Fundamentals of Piezoelectricity
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Package Consideration in Capacitive Sensor Design
MECHANICALLY AMPLIFIED CAPACITIVE STRAIN SENSOR by JUN GUO Submitted in partial fulfillment of the requirements For the degree of Doctor of Philosophy Dissertation Adviser: Dr. Wen H. Ko Department of Electrical Engineering and Computer Science CASE WESTERN RESERVE UNIVERSITY May, 2007 CASE WESTERN RESERVE UNIVERSITY SCHOOL OF GRADUATE STUDIES We hereby approve the dissertation of ______________________________________________________ candidate for the Ph.D. degree *. (signed)_______________________________________________ (chair of the committee) ________________________________________________ ________________________________________________ ________________________________________________ ________________________________________________ ________________________________________________ (date) _______________________ *We also certify that written approval has been obtained for any proprietary material contained therein. Dedication To my parents. TABLE OF CONTENTS Mechanical Amplified Capacitive Strain Sensor Table of Contents ......................................................................................................................... 1 List of Tables ................................................................................................................................ 7 List of Figures .............................................................................................................................. 9 Acknowledgements ................................................................................................................. -
Converting Quantum Information to Mechanical Motion
Converting quantum information to mechanical motion by Adam P. Reed B.S., The Ohio State University, 2011 M.S., University of Colorado, 2015 A thesis submitted to the Faculty of the Graduate School of the University of Colorado in partial fulfillment of the requirements for the degree of Doctor of Philosophy Department of Physics 2017 This thesis entitled: Converting quantum information to mechanical motion written by Adam P. Reed has been approved for the Department of Physics Konrad Lehnert John Teufel Date The final copy of this thesis has been examined by the signatories, and we find that both the content and the form meet acceptable presentation standards of scholarly work in the above mentioned discipline. iii Reed, Adam P. (Ph.D., Physics) Converting quantum information to mechanical motion Thesis directed by Prof. Konrad Lehnert Mechanical systems that combine motion and electricity are often used to process information. They are employed as compact clocks, filters, and sensors in almost all modern electronic devices. Yet these devices are limited to processing classical information. To exploit mechanical systems in emerging quantum communication and computation technologies, such systems must process fragile quantum bits of information. In this thesis, I experimentally demonstrate the conversion of quantum bits encoded in electrical signals to the motion of a micron-scale mechanical resonator. This capability is crucial for harnessing mechanical systems as memories for quantum signals, or as converters of information between electronic quantum processors and telecommunications light. Beyond quantum information processing, this work opens up the possibility to test quantum theory in objects of an unprecedented mass scale. -
PHYSICS Glossary
Glossary High School Level PHYSICS Glossary English/Haitian TRANSLATION OF PHYSICS TERMS BASED ON THE COURSEWORK FOR REGENTS EXAMINATIONS IN PHYSICS WORD-FOR-WORD GLOSSARIES ARE USED FOR INSTRUCTION AND TESTING ACCOMMODATIONS FOR ELL/LEP STUDENTS THE STATE EDUCATION DEPARTMENT / THE UNIVERSITY OF THE STATE OF NEW YORK, ALBANY, NY 12234 NYS Language RBERN | English - Haitian PHYSICS Glossary | 2016 1 This Glossary belongs to (Student’s Name) High School / Class / Year __________________________________________________________ __________________________________________________________ __________________________________________________________ NYS Language RBERN | English - Haitian PHYSICS Glossary | 2016 2 Physics Glossary High School Level English / Haitian English Haitian A A aberration aberasyon ability kapasite absence absans absolute scale echèl absoli absolute zero zewo absoli absorption absòpsyon absorption spectrum espèk absòpsyon accelerate akselere acceleration akselerasyon acceleration of gravity akselerasyon pezantè accentuate aksantye, mete aksan sou accompany akonpaye accomplish akonpli, reyalize accordance akòdans, konkòdans account jistifye, eksplike accumulate akimile accuracy egzatitid accurate egzat, presi, fidèl achieve akonpli, reyalize acoustics akoustik action aksyon activity aktivite actual reyèl, vre addition adisyon adhesive adezif adjacent adjasan advantage avantaj NYS Language RBERN | English - Haitian PHYSICS Glossary | 2016 3 English Haitian aerodynamics ayewodinamik air pollution polisyon lè air resistance -
