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Vacuum Components & Systems Vacuum Components 2021 Catalog & Systems TMPI CleaningPrecision Services Cleaning, Mechanical Blasting, Helium Leak 1 Testing, Passivation, RGA Testing Ion Pumps, Titanium Sublimation Pumps, Combo-Vac Ion Pumps Pumps, Power Supplies, Rebuilding 2 Vacuum ManipulatorsXYZ and Manipulators, Mechanical RNN Rotary Seals, Feedthroughs Linear and Rotary 3 Components Feedthroughs, Heating and Cooling, Sample Transfer & Systems Electron Beam Evaporation Sources 6-20 kW, Hanks HM2- e-Guns Single and Multiple Crucibles, Co-Evaporation Hydra and Triad. 4 Crucible Rotary Guns 3 kW Single and Multiple 4 Crucible; Power Supplies Electrical and Fluid Feedthroughs Catalog 2021 Electrical, Instrumentation, RF and Liquid Feedthroughs 5 InstrumentationGauges and Controls, Thermocouple. Cold Cathode, Pirani, 6 LN2 Pyra Flat Rectangular, ConFlat, Adapters, ASA Flanges 7 Fittings, AccessoriesFittings-ConFlat and and ISO, ISOHardware Flanges, RL Fittirgs, 8 Feedthrough Collars, Components, Hoses, Traps Gate Valves, Angle Valves, Inline Valves, Bi-Pass Valves Valves, On Axis Valves, Bakeable/All Metal Valves 9 Ion Pumped TTS Systems, Evaporators, Custom Systems, Systems Cold Wall Furnace, Sorption Pumps and Super-Sorb Carts 10 Copyright © 2021, Thermionics Laboratory, Inc. Reproduction in whole or in part, in any language, Custom ChambersSurface Analysis Chambers, Custom Designs and 11 without the prior written approval Modifications of Thermionics is prohibited. All rights reserved. Material, Surface and Molecular Beam Sciences MBE, RHEED, PLO, Molecular Beam and Surface 12 Chemistry i Table of Contents Manipulators Manipulators TMPI Cleaning and Mechanical and Mechanical Services 1 Feedthroughs 3 Feedthroughs 3 Cleaning Types Introduction Sample Heating and Cooling Precision Cleaning...................... 1-1 Terminology................................ 3-2 Sample Mounting........................ 3-49 Passivation..................................1-2 Custom Equipment..................... 3-3 Sample Heating........................ 3-50 Helium Leak Testing................... 1-3 Heating & Cooling Accessories.. 3-51 Pickling........................................ XYZ Manipulators 1-4 LN2 Sample Cooling Options...... 3-52 Oxygen Cleaning......................... 1-4 EC Series.................................... 3-4 LN2 Sample Cooling.................... 3-53 Derouging....................................1-5 EMC Series................................. 3-6 Sample Heater Power Supplies.. 3-54 Mechanical Blasting.................... 1-6 EMX Series................................. 3-8 DRS-1000 Optical Precious Metal Reclamation....... 3-55 1-6 FM Series................................... 3-10 Temperature Monitoring Cleanroom Packaging................. 1-7 FB Series.................................... 3-12 Residual Gas Analysis (RGA)..... RFH Series Feedthrough 1-8 3-56 Z Motion Translators Hats DBT Series................................. 3-14 Goniometers & Precision 3-58 ZB Series.................................... 3-16 Motion Gearbox Heads FBT Series.................................. 3-18 Ion Pumps 2 Pulsed Laser Deposition ECT Series................................. 3-20 3-68 Technical Information Target Stage XY Stage 3-22 Theory of Operation.................... 2-1 Sample Transfer Systems 3-69 Ion Pump Guide.......................... Tilt Stages 2-3 3-24 STLC Turn-to-Lock Series.......... Sizing the Pump.......................... 3-70 2-4 Virtual Axis Tilt........................... 3-26 SPF Dual Groove Disk Series.... 3-72 Pumping Speed vs. Pressure..... 2-6 RNN Series Differentially Load Lock Specifications/Ordering Info Pumped Rotary Seals 3-27 QAC Series Quick Access Caps 3-73 Diode Pumps.............................. 2-8 Rotary Feedthroughs LLC Series Load Lock Noble Diode Pumps....................2-9 Chambers................................... 3-74 Hydrogen Diode Pumps............. 2-10 FRM Series................................. 3-30 QAD Series Quick Access Triode Pumps............................. 2-11 FRMRE Magnetic Series............ 3-33 Doors.......................................... 3-75 Accessories................................ 2-11 FPRM Precision Series.............. 3-34 Viewport, Shutters Pump Physical Dimensions........ 2-12 FRRC Precision Dual Axis Power Supplies, Ion Pump......... 2-16 Series......................................... 3-35 VRS Series Viewport Shutters.... 3-76 Appendage Pumps..................... 2-17 WOA Open Axis Series.............. 3-36 VLS Series Viewport Shutters... 3-77 Custom Design Pumps............... ClearView Series Heated 2-17 Linear Feedthroughs Titanium Sublimation Pumps...... 2-18 Viewports.................................... 3-78 Power Supply, Sublimation.........2-18 FLML Series............................... 