OptiTest ® a complete range of Optical Instruments TABLE OF CONTENTS
Page DESCRIPTION
• OPTITEST - a modular Optical Test Equipment ...... 2 • Collimators ...... 3 • Telescopes ...... 4 • Autocollimators ...... 7
APPLICATIONS
• Collimators and Telescopes ...... 5 • Autocollimators ...... 9
INSTRUMENTS
• Collimators ...... 14 • Focusing Collimators ...... 15 • Telescopes ...... 16 • Focusing Telescopes ...... 17 • Autocollimators ...... 18 • Autocollimators with Eyepiece Micrometers ...... 20 • Focusing Autocollimators ...... 21 • Focusing Autocollimators with Eyepiece Micrometers ...... 22 • Large Field Autocollimators ...... 22 • LED-Autocollimators ...... 23 • Diopter Telescopes ...... 24 • Dynameter ...... 25 • Square Body Telescopes and Collimators ...... 26
COMPONENTS & ACCESSORIES
• Tube Mounted Objective Lenses ...... 27 • Objective Tube Accessories ...... 29 • Achromats in Mount Dual Adapter Micro-Objectives Laser Alignment Attachment • Reticle Adapters and Autocollimation Heads ...... 33 • Eyepieces and Illuminations ...... 35 • Reticles ...... 38 • Positionning Equipment ...... 44 Holders Tables Stands
1 OPTITEST
• collimators OPTITEST • telescopes
A COMPREHENSIVE AND MODULAR OPTICAL • autocollimators TEST EQUIPMENT. • achromats The optical testing usually requires a wide range of configurations specific to the appli - • mechanical hardware for cation or the parameters to be measured. The large variety of the set-ups is, however, a positionning of the basic combination of basic optical instruments known as: optical instruments
The OPTITEST is a comprehensive line of equipment inclu - ding the largest range of basic op - tical instruments and additional me - chanical hard ware. To cover all con - ceivable testing set- ups required by fast changing applica - tions, the compo - nents of OPTITEST line are design as a modular system.
The OPTITEST com - po nents are inter - changeable and compatible with each other. This modular approach and the extensive range of instruments belonging to OP - TITEST result in significant advantages for the user:
• unlimited flexibility to set up systems to cover present and future applications • a cost effective solution since the basic components are identical in any configuration • user freedom to set up the required equipment by himself since everything is already factory adjusted
2 COLLIMATORS
Focus plane COLLIMATORS Image projected at infinity TERMS AND DEFINITIONS
The Collimator is an optical instrument consist - Reticle ing of a well corrected objective lens with an illuminated reticle at its focal plane. The Standard Collimator emerging beam is parallel (collimated beam), Infinity setting so that the image of the reticle is projected at infinity. The collimator is usually set up in this way known as infinity adjustment (setting). Focus plane
Real When moving the reticle out of the focal Image plane of the objective lens, the shape of the emerging beam will change:
Reticle -Moving the reticle away from objective lens Focusing Collimator will result in a convergent beam. The image of Finite distance setting-Real image the reticle is real and projected at a finite dis - tance. -Moving the reticle toward the objective lens Focus plane will result in a divergent beam. If the beam di - Virtual verges, a virtual image is produced at the Image aparent crossing point of the beam rays.This point is also located at a finite distance. This adjustment of the collimator is known as finite Reticle distance setting.
Focusing Collimator Finite distance setting-Virtual image
3 COLLIMATORS AND TELESCOPES
CONSTRUCTION
The main components of a standard collima - tor (infinity setting) are:
• Tube mounted objective lens • Reticle adapter • Illumination device Eyepiece Reticle Objective Lens A focusing collimator (finite distance setting) is similary built, however, the reticle adapter is mounted on a draw out tube for focusing ad - When the incoming beam is parallel, the im - justment. age observed through the telescope is locat - ed at infinity i.e at a long distance. This set up in is known as infinity setting.
Similar to collimators, the telescopes can be focused at finite distances.Attaching a draw out tube to the reticle adapter to move the re - ticle out of the focal of the objective lens, the standard telescope becomes a focusing teles - Illumination Filter Condensor Reticle Objective Lamp Optics Lens cope. Depending on the location of the re - ticle relatively to the focal plane, it results a re - al or a virtual image at a finite distance. TELESCOPES CONSTRUCTION
TERMS AND DEFINITIONS The main components of a standard telesco - pe (infinity setting) are: The telescope is a sighting device usually with a magnification greater than unity used for • Tube mounted objective lens image enlargement or measurement purpo - • Reticle adapter ses. It consists of a well corrected objective • Eyepiece lens, a reticle at its focal plane and an eyepie - ce.
A focusing telescope (finite distance setting) is similary built, howe - ver, the reticle adap - ter is mounted on a draw out tube for fo - cusing adjustment.
4 COLLIMATORS AND TELESCOPES
Since collimators and telescopes used for an - COLLIMATORS AND TELESCOPES gle measurement have a standard infinity set - ting and therefore the beams of the instru - ments are parallel, the measurement is not af - OPERATING PRINCIPLE AND APPLICATIONS fected: • when a parallel displacement of the optical In the optical metrology the collimators and axes occures telescopes are mostly used together to mea - • when the distance between the instrument i sure different optical and geometrical para - s modified meters: Typical applications related to angle measure - ment: ANGLE MEASUREMENT Measurement of the transmission angle A telescope mounted in the front of a collima - through prisms tor enables the simultaneous observation of both collimator and telescope reticle. When a Collimator collimator is perfectly aligned to a telescope the reticles are superimposed and no dis - placement occures.
The presence of an angle „ Ͱ“between the the collimator and telescope axes is shown by a Precision Rotary Table linear displacement „d“ between the two reti - cles. The displacement „d“ gives the size of Example: the angular disalignment (in radians) of the Measurement of 90∞-angle of pentaprisms two instruments: d Telescope Ͱ = f
Collimator Telescope
• absolute measurement: The telescope is Angle measurement with Collimators and Telescopes attached to a precision rotary table with read out: where: First reading: collimator and telescope d=linear displacement measured in the reticle aligned (without sample) plane (focal plane) Second reading: sample positioned, f=effective focal length (EFL) of the observing telescope rotated until the reticles are super instrument (i.e.telescope) imposed. Reading on rotary table.
To ease the angular alignment of equipment • relative measurement: a master prisma is with flat surfaces a special type of instruments used, collimator and telescope rotated until can be used: the square body collimators and reticles are super imposed and fixed in this telescopes. The reticles of these instruments position. The sample is placed instead of are accurately aligned to the outer square master prism. Reading on telescope. body surfaces. W TRIOPTICS Square Body Collimators and W TRIOPTICS Goniometer Telescopes
5 COLLIMATORS AND TELESCOPES
Alignment of prism sytems image of the resolution target formed in the focal plane of the sample is observed through a microscope. W TRIOPTICS Master Collimator W TRIOPTICS Optical Bench MEASUREMENT OF OPTICAL PARAMETER
Measurement of focal length Telescope A typical application is the measurement of the effective focal length EFL. A highly correct - ed collimator set to infinity (emerging beam is Example: Alignment and Testing of parallel) has a reticle with a pair of spaced Binoculars Prism Systems lines located in its focal plane. The image of the reticle is projected over the lens under test Binoculars and focused in its focal plane. By means of a
Reticle with spaced lines in collimator Reticle image S S´ Microscope Collimator
Collimator Mirror
Example: Telescope Measurement of focal length with supplemantary The collimator and the telescope is strictly using collimators and telescopes achromat lens aligned. When the binoculars or the prism sys - tem only are placed between the collimator microscope (or a telescope with a supple - and telescope tilt and rotation of prisms can mentary achromat) the size of spaced lines is be measured. determined and the EFL calculated:
TR IOPTICS Binoculars Testing W S’ Instrument f = fcol . S TESTING IMAGE QUALITY The collimators used for testing the image W TRIOPTICS Optomatic quality are equiped with reticle containing a W TRIOPTICS OptiAngle resolution pattern (chart) as USAF resolution target, Siemens Star, Foucault Test etc. The telescope or any other sighting devices are Measurement of centration errors pointed to the testing collimator. The limiting number of lines per millimeter that a sighting A collimator set to infinity contains a reticle device is capable to resolve on the collimator with a dark or bright cross. The lens under test reticle is determining the resolution or image is placed in a precision rotary holder. The im - quality. age of a reticle projected over the lens under test is observed by means of a telescope with Another typical set up for testing image quality additional achromat having a graduated reti - of lenses consists of a collimator which projects a resolution target to the lens under test. The
6 AUTOCOLLIMATORS
AUTOCOLLIMATORS
TERMS AND DEFINITIONS
Graduated The Autocollimator is a single instrument com - Reticle Example: bining the functions of a collimator and a tele - Measurement of Centration in Transmission scope.It detects small angular displace ments of a mirror by means of its own colli mated Telescope light.
