DOCSLIB.ORG

Optical Properties of Refractory Metal Based Thin Films

Total Page：16

File Type：pdf, Size：1020Kb

Download full-text PDF Read full-text
Optical Properties of Refractory Metal Based Thin Films Vol. 9, No. 8 | 1 Aug 2018 | OPTICAL MATERIALS EXPRESS 2072 Optical properties of refractory metal based thin films 1,2,* 1 1 ARCHAN BANERJEE, ROBERT M. HEATH, DMITRY MOROZOV, DILINI 1 1 1 HEMAKUMARA, UMBERTO NASTI, IAIN THAYNE, AND ROBERT H. 1 HADFIELD 1School of Engineering, University of Glasgow, Glasgow G12 8QQ, UK 2Presently at: Centre for Quantum Photonics, University of Bristol, Bristol BS8 1TH, UK *[email protected] Abstract There is growing interest in refractory metal thin films for a range of emerging nanophotonic applications, including high temperature plasmonic structures and infrared superconducting single photon detectors. We present a detailed comparison of optical properties for key representative materials in this class (NbN, NbTiN, TiN and MoSi) with texture varying from crystalline to amorphous. NbN, NbTiN and MoSi have been grown in an ultra-high vacuum sputter deposition system on silicon substrates at room temperature. Two different techniques (sputtering and atomic layer deposition) have been employed to deposit TiN. We have carried out variable angle ellipsometric measurements of optical properties from ultraviolet to mid-infrared wavelengths. We compare with high resolution transmission electron microscopy analysis of microstructure. Sputter-deposited TiN and MoSi have shown the highest optical absorption in the infrared wavelengths relative to NbN, NbTiN and ALD- deposited TiN. We have also modelled the performance of a semi-infinite metal air interface as a plasmonic structure with the above mentioned refractory metal based thin films as the plasmonic components. This study has implications for the design of next-generation superconducting nanowire single photon detectors and plasmonic nanostructure-based devices. Published by The Optical Society under the terms of the Creative Commons Attribution 4.0 License. Further distribution of this work must maintain attribution to the author(s) and the published article’s title, journal citation, and DOI. OCIS codes: (160.4670) Optical materials; (310.6860) Thin films, optical properties; (120.4530) Optical constants; (250.5403) Plasmonics; (040.3060) Infrared detectors. References and links 1. T. E. Tietz and J. W. Wilson, Behavior and Properties of Refractory Metals (Stanford University Press, 1965). 2. M. Bauccio, ASM Metals Reference Book (ASM International, 1993). 3. E. Lassner and W.-D. Schubert, Tungsten : Properties, Chemistry, Technology of the Element, Alloys, and Chemical Compounds (Kluwer Academic/Plenum Publishers, 1999). 4. D. Cristea, I. Ghiuță, and D. Munteanu, “Tantalum based materials for implants and prosthesis applications,” Bull. Transilv. Univ. Braşov 857(2), (2015). 5. M. E. Packer and M. J. Murray, “A floating zone furnace for melting refractory metals and metal-like compounds,” J. Phys. Educ. 5(3), 246 (1972). 6. R. E. Smallwood, ASTM Committee B-10 on Reactive and Refractory Metals and Alloys, and L. Symposium on Refractory Metals and Their Industrial Applications, Refractory Metals and Their Industrial Applications: A Symposium (ASTM, 1984). 7. A. Boltasseva and H. A. Atwater, “Materials science. Low-loss plasmonic metamaterials,” Science 331(6015), 290–291 (2011). 8. A. Banerjee, L. J. Baker, A. Doye, M. Nord, R. M. Heath, K. Erotokritou, D. Bosworth, Z. H. Barber, I. MacLaren, and R. H. Hadfield, “Characterisation of amorphous molybdenum silicide (MoSi) superconducting thin films and nanowires,” Supercond. Sci. Technol. 30(8), 084010 (2017). 9. A. E. Lita, V. B. Verma, R. D. Horansky, J. M. Shainline, R. P. Mirin, and S. Nam, “Materials Development for High Efficiency Superconducting Nanowire Single-Photon Detectors,” MRS Proc. 1807, 1–6 (2015). 10. D. Bosworth, S.-L. Sahonta, R. H. Hadfield, and Z. H. Barber, “Amorphous molybdenum silicon superconducting thin films,” AIP Adv. 5(8), 087106 (2015). 11. D. M. O’Carroll, “Nanophotonics and plasmonics for solar energy harvesting and conversion,” J. Photonics Energy 5(1), 057001 (2015). #326346 https://doi.org/10.1364/OME.8.002072 Journal © 2018 Received 23 Mar 2018; revised 19 May 2018; accepted 21 Jun 2018; published 5 Jul 2018 Vol. 9, No. 8 | 1 Aug 2018 | OPTICAL MATERIALS EXPRESS 2073 12. J. N. Anker, W. P. Hall, O. Lyandres, N. C. Shah, J. Zhao, and R. P. Van Duyne, “Biosensing with plasmonic nanosensors,” Nat. Mater. 7(6), 442–453 (2008). 13. A. Lalisse, G. Tessier, J. Plain, and G. Baffou, “Plasmonic efficiencies of nanoparticles made of metal nitrides (TiN, ZrN) compared with gold,” Sci. Rep. 6(1), 38647 (2016). 14. P. Patsalas, N. Kalfagiannis, and S. Kassavetis, “Optical properties and plasmonic performance of titanium nitride,” Materials (Basel) 8(12), 3128–3154 (2015). 15. W. Li, U. Guler, N. Kinsey, G. V. Naik, A. Boltasseva, J. Guan, V. M. Shalaev, and A. V. Kildishev, “Refractory plasmonics with titanium nitride: broadband metamaterial absorber,” Adv. Mater. 26(47), 7959– 7965 (2014). 