Copper Electrodeposition in a Magnetic Field
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Characterization of Copper Electroplating And
CHARACTERIZATION OF COPPER ELECTROPLATING AND ELECTROPOLISHING PROCESSES FOR SEMICONDUCTOR INTERCONNECT METALLIZATION by JULIE MARIE MENDEZ Submitted in partial fulfillment of the requirements For the degree of Doctor of Philosophy Dissertation Advisor: Dr. Uziel Landau Department of Chemical Engineering CASE WESTERN RESERVE UNIVERSITY August, 2009 CASE WESTERN RESERVE UNIVERSITY SCHOOL OF GRADUATE STUDIES We hereby approve the thesis/dissertation of _____________________________________________________ candidate for the ______________________degree *. (signed)_______________________________________________ (chair of the committee) ________________________________________________ ________________________________________________ ________________________________________________ ________________________________________________ ________________________________________________ (date) _______________________ *We also certify that written approval has been obtained for any proprietary material contained therein. TABLE OF CONTENTS Page Number List of Tables 3 List of Figures 4 Acknowledgements 9 List of Symbols 10 Abstract 13 1. Introduction 15 1.1 Semiconductor Interconnect Metallization – Process Description 15 1.2 Mechanistic Aspects of Bottom-up Fill 20 1.3 Electropolishing 22 1.4 Topics Addressed in the Dissertation 24 2. Experimental Studies of Copper Electropolishing 26 2.1 Experimental Procedure 29 2.2 Polarization Studies 30 2.3 Current Steps 34 2.3.1 Current Stepped to a Level below Limiting Current 34 2.3.2 Current Stepped to the Limiting -
Resume Wonsub Chung
Resume Wonsub Chung Contact Information Wonsub Chung, ph.D. Professor Division of Material Science & Engineering Pusan National University 2, Busandaehak-ro 63beon-gil, Geumjeong-gu Busan, 46241 Korea e-mail:[email protected] Tel: +82-51-510-2386 H.P. : +82-10-8517-0855 Fax : +82-51-514-4457 Personal DOB : 1-23-1957, Male, Married, Born in South Korea Education Ph.D., Materials Science and Engineering. 1985-1989 Kyushu University, Hukuoka, Japan(Advisor: Prof. Ono Yoichi) Thesis: A Basic Study on Gas Reduction of Calcium Ferrite M.S., Materials Science and Engineering, 1983-1985 Pusan National University, Busan, South Korea (Advisor: Prof. Kyusub Song) Thesis: B.S., Materials Science and Engineering, 1978-1983 Pusan National University, Busan, South Korea, Major Career ∎ 1989-1992 Chief Researcher RIST(Research Institute of Industrial Science & Technology) Iron Ore Melting Reduction Research Project Team ∎ 1993-Present : Professor Pusan National University Division of Material Science & Engineering ∎ 1999-2000 Exchange professor Colorado School of Mines, Colorado, USA Research Interests Energy saving and Radiation Heat transfer and dissipation Study on Water Electrolysis Using Radiation and Electrical Energy Study on Reduction of Covalent Bonding Energy of Reaction Using Radiation and Electric Energy A study on the gasification reaction of coal using radiant energy Electrochemical anodic oxidation and deposition Corrosion and prevention of metallic materials (Mg, Al alloys and steels) Surface physics and chemistry Expertise -
Electroless Copper Plating a Review: Part I
Electroless Copper Plating A Review: Part I By Cheryl A. Deckert Electroless, or autocatalytic, metal plating is a non- necessary components of an electro- electrolytic method of deposition from solution. The less plating solution are the metal salt minimum necessary components of an electroless and a reducing agent. The source of plating solution are a metal salt and an appropriate copper is a simple cupric salt, such as reducing agent. An additional requirement is that the copper sulfate, chloride or nitrate. solution, although thermodynamically unstable, is Various common reducing agents stable in practice until a suitable catalyzed surface is have been suggested7 for use in elec- introduced. Plating is then initiated upon the catalyzed troless copper baths, namely formal- surface, and the plating reaction is sustained by the dehyde, dimethylamine borane, boro- catalytic nature