The two reticles are positioned in the focal plane of the corrected objective lens, so that
Precision Rotary Holder the emerging beam is parallel. This usual con - figuration is known as infinity setting , i.e the au - tocollimators are focused at infinity.
When moving the reticles out of the focal Collimator Cross Reticle plane of the objective lens, the autocollimator can be focused at finite distances, and the Mirror beam becomes divergent (producing a virtual image) or convergent (real image). This results cle. in a focusing autocollimator. The shape of the While rotating the holder with the lens, the cir - beam -convergent or divergent-depend on cle described by the reticle image is mea - the direction in which the reticles are moved. sured. CONSTRUCTION W TRIOPTICS OptiAngle W TRIOPTICS Ultra-Precision Rotary Holders The main components of a stadard autocolli - mator i.e. focused at infinity are:
MEASUREMENT OF THE FOCUSING DISTANCES • Tube mounted objective lens • Beam splitter mount which contains two Many telescopes and sighting devices are de - reticles signed to to be focused at different distances • Eyepiece over a given range. To measure the distance • Illumination device setting of sighting devices a focusing collima - The illuminated reticle projected over the tor with a accurately graduated draw out beamsplitter towards the lens is known as colli - tube is focused at the distance to be mator reticle . The second reticle placed in the checked. Through the eyepiece of the sight - focus of the eyepiece is the eyepiece reticle . ing device the collimator reticle is observed. If the image of the collimator reticle appears sharp within the required tolerance, the sight - Illumination ing device is correctly adjusted. Deviations are measured and read off on the graduated Filter Collimator reticle draw out tube of the collimator. Condensor Collimator Focusing collimator Focusable sighting device Reticle divergent beam
Virtual Image of collimator reticle Example: Measurement of distance setting Eyepiece Eyepiece Beamsplitter Objective Lens of sighting instruments Reticle 7 AUTOCOLLIMATORS
The beamsplitter mount together with the eye - the eyepiece reticle -which are seen superim - piece and the illumination device form a main posed-no displace ment occures. unit called: Autocollimator Head . If the reflector is tilted by an angle Ͱ , the re - A focusing autocollimator (finite disatnce set - flected beam is deflected by twice that angle ting) is similary built. The autocollimator head i.e. 2Ͱ. The reflected image is now laterally dis - containing the two reticles is now mounted on placed with respect to the eyepiece reticle. a draw out tube for focusing adjustment. The amount of this displacement „d“ is a func - tion of the focal OPERATING PRINCIPLE length of the autocollimator and the tilt angle
Autocollimation is an optical technique of pro - jecting an illuminated reticle to infinity and re - ceiving the reticle image after reflection on a of the reflector: d=2 Ͱ f. ( Ͱ in radians).The tilt flat mirror. The reflected image is brought to angle can be ascertained with the formula: the focus of the objective lens in which the eyepiece reticle is located. Thus the reflected d image of the collimator (illuminated) reticle Ͱ = and the eyepiece reticle can be simultane - 2f ously observed. When the collimated beam falls on a mirror which is perpendicular to where „f“ is the effective focal length EFL of beam axis, the light is reflected along the the autocollimator. Since the „f“ is a constant same path. Between the reflected image and of the autocollimator, the eyepiece reticle can be graduated in angle units and the tilt angle can be directly read off. Ͱ Reflector tilted
Collimator 2Ͱ reticle
d
Eyepiece reticle Objective lens 8 AUTOCOLLIMATORS
APPLICATIONS „go“ and „no go“ basis:
The applications of autocollimators are mainly A)-Wedge out of tolerance related to detection and measurement of B )-Wedge at the tolerance limit small angular displacements:
ANGLE MEASUREMENT OF OPTICAL COMPONENTS
Measurement of wedge and deflection angle
ABC
C)-Wedge in tolerance The deflection angle through the wedge Ͳ is given for small angles by:
d(n-1) ␥ = 2nf
W TRIOPTICS Optiangle W TRIOPTICS Autocollimators with pinhole reticles
Wedge Measurement of prisms angles
Wedge The range of applications in this field is very Mirror wide, only some fundamental set ups are pre - sented: Measurement of wedge and deviation angle with Autocollimators Internal angle of 90° prisms
The parallel beam emerging from autocollima - The reflected images from tor is reflected from both surfaces of the the 90° sides (which are in - wedge. The wedge angle ␦ is given by: sensitive against rotation around the roof edge) are d diplaced by an amount ͳ = „x“, if a de viation from 90° 2nf Collimator angle „ Ͱ“is present. where: d-displacement of the reflected image A presence of a dis place - n-refractive index of glass ment in height by the f-focal length of the autocollimator amount „y“ proves a pyra mid error „ ␥“as well: For fast measurement in optical manu-factur - X y ␥ = ing, the displacement „d“ for a given angle ␣ = 4nf 4nf tolerance and focal length „f“ can be calcu - lated and transfered to the illuminated reticle n-refractive index of glass Testing the internal in form of a pinhole, so that the acertaine - f-focal length of the auto - angle of prisms ment of the componenent can be made on a collimator
9 AUTOCOLLIMATORS
90°-Angle of Prisms b) Absolute mea surement of 45°-angle The Autocollimator is directed on one side of The 90° prism is put on a accurate flat surface. the 90°-angle. Two images will be produced The emerging beam of autocollimator is re - from both sides of the flected on the prism side and flat and returns prism. along the original path if the angle The internal reflec tion is exactly 90°. No displacement ap - within the prism will pears in the eyepiece. Deviations produce a displace - from 90° can be measured in the d ment „d“ de pen ding eyepiece. The error size: on the error of the 45° angle „ ␣“: d = Absolute Ͱ 4f measurement d of 45 -angle Ͱ = ± ͳ ∞ where f= focal length of autocollimator. The 4nf 2 sign -/+ of the error is determined by defocus - ing the eyepiece: moving the focal plane of where ␦ is the error of 90° angle.
Testing external 90•-angle of prisms Measurement of deviaton angle through prisms
The autocollimator is mounted on an adjust- able stand and can be tilted at any angle. Prism under Test A master prism is used to align the autocolli - mator to the mirror. The master prism is re - placed by the prism under test and the angle Flat difference is read off through the eye piece.
Example: Mea sure ment of deviation angle the eyepiece towards objective lens, a nega - through pen taprisms. tive error results if the distance „d“ becomes smaller.
45° Angl e of Prisms
a) Relative measure- ment of 45°-angle
To measure the 45° an - gle a master prism is Testing deviation angle used. Both prisms are through pentaprisms put on an accurate flat. The 90° angle of the prism under test must be checked first, since the Mirror error of this angle will in - fluence the measure - ment. Master prism Prism under test
Flat
10 AUTOCOLLIMATORS
CHECKING THE STRAIGHTNESS, SQUARENESS, The data can be entered into a computer to PARALLELISM AND FLATNESS produce a topography of the surface under test. The measurement of geometrical para meters B of mechanical parts is a typical application in E ma chine con struction, machine tools and aero space industry. A F Straightness Measurement H A mirror is either moved along the surface or mounted on a movable part of the machine D to be measured. The mirror is supported by G C balls or pins placed at a distance „b“ known Topography of a surface as „base length“. Deviations from straightness measured with Autocollimators will result in tilt of the mirror. Deviation from straightness are given by: Squareness Measurement
The procedure is similar with straightness mea - h = tan b surement. The measurement of the first surface Ͱ is made in the same way. Further an accurate pentaprism is used to transfer the autocolima - where: tor beam to the second surface. The straight - ␣ = mirror tilt ness of the second surface is measured. The b = base length data are then combined and corrected for the error of the pentaprism.
Squareness Measurement
Straightness Measurement Pentaprism with Autocollimators and Mirrors
When computerised or electronic autocolli- mators are used, readings can be automati - cally entered into computer. The software pro - CALIBRATION OF ROTARY TABLES gram permits straightness measurement on machine tool slideways, shafting, stages, rolls A reflecting polygon is put on rotary table or etc. dividing head under test. One side of the poly - gon is squared to the optical axis of the auto - Flatness Measurement collimator. The rotary table is set on zero. The rotary table with the polygon is rotated until The „base mirror“ is moved along diagonals next polygon side is square to autocollimator. and rectangles of the surface to be mea - The graduation of the table is compared with sured. Along each line a straightness measure - the expected angle. ment is carried out. The data from surface generators lines are used to calculate the Calibration of rotary Tables Polygon shape of the surface and the deviations from flatness.
