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Vacuum Science & Technology Timeline

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Vacuum Science & Technology Timeline 1955 – 1957 Turbomolecular pump Harrison E. Farnsworth John Bardeen (1908-1991), Lewis D. Hall, Robert L. Jepsen Willi Becker Ion beam sputtering of Walter Houser Brattain and John C. Helmer German Patent 1010235 Willi Becker 1957 Multi-stage turbine crystals for surface studies (1902-1987), and VacIon® (sputter-ion) pump based on (turbomolecular) 1956 William Bradford Shockley Penning discharge — all electronic pump pump concept (1910-1989) 1957 1955 Nobel Prize in Physics for discovery of transistor effect Mars Hablanian Orbitron titanium ion 1956 Axial flow, thin-bladed automotive Compactron sublimation pump supercharger at high vacuum – multipurpose Raymond G. Herb Showed air compressors make tubes for U.S. Patent 2850225 good vacuum pumps, television sets (1958) confounding existing theory 1955 filed 1955 1957 Start of the “Space Age” Silicone diffusion First artificial satellite launched pump fluid Sputnik I - U.S.S.R. Dow Corning DC-704 October 4, 1957 1956 CERN 600 MeV Synchro-Cyclotron (SC) starts Vacuum Deposition of operation Thin Films 1957 by Leslie A. Holland published 1956 Peter F, Varadi Committee on Vacuum and L. G. Sebestyén Techniques renamed Linear rado-frequency Commercial Roots Society of Vacuum Coaters Nixie Display Tubes The American Vacuum partial pressure analyzer vacuum pump 1957 Society 1955 (SVC) first Symposium Leybold Company 1957 1957-1958 1955 1955 1957 Vacuum Science & Technology Timeline 1958 –1959 F a i r c h i l d S e m i c o n d u c t o One of first integrated circuits r built by Jack Kilby Texas Instruments c. 1958 Resistor-transistor logic (RTL) chip John Peter Hobson Paul Aveling Redhead c. 1958 (1925-2003) (1924-2005) J. P. Hobson and P. A. Redhead Inverted magnetron UHV Viton® fluorocarbon cold-cathode gauge elastomers 1958 Elmer G. Fridrich and Emmett H. Wily E. I. du Pont de Nemours & Co. Varian Klystron (VA-842) Tungsten-halogen lamp c. 1959 Liquid-cooled, multicavity U.S. Patent 2883571 (1959) radar transmitting tube - the largest 1958 documented production klystron 1959 First of a series of VacSorb® cryosorption amateur-oriented roughing pump vacuum articles Varian Associates published in 1958 Scientific American 1958 IBM 709 computer International Organization Last major vacuum of Vacuum Science and tube computer Technology (IOVST) Magnetic core memory First AVS standard prepared founded First International 1958 by the Standards and 1958 Vacuum Congress Nuvistor – c. 1 x 2 cm Nomenclature Committee Namu, Belgium 1959 Pergamon Press 1958 1958 1958 1959 Vacuum Science & Technology Timeline 1959 – 1960 James Martin Lafferty (1916-2006) IBM 7090 Hot-cathode magnetron First transistor computer ionization gauge Monolithic Integrated circuit patent 1959-1969 Hybrid Integrated circuit patent 1960 Robert N. Noyce Jack S. Kilby U.S. Patent 2.981,877 – April 25, 1961 U.S. Patent 3,138,744 – June 23, 1964 filed 1959 filed 1959 Spinning-rotor vacuum gauge (gas viscosity) Jesse W. Beams 1960 Satellites become part of popular culture Cold-cathode magnetron Peanuts–Charles Schulz© 15 November 1959 vacuum gauge Commercial Omegatron Mass Spectrometer Paul A. Redhead A. Klopfer and W. Schmidt 1959 (Edwards High Vacuum, Inc) 1960 1959 1960 Vacuum Science & Technology Timeline 1960 – 1962 First use of quadrupole RF mass spectrometer as residual gas analyzer r o t 1960 c u Gilbert Reiling d n o (U. S.) c i Metal-halogen m Helium-neon gas laser e S incandescent Ali Javan (at left), W. R. d l lamp i Bennett and D .R. Herriott h c r U.S. Patent i 1960 a 3234421 Integrated logic circuit F (1966 ) 1-inch diameter wafer Vacuum evaporated Fairchild Semiconductor William Ross Aiken filed 1961 aluminum for integrated 1961 (1919- ) circuit contacts Cathode-ray tube display 1961 for aircraft and 10-13 torr in 2 ft. diameter C. H. Kruger and A. H. Shapiro 14” thin CRT vacuum chamber using Statistical theory of Diatron-20 magnetic sector 1960 helium-cooled cryogenic traps and baffles turbo-molecular pumping mass spectrometer residual National Research Corp.