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This Issue of Pdf File MMC Activities..............1 TOPICS.......................6 Members’ Profiles .........7 Worldwide R&D ............8 MMC Activities Research Subjects for the 9th Micromachine Technology Research Grants Subjects for the 9th Micromachine Technology Research Center reported on the selection results, after which a list of the Grants for FY 2001 were determined at the board of directors grants was presented to each of the nine selected researchers. meeting held in March 2002. As a result of a rigorous Associate Professor Ryo Yoshida of the University of Tokyo examination process, three new research subjects and six spoke on behalf of the grant recipients. Later, each of the three ongoing research subjects in their second year were selected researchers in charge of the new research subjects that were from a large number of applications. A total of ¥ 10.6 million in selected, gave a brief summary of their research plans. After the financial assistance grants will be presented. ceremony, an informal gathering was held to allow attendees to The research grant program was started in FY 1993 as an congratulate and chat with the grant recipients in a relaxed independent activity of the Micromachine Center intended to atmosphere. provide financial assistance to researchers engaged in basic This research grant program will be ending this year. research on various aspects of micromachine technologies. The grants are aimed at promoting both advances in micromachine technologies and increased exchange and cooperation between industry and academia. On March 27, 2002, a ceremony to award the research grants was held at the Chuo University Surugadai Memorial Hall. Mr. Toshiro Shimoyama, Chairman of the Micromachine Center, gave the sponsor's greeting. Mr. Nobuhiko Sasaki, Director of the Industrial Machinery Division, METI, appeared as the guest speaker, and Prof. Yoji Umetani, Chairman of the Industry- Academia Joint Research Committee of the Micromachine Outline of the New Subjects for the 9th Micromachine Technology Research Grant Basic Study on Microactuators Produced through Wettability Control and Surface-Tension-Driven Convection at the Liquid-Liquid-Gas Interface Izumi Hirasawa, professor, Department of Applied Chemistry, Faculty of Sciences, Waseda University Masato Sakurai, National Aerospace Laboratory of Japan While wettability has conventionally been treated passively as a natural phenomenon, this study is aimed at developing a basic microreactor technology, wherein a hydraulic circuit is formed by actively controlling the dominant wettability on a microscale. The drive sources in this technique are interfacial tension-driven flows caused by temperature differences and the recently discovered liquid-liquid-gas surface-tension-driven convection in a silicone oil/fluorinert system. It is hoped that these technologies will serve as basic technologies for fluid handling systems used in space. Liquid-liquid-gas Silicone oil drop Marangoni convection Silicone oil drop Hot Cool Hermetically sealed vessel Fluorinert Fluorinert Scale Path of flow is controlled by wettability The mechanism of Marangoni Rotation and other mechanical forces distribution. convection was found in a silicone oil- obtained from Marangoni convection in Fluid is driven by Marangoni convection. fluorinert system accommodated in a the silicone oil-fluorinert system. hermetically sealed vessel. Internet Home Page : http://www.mmc.or.jp/ Study on Cuff Microelectrodes using MEMS Technology Shoji Takeuchi, Lecturer, Institute of Industrial Science, the University of Tokyo This study focuses on microelectrodes designed to measure biological data. Electrodes built with MEMS technology can monitor spatial and regional activity through multiple channels better than conventional needle electrodes and glass tube microelectrodes. Accordingly, these electrodes are in extremely high demand in the field of biomedicine, where their industrialization is greatly anticipated. In this study, we investigate cuff microelectrodes using shape memory alloy (SMA) thin film microactuators with the aim of developing minimally invasive microelectrodes for taking measurements of living organisms. Design and Fabrication of a cuff microelectrode formed of a shape memory alloy actuator designed to clip a nerve cord Shape Memory Alloy thin film current The SMA is driven when a current is applied to the electrode nerve cord nerve cord SMA thin film actuator Nerve Multi-point cord measurements / stimulation Insulated with polyimide 1. 2. 