Rotary table 11 AUTOCOLLIMATORS
Measurement of parallelism
The reference surface is aligned to the auto - collimator. The autocollimator is fixed in this position. The mirror is transfered to next surface which is aligned to the same autocollimator:
Autocollimator Example: Parallel alignment of bearings
R concave R convex Alignment of bearings additional Achromat Mirror
Reference of bearings Bearing Radius measurement with Autocollimators After the first bearing is squared to autocolli - mator, the mirror is transfered to the next bear - Both concave and convex surfaces can be ing. Deviation from parallelism is read off and measured. Spherical and cylindric surfaces the bearing aligned. can be measured as well. For convex surfaces the back focal length of the achromat must Example: Parallel alignment of rolls. be longer than the radius under test. A mirror mounted on a V-block is put on the For measurement of very long radii of curva - ture focusing auto collimators with draw out tubes can be used. Drawing out the tube with the autocollimation head, the autocollimator can be focused on the lens vertex and centre X of curvature. Since the nearest focus point for a focusing auto collimator is in a distance of Autocollimator V-Block mounted mirror Rolls Y some meters and the focusing on the vertex is practically difficult, following configuration is Alignment of rolls recom mended: first (reference) rolls. After adjustment, the mir - The lens under test is positioned with the vertex ror is square to autocollimator. The reference at a distance „f“ from autocollimator lens. roll is now aligned along X-axis of the autocolli - (f-effective focal length EFL mator. The mirror is transfered to the next rolls of the auto collimator). and the procedure repeated. Two spirit levels After focusing in the centre mounted on the V-block can be used for lev - of curvature of the lens, the elling the rolls. radius is given by:
MEASUREMENT OF OPTICAL PARAMETERS f2 Radius of curvature R = d Long radii Measurement Aditional achromats are mounted on the one end of the autocollimator tube. The illuminat - ed image of the autocollimator will be project - where d=dispacement of ed into the focal plane of the achromat. This the draw out tube read off image is reflected back from the vertex of the on its scale lens and the center of curvature of lens sur - face. The linear displacement between these two positions - where a sharp image is seen in f the eyepiece - gives the radius of curvature.
12 AUTOCOLLIMATORS
Measurement and Testing of Measurement of Centration errors Flange Focus The autocollimators can be used for mea - The Flange Focus known also as Flange Focal surement of centration errors in transmission Length (FFL) or Flange Focal Distance (FFD) is (see collimators applications) or in reflection : the distance between the locating surface of the lens mount and the image plane. Check - For measurement in reflection additional ing and setting of this distance is important es - achromats are attached to autocollimator. pecially for camera lenses. The film plane is re - The precision rotary holder is equiped with a placed by a mirror mounted on an adjustable chuck runing true to the rotation axis. The jig. spherical surface under test is located on the front surface of the chuck and held in contact by means of a small vacuum device. When ro - tated, the surface under test will reflect the im - age reticle. This image describes a circle with a diameter depending on the decentration size.
1 2 3 Illuminated Bright cross
Achromat
Lens under Focusing Autocollimator Graduated Reticle test Autocollimator with additional in Eyepiece achromat
Mirror Testing Flange Ultra-precision Adjustable rotary holder Jig Focal Distance
Collimator Cross Reticle Testing Flange Focal Distance Mirror For checking the FFD when the lens under test is set to infinity a standard autocollimator (1) is M used. For testing the lens set at other distances Measuring Centration in Tr ansmission as infinity is recommended: W TRIOPTICS Precision Rotary Holders • achromats attached to the autocollimator W TRIOPTICS OptiAngle for short distances (2) • a focusing autocollimator for infinity and long distances (3)
The reticle normally used is a Siemens Star. When the reticle is sharply seen at the given distance, the camera lens is correctly set. De - viations can be measured with an adjustable jig and the lens correspondingly adjusted.
13 COLLIMATORS
STANDARD COLLIMATORS COLLIMATORS Infinity Setting
PRODUCT RANGE AND SPECIFICATION
Type Code Focal Tube Free Field of Reticle length diameter Aperture View Adapter (mm) (mm) (mm)
COL 100-38 3-100-001 100 38,1 30 6°
COL 150-38 3-100-002 150 38,1 30 4°
COL 200-38 3-100-003 200 38,1 30 3°
COL 300-38 3-100-004
COL 300-38 RC 3-100-014 300 38,1 30 2°
COL 300-38 RC/FC 3-100-114
COL 300-57 3-100-005
COL 300-57 RC 3-100-015 300 57 50 2°
COL 300-57 RC/FC 3-100-115
14 COLLIMATORS
STANDARD COLLIMATORS (CONTINUED) Infinity Setting
Type Code Focal Tube Free Field of Reticle length diameter Aperture View Adapter (mm) (mm) (mm)
COL 500-57 3-100-006
COL 500-57 RC 3-100-016 500 57 50 1,2°
COL 500-57 RC/FC 3-100-116
COL 1000-115 3-100-008
COL 1000-115 RC 3-100-018 1000 115 100 0,6°
COL 1000-115 RC/FC 3-100-118
FOCUSING COLLIMATORS Finite Distance Setting
Type Code Focal Tube Free Field of Focusing Reticle length diameter Aperture View range Adapter (mm) (mm) (mm)
COL F300-38±10 3-101-004
COL F300-38±10 RC 3-101-014 300 38,1 30 2° ∞ to±3,6 m
COL F300-38±10 RC/FC 3-101-114
COL F300-57±25 3-101-005
COL F300-57±25 RC 3-101-015 300 57 50 2° ∞ to±3,6 m
COL F300-57±25 RC/FC 3-101-115
COL F500-57±50 3-101-006
COL F500-57±50 RC 3-101-016 500 57 50 1,2° ∞ to±5 m
COL F500-57±50 RC/FC 3-101-116
COL F1000-115±50 3-101-008
COL F1000-115±50 RC 3-101-018 1000 115 100 0,6° ∞ to±20 m
COL F1000-115±50 3-101-118
15 COLLIMATORS / TELESCOPES
Delivery Kit Optional Items
The Collimators are delivered as complete - • Power supply (Transformer) for illumination ready to work-instruments: • Holders • tube mounted objective lens • Other illumination devices (cold light source • reticle adapter incl. reticle 150W, halogene illumination 20W) • illumination with green filter and 5W/6V bulb Ordering Information The reticle adapters which might be included are: To order a collimator please specify:
Standard reticle adapter including 3-101-114 COL F 300 -38 ±25 RC/FC RET-XX one reticle at choice Code Focusing type RC-Reticle changer with 4 positions. Focal length Four reticles at choice are included. Tube Diameter Draw-out range Reticle Changer RC/FC-Reticle changer with 4 po - Filter changer sitions. Four reticle at choice are Reticle(s) type included. Filter changer with 4 po - sitions. One green and one white difuser are included. Further filters on request.
STANDARD TELESCOPES TELESCOPES Infinity Setting
PRODUCT RANGE AND SPECIFICATION
Type Code Focal Tube Free Field of Resolution length diameter Aperture View for reticle line width (mm) (mm) (mm) 10 µm
TEL 100-38 3-100-021 100 38,1 30 6° 20 arcsec TEL 100-38 R 3-100-031
TEL 150-38 3-100-022 150 38,1 30 4° 14 arcsec TEL 150-38 R 3-100-032
TEL 200-38 3-100-023 200 38,1 30 3° 10 arcsec TEL 200-38 R 3-100-033
TEL 300-38 3-100-024 300 38,1 30 2° 7 arcsec TEL 300-38 R 3-100-034
TEL 300-57 3-100-025 300 57 50 2° 7 arcsec TEL 300-57 R 3-100-035
TEL 500-57 3-100-026 500 57 50 1,2° 4 arcsec TEL 500-57 R 3-100-036
TEL 1000-115 3-100-028 1000 115 100 0,6° 2 arcsec TEL 1000-115 R 3-100-038
16 TELESCOPES
FOCUSING TELESCOPES Finite Distance Setting
Type Code Focal Tube Free Field of Resolution Focusing length diameter Aperture View for reticle range line width (mm) (mm) (mm) 10 µm
TEL F300-38±10 3-101-024 300 38,1 30 2° 7 arcsec ∞ to±3,6 m TEL F300-38±10 R 3-101-034
TEL F300-57±25 3-101-025 300 57 50 2° 7 arcsec ∞ to±3,6 m TEL F300-57±25 R 3-101-035
TEL F500-57±50 3-101-026 500 57 50 1,2° 4 arcsec ∞ to±5 m TEL F500-57±50 R 3-101-036
TEL F1000-115±50 3-101-028 1000 115 100 0,6° 2 arcsec ∞ to±20 m TEL F1000-115±50 3-101-038
17 TELESCOPES / AUTOCOLLIMATORS