of the plated metal surface itself. This hydride, hypophosphite,8 hydrazine, definition of electroless plating eliminates both those sugars (sucrose, glucose, etc.), and solutions that spontaneously plate on all surfaces dithionite. In practice, however, vir- (“homogeneous chemical reduction”), such as silver tually all commercial electroless cop- mirroring solutions; also “immersion” plating solu- per solutions have utilized formalde- tions, which deposit by displacement a very thin film of hyde as reducing agent. This is a a relatively noble metal onto the surface of a sacrificial, result of the combination of cost, less noble metal. effectiveness, and ease -
Steel Production Through Electrolysis: Impacts for Electricity Consumption 0, 0, 75
Font Family: Benton Sans 131, 176, 70 Steel production through electrolysis: impacts for electricity consumption 0, 0, 75 204, 102, 51 Adam Rauwerdink 144, 144, 144 VP, Business Development October 18, 2019 Font Family: A 3,000 year old formula Benton Sans Iron Ore Carbon (Coal) Iron Carbon Dioxide 131, 176, 70 Fe2O3 C Fe CO2 0, 0, 75 204, 102, 51 >2 144, 144, 144 Gt CO2 per year (8% of global emissions) Iron Age 1000 BC Digital Age 2019 2 Boston Metal | 2019 Font Family: Steel in 2018 Benton Sans 131, 176, 70 Aluminium is #2 at 1,800 64 million tonnes 0, 0, 75 million tonnes 204, 102, 51 70% 30% 144, 144, 144 Integrated Steel Mill Mini Mill (Iron ore new steel units) (Scrap recycled steel units) Source: World Steel Association 3 Boston Metal | 2019 Font Family: Integrated steel mill: material flow Benton Sans 131, 176, 70 0, 0, 75 204, 102, 51 144, 144, 144 4 Boston Metal | 2019 Font Family: Molten oxide electrolysis (MOE) is emissions free Benton Sans Molten Oxide Electrolysis (MOE) 131, 176, 70 Iron Ore Electricity Iron Oxygen 0, 0, 75 - Fe2O3 e Fe O2 204, 102, 51 144, 144, 144 No carbon in the process = No CO2 emitted Electricity decarbonization eliminates/reduces indirect emissions! 5 Boston Metal | 2019 Font Family: Changing the formula from coal to electricity Benton Sans Iron Ore Carbon (Coal) Iron Carbon Dioxide 131, 176, 70 Fe2O3 C Fe CO2 0, 0, 75 204, 102, 51 Molten Oxide Electrolysis (MOE) 144, 144, 144 Iron Ore Electricity Iron Oxygen - Fe2O3 e Fe O2 6 Boston Metal | 2019 Font Family: MOE is more energy efficient Benton -
Electrochemistry of Fuel Cell - Kouichi Takizawa
ENERGY CARRIERS AND CONVERSION SYSTEMS – Vol. II - Electrochemistry of Fuel Cell - Kouichi Takizawa ELECTROCHEMISTRY OF FUEL CELL Kouichi Takizawa Tokyo Electric Power Company, Tokyo, Japan Keywords : electrochemistry, fuel cell, electrochemical reaction, chemical energy, anode, cathode, electrolyte, Nernst equation, hydrogen-oxygen fuel cell, electromotive force Contents 1. Introduction 2. Principle of Electricity Generation by Fuel Cells 3. Electricity Generation Characteristics of Fuel Cells 4. Fuel Cell Efficiency Glossary Bibliography Biographical Sketch Summary Fuel cells are devices that utilize electrochemical reactions to generate electric power. They are believed to give a significant impact on the future energy system. In particular, when hydrogen can be generated from renewable energy resources, it is certain that the fuel cell should play a significant role. Even today, some types of fuel cells have been already used in practical applications such as combined heat and power generation applications and space vehicle applications. Though research and development activities are still required, the fuel cell technology is one of the most important technologies that allow us to draw the environment friendly society in the twenty-first century. This section describes the general introduction of fuel cell technology with a brief overview of the principle of fuel cells and their historical background. 1. Introduction A fuel cellUNESCO is a system of electric power – generation,EOLSS which utilizes electrochemical reactions. It can produce electric power by inducing both a reaction to oxidize hydrogen obtained by reforming natural gas or other fuels, and a reaction to reduce oxygen in the air, each occurringSAMPLE at separate electrodes conne CHAPTERScted to an external circuit. -
Teaching H. C. Ørsted's Scientific Work in Danish High School Physics