Piezoelectric Solutions: Piezo Components & Materials
Piezoelectric Solutions Part I - Piezo Components & Materials Part II - Piezo Actuators & Transducers BAUELEMENTE, TECHNOLOGIE, ANSTEUERUNG Part III - Piezo Actuator Tutorial PIEZOWWW.PICERAMIC.DE TECHNOLOGY Contents Part I - Piezo Components & Materials .......... .3 Part II - Piezo Actuators & Transducers . .40 Part III - Piezo Actuator Tutorial ........ .73 Imprint PI Ceramic GmbH, Lindenstrasse, 07589 Lederhose, Germany Registration: HRB 203 .582, Jena local court VAT no .: DE 155932487 Executive board: Albrecht Otto, Dr . Peter Schittenhelm, Dr . Karl Spanner Phone +49 36604-882-0, Fax +49-36604-882-4109 info@piceramic .com, www .piceramic .com Although the information in this document has been compiled with the greatest care, errors cannot be ruled out completely . Therefore, we cannot guarantee for the information being complete, correct and up to date . Illustrati- ons may differ from the original and are not binding . PI reserves the right to supplement or change the information provided without prior notice . All contents, including texts, graphics, data etc ., as well as their layout, are subject to copyright and other protective laws . Any copying, modification or redistribution in whole or in parts is subject to a written permission of PI . The following company names and brands are registered trademarks of Physik Instrumente (PI) GmbH & Co . KG : PI®, PIC®, NanoCube®, PICMA®, PILine®, NEXLINE®, PiezoWalk®, NEXACT®, Picoactuator®, PIn- ano®, PIMag® . The following company names or brands are the registered trademarks of their -
An Apparatus for Measuring the Piezoresistivity of Semiconductors
- - --------------------- --- ~----------...., Journal of Research of the National Bureau of Standards Vol. 59 No.6, December 1957 Research Paper 2814 An Apparatus for Measuring the Piezoresistivity of Semiconductors 1 R. F. Potter 2 and W. 1. Me Kean A detailed description is given of an apparatus and procedure designed to measure t he piezoresistive effect in semiconductors over an extended temperature range. A tensile force up to 1 kilogram can be appli ed to the sample by means of a calibrated beam balance. The apparatus has been used for measurements on indium antimonide over the range 780 K to 3000 K , and tensile stresses of the order of 5 X 107 dynes per square centimeter can be applied t o samples that are cut in a special manner. In modern solid-state physics, phenomena such as a form quite analogous to that for the elastic con electrical conduction, Han effect, and optical absorp stants. The II-constants are defined as follows: tion have been studied extensively because of their direct connection with a well-developed theory of IIn = IIll, II semiconductors. More recently several other effects have been receiving an increasing amount of attention (2) by both the theorist and experimentalist; some of these are cyclotron resonance, photoelectromagnetic effect, magnetoresistivity, and piezoresistivity. The latter parameter has been studied for some X ij is the applied stress, and P is the resistivity, time in connection with m etals, but it is only in where the cubic axes are taken as the reference axes. comparatively recent years that large anisotropic The change of resistance in a material is measured changes in the resistivity with applied stress were when a stress is applied in a given direction to a measUTed for single crystals with cubic symmetry. -
Advances in Piezoresistive Probes for Atomic Force