Delivery Kit • Additional achromats in mount fitting on the objective lens tube The Telescopes designated by the code men - • CCD-camera attachment tioned in the table are delivered as complete -ready to work-instruments: Ordering Information To order a telescope please specify: • tube mounted objective lens • reticle adapter incl. reticle 3-100-036 TEL 500 -57 R (EPC25) RET-XX • standard eyepiece, magnification 16x Code Optional Items Focal length Tube Diameter • Eyepieces with magnification Right angle viewing 10x, 12x and 25x Non standard eyepiece • Holders Reticle(s) type • Eyepiece micrometers
AUTOCOLLIMATORS
PRODUCT RANGE AND SPECIFICATION
18 AUTOCOLLIMATORS
STANDARD AUTOCOLLIMATORS Infinity Setting
Type Code Focal Tube Free Field of Resolution Beam length diameter Aperture View/ for reticle Splitter in (mm) (mm) (mm) Measuring line width Mount Range 10 µ with reticles
ACM 100-38 3-100-061 100 38,1 30 6°/3° 10 arcsec
ACM 150-38 3-100-062 150 38,1 30 4°/2° 7arcsec
ACM 200-38 3-100-063 200 38,1 30 3°/1,5° 5 arcsec
ACM 300-38 3-100-064
ACM 300-38 RC 3-100-094 300 38,1 30 2°/1° 3,5 arcsec
ACM 300-38 RC/FC 3-100-194
ACM 300-57 3-100-065
ACM 300-57 RC 3-100-095 300 57 50 2°/1° 3,5 arcsec
ACM 300-57 RC/FC 3-100-195
ACM 500-57 3-100-066
ACM 500-57 RC 3-100-096 500 57 50 1,2°/0,6° 2 arcsec
ACM 500-57 RC/FC 3-100-196
ACM 1000-115 3-100-068
ACM 1000-115 RC 3-100-098 1000 115 100 0,6°/0,3° 1 arcsec
ACM 1000-115RC/FC 3-100-198
Autocollimator with Reticle Changer (RC) and Filter Changer (FC)
The reticle and filter changer feature 4 locati - ons for reticles and filters respectively
19 AUTOCOLLIMATORS
AUTOCOLLIMATORS WITH EYEPIECE MICROMETERS Infinity Setting
Type Code Focal Tube Free Measuring Resolution length diameter Aperture range / for Micro/ (mm) (mm) (mm) Microme - Digi ter range (arcsec)
ACM 200-38 Micro 3-100-073 200 38,1 30 1,5°/0,6° 2,5
ACM 300-38 Micro 3-100-074 1,7/ ACM 300-38 Digi 3-100-084 300 38,1 30 1°/0,4° 0,35
ACM 300-57 Micro 3-100-075 1,7/ ACM 300-57 Digi 3-100-085 300 57 50 1°/0,4° 0,35
ACM 500-57 Micro 3-100-076 1/ ACM 500-57 Digi 3-100-086 500 57 50 0,6°/0,23° 0,2
ACM 1000-115 Micro 3-100-078 0,5/ ACM 1000-115 Digi 3-100-088 1000 115 100 0,3°/0,11° 0,1
Autocollimator with eyepiece micrometer Micro-Mechanical Micrometer Digi-Digital Micrometer
20 AUTOCOLLIMATORS
FOCUSING AUTOCOLLIMATORS Finite Distance Setting
Type Code Focal Tube Free Field of Focusing Beam length diameter Aperture View/ Range Splitter in (mm) (mm) (mm) Measuring Mount Range with reticles
ACM F 300-38±10 3-101-064
ACM F 300-38±10 RC 3-101-094 300 38,1 30 2°/1° ∞ to ±3,6m
ACM F 300-38±10 RC/FC 3-101-194
ACM F 300-57±25 3-101-065
ACM F 300-57±25 RC 3-101-095 300 57 50 2°/1° ∞ to ±3,6m
ACM F 300-57±25 RC/FC 3-101-195
ACM F 500-57±25 3-101-066
ACM F 500-57±25 RC 3-101-096 500 57 50 1,2°/0,6° ∞ to ±5m
ACM F 500-57±25 RC/FC 3-101-196
ACM F 1000-115±25 3-101-068
ACM F 1000-115±25 RC 3-101-098 1000 115 100 0,6°/0,3° ∞ to ±20m
ACM F 1000-115±25 RC/FC 3-101-198
Focusing Autocollimator with Reticle Changer (RC) and Filter Changer (FC)
21 AUTOCOLLIMATORS
FOCUSING AUTOCOLLIMATORS WITH EYEPIECE MICROMETERS FIinite Distance Setting
Type Code Focal Tube Free Focusing Measuring Resoluti - length diameter Aperture range range/ on (mm) (mm) (mm) Microme - (arcsec) ter range
ACM F 300-38±10 Micro 3-101-074 1,7 300 38,1 30 ∞ to ±3,6m 1°/0,4° ACM F 300-38±10 Digi 3-101-084 0,35
ACM F 300-57±25 Micro 3-101-075 1,7 300 57 50 ∞ to ±3,6m 1°/0,4° ACM F 300-57±25 Digi 3-101-085 0,35
ACM F 500-57±50 Micro 3-101-076 1 500 57 50 ∞ to ±5m 0,6°/0,23° ACM F 500-57±50 Digi 3-101-086 0,2
ACM F 1000-115±50 Micro 3-101-078 0,5 1000 115 100 ∞ to ±20m 0,3°/0,11° ACM F 1000-115±50 Digi 3-101-088 0,1
LARGE FIELD AUTOCOLLIMATORS providing a significant increase of field of view. Equiped with suitable reticles the Large Field To meet customer requirements for testing op - Autocollimators give for the same focal length tical instruments with large field of view, TRIOP - a field of view larger by 50-100% compared TICS developed a new and unique line of au - with the standard line. tocollimators, collimators and telescopes
Type Code Focal Tube Free Field of Resolution length diameter Aperture View/Mea - for reticle (mm) (mm) (mm) suring ran - line width ge 10 µm (arc sec)
ACM 300-57 LF 3-100-265 300 57 50 3°/1,5° 3,5
ACM 500-57 LF 3-100-266 500 57 50 2,4°/1,2° 2
ACM 1000-115 LF 3-100-268 1000 115 100 0,9°/0,45° 1
22 AUTOCOLLIMATORS
LED-AUTOCOLLIMATORS humidity etc). The LED-Illumination enable a practically unlimited life period. The power The LED-Autocollimators are light, compact supply is possible at 12V or 24V or ensured by a Autocollimators made according MIL-Stan - battery. dards (high and low temperature, shocks, hu -
Type Code Focal Tube Free Field of Resolution Beam length diameter Apertu - View/ for reticle Splitter in (mm) (mm) re Measuring line width Mount (mm) Range 10 µ with reticles
ACM 140-40 LED 3-100-362 140 40 30 4°/2° 7 arcsec
Delivery Kit Optional Items
The Autocollimators are delivered as com - • Power supply (Transformer) for plete -ready to work-instruments including llumination following parts: : • Eyepieces with magnification 10x, 12x and 25x • Tube mounted objective lens • Holders • Beam splitter mount with reticles and • Other illumination devices (cold light eyepiece micrometers* source 150W, halogene illumination • Eyepiece 20W) • Illumination device with green filter and • Additional achromats in mount fitting on 5W/6V bulb the objective lens tube *for Autocollimators with eyepiece micrometers only • CCD-camera attachement • Mirrors
23 AUTOCOLLIMATORS DIOPTER TELESCOPES
The available Beam Splitter Mounts are of different types : DIOPTER TELESCOPES Standard Beam Splitter Mount including two reticle at choice Operating Principle and Applications RC -Beam Splitter Mount with il - luminated Reticle Changer (4 The Diopter Telescope or Dioptometer is a fo - positions for collimator reticles) cusing telescope measuring the power of lens - and one eyepiece reticle. Five es in diopters. The results of the measurement reticles at choice are included. can be read off on a graduated scale.
RC/FC -Beam Splitter Mount The Diopter Telescopes have wide appli ca - with illuminated Reticle Chang - tions in the field of optical testing. Most impor - er. Filter Changer with 4 posi - tant applications include: tions. One green and one white di fuser are included. Fur - • Testing diopter graduation, focusing range ther filters on request. and infinity („zero“) setting of eyepieces. • Measurement of power of lenses Large Field Beam Splitter Mount • Testing the astigmatism of telescopes including two reticle at choice • Measuring the field curvature of lenses
The measurements with Diopter Telescopes in - clude following steps:
• the eyepiece of the Diopter Telescope is Ordering Information rota ted until its reticle is seen sharp and To order an autocollimator please specify: clear. The focusing ring is set to zero. • the Diopter Telescope is placed with its 3-101-096 ACM F 500- 57 ±50 RC RET-XX supporting flange on the eyepiece or the telescope under test. The eyepiece of the Code telescope under test is rotated until its reticle Focusing type is seen sharp and clear. This is the zero Focal length setting of the eyepiece. Tube Diameter • Further measurements are made by Draw-out range rotating the eye- Reticle Changer piece under test to Reticle(s) type the next graduation and focusing the Dioptometer corres - pondingly. The 3-100-088 ACM 1000 - 115 Digi RET-XX reading is done H directly on the Code diopter graduated Focal length scale. Tube Diameter Eyepiece Digital Micrometers (2 pcs) Reticle(s) type 48 hexagon
24 DIOPTER TELESCOPES
Product Range and Specification The size of the smallest division is important for The supporting flange of TRIOPTICS Dioptome - accurate reading. All TRIOPTICS Dioptometers ters is hexagonal (48 mm wide) and remov - (except for 3-100-298) have large graduations able. After removing the flange, the connec - and permit easy reading and accurate esti - tion thread M 38x1 mm can be used to attach mation at half of the smallest division. The eye - the Dioptometer to custom holders or other pieces are interchangeable and can be devices. adapted to custom needs.