UNIVERSITY OF COPENHAGEN FACULTY OF SCIENCE Ida Marie Monberg Hindsholm Teaching H. C. Ørsted's Scientific Work in Danish High School Physics Masterʹs thesis Department of Science Education 19 July 2018 Master's thesis Teaching H. C. Ørsted’s Scientific Work in Danish High School Physics Submitted 19 July 2018 Author Ida Marie Monberg Hindsholm, B.Sc. E-mail [email protected] Departments Niels Bohr Institute, University of Copenhagen Department of Science Education, University of Copenhagen Main supervisor Ricardo Avelar Sotomaior Karam, Associate Professor, Department of Science Education, University of Copenhagen Co-supervisor Steen Harle Hansen, Associate Professor, Niels Bohr Institute, University of Copenhagen 1 Contents 1 Introduction . 1 2 The Material: H. C. Ørsted's Work . 3 2.1 The Life of Hans Christian Ørsted . 3 2.2 Ørsted’s Metaphysical Framework: The Dynamical Sys- tem............................. 6 2.3 Ritter and the failure in Paris . 9 2.4 Ørsted’s work with acoustic and electric figures . 12 2.5 The discovery of electromagnetism . 16 2.6 What I Use for the Teaching Sequence . 19 3 Didactic Theory . 20 3.1 Constructivist teaching . 20 3.2 Inquiry Teaching . 22 3.3 HIPST . 24 4 The Purpose and Design of the Teaching Sequence . 27 4.1 Factual details and lesson plan . 28 5 Analysis of Transcripts and Writings . 40 5.1 Method of Analysis . 40 5.2 Practical Problems . 41 5.3 Reading Original Ørsted's Texts . 42 5.4 Inquiry and Experiments . 43 5.5 "Role play" - Thinking like Ørsted . 48 5.6 The Reflection Corner . 51 5.7 Evaluation: The Learning Objectives . -
Electrochemistry –An Oxidizing Agent Is a Species That Oxidizes Another Species; It Is Itself Reduced
Oxidation-Reduction Reactions Chapter 17 • Describing Oxidation-Reduction Reactions Electrochemistry –An oxidizing agent is a species that oxidizes another species; it is itself reduced. –A reducing agent is a species that reduces another species; it is itself oxidized. Loss of 2 e-1 oxidation reducing agent +2 +2 Fe( s) + Cu (aq) → Fe (aq) + Cu( s) oxidizing agent Gain of 2 e-1 reduction Skeleton Oxidation-Reduction Equations Electrochemistry ! Identify what species is being oxidized (this will be the “reducing agent”) ! Identify what species is being •The study of the interchange of reduced (this will be the “oxidizing agent”) chemical and electrical energy. ! What species result from the oxidation and reduction? ! Does the reaction occur in acidic or basic solution? 2+ - 3+ 2+ Fe (aq) + MnO4 (aq) 6 Fe (aq) + Mn (aq) Steps in Balancing Oxidation-Reduction Review of Terms Equations in Acidic solutions 1. Assign oxidation numbers to • oxidation-reduction (redox) each atom so that you know reaction: involves a transfer of what is oxidized and what is electrons from the reducing agent to reduced 2. Split the skeleton equation into the oxidizing agent. two half-reactions-one for the oxidation reaction (element • oxidation: loss of electrons increases in oxidation number) and one for the reduction (element decreases in oxidation • reduction: gain of electrons number) 2+ 3+ - 2+ Fe (aq) º Fe (aq) MnO4 (aq) º Mn (aq) 1 3. Complete and balance each half reaction Galvanic Cell a. Balance all atoms except O and H 2+ 3+ - 2+ (Voltaic Cell) Fe (aq) º Fe (aq) MnO4 (aq) º Mn (aq) b. -
Advanced Semiconductor Plating – Key Fundamentals
Process Application Note PAN100 Advanced Semiconductor Plating – Key Fundamentals Cody Carter and John Ghekiere, ClassOne Technology Introduction In semiconductor processing, each of the hundreds, millions, even billions of individual features on a given product wafer must meet tight specifications in order to achieve the product quality and yields required in today’s fabs. Literally, every individual feature must be engineered to near perfection. In electrochemical deposition (ECD) processes, fabs must have the ability to produce well-formed features that are not only void-free but also of perfect dimension; and all of this must be accomplished within an acceptable total system cost and oper- ating cost. ClassOne has developed this Advanced Semiconductor Plating Series to provide theory and practice guidance for today’s elec- troplating