MMC Activities...... 1 TOPICS...... 6 Members’ Profiles ...... 7 Worldwide R&D ...... 8

MMC Activities Research Subjects for the 9th Micromachine Technology Research Grants

Subjects for the 9th Micromachine Technology Research Center reported on the selection results, after which a list of the Grants for FY 2001 were determined at the board of directors grants was presented to each of the nine selected researchers. meeting held in March 2002. As a result of a rigorous Associate Professor Ryo Yoshida of the University of examination process, three new research subjects and six spoke on behalf of the grant recipients. Later, each of the three ongoing research subjects in their second year were selected researchers in charge of the new research subjects that were from a large number of applications. A total of ¥ 10.6 million in selected, gave a brief summary of their research plans. After the financial assistance grants will be presented. ceremony, an informal gathering was held to allow attendees to The research grant program was started in FY 1993 as an congratulate and chat with the grant recipients in a relaxed independent activity of the Micromachine Center intended to atmosphere. provide financial assistance to researchers engaged in basic This research grant program will be ending this year. research on various aspects of micromachine technologies. The grants are aimed at promoting both advances in micromachine technologies and increased exchange and cooperation between industry and academia. On March 27, 2002, a ceremony to award the research grants was held at the Chuo University Memorial Hall. Mr. Toshiro Shimoyama, Chairman of the Micromachine Center, gave the sponsor's greeting. Mr. Nobuhiko Sasaki, Director of the Industrial Machinery Division, METI, appeared as the guest speaker, and Prof. Yoji Umetani, Chairman of the Industry- Academia Joint Research Committee of the Micromachine

Outline of the New Subjects for the 9th Micromachine Technology Research Grant Basic Study on Microactuators Produced through Wettability Control and Surface-Tension-Driven Convection at the Liquid-Liquid-Gas Interface Izumi Hirasawa, professor, Department of Applied Chemistry, Faculty of Sciences, Waseda University Masato Sakurai, National Aerospace Laboratory of While wettability has conventionally been treated passively as a natural phenomenon, this study is aimed at developing a basic microreactor technology, wherein a hydraulic circuit is formed by actively controlling the dominant wettability on a microscale. The drive sources in this technique are interfacial tension-driven flows caused by temperature differences and the recently discovered liquid-liquid-gas surface-tension-driven convection in a silicone oil/fluorinert system. It is hoped that these technologies will serve as basic technologies for fluid handling systems used in space.

Liquid-liquid-gas Silicone oil drop Marangoni convection Silicone oil drop Hot Cool Hermetically sealed vessel

Fluorinert Fluorinert Scale

Path of flow is controlled by wettability The mechanism of Marangoni Rotation and other mechanical forces distribution. convection was found in a silicone oil- obtained from Marangoni convection in Fluid is driven by Marangoni convection. fluorinert system accommodated in a the silicone oil-fluorinert system. hermetically sealed vessel.

Internet Home Page : http://www.mmc.or.jp/ Study on Cuff Microelectrodes using MEMS Technology Shoji Takeuchi, Lecturer, Institute of Industrial Science, the University of Tokyo This study focuses on microelectrodes designed to measure biological data. Electrodes built with MEMS technology can monitor spatial and regional activity through multiple channels better than conventional needle electrodes and glass tube microelectrodes. Accordingly, these electrodes are in extremely high demand in the field of biomedicine, where their industrialization is greatly anticipated. In this study, we investigate cuff microelectrodes using shape memory alloy (SMA) thin film microactuators with the aim of developing minimally invasive microelectrodes for taking measurements of living organisms.