Type Code Focal Field of Height H Measuring Graduation length View (mm) range / (Diopter) (mm) (Diopter)
DPT-5/+5 3-100-295 75-92 -5 to +5 0,2
DPT-3/+1 3-100-296 82-90 -3 to +1 0,1 40 13° DPT-1/+3 3-100-297 77-83 +3 to -1 0,1
DPT-5/+5 3-100-298 75-92 -5 to +5 0,1
• Measurement of the diameter of exit pupil DYNAMETER of optical instruments • Checking the distance between eyepiece The Dynameter is used in optical testing for: and exit pupil • Measurement of magnification of telesco- pes
Type Code Magnification Distance Diameter Reticle range range
DYN 90 3-100-291 12 x 90mm, div. 10mm 10mm with 0,5mm div. 0,1mm
25 COLLIMATORS AND TELESCOPES
SQUARE BODY TELESCOPE AND COLLIMATOR
The collimators and telescopes with square the standard eyepiece EPC 00-15 (magnifica - body have a cross reticle accurately aligned tion 16x). The collimator includes the standard to the body flat surface i.e.mechanical axis of illumination ILL 5W-6V. Further eyepieces and the instrument. The square body is used as a illumination devices of OPTITEST are available reference surface in solving alignment pro - on request. blems. The telescope is normally equiped with
Type Code Focal Field of Free Magni- Alignment length View Aperture fication optical/ (mm) (mm) mechani - cal axis
TEL 150-40x40 3-100-030 150 4° 30 9,5 x >10arc sec
COL150-40x40 3-100-010 150 4° 30 - >10arc sec
26 TUBE MOUNTED OBJECTIVE LENSES
• setting up a modified instrument is easy and OPTO-MECHANICAL ASSEMBLIES fast, since no adjustments are necessary. AND COMPONENTS • the OPTITEST system is continuously develo - ped, so that new components and features (e.g. image processing) enhance the utility of The OPTITEST system is configurated from basic existing instruments. opto-mechanical components which are mo - dular, compatible to each other and common Description and technical data of the opto- to most of the instruments. mechanical assemblies and components of The opto-mechanical components are specifi - OPTITESt are presented on the following pa - cally designed to allow instruments reconfigu - ges: ration on site without any adjustments. The ad - vantages of this modular approach are signifi - TUBE MOUNTED OBJECTIVE LENSES cant from point of view of flexibility and cost efficiency: The tube mounted objective lenses represent one of the main components of OPTITEST Auto - • to adapt the instruments to new applicati - collimators, Collimators and Telscopes. Typical ons might be sufficient to buy some compo - features of these basic elements are: nents only, avoiding the costly procurement of • barrel made of hardened steel with hard a complete new instrument. chrome surface
27 TUBE MOUNTED OBJECTIVE LENS
• front end surface accurately square to opti - • This position which correspondes to the „Infi - cal axis nity Setting“ is engraved on the scale of the • front end surface with female thread focusing device as „0“. M35x0.75 mm (for barrels D 38 mm) and M53x0.75 (for barrels D 57 mm) to allow ad - • Moving the reticle away from objective lens dition of accessories (achromats in mount, will result in a convergent beam. The image of beam deflecting mirrors atc.). Similarly with the reticle is real and projected at a finite di - the instruments described before, the tube stance. This region of the scale is marked as mounted objective lenses are available in „+“ focusing range. two different types:
TUBE MOUNTED OBJECTIVE LENS D 38.1-0.0127 Infinity setting M 35 X 0,75 M 35 X 0,75 Type Code Focal length Length Free Diameter L aperture L (mm) (mm) (mm) D 57.145 ±0,02 OBJ-100-38 3-200-001 f = 100 D 38 70 30 M 53 X 0,75 M 35 X 0,75 OBJ-150-38 3-200-002 f = 150 D 38 112 30 L OBJ-200-38 3-200-003 f = 200 D 38 163 30 Adapter for LF ACH M 48 X 0,75 OBJ-300-38 3-200-004 f = 300 D 38 265 30 D 115±0,02 OBJ-300-57 3-200-005 f = 300 D 57 273 50
M 106 X 0,75 M 35 X 0,75 OBJ-500-57 3-200-006 f = 500 D 57 464 50
OBJ-1000-115 3-200-008 f = 1000 D 115 980 100 L
• The first type represents objective lenses mo • Moving the reticle toward the objective lens unted in barrels having fixed length. The bar will result in a divergent beam. If the beam rel length is designed such, that when atta diverges, a virtual image is produced at the ching the reticle adapter to the barrel, the aparent crossing point of the beam rays.This reticle is in the focal plane of the objective point is also located at a finite distance. This lens and the emerging beam is parallel. The region of the scale is marked as „-“ focusing reticle image is projected to infinity. This type range. of adjustment is known as „Infinity Setting“. This type of adjustment is known as • The second type of objective lenses is simi „Finite Distance Setting“. larly built, however, a focusing device atta ched to the tube (barrel) containing the ob jective lens, allow for variation of the di stance between the reticle and lens. The fo cusing range is normally selected so that in the mid position the reticle is placed in the focal plane of the lens.
28 TUBE MOUNTED OBJECTIVE LENS
TUBE MOUNTED OBJECTIVE LENSES
WITH FOCUSING DEVICE D 57.145 ±0,02 Finite Distance Setting M 35 X 0,75 M 35 X 0,75
Type Code Focal length Length Free L D 115 0,02 Diameter/Draw L (mm) aperture ± Out (mm) (mm) M M 35 X 0,75
L OBJ-F300-57 3-201-005 f = 300 D 57±25 259 50
OBJ-F500-57 3-201-006 f = 500 D 57±50 469 50
OBJ-F1000-115 3-201-008 f = 1000 D115±50 948 100
ACCESSORIES for tube mounted objective lenses
For the tube mounted objective lenses of the OPTITEST line a large selection of accessories is available:
1
2
9 8 6 3 4 7 5
5- Micro-objective 1- Tube mounted objective lens D 38mm 6- Dual Adapter 2- Front cover ring 7- Mounted deflecting mirror 3- Achromat in mount 8- Iris diaphragm in mount 4- Adapter for micro-objectives 9- Laser Alignment Attachment
29 OBJECTIVE TUBE ACCESSORIES
ACHROMATS IN MOUNT jective lens tube, the achromats in mount can be directly screwed on it. The parallel beam The OPTITEST achromats are highly corrected emerging from objective lens tube is now fo - objective lenses mounted in a cell having a cused in the focal plane of the achromat. Ty - mechanical interface (thread M 35x0.5 mm) pical applications for this set up: fitting to the end of the objectiv lens barrel. The achromats in mount can be use for gene • radius measurement of spherical ral purpose measurements or in connections and cylindrical surfaces (autocollimators) with the OPTITEST autocollimators, collimators • reading or observation of processes and telescopes. (telescopes) After removing the front cover ring of the ob • measurement of FFD(flange focal
distance) of camera lenses set to short distances (autocollimators) Type Code Focal length Free • MTF measurements, etc. Diameter (mm) aperture The range of achromats in mount (mm) is presented bellow:
AMT 50-38 3-200-070 50/38 18 Further achromats as AMT 140-38, AMT 275-40, etc. can be delivered AMT 100-38 3-200-071 100/38 30 on request.
AMT 150-38 3-200-072 150/38 30
AMT 200-38 3-200-073 200/38 30
AMT 300-38 3-200-074 300/38 30
AMT 500-38 3-200-077 500/38 30
AMT 300-57 3-200-075 300/57 50
AMT 500-57 3-200-076 500/57 50
AMT-1000-115 3-101-078 1000/115 100
30 OBJECTIVE TUBE ACCESSORIES
DUAL ADAPTER IRIS DIAPHRAGM
The Iris Diaphragm as - sembly contains an iris diaphragm adjustable between 2...30 mm. The Iris Diaphragm as - sembly can be atta - ched to any tube munted objective lens of OPTITEST.On the other side the Iris Dia - phragm assembly has a mechanical interfa - ce fitting to :
• achromat mount of the Dual Adapter
• micro-objectives ad apter • achromats in mount of OPTITEST line
The Dual Adapter assembly incorporates: The Iris Diaphragm can be used to observe eit - her the autocollimation image or the image • a Iris Diaphragm in mount with a connection on a surface at finite distance. It can be used thread to the end of objective lens barrel as well to adjust the illumination intensity when • an achromat in a mount which has a circu measuring samples with different reflectivities. lar (ring shape) aperture around the achro mat. ADAPTER FOR MICRO-OBJECTIVES
When mounted on an autocollimator, the The Adapter for Micro-objectives enables the Dual Adapter allows for simultaneous observa - fitting of different micro-objectives to the ob - tion of the autocollimation image (through the jective lens barrel of the Autocollimator. In this circular aperture around the achromat) and way it is possible to focuss the autocollimator direct viewing of the surface structure beam on a surface placed at the working di - (through the achromat) of the plate placed in stance of the microobjective. the front of the autocollimator. For viewing on - ly, the built in iris diaphragm is used. Closing the diaphragm covers the autocollimation be - am, so that observation of the surface through the achromat is possible. Applications include the alignment of wafers and lens systems.