3. Electrode pads current The electrodes are made implantable by insulating them with polyimide Study on Heart-Emulating Microactuators Using Self-Oscillating Gel Ryo Yoshida, Associate Professor, School of Engineering, the University of Tokyo A novel self-oscillating gel was developed with the capacity to oscillate autonomously in a spontaneous rhythm, like the heartbeat. A molecular design that functions to convert chemical energy into mechanical energy is achieved by inducing a cyclic BZ reaction in the gel, as in a metabolic response, causing the gel to periodically swelling and deswelling. In order to develop new micromachines capable of imitating biological functions, such as self-beating/peristaltic motion actuators, we are establishing a technology for developing micro-size gel and conducting a behavioral analysis in a microenvironment. We are also conducting basic studies for constructing a material system. Self-oscillating gel No on-off stimuli, constant condition, Micron-sized cross-linked gel particles Swelling (oxidized state) periodical swelling-deswelling oscillation Swelling (oxidized state) Deswelling (reduced state) Time (reduced state) (reduced Deswelling Oxidized state Exterier Gel phase •Self-beating / peristaltic motion microactuators, 3+ Ru(bpy)3 micropumps, etc. Transducing circuit CO2, etc. •Applications of micromachining technologies 2 Ru(bpy)3 + (lithography, etc.) - E.g. developing artificial cilia BrO2 Reduced state BrMA BrO3- Propagation of chemical wave Oxidized region HBrO2 Br - Br2 Malonic acid Product Gel film with micro projection structure array BZ reaction network 2 Hiroshima Micromachine Seminar Hiroshima Micromachine Seminar was held in the regarding "Micro Device Using Silicon Anisotropic Wet afternoon of February 8, 2002 at AIST Chugoku of National Etching". Then Mr. Kazunori Okada of Harima Research Institute of Advanced Industrial Science and Technology Laboratories, SUMITOMO ELECTRIC INDUSTRIES, Ltd., (AIST) in Kure City. It was organized by Micromachine Center, presented a speech dealing with "LIGA Micromachining co-organized by AIST Chugoku and Chugoku Technology Technology Using SR(synchrotron radiation)", and Mr. Ryo Promotion Center (CTPC), and supported by Kure Area Ohta of R&D Center, OLYMPUS OPTICAL CO. LTD., dealt with Industrial Promotion Center. "Research on Multifunctional Integration Film Technology". At this seminar, Mr. Takayuki Hirano, Executive Director During the interval, Mr. Ryo Ohta and Mr. Teruhisa Akashi of MMC, made a speech dealing with the "MMC's Activities"; conducted a presentation of a 1mmøSMA micro actuator Mr. Yuich Ishikawa, Principal Research Scientist of AIST, (OLYMPUS OPTICAL CO. LTD.) and a microfluid operating spoke regarding the "Characteristics of Micromachine device (Hitachi, Ltd.) - two portable exhibits of micromachine Technology"; Koji Yada, General manager of MMC's research technology which had been brought to the seminar. department, presented an "Overview of Results in Accordingly, this provided an excellent opportunity for the Micromachine Project". attendants to become more familiar with micromachine In addition, as part of the introduction to the research technologies. results of the members companies, Mr. Eiichi Yonezawa of With a total of 45 people present - 21 individuals from 16 Corporate R&D Center Material Science and Technology companies in Hiroshima prefecture, and another 24 individuals Laboratory, Fuji Electric Co., Ltd., presented a speech about from universities, research centers, public organizations and "Two-Dimentional Micro-Conveyor", and Mr. Teruhisa Akashi the like - the seminar was both well and of considerable of Engineering Research Laboratory, Hitachi, Ltd., spoke significance. Eighth Micromachine Drawing Contest Award Ceremony The Micromachine Center (MMC)-sponsored Micromachine Drawing Contest for elementary and junior high school students was held this year for the eighth time. The contest was conducted with the cooperation of MMC's supporting members AISIN COSMOS R&D CO., LTD., FANUC LTD., and Fujikura Ltd. as well as the schools that participated in the Fifth Micromachine Drawing Contest. This year's contest attracted a total of 1,984 entries (957 entries in the elementary school category and 1,027 entries in the junior high school category) submitted by students from the following 17 elementary schools and 10 junior high schools. Participating Schools Elementary Schools: Junior High Schools: Arai Municipal Elementary School(Takasago, Hyogo Prefecture) Koganei Elementary School attached to Tokyo Shoyo Municipal Junior High School (Takasago, Hyogo Prefecture) Iho Minami Municipal Elementary School* Gakugei University (Tokyo) Arai Municipal Junior High School (Takasago, Hyogo Prefecture) (Takasago, Hyogo Prefecture) Mihama-Kita Municipal Elementary School Kano Municipal Junior High School (Gifu, Gifu Prefecture) Iho Municipal Elementary School (Takasago, Hyogo Prefecture) (Urayasu, Chiba Prefecture) Kariya-Minami Municipal Junior High School* Kitahama
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