Design and Fabrication of a cuff microelectrode formed of a shape memory alloy actuator designed to clip a nerve cord

Shape Memory Alloy thin film current

The SMA is driven when a current is applied to the electrode nerve cord nerve cord

SMA thin film actuator Nerve Multi-point cord measurements / stimulation Insulated with polyimide 1. 2. 3. Electrode pads current

The electrodes are made implantable by insulating them with polyimide

Study on Heart-Emulating Microactuators Using Self-Oscillating Gel Ryo Yoshida, Associate Professor, School of Engineering, the University of Tokyo A novel self-oscillating gel was developed with the capacity to oscillate autonomously in a spontaneous rhythm, like the heartbeat. A molecular design that functions to convert chemical energy into mechanical energy is achieved by inducing a cyclic BZ reaction in the gel, as in a metabolic response, causing the gel to periodically swelling and deswelling. In order to develop new micromachines capable of imitating biological functions, such as self-beating/peristaltic motion actuators, we are establishing a technology for developing micro-size gel and conducting a behavioral analysis in a microenvironment. We are also conducting basic studies for constructing a material system.

Self-oscillating gel No on-off stimuli, constant condition,

Micron-sized cross-linked gel particles Swelling

(oxidized state) periodical swelling-deswelling oscillation Swelling (oxidized state) Deswelling (reduced state)

Time (reduced state) (reduced Deswelling

Oxidized state Exterier Gel phase •Self-beating / peristaltic motion microactuators, 3+ Ru(bpy)3 micropumps, etc. Transducing circuit CO2, etc. •Applications of micromachining technologies 2 Ru(bpy)3 + (lithography, etc.) - E.g. developing artificial cilia BrO2 Reduced state BrMA BrO3- Propagation of chemical wave Oxidized region HBrO2 Br -

Br2

Malonic acid

Product Gel film with micro projection structure array BZ reaction network

2 Hiroshima Micromachine Seminar

Hiroshima Micromachine Seminar was held in the regarding "Micro Device Using Silicon Anisotropic Wet afternoon of February 8, 2002 at AIST Chugoku of National Etching". Then Mr. Kazunori Okada of Harima Research Institute of Advanced Industrial Science and Technology Laboratories, SUMITOMO ELECTRIC INDUSTRIES, Ltd., (AIST) in Kure City. It was organized by Micromachine Center, presented a speech dealing with "LIGA Micromachining co-organized by AIST Chugoku and Chugoku Technology Technology Using SR(synchrotron radiation)", and Mr. Ryo Promotion Center (CTPC), and supported by Kure Area Ohta of R&D Center, OLYMPUS OPTICAL CO. LTD., dealt with Industrial Promotion Center. "Research on Multifunctional Integration Film Technology". At this seminar, Mr. Takayuki Hirano, Executive Director During the interval, Mr. Ryo Ohta and Mr. Teruhisa Akashi of MMC, made a speech dealing with the "MMC's Activities"; conducted a presentation of a 1mmøSMA micro actuator Mr. Yuich Ishikawa, Principal Research Scientist of AIST, (OLYMPUS OPTICAL CO. LTD.) and a microfluid operating spoke regarding the "Characteristics of Micromachine device (Hitachi, Ltd.) - two portable exhibits of micromachine Technology"; Koji Yada, General manager of MMC's research technology which had been brought to the seminar. department, presented an "Overview of Results in Accordingly, this provided an excellent opportunity for the Micromachine Project". attendants to become more familiar with micromachine In addition, as part of the introduction to the research technologies. results of the members companies, Mr. Eiichi Yonezawa of With a total of 45 people present - 21 individuals from 16 Corporate R&D Center Material Science and Technology companies in Hiroshima prefecture, and another 24 individuals Laboratory, Fuji Electric Co., Ltd., presented a speech about from universities, research centers, public organizations and "Two-Dimentional Micro-Conveyor", and Mr. Teruhisa Akashi the like - the seminar was both well and of considerable of Engineering Research Laboratory, Hitachi, Ltd., spoke significance.