The working distance between the Autocolli - mator and the surface under test depends on the back focal length (BFL) of the achromat mounted in the Dual Adapter. The range of achromats used in the Dual Adapter is from 10 to 200 mm. Further achromats for specific ap - plications are available on request.
31 OBJECTIVE TUBE ACCESSORIES
The Microobjectives have different magnifica - trically with the mechanical interface to ob - tions and working distances to suit many appli - jective lens tube. The visible laser beam helps cations : observation of structure of surfaces, to align quickly the mirror or the autocollima - measuring of radii of curvature of spherical sur - tor. The device is supplied complete including faces, measuring of BFL, etc. power supply.
DEFLECTION MIRROR IN MOUNT
The Deflection Mirror in Mount is used to devia - te the beam of autocollimators, collimators and telescopes by 90°. For this a mirror is mo - unted at an angle of 45° related to the optical axis of the instrument. The mount of the deflec - tion mirror can be attached to the end of the objective lens tubes. The Deflection Mirror in Mount increases the versatility of autocollimators and other instru - ments since these can be used for measure - ments in horizontal and vertical directions with - out exchanging the instrument holder.
LASER ALIGNMENT ATTACHMENT Laser Alignment Attachment D 57 mm
The alignment of autocollimators to a mirror might be difficult, if the distance is long and the instrument has a long focal length (i.e. small field of view). The TRIOPTICS Laser Align - ment Attachment can be easily mounted di - rectly on the end of the objective lens barrel. A small laser diode is mounted inside concen -
Type Code Technical Data
Outer dia. 38 mm,Achromat dia 8 mm, Dual Adapter DA 8-38 3-200-026 Diaphragm 2-30 mm Outer dia. 38 mm,Achromat dia 10 mm, Dual Adapter DA 10-38 3-300-027 Diaphragm 2-30 mm
Range 2-30 mm connection threads Iris Diaphragm ID 2-30 3-300-025 M 35 x 0,5 mm Outer dia. 38 mm thread M 35 x 0,5 mm/ Adapter for Microobjectives AMO 38 3-300-070 thread 4,5“x 1/36“ Magnification 3,2 X Microobjective Micro 3,2 3-300-073 Working Distance 31 mm Magnification 6,3 X Microobjective Micro 6,3 3-300-074 Working Distance 12 mm Magnification 10 X Microobjective Micro 10 3-300-075 Working Distance 7,5 mm
Deflection Mirror DMF 38 3-300-091 Mirror dia 36 mm, / 6
Deflection Mirror DMF 57 3-300-092 Mirror dia 75 mm, / 5
Laser Alignment Attachment LA 57 3-300-095 Max. distance: 25 m
32 RETICLE ADAPTERS
RETICLE ADAPTERS Eyepiece A Reticle Adapter is basically an assembly containing : Reticle Adapter • one reticle in mount when designated for collimators and telescopes To objective • a beamsplitter and two reticles in mount for lens use in autocollimators barrel • mechanical interface for connection to tu be mounted objective lenses (M35x0.75mm) • mechanical interface for connection with Illumination device eyepieces and illumination devices (M27x0.5mm).
RETICLE ADAPTER FOR AUTOCOLLIMATORS BEAMSPLITTER MOUNTS
The Beamsplitter Mount (BSP) contains a be - amsplitter and two reticles in mount for use in autocollimator. The Beamsplitter Mounts with the eyepiece and illumination forms an assem - bly known as Autocollimation Head. Some Au - tocollimation Heads (ACH) are illustrated be - low:
Eyepiece RETICLE ADAPTER FOR COLLIMATORS AND TELESCOPES Illumination device
The Reticle Adapters for collimators and teles - To copes as well as the Beamsplitter Mounts for objective autocollimators come standard with dust co - lens barrel vers when ordered separately.
Beamsplitter Mount
Type Code No. of reticles Technical Data
RA 3-200-041 1 Standard Reticle Adapter. It contains one fixed reticle.
90°-Standard Reticle Adapter. A beamsplitter is used for 90°-RA 3-200-042 1 beam deviation . Reticle Adapter with two micrometers. Range for reticle RA Micro 3-200-043 1 displacement: 4mm. Resolution: 0,005 mm Reticle Adapter with Reticle Changer. The four reticles posi - RA-RC 3-200-045 4 tioned by rotating indexing wheel Reticle Adapter with Reticle Changer and Filter Changer. RA-RC/FC 3-200-046 4 The 4 reticles and 4 filters positioned by rotating indexing wheels. Standard included: one green filter, one diffuser. Two filter locations empty. Filter dia. 20 mm
33 AUTOCOLLIMATION HEADS
Autocollimation Heads From left: Standard Autocollimation Head (ACH) 90°-viewing ACH with eyepiece micrometers ACH with Reticle and Filter Changer Standard Autocollimation Head (ACH) direct viewing
Large Field ACH / Standard ACH Beamsplitters in Mount
Type Code No. of Technical Data reticles
Standard Beamsplitter Mount with Straight or 90°-viewing. BSP 3-200-031 2 It contains two fixed reticles. Large Field Beamsplitter Mount with straight or 90°-viewing. LF BSP 3-200-231 2 It contains two fixed reticles Beamsplitter Mount with two micrometers. Range for re - BSP Micro 3-200-033 2 ticle displacement: 4mm. Resolution: 0,005 mm. With straight or 90°-viewing. It contains 1 reticle transleatable in two axes and one fixed reticle (collimator reticle) Beamsplitter Mount with two digital micrometers. Range for reticle displacement: 4mm. Resolution: 0,001 mm. With BSP Digi 3-200-034 2 straight or 90°-viewing. It contains 1 reticle transleatable in two axes and one fixed reticle (collimator reticle) Beamsplitter Mount with Reticle Changer. It contains 1 BSP-RC 3-200-035 5 eyepiece reticle and 4 collimator reticles. The 4 reticles positioned by rotating indexing wheel Beamsplitter Mount with Reticle Changer and Filter Chan - ger. It contains 1 eyepiece reticle and 4 collimator reticles. BSP-RC/FC 3-200-035 5 The 4 reticles positioned by rotating indexing wheels. Stan - dard included: one green filter, one diffuser. Two filter lo - cations empty. Filter dia. 20 mm
34 EYEPIECES
EYEPIECES 15 is the standard fit for OPTITEST instruments. • Magnification of the eyepiece: 250 M = f eyepiece
• Magnification of autocollimators and teles copes f lens EPC 00-15 (standard) M = EPC 00-20 f eyepiece EPC 00-25 The eyeshield is removable. After removal, the The range of eyepieces included in the OPTI - thread of the eypiece tube (M 28x0.75) can TEST line provides capabilities for many appli - be used to attach a CCD-camera adapter. cations requiring different parameters as : CCD-CAMERA ADAPTER • large field of view • large magnification This device includes highly corrected imaging • facilities for attaching CCD-cameras, etc. optics which transfer the reticle image from
All the eyepiece are focusable and have a the eyepiece on CCD-array. The Camera Ad - long eyepoint which is convenient for spec - apter has a mechanical interface to CCD-Ca - tacle lens wearers. A diopter scale can be mera (C-mount) and a threaded mount used for various measurements like astigmatis - (M28x0.75) to eyepiece. The imaging optics mus, flatness errors etc. The eyepiece EPC 00- are interchangeable (factory assembly). Eyepieces
Type Code Focal Magnifi - Linear Diopter Connection length cation Field Scale Thread (mm)
EPC 00-10 3-200-050 10,3 25 x 10 ±5 dpt. M 27x0,5
EPC 00-15 3-200-052 15,8 16 x 10 ±5 dpt. M 27x0,5
EPC 00-20 3-200-054 20,7 12 x 15 ±5 dpt. M 27x0,5
EPC 00-25 3-200-056 25,0 10 x 17 ±5 dpt. M 41x0,75 35 ILLUMINATION
A complete Video Attachment includes: Type Code • CCD-Camera-Adapter • CCD-Camera (standardly 2/3“monochro Video Attachment 3-300-060 me. On request other types) complete • TV-Monitor, monochrome, CCIR • BNC-Cable to connect camera and monitor CCD-Camera Adapter 3-300-061 • Power supply for camera with imaging optics
ILLUMINATION DEVICES
Standard illumination and Illumination for Lar - ge Field Instruments
STANDARD ILLUMINATION.
The standard illumination device of OPTITEST normally includes:
• condenser optics • a green filter with a ground side working as difusser • illuminating lamp in socket • connection cable to power supply. Length 1 m.
The tube containing the filter is directly scr - ewed on the illumination housing. The stan - dard green filter can be easily exchanged if necessary.