16. J. A. Briggs, G. V. Naik, Y. Zhao, T. A. Petach, K. Sahasrabuddhe, D. Goldhaber-Gordon, N. A. Melosh, and J. A. Dionne, “Temperature-dependent optical properties of titanium nitride,” Appl. Phys. Lett. 110(10), 101901 (2017). 17. J. Chen, J. B. Altepeter, M. Medic, K. F. Lee, B. Gokden, R. H. Hadfield, S. W. Nam, and P. Kumar, “Demonstration of a quantum controlled-NOT gate in the telecommunications band,” Phys. Rev. Lett. 100(13), 133603 (2008). 18. R. H. Hadfield, M. J. Stevens, R. P. Mirin, and S. W. Nam, “Single-photon source characterization with twin infrared-sensitive superconducting single-photon detectors,” J. Appl. Phys. 101(10), 103104 (2007). 19. J. Zhang, N. Boiadjieva, G. Chulkova, H. Deslandes, G. N. Gol’tsman, A. Korneev, P. Kouminov, M. Leibowitz, W. Lo, R. Malinsky, O. Okunev, A. Pearlman, W. Slysz, K. Smirnov, C. Tsao, A. Verevkin, B. Voronov, K. Wilsher, and R. Sobolewski, “Noninvasive CMOS circuit testing with NbN superconducting single-photon detectors,” Electron. Lett. 39(14), 1086 (2003). 20. C. M. Natarajan, M. G. Tanner, and R. H. Hadfield, “Superconducting nanowire single-photon detectors: physics and applications,” Supercond. Sci. Technol. 25(6), 063001 (2012). 21. G. N. Gol’tsman, O. Okunev, G. Chulkova, A. Lipatov, A. Semenov, K. Smirnov, B. Voronov, A. Dzardanov, C. Williams, and R. Sobolewski, “Picosecond superconducting single-photon optical detector,” Appl. Phys. Lett. 79(6), 705–707 (2001). 22. S. Miki, T. Yamashita, H. Terai, and Z. Wang, “High performance fiber-coupled NbTiN superconducting nanowire single photon detectors with Gifford-McMahon cryocooler,” Opt. Express 21(8), 10208–10214 (2013). 23. F. Marsili, D. Bitauld, A. Fiore, A. Gaggero, F. Mattioli, R. Leoni, M. Benkahoul, and F. Lévy, “High efficiency NbN nanowire superconducting single photon detectors fabricated on MgO substrates from a low temperature process,” Opt. Express 16(5), 3191–3196 (2008). 24. J. Bardeen, L. N. Cooper, and J. R. Schrieffer, “Theory of superconductivity,” Phys. Rev. 108(5), 1175–1204 (1957). 25. M. S. Allman, V. B. Verma, M. Stevens, T. Gerrits, R. D. Horansky, E. Lita, F. Marsili, A. Beyer, M. D. Shaw, D. Kumor, R. Mirin, and S. W. Nam, “A near-infrared 64-pixel superconducting nanowire single photon detector array with integrated multiplexed readout,” Appl. Phys. Lett. 106(19), 192601 (2015). 26. J. Li, R. A. Kirkwood, L. J. Baker, D. Bosworth, K. Erotokritou, A. Banerjee, R. M. Heath, C. M. Natarajan, Z. H. Barber, M. Sorel, and R. H. Hadfield, “Nano-optical single-photon response mapping of waveguide integrated molybdenum silicide (MoSi) superconducting nanowires,” Opt. Express 24(13), 13931–13938 (2016). 27. R. M. Heath, M. G. Tanner, T. D. Drysdale, S. Miki, V. Giannini, S. A. Maier, and R. H. Hadfield, “Nanoantenna enhancement for telecom-wavelength superconducting single photon detectors,” Nano Lett. 15(2), 819–822 (2015). 28. W. M. Haynes, CRC Handbook of Chemistry and Physics : A Ready-Reference Book of Chemical and Physical Data, 92nd ed. (CRC Press, 2011). 29. M. E. Straumanis and S. Zyszczynski, “Lattice parameters, thermal expansion coefficients and densities of Nb, and of solid solutions Nb–O and Nb–N–O and their defect structure,” J. Appl. Cryst. 3(1), 1–6 (1970). 30. C. M. Perlov and C. Y. Fong, “Calculation of the superconducting transition temperature in niobium,” Phys. Rev. B 29(3), 1243–1249 (1984). 31. P. Ettmayer, R. Kieffer, and F. Hattinger, “Determination of melting points of metal nitrides under nitrogen pressure,” Metall 28(12), 1151–1156 (1974). 32. G. Zou, M. Jain, H. Zhou, H. Luo, S. A. Baily, L. Civale, E. Bauer, T. M. McCleskey, A. K. Burrell, and Q. Jia, “Ultrathin epitaxial superconducting niobium nitride films grown by a chemical solution technique,” Chem. Commun. (Camb.) 44(45), 6022–6024 (2008). 33. R. G. Ross and W. Hume-Rothery, “High temperature X-ray metallography: I. A new debye-scherrer camera for use at very high temperatures II. A new parafocusing camera III. Applications to the study of chromium, hafnium, molybdenum, rhodium, ruthenium and tungsten,” J. Less Common Met. 5(3), 258–270 (1963). 34. I. G. D ’yakov and A. D. Shvets, “Investigation of superconducting properties of molybdenum,” Sov. Phys. 22(49), 1091–1093 (1966). 35. A. Misra, J. J. Petrovic, and T. E. Mitchell, “Microstructures and mechanical properties of a Mo3Si-Mo5Si3 composite,” Scr. Mater. 40(2), 191–196 (1998). 36. R. R. Pawar and V. T. Deshpande, “The anisotropy of the thermal expansion of α-titanium,” Acta Crystallogr. A 24(2), 316–317 (1968). 37. M. C. Steele and R. A. Hein, “Superconductivity of Titanium,” Phys. Rev. 92(2), 243–247 (1953). 38. H. O. Pierson, Handbook of Refractory Carbides and Nitrides : Properties, Characteristics, Processing, and Applications (Noyes Publications, 1996). Vol. 9, No. 8 | 1 Aug 2018 | OPTICAL MATERIALS EXPRESS 2074 39. M. Marlo and V. Milman, “Density-functional study of bulk and surface properties of titanium nitride using different exchange-correlation functionals,” Phys. Rev. B 62(4), 2899–2907 (2000). 40. W. Spengler, R. Kaiser, A. N. Christensen, and G. Müller-Vogt, “Raman scattering, superconductivity, and phonon density of states of stoichiometric and nonstoichiometric TiN,” Phys.
Load more