Eighth Micromachine Drawing Contest Award Ceremony

The Micromachine Center (MMC)-sponsored Micromachine Drawing Contest for elementary and junior high school students was held this year for the eighth time. The contest was conducted with the cooperation of MMC's supporting members AISIN COSMOS R&D CO., LTD., FANUC LTD., and Fujikura Ltd. as well as the schools that participated in the Fifth Micromachine Drawing Contest. This year's contest attracted a total of 1,984 entries (957 entries in the elementary school category and 1,027 entries in the junior high school category) submitted by students from the following 17 elementary schools and 10 junior high schools.

Participating Schools Elementary Schools: Junior High Schools: Arai Municipal Elementary School(Takasago, Hyogo Prefecture) Koganei Elementary School attached to Tokyo Shoyo Municipal Junior High School (Takasago, Hyogo Prefecture) Iho Minami Municipal Elementary School* Gakugei University (Tokyo) Arai Municipal Junior High School (Takasago, Hyogo Prefecture) (Takasago, Hyogo Prefecture) Mihama-Kita Municipal Elementary School Kano Municipal Junior High School (Gifu, Gifu Prefecture) Iho Municipal Elementary School (Takasago, Hyogo Prefecture) (Urayasu, Chiba Prefecture) Kariya-Minami Municipal Junior High School* Kitahama Municipal Elementary School Igusa Municipal Elementary School (Kariya, Aichi Prefecture) (Takasago, Hyogo Prefecture) (Kawashima, Saitama Prefecture) Numazu School for Special Education (Shizuoka Prefecture) Takasago Municipal Elementary School -Minami Elementary School Oshino Municipal Junior High School (Takasago, Hyogo Prefecture) (Kawagoe, Saitama Prefecture) (Oshino, Yamanashi Prefecture) Nishino-Cho Municipal Elementary School Omiya-Minami Elementary School (Saitama, Saitama Prefecture) Kakio Municipal Junior High School (Nishio, Aichi Prefecture) Numasaki Municipal Elementary School (Kawasaki, Kanagawa Prefecture) Oshino Municipal Elementary School (Tsukuba, Ibaraki Prefecture) Fukagawa 3rd Municipal Junior High School (Koto-ku, Tokyo) (Oshino, Yamanashi Prefecture) Ninomiya Municipal Elementary School Fukagawa 8th Municipal Junior High School (Koto-ku, Tokyo) Higashi-Kakio Municipal Elementary School (Tsukuba, Ibaraki Prefecture) Sakuragi Municipal Junior High School (Kawasaki, Kanagawa Prefecture) Mase Municipal Elementary School (Tsukuba, Ibaraki Prefecture) (Saitama, Saitama Prefecture) Kazuya Municipal Elementary School (Koto-ku, Tokyo) (* School prize awarded)

A selection committee headed by Dr. Hirofumi Miura in the elementary school category, Shihori Matsukura (a 6th (professor, Kogakuin University) chose 15 drawings each from grader at Numasaki Municipal Elementary School, Tsukuba, the elementary and junior high school categories. The prize- Ibaraki Prefecture) and the Grand Prize winner in the junior winning drawings are shown on the following pages. The award high school category, Kaoru Tanaka (a 2nd year student at ceremony was held on March 26, 2002 at the Science Museum, Kariya-Minami Municipal Junior High School, Kariya, Aichi Tokyo (Kitanomaru Park, Tokyo). The approximately 50 Prefecture). attendees included the winners of the Grand Prize and First Prize in both the elementary and junior high school categories, parents and relatives of the prizewinners, staff of the participating schools, guests, and members of the selection committee. During the award ceremony, Mr. Kenichiro Yoshida, deputy director of the Manufacturing Industries Bureau, METI, addressed the audience and selection committee chairman and Kogakuin University Professor, Dr. Hirofumi Miura, explained the selection process and commented on the work submitted. This was followed by a few words from the Grand Prize winner