(NRC) 1961 gas analyzer bakeable to 500°C 1960 Consolidated Electrodynamics Corp. / Eitel-McCullough 1961 1000 liter/ sec Gerald. S. Anderson and First industrial Getter-ion pump Roger Moseson ion implanter First practical capacitance Varian Associates. Inc Very large sorption pumps Radio-frequency delivered 1960 sputter deposition manometer 1960 for roughing large chambers U.S. Patent 3,233,137 MKS Instruments Co. Varian Associates, Inc. 1961 NASA 1961 1961 2000 cu. ft. space L. L. Levenson, Norman Milleron chamber and D. H. Davis U. S. Air Force UHV (CF) metal-gasket Wolfgang Knauer Computation of vacuum 1960 First AVS Division captured step-seal Ion pump with post and conductances using formed – Vacuum William R. Wheeler planar magnetron cathodes Monte Carlo simulations Metallurgy 1961 U.S. Patent 3216652 (1965) 1960 1961 filed 1962 1960 1962 Vacuum Science & Technology Timeline 1962 – 1964 Sidney S. Charschan and Harald Westgaard Air-to-vacuum inline reactive sputter desposition system 150 ft. diameter radio U.S. Patent 3294670 (1966) telescope dish for filed 1963 radar and communications Stanford University Varian Clinac x ray machine for cancer radiation therapy 1960s W. M. Brubaker, 1963 P. Michael Uthe, and Low energy electron diffraction Robert Finnigan (LEED) image from nickel Commercial quadrupole Varian mass spectrometer 1962 Donald M. Mattox residual gas analyzer Deposition by plasma- 1964 enchanced thermal evaporation – Ion Plating First commercial monopole U.S. Patent 3329601 (1967) residual gas analyzer Richard E. Honig 1963 General Electric Publishes “Vapor Pressure 1964 Data for the Solid and Liquid Elements” in RCA Review Frederick A. Mosby Touch-Tone phone with (updated in 1969by Honig and Improved halide- thin-film resistor arrays Dean A. Kramer) tungsten lamp Western Electric 1962 U.S. Patent 3243624 1964 (1966) The Next Revolution Varian VA-126 filed 1963 in Electronics A partial pressure of High-power traveling J. English, B. Fletcher 14 April 1962 10-17 torr measured wave tube and Walter Steckelmacher with magnetic-sector 1962 Quadrupole mass develop wide-range Pirani mass spectrometer spectrometer sold by vacuum gauge William D. Davis Apollo Lunar Exploration Electronics Associates, Inc. 1964 IOVST becomes 1962 Program started (EAI) to NASA as residual International Union NASA gas analyzer for space for Vacuum Science, chamber research First AVS Section founded – 1963 Journal of Vacuum Techniques, and 1963 Applications (IUVSTA) Pacific Northwest Science & Technology 1962 (Sections are now AVS Chapters) “Ultrahigh Vacuum” Vol. 1, No. 1, Sept./ Oct. 1962 H. A. Steinherz and P. A. Redhead 1964 Scientific American 1962March 1962 1964 Vacuum Science & Technology Timeline 1965 – 1968 Rudolph Brand Dry pump with nitrogen ballast British Patent 1178265 (1967) filed 1966 Gordon Moore and Robert Noyce Found Intel Corporation July 1968 Stanford Linear Accelerator (SLAC) 2-mile long vacuum tube Cambridge Instrument Co. Invented by William Hansen, Stereoscan Scanning Electron Developed by Edward Ginzton (pictured), Microscope prototype Completed under the 1965 direction of Wolfgang Panofsky 1966 Charles W. Hanks Plasma-enhanced chemical vapor deposition 270° bent-beam electron-beam of metal carbides gun evaporation source Robert D. Culbertson, Russell G. Mc Rae, U.S. Patent 3535438 (1970) Leslie A. Holland Harold M. Manasevit and Harold P. Meyn filed 1968 Magnetically-focused Radio-frequency oxide U.S. Patent 3604970 (1971) 180° bent-electron-beam plasma etching 1967 evaporation source U.S. Patent 3546036 (1970) 1965 filed 1966 John C. Helmer and W. H. Hayward Fomblin ® AIP Bent-beam (Helmer) perfluoropolyether Reprint vacuum gauge vacuum fluids and 1993 Vacuum-pneumatic 1966 lubricants subways proposed for Montedison SpA urban and intercity Paul A. Redhead c. 1967 The Physical Basis transportation Extractor ionization Domestic of Ultra-high Vacuum Roland Weber 1965 vacuum gauge microwave oven Paul A. Redhead, J. Peter Hobson LEED/Auger Spectrometer 1966 1967 and Ernest V. Kornelsen 1967 1968 1965 1968 Vacuum Science & Technology Timeline 1969 – 1971 K. H. Mirgel Vertical uni-directional Alan K. Reinberg turbomolecular pump Russell D. Young Radio-frequency plasma deposition 1969 Topografiner – precursor to the U.S. Patent 3757733 (1973) scanning tunneling microscope – filed 1971 Plasma etching of semiconductors required a vacuum environment Steven M. Irving, Kyle Eugene 1971 A. Y. Cho, John R. Arthur, et al. Lemons, and George E. Bobos U.S. Patent 3615956 (1971) Molecular-beam epitaxy Structure Zone Model of Walter Steckelmacher and filed 1969 1969-1970 thin film growth Brian Fletcher B. A. Movchan and Convection thermal conductivity M. V. Demchishin vacuum gauge that measures up to 1969 one atmosphere c. 1971 DC 704 & DC 705 Alan S. Penfold tetramethyl tetraphenyl and John A. Thornton trisiloxane pump fluids Dow-Corning Co. Post magnetron sputter Apollo 11 c. 1970 deposition source First Moon Landing U.S. Patent 3884793 (1975) Joseph Peter Clarke 1969 filed 1971 (1931-2002) Cylindrical and conical magnetron sputter deposition sources Commercial scanning U.S. Patent 3616450 (1971) Handbook of Thin San Marco 3 Satellite electron microscope filed 1968 Film Technology carries Omegatron mass Cambridge Instruments, U. K. Leon I. Maissel spectrometer instrument 1970 Association of Vacuum and Reinhard Italian Space Commission Equipment Manufacturers Glang, editors and NASA (AVEM) founded McGraw-Hill 1970 1971 1969 1969 1971 Vacuum Science & Technology Timeline.
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