3-37 Delta Shutters............................. 3-78 Combo-Vac Pumps.................... 2-19 FLMR Series............................... 3-37 Motor Drive Systems LN Shroud................................. 2-19 FLMM Series.............................. 3-37 2 Motor Drive Options.................... 3-79 Pump Rebuilding........................ 2-22 FLMH Series............................... 3-39 Accessories................................ 3-80 Linear- Rotary Feedthroughs YMC Series Synchronnus Motor Controllers........................ 3-81 FRLC Precision Dual Axis Series......................................... 3-35 Faraday Cup Actuator 3-82 FLLRE Magnetic Series.............. 3-40 RPLR Series............................... 3-42 JS Series Thimble Jack 3-82 FLRM Series............................... 3-44 Stages BPLR Series............................... 3-48 Wobble Sticks 3-46 Locking Jaw Systems 3-48 ii Table of Contents Electrical & Fluid e-Guns™ 4 Feedthroughs 5 Flanges 7 Technical Information Electrical Feedthroughs Technical Information Theory of Operation.................... 4-1 FMC Medium Current................. 5-1 General Information....................7-1 Custom e-Guns........................... 4-1 FHV High Voltage....................... 5-2 Specifications..............................7-1 Hanks HM2 e-Guns, 6-20 kW FHC High Current....................... 5-3 PyraFlat Rectangular FMH & FBN Instrumentation...... 5-4 Flanges General Description.................... 4-2 FSH & FBSH Instrumentation..... 5-6 Single Crucbile........................... 4-3 FIM Coaxial................................. 5-7 Technical Information.................7-2 Rotary Multiple Crucible............. 4-4 FEP Multi-Conductor.................. 5-8 Ordering Information...................7-2 Hydra-2, Co-Evaporation, PLC Push-On Connectors.......... 5-8 Assembly Hardware....................7-3 Dual Array, Multiple Crucible/ Thermocouple............................. 5-9 Applications................................7-4 Emitters...................................... 4-5 Film Thickness Monitor............... 5-10 ConFlat Flanges Hydra-1, Co-Evaporation, Fluid Feedthroughs Single Array, Multiple Crucible/ Technical Information.................7-2 Emitters...................................... FCW Water Cooling.................... 4-6 5-11 Ordering Information...................7-6 Triad, Co-Evaporation, Three FLN Cryogenic............................ 5-12 Rotatable....................................7-6 Crucibles.................................... 4-7 Tapped Rotatable.......................7-8 Accessories Non-Rotatable............................ 7-10 Replacement Parts, Instrumentation 6 Tapped Non-Rotatable...............7-12 Feedthroughs, Crucible Thermocouple Gauge Tubes Dimensinal Drawings..................7-14 Liners............................. 4-8 and Controllers Note: Assembly Hardware and Gasket are shown on the same 6 kW Multiple Position Technical Information............. 6-1 page Linear Gauge Tube Ordering Adapter Flanges (ConFlat) 3 & 4 Crucbiles........................... 4-9 Information............................. 6-1 Gauge Tube Specifications.... 6-2 Double Sided Flanges................7-16 4- 12 kW Power Supplies Cross Reference Guide Note: Assembly Hardware and Gasket are shown on the same Technical Information................. 4-10 Equivalency Table.................. 6-2 page Specifications.............................. 4-11 TC Gauge Controllers 6-3 Reducing Flanges....................... Analog........................ 6-4 7-18 Sweep Controllers Battery Powered......... 6-5 Wire Seal Flanges Digital Sweep Controller............. 4-12 Digital......................... 6-6 Programmable Sweep................ 4-13 Cold Cathode Ionization Bolt-Type Wire Seal Flanges......7-20 Clamp-Type Wire Seal Flanges..7-22 3 kW e-Guns Gauges and Controllers Note: Assembly Hardware and Technical Information................. Gasket are shown on the same Single Position............................ 4-14 6-7 Multiple Position 3, 4, and 5 Gauge Tube Ordering page Information................................. Crucibles..................................... 4-15 6-7 Controller Ordering Information.. Rod Fed...................................... 4-17 6-8 ASA Flanges Accessories Pirani Gauges and Standard ASA Flanges...............7-24 Replacement Parts, Controllers ASA/ConFlat Adapter Flanges... 7-25 Feedthroughs, Technical Information................. 6-9 Beam Sweep................. 4-18 Ordering Information................... 6-9 Crucbile Liners............... 4-18 e-Gun Power Supplies Bayard-Alpert Ionization 4 kW Power Supply.................... 4-19 Gauges 6 kW Power Supply.................... 4-20 Glass Envelope Type................
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