3 Eighth Micromachine Drawing Contest Prizewinners Elementary School Category

Grand Prize First Prize Second Prize Your Personal Mr. Fresh-Breath Let's Go, Fossil Scouts ! Tooth-Brushing Machine

Ai KOBAYASHI Nishino-cho Municipal Elementary Shihori MATSUKURA Kenta KONISHI School (5th grade) Numasaki Municipal Elementary School Omiya-Minami Municipal Elementary School (6th grade) (6th grade)

Second Prize Third Prize Third Prize Third Prize Robot Wiring Engineer Genetically-Modified Crab Micromini Sensor and Earphone Sick Tree-Revitalizing Machine

Yuki AMANO Yusuke NAKAMICHI Hideyuki SUSEKI Yasutaka HAYASHI Oshino Municipal Elementary Iho Minami Municipal Elementary Omiya-Minami Municipal Numasaki Municipal Elementary School School (6th grade) School (5th grade) Elementary School (6th grade) (6th grade)

Honorable Mention Honorable Mention Honorable Mention Good Idea Award Miss. Cleaning Brush Health Machine Micromachine Dentist Automatic Focus-Adjusting Contact Lens

Misa OSONO Misato KONDO Mihama-Kita Municipal Nishino-cho Municipal Elementary Maori NAKANE Elementary School (4th grade) School (6th grade) Nishino-cho Municipal Elementary Aya HANAGATA School (6th grade) Mihama-Kita Municipal Elementary School (4th grade)

Good Idea Award Good Idea Award Encouragement Award Encouragement Award Air Pollution Monitoring Machine Insect-Shaped Surgery Machine What's a Micromachine Repair Machine for Tiny Doing HERE ?! Places

Hayato IWASE Shun GOTO Numasaki Municipal Elementary Oshino Municipal Elementary Kumiko MINEGISHI Kaori ABE School (5th grade) School (6th grade) Oshino Municipal Elementary Kasumigaseki-Minami Municipal School (5th grade) Elementary School (6th grade)

4 Junior High School Category

Grand Prize First Prize Second Prize Micro-Dialysis Machine Memories-Preserving Micromachine Real-Touch Ring

Asuka SUZUKI Kariya-Minami Municipal Junior High Kaoru TANAKA Erika SUGAWARA School (1st grade) Kariya-Minami Municipal Junior High School Fukagawa 3rd Municipal Junior High School (2nd grade) (1st grade)

Second Prize Third Prize Third Prize Third Prize Blood Transfusion Mistake Stopper Ant-Shaped Robot Artificial Pollinator Flower-Preserving Machine

Tomoyo YAMAOKA Minori TANAKA Nanae NAGASAKA Sayaka SATO Kano Municipal Junior High School Kariya-Minami Municipal Junior Kariya-Minami Municipal Junior Kariya-Minami Municipal Junior High (2nd grade) High School (1st grade) High School (2nd grade) School (3rd grade)

Honorable Mention Honorable Mention Honorable Mention Good Idea Award Super Contact Lens Shoulder Massaging Ladybird Forgetfulness-Preventing Fingertip Reading Machine Pendant

Yuma FUKAZAWA Megumi TAJIMA Misako KITO Fukagawa 3rd Municipal Junior Kariya-Minami Municipal Junior Atsushi YOSHIKAWA Fukagawa 3rd Municipal Junior High School (1st grade) High School (3rd grade) Fukagawa 3rd Municipal Junior High School (1st grade) High School (1st grade)

Good Idea Award Good Idea Award Encouragement Award Encouragement Award Drink-Driving Stopper Danger Detecting / Reporting Ozone Layer-Restorer Duster Taro : The Dust Machine Remover Machine

Satomi WATANABE Haruka FUJII Kariya-Minami Municipal Junior Midori NOMURA Kariya-Minami Municipal Junior Tomoyo MIYAOKA High School (1st grade) Kariya-Minami Municipal Junior High School (1st grade) Kakio Municipal Junior High High School (2nd grade) School (1st grade)