Standard illumination
Type Code Filter Diameter Connection To be used (mm) thread
Standard ILL 5W-6V 3-200-150 20 M 27 x 0,5 Instruments Large Field LF-ILL 5W-6V 3-200-151 20 M 41 x 0,75 Instruments
The Power Supply for standard illumination is an adjustable transformer which allow for ad - apting the light intensity to the specific appli - cation. The transformers include the powerca - ble. Transformers
Type Code Adjustment Power range Voltage
Trafo 220 3-200-153 2 - 6V 220V / 50 Hz
Trafo 110 3-200-154 2 - 6V 110V / 50 / 60 Hz
36 ILLUMINATION
FURTHER ILLUMINATIONS
In some applications the light intensity of the standard illumination might not be sufficient. This is the case in procedures requiring auto - collimation with a small (uncoated) reflector or long distances between reflector and auto - collimator. A need for more light is also related to collimators with very long focal length or ali - gnment of complex optical systems. For these or similar applications following illumination de - vices with halogene lamps are recommen - ded. Power Supply for Standard Illumination Cold Light Source with Fiber Optic Guide The fiber optic guide of the Cold Light Source Halogene Illumination with Power Supply with an effective diameter of 8 mm has an ad - apter fitting into the housing of standard illumi - nation, so that the filter and condenser of standard illumination are further actively used with this light source.
The Halogene Illumination HAL 20W is deliver - ed with own filter tube and green filter. When exchanging HAL 20W against the standard illu - mination, the filter tube of standard illuminati - on must be removed and its own filter moun - ted instead.
Type Code Adjustment Features Power range Voltage
continuous Cold Light Source, com - CLS 150 W/220V 3-200-158 Range gra plete incl. power supply, 220V / 50 Hz fuated in 50 halogene lamp 150W,re - divisions flector optimised for ran - ge approx. 400-800nm, flexible fiber optic guide 1m length, adapter fitting into the housing of stan - dard illumination
continious As above, however po - CLS 150W/110V 3-200-159 Range gra - wer supply voltage 110V 110V / 50 / 60 Hz fuated in 50 divisions
continious Halogene lamp 20W in HAL 20 W 3-200-160 10 steps housing, filter tube with 220/110V/50/60 Hz green filter fitting on the housing of standard illu - mination
37 RETICLES
RETICLES. 1. CROSS LINE (HAIR) RETICLES
The OPTITEST line offers a comprehensive choi - APPLICATIONS ce of reticles to meet any conceivable appli - cation. Custom glass reticles made to your • Alignment of mirrors and optical systems specification also can be supplied in our instru - • Precision measurement of angles in combi ments. The reticle combination used in an opti - nation with eyepiece micrometers cal instrument is depends on application and • Radius measurement of cylindric surfaces the experience of the user. However some ge - • Measurement of centration errors neral rules and recommandations presented • Ideal for PC-controlled angle measurements below are intended to help the user to solve this problem. W TRIOPTICS Optiangle General rules and recommandations RECOMMANDATIONS
• A bright cross reticle is especially suitable for • Eyepiece reticles: double cross line applications where the light conditions are not optimal e.g. small reflector for autocolli • Collimator reticles: single cross line mation, long distance between autocolli mator and reflector, AR-coated surfaces, • Prefered combinations: etc. For any other applications a dark cross reticle is prefered. RET-24/RET-02 RET-24/RET-12 • For same application, the use of instruments RET-24/RET-13 with longer focal length (smaller numerical RET-02/RET-12 aperture) will worsen the light conditions. RET-22/RET-01(f <300 mm) Therefore always use cross reticles with thicker lines when focal length increases.
• The accuracy of reading increases when between two superimposed reticles (in sym metrie position) a small bright gap is left. The thickness of a dark/bright cross or a single/double cross combination should be selected correspondingly. Dark Cross Reticle Bright Cross Reticle • The use of bright cross reticles (known also (Positive Type) (Negative Type) as dark field reticles) in eyepiece is not re commended since the observation of the collimator reticle is difficult.
• In the instruments with 90°-viewing using re ticles with scales, the correct (errected) po sition of the scale numbers depends on the working position i.e. horizontal or vertical as sumed by the assembly of the instrument. Double Cross Reticle Therefore the working position of these in (Positive Type) struments must be specified when ordering.
Important! Read always our reccomandations as follows :
• first reticle is eyepiece reticle • second reticle is collimator reticle.
38 RETICLES
Single Cross Line (Hair) Reticles 2. RETICLE WITH ANGLE GRADUATED SCALES
APPLICATIONS Code Type Line with Dia (mm) (mm) • Tilt measurement in conjunction with a re flector attached to the object under test • Angle measurement of optical components RET-01 0,010 12 like prisms, windows, etc.
RET-02 0,020 12 W TRIOPTICS AUTOCOLLIMATORS
RET-04 0,040 12 RECOMMANDATIONS
• Eyepiece reticles: angle graduated scales RET-82 0,020 25 • Collimator reticles: single cross line : RET-02 (RET-01, RET-12, RET-04) RET-85 0,050 25 • Prefered combinations: Angle graduated scales/RET-02 RET-11 0,010 12
RET-12 0,020 12 70' 60' 50' 40' RET-13 0,030 12 30' 70' 60' 50' 40' 30' 20' 10' 20' 10'
RET-15 0,050 12 10' 20' 10' 20' 30' 40' 50' 60' 70' 30' 40' RET-86 50' 0,020 25 60' 70'
RET-87 0,050 25 RET 30
Double Cross Line (Hair) Reticles
50' 45' Code Type Clear Spa - Dia (mm) 40' ce (mm) 35' 30' 25' 20' 15' RET-22 0,020 12 50' 45' 40' 35' 30' 25' 20' 15' 10' 5' 10' 5'
5' RET-24 10' 5' 10' 15' 20' 25' 30' 35' 40' 45' 50' 0,040 12 15' 20' 25' 30' RET-26 0,060 12 35' 40' 45' 50' RET 31 39 RETICLES
2. RETICLE WITH ANGLE GRADUATED SCALES (continued)
30'
Angle graduated scales 25'
20' Code Range of Smallest Estimation Designed 15' graduation division for 10' 5'10'15'20'25'30' instrument 5'
RET-30 ±75 min 60 sec 20 sec ACM 100 5' 30' 25' 20' 15' 10' 5' 10' RET-31 ±50 min 30 sec 15 sec ACM 150 15' 20'
25'
RET-32 ±30 min 30 sec 10 sec ACM 200 30'
RET-33 ±25 min 30 sec 10 sec ACM 300 RET 32 RET-35 ±12,5 min 15 sec 5 sec ACM 500
RET-39 ±7,5 min 5 sec 1,5 sec ACM 1000
25' 20' Reticle with special angle graduations 15' 25' 20' 15' 10' 5' 10' RET-40 ±20 1 0,5 ACM 100 5' 0,2 RET-42 ±12 0,5 ACM 200 5' 10' 5' 10' 15' 20' 25' 15' 20' 25'
RET 33
12,5' 10' 7,5' 5' 12,5' 10' 7,5' 5' 2,5' 2,5'
2,5' 2,5' 5' 7,5' 10' 12,5' 5' 7,5' 10' 12,5'
RET 35
40 RETICLES
3. RETICLE WITH ANGLE TOLERANCES
APPLICATIONS
• Fast checking of wedges and plane-parallel plates. Each pinhole allows for checking two angles given by: • diameter of the pinhole • cross size (twice the pinhole diameter). These reticles are recommended for testing of large production quantities on „go“ „no RET 50 go“ basis. • Alignment of optical systems • Measurement of radii of curvature
RECOMMANDATIONS
• Eyepiece Reticle: RET-50, RET, 51 • Collimator Reticle:pinhole with cross RET- 53...59
Prefered Combinations
• RET-50/RET-59 • RET-51/RET-53...RET-58 RET 53...59
Reticles with Angle tolerances
Reticles with angle tolerances
Code Type Range of Designed for graduation instrument
RET-50 9 concentric circles graduated for TILT 1, 2, 3, 4, 5, 7,5, 10, ACM 200 measurement (positive type) 15, 30, min
RET-51 9 concentric circles graduated for WEDGE 1, 2, 3, 4, 5, 7,5, 10, ACM 200 measurement (positive type) 15, 30, min
RET-53 pinhole with cross for WEDGE measurement 30/60 ACM 300 (negative type)
RET-54 1/2 min
RET-55 pinhole with cross 1,5/3 min for TILT RET-56 measurement 2/4 min (negative type) RET-57 2,5/5 min
RET-59 30/60 sec ACM 200
41 RETICLES
4. RESOLUTION TESTS
Resolution Tests
Code Type Diameter (mm)
RET-61 Siemens Star 2 x 36 segments Resolution 12 8,7 µm
RET 62 Siemens Star with crossline 0,02 mm 2x30 12 segments Resoluton10,4µ RET 61 RET 63 USAF Resolution Test lpm (line pairs per 12 mm) 0,504...0,0044
RET-67 Siemens Star 2 x 36 segments Resolution 25 8,7 µm
RET-68 USAF Resolution Test lpm (line pairs per 25 mm) 0,504...0,0044
Further resolution tests are available on request
APPLICATIONS
• Testing image quality of optical systems RET 62 • Adjustment and setting of optical instru ments
RECOMMANDATIONS
• The resolution tests are always used as colli mator reticle. When used in autocollimators, the eyepiece reticle should be a single cross.
