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UC San Diego Electronic Theses and Dissertations UC San Diego UC San Diego Electronic Theses and Dissertations Title 10-nm CMOS : a design study on technology requirement with power/performance assessment Permalink https://escholarship.org/uc/item/64g181j0 Author Liu, Minjian Publication Date 2007 Peer reviewed|Thesis/dissertation eScholarship.org Powered by the California Digital Library University of California UNIVERSITY OF CALIFORNIA, SAN DIEGO 10-nm CMOS — A Design Study on Technology Requirement with Power/Performance Assessment A dissertation submitted in partial satisfaction of the requirements for the degree Doctor of Philosophy in Electrical Engineering (Applied Physics) by Minjian Liu Committee in charge: Professor Yuan Taur, Chair Professor Prabhaker Bandaru Professor Chung-Kuan Cheng Professor Yu-Hwa Lo Professor Deli Wang 2007 The dissertation of Minjian Liu is approved, and it is acceptable in quality and form for publication on paper: Chair University of California, San Diego 2007 iii DEDICATION To my mom Zhou YuYing, my dad Liu DongLin and my husband Yang Yang. iv TABLE OF CONTENTS SignaturePage................................ iii Dedication .................................. iv TableofContents .............................. v ListofFigures................................ vii ListofTables ................................ viii Acknowledgments .............................. ix Vita...................................... xi Abstract ................................... xii 1 Introduction ................................. 1 1.1 CMOS Scaling — Reaching the Limit . 1 1.2FundamentalLimitingFactors . 4 1.2.1 Non-scaling electron thermal voltage . 5 1.2.2 Gate-oxidescalinglimit . 8 1.3OrganizationofThesis . 10 2 BackgroundandMethodology . 12 2.1MOSFETScalingTheory . 13 2.2LeakageCurrentsinStatic . 17 2.2.1 Tunneling through gate insulator . 19 2.2.2 Band-to-bandtunneling . 21 2.2.3 Source-to-drain direct tunneling . 21 2.3ProblemsToBeAddressed . 22 2.4Methodology............................... 24 3 Short Channel Effect and Threshold Voltage Design . ... 27 v 3.1 Depletion Layer Depth and Gate Dielectric Thickness . ..... 30 3.1.1 Properties of high-K dielectrics . 32 3.1.2 Choice of high-K dielectric for 10-nm CMOS . 33 3.2 Gate Electrode: Metal Gate vs. Poly-Silicon . ... 34 3.3 Doping Profile Design for Threshold Voltage Requirements ..... 38 3.3.1 Retrogradedopingprofile . 39 3.3.2 Quantum-mechanicaleffect . 42 3.3.3 Threshold voltage lowering by counterdoping . .. 45 3.4LaterallyNonuniformDoping. 51 3.5 Effect of Source-Drain Junction Depth on Short Channel Effect. 55 3.6 Vt LoweringbyForwardBodyBias. 56 3.7EffectofThickerGateOxide . 61 4 Optimization of Gate Overlap and Source/Drain Doping Lateral Gradient 63 4.1 CMOS Performance Metric — Inverter Delay . 67 4.2 Optimum Gate Overlap for an Abrupt Source - Drain Profile . ... 69 4.3 The Effect of Source-Drain Doping Gradient on Performance .... 73 4.4 Band-to-Band Tunneling Current . 77 5 The Scaling Limit of Power Supply Voltage from Noise Margin Consid- erations.................................... 86 5.1 Device Assumptions for Noise Margin Study . 90 5.2NoiseMarginforCMOSNANDCircuits . 90 5.3 Minimum Power Supply Voltage from Noise Margin Considerations . 96 6 Scalingto10nm—Bulk,SOIorDGMOSFETs? . 101 6.1SOICMOS................................103 6.2DGMOSFET ..............................106 6.3 10 nm: Bulk MOSFET is the More Likely Candidate . 109 7 Conclusion..................................112 Bibliography.................................115 vi LIST OF FIGURES Figure 1.1: A brief chronology of the major milestones in the develop- mentofVLSI ............................. 2 Figure 1.2: Trends in lithographic feature size, and number of transis- tors per chip for DRAM and microprocessor chips. 3 Figure 1.3: The scaling trend of CMOS technology node and channel length.................................. 4 Figure 1.4: History and trends of power-supply voltage (Vdd), threshold voltage (Vt), and gate-oxide thickness (tox) vs. channel length for CMOSlogictechnologies. 5 Figure 1.5: Measured (dots) and simulated (solid lines) tunneling cur- rents in thin-oxide polysilicon-gate MOS devices. The dashed line indicates a tunneling current level of 1A/cm2 [8]........... 9 Figure 2.1: The band diagram of the channel in an n-MOSFET. The potential barrier is controlled by the gate voltage. When the chan- nel length decreases, the barrier is increasingly affected by the drain voltage especially when the drain is tied at su . 15 Figure 2.2: Simplified geometry for analyzing 2-D effects in a short- channel MOSFET. The white area in silicon represents the deple- tion regions where mobile carriers are swept away by the built-in as well as the applied fields of the gate and betwee . 16 Figure 2.3: The operation of an inverter. When the gate voltage is switched from zero to Vdd, output node is discharged through n- MOSFET. Therefore n-MOSFET is called a pull-down device. Sim- ilarly, p-MOSFET acts as a pull-up device. 