5 Overview of MMC's Activities in Fiscal 2002

I. Basic Objective of Activities administrative trends) MMC's basic objectives in FY 2002 are to actively disseminate information (4) Database construction and data management system on micromachines from Japan as in the previous fiscal year, to engage in operations technical issues regarding the fusion of micro- and nanotechnologies, and to 3. Exchange and Cooperation with Worldwide Organizations promote the further industrialization of micromachines. Involved with Micromachines (partially subsidized by the II. Description of Primary Activities activities to help promote the machine industry) 1. Investigations and Research on Micromachines (1) Participating in the 8th Micromachine Summit and holding Planned activities include spurring on the rapid development of overseas seminars micromachine technology, gaining a clear understanding of the trends in We will take part in the 8th Micromachine Summit to be held at technologies and industries, and conducting investigations and research on Maastricht in the Netherlands and hold a joint seminar with local research new technological issues regarding the fusion of micro- and nanotechnologies. institutes in Europe, with the cooperation of JETRO and others. (1) Studies on the prospects for the future of micromachine (2) Holding symposiums on micromachine technology (partially technology subsidized by the activities to help promote the machine While we anticipate the industrialization of micromachine technologies industry) that have been developed thus far, from a technological perspective we must This year we will hold the 8th International Micromachine and also strive toward further miniaturization in this new technological system of Nanotechnology Symposium (provisional name) with an added topic on the micromachines. From an applications perspective, MMC is pursuing the fusion of micromachine technology with nanotechnology. fusion of micromachine technologies with technologies in other fields, such as (3) Dispatches Overseas and Exchange with Researchers medical care and biotechnology. Hence, studies on the prospects of Promotion of exchange through the dispatch of research missions micromachines are being implemented while conducting endeavors from overseas and information exchanges with universities and research institutes various angles. involved in micromachines. (2) Studies on the R & D trend of micromachine technology in (4) Constructing a foundry network system (currently Japan and abroad requested as part of commissioned activities to help Developing basic technological data to aid in developing micromachine promote the machine industry) technologies. To structure enterprises providing a foundry service for engaging in the (3) Investigation and research on basic and sprout construction of a system aimed at improving service provision through a micromachine technologies network. Studies in the current fiscal year will be a continuation of the previous 4. Standardization of Micromachines year's studies in the fields of cell manipulation and nano-optics. (1) Creation of an international standard as a method for (4) Studies on the construction of a system for estimating the evaluating the properties and measuring methods of thin micromachine market film materials. Studies in the current fiscal year entail determining methods for (2) Investigation and research on micromachine standardization constructing a system and summarizing statistics. This fiscal year MMC will hold an international forum/workshop in Tokyo (5) Investigation and research on scale interface in July. (commissioned activities to help promote the machine 5. Dissemination and Education about Micromachines industry) (1) The quarterly magazine "MICROMACHINE" will be From the perspective of scale interface, MMC will study the trends of published periodically and distributed to those involved in optical devices in demand for next-generation optical communications and the field, and will also be provided on the Internet website. evaluate the sophisticated functionality possible by fusing micromachine and (2) Conduct activities for disseminating information and nanotechnologies. educating the public about micromachines, including a 2. Collection and Provision of Micromachine Information drawing contest in which elementary and junior high school (1) Maintaining and upgrading the MMC library (to promote students draw pictures of micromachines. the storage of information in a database) (3) Hold the 13th Micromachine Exhibition. (2) Publication of a micromachine periodical (issuing (4) Serve as secretariat for the Federation of Micromachine "Micromachine Index") Technology to link and strengthen micromachine-related (3) Publication of a newsletter (including data on research and organizations.