5. SCALES IN MM AND FURTHER RETICLES USED IN OPTICAL TESTING
APPLICATIONS RET 63
• Measurement of optical parameter : focal length : RET-73, RET-74, RET-91 RECOMMANDATIONS: centration errors: RET-71, RET-90 • Alignment of optical systems: RET-76, RET-77, • Eyepiece Reticle: mm scales RET-92 • Collimator Reticle: Porro plates, slits patterns, etc. W TRIOPTICS OPTI ANGLE / OPTOMATIC
42 RETICLES
Prefered combinations:
• RET-71/RET-13(RET-02) • RET-91/RET-13 (RET-02, RET-86) • RET-02/RET-73
SCALES IN MM AND FURTHER RETICLES USED IN OPTICAL TESTING
Code Type Diameter RET 74 (mm)
RET-71 Crossed ± 4mm scale. Range ± 4mm 12 Division 0,1mm
RET 73 Porro plate. Distance between line 12 pairs: 2/4/6/8
RET 74 4 slits pattern, negative type. Width: 12 0,24/0,8 mm Distance: 2,4/8mm
RET-75 2 slits pattern, negative type. 12 RET 75 Width: 0,08 mm Distance: 0,5 mm
RET-76 Circle with cross, negative type. Diam. 12 0,8 mm, crosslines: 0,02mm
RET-77 Pinhole with positive cross 12 Diam. 0,5 mm, crosslines: 0,01mm
RET 78 cross with circle, positive. Diam. : 1mm, 12 crossline: 0,02mm RET 76 RET 90 Crossed ± -5mm scale. Range ±5mm 17 Division 0,1mm
RET-91 10mm Scale in 500 divisions. 15 1division 0,02mm
RET-92 Cross with concentric circles. 25 Diam.:1,2,3,4,5,10,12,5 Linewidth:0,015mm
RET 77
4
3
2
4321 1
1 1234
2
3 4 RET 71 RET 73 RET 92 43 HOLDERS
ACCESSORIES. POSITIONING EQUIPMENT.
The OPTITEST line offers a wide range of acces - sories to solve positioning and alignment pro - blems. In addition to the standard positioning equipment presented below, TRIOPTICS is sup - plying special holders and stands made ac - cording to specific customers requirements.
CLAMP FIXTURES Various Clamp Holders
The clamp fixtures are mounted on a base TWO AXIS ADJUSTABLE HOLDER plate with 4 fixing screws and 4 pressure scr - ews. The pressure screws prevent a loosening This unit provide two axis fine adjustments for of the fixing screws and allow a certain level - azimuth and elevation. It also incorporates ling within a small range. clamping screws to securely hold the autocol - limator. Code Diam. D H L W A B mm
3-300-001 38 40 100 100 75 75
3-300-002 57 50 75 120 150 100
3-300-003 115 100 75 200 50 175
Adjustable Holder D 57 mm
Code Diam. D Adjust - Sensitivity CLR mm ment 4 X M6 range
38 4 X M6 3-300-005 ± -1° < 10 sec 3-300-006 57 ± -2° < 1 sec
3-300-007 115 ± 1,5° < 1 sec
44 STANDS
AUTOCOLLIMATOR STAND
COARSE TRAVEL STAND (TYPE A)
Features
The Autocollimator Stand A is a simple stand featuring a precision rack and pinion slide me - chanism for height adjustment of the autocolli - mator. The Stand A is equiped with a clamp fixture D 38 mm. Further provisions are made for mounting of a tilt table D 100 mm. Alternatively a rotary table D 100 mm or a combination of tilt and rotary table can be mounted on the Stand A.
Applications
The Stand A is designated for angle measure - ments of plano optics as wedges, windows, prisms, etc. OptiAngle with Stand C FINE TRAVEL STAND (TYPE B) FINE TRAVEL STAND (TYPE C) Features Features The Stand B has two travel mechanisms: a co - arse travel and a coaxial ultra-fine focusing The Stand C is similar with Stand B, however, mechanism. The ultra-fine mechanism is espe - two transversal translation stages with micro - cially useful in applications where a smooth, meter are supplimentary provided. One of this precise motion of optical instruments or subsy - stage allows to transversally move the clamp stems are required. The bottom body of the fixture with the optical instruments (mostly au - stand contains a clamp fixture for a collimator tocollimators or telescopes). The second stage D 38 mm and an adjustable mirror for beam is used to translate a reticle (mm scale) mount deviation. A second clamp fixture D 38 mm for measurement purposes. attached to the travel mechanisms is used to hold autocollimators and telescopes. Applications Further accessories can be attached to the Stand B: The Stand C is ideal for measurements in trans - mission (centration errors) or reflection (radius, • tilt table centration, etc) of spherical optics. The two • rotary table additional micrometer stages are used for fo - • precision self-centering rotary holder for cal length measurements. In this case a Porro centration measurements plate is mounted in the collimator located in the bottom body. The Porro pattern is projec - Applications ted over the sample to be measured. The rea - ding is done using a microscope or telescope The Stand B is ideal for measurements in trans - mounted on clamp fixture attached to the tra - mission (centration errors) or reflection (radius, vel mechanism. centration, etc) of spherical optics. Of coarse angle measurements of plano optics are also possible.
45 STANDS AND TABLES
CONSTRUCTION Transversal micrometer stage for Stand C FINE TRAVEL STAND B (C) Tilt Table D 100,2-tilt axes 1 - CoarseTravel Knob 1
2 - Fine Focusing Knob 2 Rotation Table 360∞ 3 - Clamping Knob T H D38.1 4 - Collimator clamb holder 3
Transversal micrometer 5 - Deflection Mirror Rotation and Tilt Table 4 stage with reticle for Stand C 5
D Self-centering Rotary Holder X
Type/Features Code Height Trave l Distance L x W Approx. H m m coarse/fine to optic al mm Weight r ange T mm axis D m m Kg
Stand A. Coarse travel only. 3-200-030 465 225/- 80 225x115 6,5 Sensivity: 50 µm
Stand B. Coarse and fine 3-200-032 600 380/380 112,5 277x178 12 travel. Sensivity: 1 µm
Stand C. Coarse and fine 3-200-034 600 380/380 112,5 277x178 13,5 travel. Sensivity: 1 µm. Transversal Stages: ± 10mm, Resolution 0,005 µm
TILT AND ROTATION TABLES TILT AND ROTATION TABLE D 100 MM
TILT TABLE D 100 MM The tilt and rotation tables are modular and can be mounted together with the tilt table Three fine adjustments screws allow the tilt either on top or at bottom. along two axes. Two threaded holes M4 are provided for attaching further accessories. The tilt table designed for measurements in trans - mission have a central hole D 15 mm.
ROTATION TABLE D 100 MM
The rotation table features complete 360° ro - tation. After clamping the table in the selec - ted position, a tangential micrometer enables a fine rotation adjustment. Tilt and Rotation Table D 100, Rotation Table D 100, Tilt Table D 100, Wedge and Filter Hol - derSupporting Tables 46 CENTERING / ROTARY HOLDERS
Tilt on Rotation Table
Type Code Tilt Rotation Sensitivity Load Approx Range range Capacity Weight coarse/fine
Tilt Table D 100 3-300-010 ± 2° - 5 sec 8 Kg 1,6 Kg
Tilt Table D 100/ d 15 3-200-011 ± 2° - 5 sec 8 Kg 1,5 Kg
Rotation Table D 1000 3-300-014 - 360°/±2,5° 10 sec 10 Kg 1,8 Kg
Tilt and Rotation Table D 100 3-300-016 ± 2° 360°/±2,5° 5/10 sec 8 Kg 3,4 Kg
SELF-CENTERING HOLDERS Code Type Diam. Centrati - Mounting Trioptics Self-Centering Lens Mounts reliably range on center and hold optics and cylindrical objects. mm mm The centering accuracy is far above the com - mercially available self-centering mounts. To 3-300-018 SCH 75 5-75 < 0,05 3xM4 CLR ensure the precise axial position of lens cells on Dia.110 and mounts, the three support rods have an mm accurately ground step. This secure not only a repeatable radial centration but an exacte 3-300-019 SCH 35 3-35 < 0,03 M57.7x0,75 axial positioning as well.
47 TRIOPTICS GmbH . Optische Instrumente Hafenstrasse 35-39 . 22880 Wedel / Germany Phone: +49-410 3-1800 6-0 Fax: +49-410 3-1800 6- 20 E-mail: [email protected] . http://www.trioptics.com
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