformity the and quality metadata’s equipment an improve to recommendations these R1.1.1 R1.1 approval]. authorized, was publication which by method the [insert by publication for approved was information related This information]. the of origin [insert from derived was and code] (month-year) NOTICE CONSTRUCTION FOR PRACTICES E125 EQUIPMENTMETADATA RECOMMENDED 1 RELATED INFORMATION emsin i rne t erdc ado itiue hs dcmn, i woe r i pr, ny wti h soe f EI nentoa Sadrs cmite (document committee Standards International SEMI of scope the within only part, in or whole in document, Guideline. this Safety or distribute Standard adopted or and/or official reproductiondevelopment) All and/oractivity. other theprior withoutconsent distribution SEMI written prohibited.ofis an reproduce as construed be to to is granted page this is on material No Permission program. Standards International SEMI the of Document Draft a is This equipment. should maximum production sufficient oflevels the hierarchy most ofin the equipment. A be for five representation R1.3.1 R1.3 currentconnection. used the ofEDA for EDA the client’s version to R1.2.6.1 version. standard newly to related active constructs the report changed be should metadata for requests Subsequent should E125. SEMI in required as message MetadataRevised the metadata via reported and the changes, version active the If time. the at active version the to related constructs R1.2.6 and Name, Uid, version(s), options and same the havesame model, installed. software the and their for except R1.2.5.1 identical be should components equipment attributes. ImmutableID duplicate those from metadata R1.2.5 the sameinstalled.version(s), options and R1.2.4.1 of Name the forEquipment. of attribute the equipmentand the the SEMIE120components R1.2.4 knowledgetype that of equipment. of general EquipmentStructure General Introduction Equipment that can support multiple versions of the content standards should report in the metadata only the only metadata the in report should standards content the of versions multiple support can that Equipment the model, equipment the within times multiple appear IODevices or Subsystems, Modules, identical Where of attributes ImmutableID and Uid the for except identical be should equipment identical from metadata The etc.) exception, event, parameter, component, (equipment element metadata each of field Description The where except notation CamelCase in formatted be should elements metadata all of fields ID and name The a to element the of nature the conveys that text brief contain should elements metadata of field name The implementer The situations. some in apply not might but cases, most in appropriate are suggestions These Follow metadata. equipment's an improving for practices recommended contains Information Related This h eaaa mdl sol nld h eet heacia ees ncsay t rsn n accurate an present to necessary levels hierarchical fewest the include should model metadata The Equipment that can support multiple versions of EDA simultaneously should return metadata conformant metadata return should simultaneously EDA of versions multiple support can that Equipment make same the of are they when identical considered are IODevices and Subsystems, Modules, of Pairs software same the have model, and make same the of are they when identical considered are Equipment the format best optionComputerinterpretationhuman readability both The provides for CamelCase and and “CF4” as such values attribute Name functional or descriptive use to encouraged is implementer The that object the about information embed not should element metadata a of attributes ID the and Name The : This related information is not an official part of SEMI [insert designation, without publication date publication without designation, [insert SEMI of part official an not is information related This : Etch1 ExhaustPump Subsystem ). Page jn l jn 76 Regulations , ¶12.2] on [insert date of date [insert on ¶12.2] , Document Document Number: Doc. Date:  SEMI 5/8/2018 DRAFT 

LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900, Fax:408.943.6900, Phone:408.943.7943 CASan 95134-2127 Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and modules). settings or instructions by R1.3.6.2 processing its in directed be should bythe factory managed system. that be a in can recipe contained Module a as designated component equipment R1.3.6.1 inspectionlocationsonthe equipment. measurement, and Substrate as function R1.3.6 and component EFEM the within contained not Locks. 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Date:  SEMI 5/8/2018 DRAFT 

LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900, Fax:408.943.6900, Phone:408.943.7943 CASan 95134-2127 Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and R1.5.2.3.1 R1.5.2.3.1 ofTransition out state. that R1.5.2.3 substates. of does athat correspond the orits with not State sourceStateIdto one value substates and R1.5.2.2.1 at leastState. that one Transitioninto contain R1.5.2.2 exitedthe StateMachine. upondestruction enteredand of uponcreation is Top State R1.5.2.1 any as aredefined transitions. pathways These path out. with supplemented table, transition the R1.5.2 of column “Trigger” the from text includedthe Description. in and “Action” was “Comment”columns from text important the the standards, content the for R1.5.1.2 ignored. shouldallowed or They be not R1.5.1.1 R1.5.1 R1.5 R1.4.2.1 R1.4.2 ignored. shouldallowed or They be not R1.4.1.1 and R1.4.1 Model, Make, Supplier, the R1.4 for values accurate including metadata attributes. ImmutableID the in defined EquipmentElement R1.3.14 emsin i rne t erdc ado itiue hs dcmn, i woe r i pr, ny wti h soe f EI nentoa Sadrs cmite (document committee Standards International SEMI of scope the within only part, in or whole in document, Guideline. this Safety or distribute Standard adopted or and/or official reproductiondevelopment) All and/oractivity. other theprior withoutconsent distribution SEMI written prohibited.ofis an reproduce as construed be to to is granted page this is on material No Permission program. Standards International SEMI the of Document Draft a is This ignored. shouldallowed or They be not R1.6.1.1 EquipmentNodeDescription. 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LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900, Fax:408.943.6900, Phone:408.943.7943 CASan 95134-2127 Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and R1.8 is changed.Parameter the of unit the when value constraint the of conversion the for provision no is There AvailableUnits. R1.7.8 the metadata. in theeachEvent EventReport defined in for inclusion R1.7.7 R1.7.6.1 R1.7.6 ignored. shouldallowed or They be not R1.7.5.2 is that VariableType.TypeDefinition a R1.7.5.1 R1.7.5 R1.7.4 R1.7.3 to transient. for setIt theseisbe entity)can Parameters ReadWrite values. appropriate not (external R1.7.2.1 Unrestricted. R1.7.2 definition. or leastException oneconstruct Transient AvailableParameter beby at should referenced as R1.7.1 R1.7 implementation. R1.6.3.1 R1.6.3 toof the nature the problem. indicate interpretable R1.6.2 emsin i rne t erdc ado itiue hs dcmn, i woe r i pr, ny wti h soe f EI nentoa Sadrs cmite (document committee Standards International SEMI of scope the within only part, in or whole in document, Guideline. this Safety or distribute Standard adopted or and/or official reproductiondevelopment) All and/oractivity. other theprior withoutconsent distribution SEMI written prohibited.ofis an reproduce as construed be to to is granted page this is on material No Permission program. Standards International SEMI the of Document Draft a is This match whypossible. SECSdata donot a and is documentitems mapping explain should which R1.10.1 R1.10 pressure. temperature ofand such characteristics, mix as R1.9.4 R1.9.3 Parameters possible. wherever andfor enumeration dateTime, R1.9.2 ignored. shouldallowed or They be not R1.9.1.2 R1.9.1.1 R1.9.1 R1.9 collection. data it for and available interval) makes (update R1.8.3 supplier allto personnel. available includes data R1.8.2 R1.8.1 TypeUnitsDefinitions and Sensor Data Parameters UnitConfigs in a set should refer to units that apply to the same characteristic, such as temperature, not for a for not temperature, as such characteristic, same the to apply that units to refer should set a in UnitConfigs Units besensorsthe measure same should consistentfor an type of of equipment. within binary, Boolean, string, real, integer, as such types, data basic only employ should metadata equipment The Parameter. byat least Unitresponseshould the one GetUnits() referenced Each from be value sensor’s each reads equipment the which at interval time This the document should EDA. suppliers Equipment using Parameters as available made be should equipment the on available data sensor All be sensorvaluesunits. should asNumeric specified defined floatingpoint with data multiple with specified been have that Parameters with constraints of use the avoid should Implementations for available made and Parameters individual as defined be should information context appropriate All a the metadata. Parameterin (ifreference defined definition should AssociatedParameter any) Each Parameter. byat least should Parameterone referenced TypeDefinition Each be value. orthe same shouldonehold report to transientThe more define parameter implementer not than to value. parameter orthe shouldonesame hold report non-transient The more define implementer not than to set attribute isTransient its have should type Control or Configuration a as defined is that Parameter Any defined is which and SEMIObjType a in or EquipmentNodeDescription an in defined is that parameter Each human be should attribute ID the Exceptions. events define EDA implementernot corresponding to The should EDA ExceptionReport, the with provided not is Description the Since SECSMapping Where SECS data items exist that do not map directly to E125 equipment metadata items, the implementer the items, metadata equipment E125 to directly map not do that exist items data SECS Where Dead references and unused artifacts are an indication of underlying problems in the equipment interface. equipment the in problems underlying of indication an are artifacts unused and references Dead keptTypeDefinitions to minimum. by the defined supplierbe should a be EquipmentNodeDescriptions. can foundin Parameters SEMIObjTypes definitions in and a of TypeHint a in or Structures) interface. or equipment the in problems underlying of indication an are Arrays artifacts unused and references Dead (including Parameter a from directly be may This user the is, That ReadWrite. as E125 SEMI in defined are Parameters type Control and Configuration EDA well-designed a in redundant is this reporting, parameter for provide Exceptions Since Page jn l jn 79 Document Document Number: Doc. Date:  SEMI 5/8/2018 DRAFT 

Document Document Number: Doc. Date:  SEMI 5/8/2018 DRAFT 

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