TOPICS MEMS 2002 Report

The IEEE International Conference on Micro Electro the fields of Optical MEMS/Devices, Bio-MEMS, and Micro Mechanical Systems (MEMS) is an annual event, held by turns in fluidics, showing that research and development in IT- and Bio- Japan, the Unites States, and Europe. MEMS 2002 (The Fifteenth related fields is continuing to expand. In particular, there was a IEEE International Conference on Micro Electro Mechanical notable increase in the number of presentations by speakers from Systems) was held at the MGM Grand Hotel (Las Vegas, USA) Korea, Taiwan, and China that between January 20 and 24, 2002. For the first time, conference dealt with IT-related topics, attendance exceeded 700, and the number of applications also including RF/Wireless. increased from last year, from 395 to 454, to a record high. The city of Las Vegas Although the number of oral presentations was 41, the same as in (where the conference was previous years, the increase in applications resulted in a 30% held) was dotted with increase in the number of poster presentations, to 134. However, Disneyland-like attractions - this year's conference continued the organizational practice of there was even an "Eiffel single-presentation sessions, discussions took place in a single Tower" at the Paris Las Vegas conference hall packed with more than 700 people. Because of hotel (pictured). My this, although I found the presentations themselves to be impression was of a city significant from the perspective of sharing technical information, where, with the time and the constant murmuring throughout the conference hall created an money, you could enjoy atmosphere at odds with intense research debate. yourself to the full. There was an increased number of presentations related to

6 Members' Profiles Oki Sensor Device Corporation Perhaps you are familiar with the reed switch. So named because its electrodes resemble the stems of a reed, a reed switch has a very simple construction with two or three reed electrodes sealed in a small glass tube (Fig. 1).

reed OFF Contact point

Takao Yano Inert gas Glass tube Managing Advicer

ON The reed switch is also used in the float sensor to detect fluid levels. In combination with a magnet, this N N S S switch has many other applications, as well. In particular, the float switch is indispensable for detecting the flow S N rate of gas and water, and in automotive applications that require high reliability. Fig. 1 Operating principles of the reed switch Another method frequently used for operating the Unfortunately, the reed switch is not widely known reed switch consists of winding a coil around the switch because people are not exposed to it much. However, by and applying a current to the coil to generate a magnetic encapsulating the electrode contacts in a glass tube and field. A reed switch wrapped by a coil and covered with a filling the tube with inert gas, the electrodes are not protective resin or the like is called a reed relay. greatly affected by external factors, such as temperature A major application for reed switches is an IC tester. In and humidity and corrosive gases. This feature allows the addition to their reliability-they can endure hundreds of reed switch to be used in various fields. millions of on/off operations-the reed switch is used for its Since the reed switch is turned on and off only by good high-frequency property. The reed switch was variations in a magnetic field applied externally, the initially developed for use in a crossbar telephone switch does not require power necessary for turning other switchboard. Later the diameter of the switch was reduced switches on and off. All that is required is the reed switch from its initial 30 mm or more to its current minimum of 7 and a magnet. When a magnetic field is brought near the mm to be provided in keyboards and the like. reed switch, an induction field is generated around the In recent years, however, electronic equipment has reed electrodes, which are formed of a ferromagnetic been developed with more functions and an increased material. As a result, the contact points on the two number of mounted parts, as represented by the cellular electrodes are magnetized as a north pole and a south phone. Hence, there has been much demand to make pole and contact each other through mutual attraction. each part lighter and more compact. A reed switch can be used, for example, to detect the Similarly, there have been numerous calls to improve opening and closing of a door, such as the door of a house the efficiency of accommodating parts in industrial or a refrigerator, by mounting a magnet on the door or equipment and automobiles, in order to mount a large door frame and a reed switch on the other. When the door number of parts in a smaller space. At present it is is closed, bringing the magnet close to the reed switch, the believed theoretically that the reed switch can be contacts in the reed switch meet and close the circuit. reduced to a minimum of 5 mm in diameter. Today, reed relays utilizing micromachine technology (MMR: micromachined relays) are being developed. Our Float Reed switch Magnet company is also developing reed switches using micromachine technology as a core product for the ensuing period. By taking advantage of the feature of reed switches (the open and closing of contact points through magnetism), we can provide more compact microsize reed switches with high integration. It is our hope that we can fill the needs of a wide-range of users by producing reed switches, not just for current applications, but also for markets that cannot yet utilize reed switches; and to uncover and create new Fig. 2 Float sensor applications.