ADVANCES IN PIEZORESISTIVE PROBES FOR ATOMIC FORCE MICROSCOPY A DISSERTATION SUBMITTED TO THE DEPARTMENT OF MECHANICAL ENGINEERING AND THE COMMITTEE ON GRADUATE STUDIES OF STANFORD UNIVERSITY IN PARTIAL FULFILLMENT OF THE REQUIREMENTS FOR THE DEGREE OF DOCTOR OF PHILOSOPHY Jonah A. Harley March 2000 ii Ó Copyright by Jonah A. Harley 2000 All Rights Reserved iii I certify that I have read this dissertation and that in my opinion it is fully adequate, in scope and quality, as dissertation for the degree of Doctor of Philosophy. __________________________________ Thomas W. Kenny (Principal Advisor) I certify that I have read this dissertation and that in my opinion it is fully adequate, in scope and quality, as dissertation for the degree of Doctor of Philosophy. __________________________________ Storrs T. Hoen I certify that I have read this dissertation and that in my opinion it is fully adequate, in scope and quality, as dissertation for the degree of Doctor of Philosophy. __________________________________ Calvin F. Quate Approved for the University Committee on Graduate Studies __________________________________ iv Abstract The atomic force microscope (AFM) is a tool that enables the measurement of precisely localized forces with unprecedented resolution in time, space and force. At the heart of this instrument is a cantilever probe that sets the fundamental limitations of the AFM. Piezoresistive cantilevers provide a simple and convenient alternative to optically detected cantilevers, and have made it easier for commercial applications to exploit the power of the force microscope. Unfortunately, piezoresistive cantilevers do not provide performance levels equal to those of the optically detected AFM. Several advances will be discussed in this work that largely erase that discrepancy, and in some cases take the capabilities of the piezoresistive cantilever beyond those of the standard AFM cantilever. -
Modeling Piezoresistivity in Silicon and Polysilicon
November 19, 2005 10:41 Journal of Applied Engineering Mathematics Volume 2 MODELING PIEZORESISTIVITY IN SILICON AND POLYSILICON Gary K. Johns Mechanical Engineering Department Brigham Young University Provo,Utah 84602 ABSTRACT INTRODUCTION The piezoresistive effect of silicon is often utilized in sen- Piezoresistivity is a material property that couples bulk elec- sors. Due to the crystalline nature of silicon, the sensitivity of trical resistivity to mechanical strain [1]. In other words, as a ma- the piezoresistive effect depends on many things including the terial is stretched, compressed, or distorted in any way, the elec- direction and magnitude of the applied stress and the orientation trical resistivity changes. Almost all materials have this property, of the crystallographic plane. A method of modeling the piezore- even though in some it is so small that it is virtually undetectable. sistive effect in silicon and poly crystalline silicon is presented. However, other materials show a large change in resistivity for a This mathematical model includes partial derivatives and linear relatively small strain. One of these materials is silicon. The algebra to combine basic electrical and mechanical equations to piezoresistive effect in silicon makes it a good candidate to use describe the change in resistivity as a function of stress. An ex- as a sensor. A sensor element is a device that converts one form periment was used to verify the model. The analytical solution of energy into another [2]. An element made from silicon can and experimental results agree. The model presented in this pa- be designed to be a sensor since the piezoresistive property links per is adequate to predict the behavior of a piezoresistive sensor strain energy to change in resistance (electrical energy). -
The Piezojunction Effect in Silicon, Its Consequences and Applications for Integrated Circuits and Sensors
The Piezojunction Effect in Silicon, its Consequences and Applications for Integrated Circuits and Sensors The Piezojunction Effect in Silicon, its Consequences and Applications for Integrated Circuits and Sensors PROEFSCHRIFT ter verkrijging van de graad van doctor aan de Technische Universiteit Delft, op gezag van de Rector Magnificus prof. Ir. K. F. Wakker, voorzitter van het College voor Promoties, in het openbaar te verdedigen op maandag 24 september 2001 om 10:30 uur door Fabiano FRUETT master in electric engineering, UNICAMP, Brazil geboren te São Caetano do Sul, Brazil Dit proefschrift is goedgekeurd door de promotor: Prof. dr. ir. A.H.M. van Roermund Togevoegd promotor: Dr. ir. G.C.M. Meijer Samenstelling promotiecommissie: Rector Magnificus, Technische Universiteit Delft, voorzitter Prof. dr. ir. A.H.M. van