19 Figure 2.4: Leakage currents of an n-MOSFET are shown in different status. When the FET is ”ON”, the major leakage source is the gate tunneling current. When the FET is ”OFF”, the major three leakage currents are shown in the band diagram. 20 Figure 2.5: Schematic band diagram of a P-N junction under reverse bias (a) energy-momentum picture for indirect tunneling (b). The minimum tunneling distance is wT,min [25].............. 22 Figure 3.1: Constant scale length λ contours (solid lines) in a tox-Wd design plane, assuming SiO2 or ǫsi/ǫox = 3. The dotted line marks the boundary on which the ideality factor m equals 1.3. The interc 28 vii Figure 3.2: Constant gate-insulator dielectric constant contours in a ti/λ-Wd/λ plane............................. 31 Figure 3.3: Band diagram showing polysilicon-gate depletion effects when a positive voltage is applied to the n+ polysilicon gate of a p-type MOScapacitor............................. 35 Figure 3.4: The illustration of the three regions for analytically solving scale length when the polysilicon depletion is not negligible. tp is the polysilicon depletion depth, ti is the gate insulator thickness and Wd istheSidepletion ...................... 36 Figure 3.5: Scale length λ vs. polysilicon doping concentration Np for different ti, ǫi and normal surface field Es. ............. 37 Figure 3.6: A schematic diagram showing the low-high (retrograde) step doping profile, x = 0 denotes the silicon-oxide interface . 40 Figure 3.7: The structure of extreme retrograde doping profile. For a 10-nm n-type MOSFET, the doping levels are labeled. 42 Figure 3.8: The drain current vs. gate voltage for 10-nm n-type MOS- FET with extreme retrograde doping profile at drain voltage of 50 mVand1V. ............................. 44 Figure 3.9: An illustration of the doping concentration (a) and band diagram (b) for MOS with uniform doping, extreme retrograde doping and counterdoping in the vertical direction. The surface field, which is the slope of the potential/energy band a . .. 47 Figure 3.10: The structure of 10-nm n-type MOSFET with counterdop- ing profile. The doping type and concentration are labeled in each region. Counterdoping thickness is 3 nm. Source/drain deep junc- tion (14 nm) is assumed. Gate work function is the sam . 48 Figure 3.11: The doping profile along the parallel cut 1 nm below the interface. ................................ 49 Figure 3.12: The doping profile along the parallel cut 7 nm below the interface. ................................ 49 Figure 3.13: The doping profile along the perpendicular cut in the middle of the device. The location of x=0 is the gate oxide/silicon interface. 50 Figure 3.14: The drain current versus gate voltage for drain voltage of 50 mV and 1 V respectively. The threshold voltage at low drain bias is 0.28 V which is obtained by linear extrapolation. DIBL is 85 mV/V and subthreshold swing is 100 mV/decade. 50 Figure 3.15: Schematic doping contours of SUPER-HALO profile.... 51 viii Figure 3.16: The illustration of HALO doping for channel length of 10 nm. HALO pockets of 4-nm are kept laterally on each side next to the source-drain region. The region between the HALO pockets has the same doping concentration as the substrate in . 52 Figure 3.17: The electrostatic potential contour of a 10-nm n-MOSFET with HALO doping. The doping profiles are illustrated in Fig- ure 3.16. The bias condition is Vs = 0 and Vg = Vd =1V...... 53 Figure 3.18: Threshold voltages are plotted as a function of the channel length for MOSFETs without HALO doping and with two other HALO doping profiles as shown in Figure 3.16. 54 Figure 3.19: Threshold voltages versus body bias are plotted with dif- ferentextractionmethods. 59 Figure 3.20: The electrostatic potential contour for 10-nm MOSFET with forward body bias of 0.5 V. The gate voltage is at 0.33 V whichisthethresholdvoltage. 60 Figure 3.21: The leakage current of a diode under forward bias condition. The diode under study has the doping concentration same as the source and substrate doping of a 10-nm n-MOSFET. 60 Figure 3.22: The threshold voltage and the drain-induced barrier low- ering (DIBL) versus channel length for effective oxide thickness (EOT) of 0.4 nm and 0.8 nm. The threshold voltage is for the drain voltage at 1 V. For thicker oxide thickness, the . 62 Figure 4.1: The illustration of the optimum gate length as a result of the trade-off between current drive and miller capacitance. (a) shows that the gate is too long and large overlap capacitance degrades theperformance. (c)showsthatthegateis . 66 Figure 4.2: The schematic of the 3-stage ring oscillator setup. At each node (n1, n2 and n3), a loading capacitance can be added to mea- sure the loaded delay. The current source is added to provide a pulse signal to “kick” the circuit start . 67 Figure 4.3: The node voltages are plotted versus time for three-stage ring oscillator. The period of the oscillation is given by n(τn +τp)= 2nτ where τ =(τn + τp)/2 is the the delay of an inverter. 68 Figure 4.4: Switching delay of a 3-stage ring oscillator vs.
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