engineers and operators to help them optimize their processes. Because of the broad scope of the topic, this series is arranged in four parts, as follows: Part 1: Key Fundamentals and How to Dial In Target Plated Thickness Part 2: Factors Affecting Localized Plating Rates and How to Optimize Cross-wafer Uniformity Part 3: Wafer and Feature Effects and How to Optimize Feature Uniformity Part 4: System-level Factors and How to Establish Repeatable Plating Performance Individual Wafer in an Electrolytic Cell A fundamental understanding of the basic electrolytic cell Figure 1. Electrolytic cell provides a valuable baseline from which to more deeply explore the specialized plating applications in the semicon- ductor industry. The most advanced plating applications for semiconductor manufacturing are based on the same principles as a standard, electrolytic cell. Figure 1 depicts an electrolytic cell with the following functional components: positive and negative electrodes, electrolyte, and power supply. -
Electrolysis Through Magnetic Field for Future Renewable Energy
International Journal of Recent Technology and Engineering (IJRTE) ISSN: 2277-3878, Volume-8 Issue-2S, July 2019 Electrolysis Through Magnetic Field for Future Renewable Energy Asaad Zuhair Abdulameer, Zolkafle Buntat, Rai Naveed Arshad, Zainuddin Nawaw Production of Hydroxide through the electrolysis of water, Abstract: Hydrocarbon fuels are the best source of energy; resolve numerous possible problems of using hydroxide as a however, they have some drawbacks. Because of extensive usage fuel supplement [9, 10]. In this attempt, magnetic field and replacement difficulties, it is not financially possible to electrolysis is a technique of electrolysis that is a more entirely disregard them in the coming days. Hydrogen with Oxygen (hydroxide-HHO) gas as a fuel supplement is one convenient light source to compare with solar energy for possible way to reduce consumption and emissions of commercial electrolysis [11]. Although this process gives a hydrocarbon fuels. However, the accessibility and rate of small proportion of hydrogen production by using the current compressed hydrogen (H2) have made it challenging. Electrolysis method, we believed that this process would contribute a lot of water, resolve numerous possible complications of using to society if the existing methods are upgraded with suitable hydroxide for fuel to progress hydrocarbon burning. This materials and substances. research introduces a new design of electrolyzer with proper selection of electrode material and types integrated with magnetic field system, which can reduce the energy consumption. The effect of the optimum magnetic field strength was measured for this process with tap and distilled water. Two supplementary compounds, Sodium Hydroxide (NaOH) and Soda (NaHCO3), with concentration 3333ppm 1.5 litres of the electrolyte was used in this process. -
The PCB Magazine, May 2015
& ETCHING Electroplating May 2015 PLATING 22 Through-Holes with Different Geometry: A Novel and High-Productivity Process ENEPIG: 44 The Plating Process May 2015 • The PCB Magazine 1 13th ANNUAL MEPTEC MEMS TECHNOLOGY SYMPOSIUM Enabling the Internet of Things: Foundations of MEMS Process, Design, Packaging & Test MEMS based products are key en- ablers in the Internet of Things (IoT) Wednesday, May 20, 2015 revolution. The availability of large numbers of reliable and cost-effec- Holiday Inn San Jose Airport • San Jose, California tive MEMS sensors and actuators KEYNOTE SPEAKER has driven an explosion in the num- DIAMOND SPONSOR ber of IoT applications to reach the Creating a Trillion Sensors Based Future market. The Internet of Things is Dr. Janusz Bryzek pushing MEMS technology to new Chair, TSensors Summits levels of performance and bringing forth new requirements. Sensors are one of the eight exponential technologies enabling growth of goods and services faster than This event will showcase advances growth of demand for them. Exponential technologies enable Exponen- in core technologies that form the tial Organizations (ExO), which demonstrate sales growth to a billion SILVER SPONSOR foundation of the creation of MEMS- dollars in one