Roermund,Technische Universiteit Delft, promotor Dr. ir. G.C.M. Meijer, Technische Universiteit Delft, toegevoegd promotor Prof. dr ir. R. Puers, Katholieke Universiteit Leuven, Belgium Prof. ir. A.J.M. van Tuijl, Philips Research Laboratories, Eindhoven Dr. C.A. dos Reis Filho, Univesridade Estadual de Campinas, Brazil Prof. dr. ir. J.W. Slotboom, Technische Universiteit Delft Prof. dr. ir. J.H. Huijsing, Technische Universiteit Delft Published and distributed by: DUP Science DUP Science is an imprint of Delft University Press P.O. Box 98 2600 MG Delft The Netherlands Phone: +31 15 27 85 678 Fax: +31 15 27 85 706 E-mail: [email protected] ISBN 90-407-2226-9 Keywords: piezojunction effect, analogue integrated circuit and mechanical-stress sensor. Copyright 2001 by Fabiano Fruett All rights reserved. No part of the material protected by this copyright notice may be reproduced or utilized in any form or by means, electronic or mechanical, including photocopying, recording, or by any information storage and retrieval system, without written permission from the publisher: Delft University Press. -
Two-Level Bulk Microfabrication of a Mechanical Broadband Vibration Amplifier E-Mail: [email protected]
Journal of Micromechanics and Microengineering PAPER • OPEN ACCESS Related content - Prototyping of a highly performant and Two-level bulk microfabrication of a mechanical integrated piezoresistive force sensor for microscale applications Bilal Komati, Joël Agnus, Cédric Clévy et broadband vibration amplitude-amplifier with ten al. coupled resonators - Torsional MEMS gyroscopes with non- resonant drive Cenk Acar and Andrei M Shkel To cite this article: Michelle Müller et al 2018 J. Micromech. Microeng. 28 045009 - Wide-bandwidth piezoelectric energy harvester with polymeric structure Mehdi Rezaeisaray, Mohamed El Gowini, Dan Sameoto et al. View the article online for updates and enhancements. This content was downloaded from IP address 82.130.103.57 on 19/11/2018 at 16:31 IOP Journal of Micromechanics and Microengineering Journal of Micromechanics and Microengineering J. Micromech. Microeng. J. Micromech. Microeng. 28 (2018) 045009 (10pp) https://doi.org/10.1088/1361-6439/aaabf6 28 Two-level bulk microfabrication of a 2018 mechanical broadband vibration amplitude- © 2018 IOP Publishing Ltd amplifier with ten coupled resonators JMMIEZ Michelle Müller1 , Verena Maiwald1, Lothar Thiele2, Jan Beutel2, Cosmin Roman1 and Christofer Hierold1 045009 1 Department of Mechanical and Process Engineering, Micro and Nanosystems Group, ETH Zurich, 8092 Zurich, Switzerland Michelle Müller et al 2 Department of Information Technology and Electrical Engineering, Computer Engineering and Networks Laboratory, ETH Zurich, 8092 Zurich, Switzerland Two-level bulk microfabrication of a mechanical broadband vibration amplifier Email: [email protected] Received 14 December 2017 Printed in the UK Accepted for publication 31 January 2018 Published 19 February 2018 JMM Abstract A micromechanical broadband vibration amplitudeamplifier for low power detection of 10.1088/1361-6439/aaabf6 acoustic emission signals is presented. -
Characteristic and Analysis of Silicon Germanium Material As MEMS Pressure Sensor
Available online www.jocpr.com Journal of Chemical and Pharmaceutical Research, 2015, 7(1):411-415 ISSN : 0975-7384 Research Article CODEN(USA) : JCPRC5 Characteristic and analysis of silicon germanium material as MEMS pressure sensor S. Maflin Shaby Dept of Electronics and Telecommunication Engineering, Sathyabama University, Chennai, India _____________________________________________________________________________________________ ABSTRACT The silicon based pressure sensor is one of the major applications of the piezoresistive sensor. This paper focuses on the structural design and optimization of the MEMS piezoresistive pressure sensor to enhance the sensitivity. A finite element method (FEM) is adopted for designing the performance of a silicon based piezoresistive pressure sensor. Thermal as well as pressure loading on the sensor is applied to make a simulation results. In order to achieve better sensor performance, a parametric analysis is performed to evaluate the system output sensitivity of the pressure sensor. The design parameters of the pressure sensor include the location of piezoresistors and the new structural material used for designing of the piezoresistors in the membrane is poly-Silicon Germanium