Ballot Adjudication Summary

Ballot Adjudication Summary 2013 Cycle 1 REGION: North America COMMITTEE: EHS EVENT: NA Standards Spring 2013 Meetings DATE OF MEETING: April 4 2013 PLACE OF MEETING: SEMI Headquarters in San Jose, California COMMITTEE CO-CHAIRS: Sean Larsen/Lam Research AG, Chris Evanston/Salus SEMI STAFF: Paul Trio

I. Document Number & Title Document Reapproval of SEMI S6-0707E, EHS Guideline for 5522 Exhaust Ventilation of Semiconductor Manufacturing Equipment

II. Tally (Staff to fill in)

Voting Tally: As-cast tally after close of voting period A minimum of 60% of the voting interests that have voting members within the technical committee must return votes. (Regulations ¶ 9.6.1) III. Rejects Reject 1 (KLA-Tencor: Lauren Crane) Negative 2 of Reject 1 Referenced *TF/Committee to fill in if necessary Section 6.3.1 *Original negative comment and justification should be included.

N Negative: e S6 is not limited in scope to consideration of “process chemicals” (see, for g example, 5.2.49). Therefore this section is inappropriately narrow. a t i Reason Proposed Solution: v Change to the effect of e “…should be compatible with the substances of concern specified by the SME supplier….”

Technical GO TO “Related” x No withdrawal made section Withdrawal GO TO “Final”  Withdrawal document received by staff on XXXX (A) “Related” is mutually agreed upon. x *This motion can be appended to the motion for Persuasive (See Persuasive Section) Motion and Reason Negative is related (needs over 1/3 votes to pass) Negative is not related (needs 2/3 or more votes to pass) R Reason XXXX e l Motion by/2nd by Name (Company)/Name (Company) a Discussion t e XX-XX d [Negative is related] > 1/3 GO TO “Persuasive” Result of Vote [Negative is not related] < 2/3 (check ONE) 2/3=< [Negative is not related] GO TO “Final”  (B)

P x Negative is related and persuasive (needs over 1/3 votes to pass) Motion and e Negative is related and not persuasive (needs 2/3 or more votes to pass) r Reason Reason XXXX s u Motion by/2nd by John Visty (Salus) / Bert Planting (ASML) a Discussion None s 10-0 x [Negative is related and persuasive] > 1/3 GO TO “Final”  (E) [Negative is related and not persuasive] < 2/3 Result of Vote GO TO “Final”  i (check ONE) 2/3=<[Negative is related and not persuasive] <90% (C) v e 90% =< [Negative is related and not persuasive] GO TO “Not Signifi- cant Finding Option”

N o t This option can only be used “if the committee finds a negative not persuasive by a vote equal to or greater than 90% of the persons voting on the action”. (Regulations ¶ S 9.5.3.3.2) i g n It is mutually agreed upon to term the negative “not significant” GO TO  i (D) f GO TO  i It is mutually agreed upon to term the negative “significant” c (C) a Motion The negative is “not significant”. n t Motion by/2nd by Name (Company)/Name (Company)

F XX-XX Motion passed with simple majority GO TO  (D) i n d i n g Vote XX-XX Motion failed with simple majority GO TO  (C) O p t i o n Negative is: (A) withdrawn (counted under h in disposition) Final (B) not related (counted under i in disposition) (C) related and not persuasive (significant) (D) not significant (counted under j in disposition) x (E) related and persuasive DOCUMENT FAILS Comment generated. See comment #x

Reject votes were also received from the following voters:  QSES: Tomokatsu Sano  TUV SUD: Glenn Holbrook  TUV Rheinland: David Sexton  Lam Research AG: Sean Larsen IV. Comments Comments were received from the following voters:  Lam Research AG: Sean Larsen V. Action for this document M This document passed committee review as balloted and will be forwarded to the A&R for o procedural review. t This document passed committee review with editorial changes and will be forwarded to the i A&R for procedural review. o n x This document failed committee review and will be returned to the task force for rework. This document failed committee review and work will be discontinued. Motion by/2nd John Visty (Salus) / Bert Planting (ASML) by Discussion None Vote 12-0 x Motion passed Final Action Motion failed