7 Worldwide R&D Microscale Thermal Engineering Takayoshi Inoue, Professor, Department of Mechanical Sciences and Engineering Graduate School of Science and Engineering, Tokyo Institute of Technology

The primary research activities in our laboratory focus on thermal engineering on a microscale. The research Thermopile T.C. staff at the laboratory currently includes Associate Cr (0.3µm) Professor Osamu Nakabeppu, Research Associate Yuji Suzuki, and graduate and undergraduate students of the Ni (0.15µm) department. Although we use the simple term "microscale," this is such an extensive field that we have decided to divide it into two domains. The first is a domain on the order of microns in which devices, such as microchannels, micromachines, or MEMS, can be treated as continuums. The second is a molecular-scale domain in which we 260µm consider phenomena on the molecular or quantum level. Heater Nanotechnology, a term that is frequently heard these days, would probably be included in the latter domain. Temperature Image Topographic Image (Active Mode) Below, I introduce two or three examples of studies 70µm70µm conducted in our laboratory. The first example is a method for measuring temperatures in microspaces. The most basic activity in thermal engineering research is to measure temperature distributions in target areas with high accuracy. However, optical measurements become impossible at a scale less than the diffraction limit of light. Accurate temperature measurements are also difficult when using a probe because the probe itself affects the measurements. At our 0 0 laboratory, we mounted a temperature sensor and 0 70µm 0 70µm microheater on the probe of an atomic force microscope 0705nm 41.7 45.7: and set the probe temperature equivalent to the sample temperature. In this way, we were able to accurately Fig. 1 A probe for measuring temperatures in measure temperatures at a spatial resolution of about 25 microspaces and the temperature distribution nm (Fig. 1). It is believed that a precise technology for around fine wires electrically heated measuring temperatures at a submicron spatial resolution would be beneficial to the semiconductor industry and the field of micromachines. Dopant implantation Recrystallization, Homogenization Studies on the flows in microchannels are important for CPU cooling and µ-TAS technologies. At our Laser laboratory, we studied the fabrication of a laminated-type micro heat exchanger using microchannels, as well as gas- absorption enhancing technology for microchannel flow. 20-30nm Finally, we also studied a technology for forming ultra- shallow junctions in semiconductors as a molecular-level thermal engineering technology. The line width in the Fig. 2 The formation of an ultra-shallow junction CPU has been decreased to less than 0.1µm. To keep pace with this, it has become necessary to form extremely shallow junctions of less than 30 nm. There is demand to nm, and also to restore a good crystalline structure. Using diffuse impurities uniformly up to 30 nm and to form a simulations, we have studied the feasibility of forming steep concentration gradient at depths greater than 30 such junctions with laser heating.

MICROMACHINE No. 39 MICROMACHINE is published quarterly by Micromachine Center (MMC) to promote the international exchange of information related to micromachines, R&D and other technical topics, and is circulated free of change. Please send your comments about MICROMACHINE to the publisher : Takayuki Hirano, Executive Director, Micromachine Center (MMC) MBR99 Bldg., 6F., 67 Kanda Sakumagashi, Chiyoda-ku, Tokyo 101-0026, Japan Tel : +81-3-5835-1870, Fax : +81-3-5835-1873 Internet Home Page http://www.mmc.or.jp/ Change of Address : Please send old address lebel and new address to the publisher. Editorial and Production Management : Japan Technical Information Service (JATIS) Date of Issue : May 17, 2002 © All Copyrights Reserved by MMC