in which germanium is about 60%. The findings depict that proper selection of the piezoresistors location and the new structural material of the piezoresistors in the membrane can enhance the sensor sensitivity. Keywords: Piezoresistors, sensor, parametric analysis, silicon germanium, piezoresistivity, sensitivity _____________________________________________________________________________________________ INTRODUCTION The silicon based pressure sensor is one of the major applications of the piezoresistive sensor. Nowadays, silicon piezoresistive pressure sensor is a matured technology in industry and its measurement accuracy is more rigorous in many advanced applications. The fundamental concept of piezoresistive effect is the change in receptivity of a material resulting from an applied stress. -
Undirectional Paramagnetic Amplifier Design Research
,/f. .ASAC ^ ...-. ,- 1-KC ~ i I ,AA.,iU,ETlL t' .i .. ; .c tic s UNDIRECTIONAL PARAMAGNETIC AMPLIFIER DESIGN M. W. P. STRANDBERG TECHNICAL REPORT 363 JUNE 26, 1959 L·A/t 1_·-l-lmr · : '' -',- I'C RESEARCH LABORATORY OF ELECTRONICS MASSACHUSETTS INSTITUTE OF TECHNOLOGY CAMBRIDGE, MASSACHUSETTS The Research Laboratory of Electronics is an interdepartmental laboratory of the Department of Electrical Engineering and the Department of Physics. The research reported in this document was made possible in part by sup- port extended the Massachusetts Institute of Technology, Research Laboratory of Electronics, jointly by the U.S. Army (Signal Corps), the U.S. Navy (Office of Naval Research), and the U.S. Air Force (Office of Scientific Re- search, Air Research and Development Command), under Signal Corps Con- tract DA36-039-sc-78108, Department of the Army Task 3-99-20-001 and Project 3-99-00-000. Unidirectional Paramagnetic Amplifier Design* M. W. P. STRANDBERGt, FELLOW, IRE Summary-The radio-frequency parameters and the quantum- amplifiers along these lines is apparent. This is difficult mechanical parameters entering into the design of paramagnetic to understand because, for example, the application of quantum-mechanical amplifiers are described and discussed. The physical and electrical limitations on such parameters as gain-band- paramagnetic amplifiers to L-band radioastronomy is width product, gain stability, and nonreciprocity are described ana- hampered by the lack of a lossless L-band circulator. lytically and with design curves. Two realizations of nonreciprocal Furthermore, other methods of obtaining unidirectional amplifiers are described and discussed. In particular, operation of a gain-for example, through the use of a circulator (non- nonreciprocal amplifier at 9 kmc is described. -
Piezoelectric Crystal Experiments for High School Science and En- Gineering Students
Paper ID #14540 MAKER: Piezoelectric Crystal Experiments for High School Science and En- gineering Students Mr. William H. Heeter, Porter High School Engineering Dept. My name is William (Bill) Heeter. I graduated from Texas A&M with an Engineering degree in 1973. I worked in Industrial Distribution for over 30 years before becoming a high school pre-engineering teacher. I have been teaching engineering and technology for the past 13 years. I have been a Master Teacher for ”Project Lead the Way”, CTE co-Director, CTE Building Chair, Technology Teacher. My students have received many awards and college scholarships. One group of students received a provisional U.S. Patent. Several students have seen their work actually produced by industry, including the ordering touch screens used by Bucky’s. Dr. Sheng-Jen ”Tony” Hsieh, Texas A&M University Dr. Sheng-Jen (”Tony”) Hsieh is a Professor in the Dwight Look College of Engineering at Texas A&M University. He holds a joint appointment with the Department of Engineering Technology and the De- partment of Mechanical Engineering. His research interests include engineering education, cognitive task analysis, automation, robotics and control, intelligent manufacturing system design, and micro/nano manufacturing. He is also the Director of the Rockwell Automation laboratory at Texas A&M University, a state-of-the-art facility for education and research in the areas of automation, control, and automated system integration. Dr. Jun Zou, Department of Electrical and Computer Engineering, Texas A&M University Jun Zou received his Ph.D. degree in electrical engineering from the University of Illinois at Urbana- Champaign in 2002.