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Copper Electroplating Parameters Optimisation

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Copper Electroplating Parameters Optimisation Copper Electroplating Parameters Optimisation L.M.A. Ferreira*, CERN , Geneva, Switzerland *Corresponding author: CERN, CH-1211 Geneva 23, [email protected] Abstract: Copper electroplating is a well-known no peel off to avoid contamination of the SCRF and widely used industrial surface finishing device. process, however it becomes less attainable when Aqueous based copper electroplating seems complex geometries meet tight tolerances. The the most reliable, flexible, cost effective method work presents a copper plating process for an to create this copper layer on stainless steel base accelerator component, which was modelled via material structures; this however, doesn’t imply a the COMSOL Multiphysics® Electrodeposition straightforward application, as the coupler Module. The objective was to evaluate two geometry is complex and tolerances are tight. At existing copper plating baths and their impact on CERN, two existing copper electroplating baths the current density distribution and other plating were tested to evaluate the feasibility of plating parameters. Only electrochemical parameters three couplers subcomponents within the were taken into account. demanded dimensional tolerances. COMSOL Multiphysics® Electrodeposition Module was Keywords: Electroplating, current density, used to optimise the counter electrode geometry thickness distribution. with the objective of achieving an as even as possible copper layer thickness, as well as 1. Introduction obtaining the plating parameters such as applied current density and plating time. Particle accelerators can go from relatively small equipment such as cathodic tubes, present 2. Physics and assumptions in old television devices, to medium size (several meters) for medical applications or up to very An electrochemical cell is characterised by the large (several kilometres), dedicated to relation between the current that passes and the fundamental or applied R&D. Present and future applied voltage. This relation depends on various very large machines rely on superconducting physical phenomena in the electrodes, in the devices such as accelerating radio frequency electrolyte and at the interface between them. (SCRF) cavities or magnets. Present In the electrolyte, the current density vector superconducting materials operate near zero can be given by the Nernst-Planck equation by Kelvin; this very low temperatures have also an incorporating the current density expression, see impact on the design of nearby non equation 1: superconducting equipment, such as the couplers. ∑ ∑ The performance of these superconducting , structures fully outcomes the construction and ∑ (1) operating costs of the inherent cryogenics where il stands for current density vector in the services. electrolyte, F the Faraday constant, zi the charge Power couplers interfere directly with SCRF number of each ion, Di the diffusion coefficient, devices as they are responsible for: transfer the RF ci the concentration of each ion, the electrolyte power to the cavity and match the impedance; potential, um,i the ion mobility and u the velocity bridge the gap between room and cryogenic vector. temperature; provide a vacuum barrier for the The three terms on the right-hand side beam vacuum. Besides a stainless steel structural represent the contributions of diffusion, migration and mechanical assembly, a copper coating is and convection to the current density, necessary on certain surfaces of a coupler. This respectively. For solutions containing an excess copper layer provides: high electrical of supporting electrolyte, the ionic migration term conductivity for low resistive RF losses and less can be neglected; if the electrolyte is well stirred heating (high RRR); low thermal conductance for and/or currents are kept so low that the electrode low static cryogenic losses (thin layer). The layer surface concentration do not differ appreciably must have: a good uniformity of thickness; low from the bulk values, then ionic diffusion term surface roughness to avoid field enhancement and can be neglected as well. Under these conditions, Excerpt from the Proceedings of the 2015 COMSOL Conference in Grenoble the equation can be simplified, and becomes axisymmetric geometry, but small although identical to Ohm’s law. important features, make them fully 3D The electrodes, usually metals, obey to the geometries. ohm’s law and the current density vector can be In terms of physics, only electrochemical defined thereafter, see equation 2. aspects were taken into account. As already At the interface, the electrode kinetics may justified in chapter 2, the chosen physics interface have an impact on the overall potential and