to three years. New Exponential organizations are expected based products. Experts from the to replace 40% of Fortune 500 companies in the coming decade, in a field will present the latest innova- similar mode to Kodak replacement by Instagram in 2012. Presented will tions in MEMS fabrication processes, an amazing showcase of available sensor based products. packaging, assembly, & test. Insight will be provided as to new technolo- EXHIBITING COMPANIES TO DATE gies, materials and software that will fuel the creation of new devices cou- pled with traditional MEMS technol- ogies to address new markets and new requirements for the Internet of Things. -
The Effect of Magnetic Field on the Dynamics of Gas Bubbles in Water Electrolysis
The Effect of Magnetic Field on the Dynamics of Gas Bubbles in Water Electrolysis Yan-Hom Li ( [email protected] ) Department of Mechanical and Aerospace Engineering, Chung-Cheng Institute of Technology, National Defense University, Taiwan Yen-Ju Chen Department of Mechanical and Aerospace Engineering, Chung-Cheng Institute of Technology, National Defense University, Taiwan Research Article Keywords: gas bubbles, platinum electrodes, magnetic eld result, downward Lorentz forces Posted Date: March 8th, 2021 DOI: https://doi.org/10.21203/rs.3.rs-283081/v1 License: This work is licensed under a Creative Commons Attribution 4.0 International License. Read Full License Version of Record: A version of this preprint was published at Scientic Reports on April 30th, 2021. See the published version at https://doi.org/10.1038/s41598-021-87947-9. The effect of magnetic field on the dynamics of gas bubbles in water electrolysis Yan-Hom Li1,2,*, Yen-Ju Chen 1,⸸ 1Department of Mechanical and Aerospace Engineering, Chung-Cheng Institute of Technology, National Defense University, Taoyuan, 335, Taiwan, 2System Engineering and Technology Program, National Yang Ming Chiao Tung University, Hsin-Chu, 300, Taiwan *corresponding. hom_li @hotmail.com ⸸these authors contributed equally to this work Abstract In this work, the movement of the gas bubbles evolved from the platinum electrodes in the influence of various magnetic field configurations are experimentally investigated. The oxygen and hydrogen bubbles respectively evolve from the surface of anode and cathode have distinctive behaviors in the presence of magnetic fields due to their paramagnetic and diamagnetic characteristics. The magnetic field perpendicular to the surface of the horizontal electrode induces the revolution of the bubbles. -
Electrolysis of Salt Water
ELECTROLYSIS OF SALT WATER Unit: Salinity Patterns & the Water Cycle l Grade Level: High school l Time Required: Two 45 min. periods l Content Standard: NSES Physical Science, properties and changes of properties in matter; atoms have measurable properties such as electrical charge. l Ocean Literacy Principle 1e: Most of of Earth's water (97%) is in the ocean. Seawater has unique properties: it is saline, its freezing point is slightly lower than fresh water, its density is slightly higher, its electrical conductivity is much higher, and it is slightly basic. Big Idea: Water is comprised of two elements – hydrogen (H) and oxygen (O). Distilled water is pure and free of salts; thus it is a very poor conductor of electricity. By adding ordinary table salt (NaCl) to distilled water, it becomes an electrolyte solution, able to conduct electricity. Key Concepts o Ionic compounds such as salt water, conduct electricity when they dissolve in water. o Ionic compounds consist of two or more ions that are held together by electrical attraction. One of the ions has a positive charge (called a "cation") and the other has a negative charge ("anion"). o Molecular compounds, such as water, are made of individual molecules that are bound together by shared electrons (i.e., covalent bonds). o Essential Questions o What happens to salt when it is dissolved in water? o What are electrolytes? o How can we determine the volume of dissolved ions in a water sample? o How are atoms held together in an element? Knowledge and Skills o Conduct an experiment to see that water can be split into its constituent ions through the process of electrolysis.