this is was Electrochemistry > Electrodeposition > defined by the overpotential. Electrodeposition, Deformed Geometry > Thus we get these relations: Electrodeposition, Secondary (edsec). The chosen study was time dependent with Electrode: , with conservation of initialisation. current . (2) 3.1 Geometry Electrolyte: , with conservation of The geometry of each coupler subcomponent current . (3) was processed individually and originated a Electrode/Electrolyte interface: dedicated Comsol study. This reflects also the reality for the copper plating as each component , (4) is also electroplated separately. The geometry was introduced into Comsol via STP file format (3D Where is stands for current density in the CAD) which wasn’t originally simplified to be electrode, σs the conductivity of the electrode, processed in Comsol. This implied a significant the electric potential in the electrode, Qs the import post processing as can be seen in figure 1. general current source for the electrode, il stands for current density in the electrolyte, σl the conductivity of the electrolyte, the electric potential in the electrolyte, Qs the general current source for the electrode, hm the activation overpotential and Eeq,m the equilibrium potential of a reaction. The relation between current density and overpotential can be described by the Butler- Volmer or Tafel equations, and also by experimental data obtained from polarisation curves. Aqueous based electroplating are usually governed by secondary current distribution. These implies that variation composition in the electrolyte are negligible and thus, that the electrolyte conductivity is uniform; also that the electrode kinetics, charge transfer, are taken into account. For this specific application, these constraints are respected, as the electrolyte species concentrations are high, the electrolyte agitation is vigorous and the overpotential is small but not negligible. Figure 1: Coupler WEC subcomponent as imported 3. Model creation (top) and post processing (bottom). The description of the model follows the steps The following figure presents the two as defined in Comsol 4.4 [1]. remaining coupler subcomponents geometries, The electrochemical cell design in Comsol already after the import post processing starts by defining the model geometry. The three procedure. It concerns the CEC and the WIC coupler components have a general 2 D subcomponents. Excerpt from the Proceedings of the 2015 COMSOL Conference in Grenoble External Depositing Electrode nodes were added in order to set the boundary conditions for both the cathode and the anode. The main input value for the cathode was the boundary condition which was defined as the Average Current Density, also referred in this document as applied current density; this choice allows to see the working point on the cathodic polarisation curve (see figure 3) that was used to define the kinetics expression at the Electrode Reaction node (see equation 5). For the anode node, the inputs were given by one anodic polarisation curve and the boundary was set to Electric Potential and equal to zero. 200 ) -2 100 0 -2-10123 -100 Overpotential (V) Current density (A.m density Current -200 Cyanide plating bath anodic branch Cyanide plating bath cathodic branch Figure 2: Coupler CEC (top) and WIC (bottom) Sulfate plating bath anodic branch subcomponents after import processing. Sulfate plating bath cathodic branch Figure 3: Polarisation curves from the two copper Coupler subcomponents define the cathode plating baths. geometry, but still missing is the anode geometry. The main part of the simulation work performed ""._1 (5) with Comsol, was dedicated to the definition of the anode geometry capable of achieving the most where: iloc is the local current density; int”” is the even copper layer thickness for each different polarisation curve either for the cathode or the subcomponent; this will be described later on. anode defined by an interpolation function of In terms of overall electrochemical cell experimental data; edsec.eta_er1 is the local geometry, there is a main difference between overpotential as defined by Comsol. CEC, WEC and WIC; the plating surface of both The occurring chemical reactions are related CEC and WEC is the internal one and thus the to the two different copper plating baths. The first electrochemical cell overall boundaries are concerns a copper sulfate bath with the following defined by the subcomponent itself; however for composition: WIC, where the plating surface is the external CuSO4.5H20 75 g/l one, the overall boundaries were defined by the H2SO4 (96%) 100 ml/l size of the existing electroplating tank. Cl (NaCl) 0.075 g/l 3.2 Materials This electrolyte has a conductivity of 22.6 S.m-1, All necessary information regarding materials at room temperature. The cathodic
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