Recommended publications
  • (12) United States Patent (10) Patent No.: US 8,893,711 B2 Kennedy (45) Date of Patent: Nov
    US008893711B2 (12) United States Patent (10) Patent No.: US 8,893,711 B2 Kennedy (45) Date of Patent: Nov. 25, 2014 (54) HIGH TEMPERATURE SOLAR SELECTIVE 4,252,865 A * 2/1981 Gilbert et al. ................. 428,611 COATINGS (Continued) (75) Inventor: Cheryl E. Kennedy, Lafayette, CO (US) FOREIGN PATENT DOCUMENTS (73) Assignee: Alliance for Sustainable Energy, LLC, CN 2004O10097.125 12, 2004 Golden, CO (US) JP 2004266O23 9, 2004 (*) Notice: Subject to any disclaimer, the term of this WO 2005 121389 12/2005 patent is extended or adjusted under 35 OTHER PUBLICATIONS U.S.C. 154(b) by 1223 days. G.L. Harding, Sputtered metal carbide Solar-selective absorbing Sur (21) Appl. No.: 12/745,319 faces, J. Vac. Sci. Technol., 13, No. 5, 1070 (1976). (22) PCT Filed: Oct. 18, 2007 (Continued) (86). PCT No.: PCT/US2007/081838 Primary Examiner — Avinash Savani S371 (c)(1), (74) Attorney, Agent, or Firm — John C. Stolpa; Michael A. (2), (4) Date: Sep. 1, 2010 McIntyre (87) PCT Pub. No.: WO2009/051595 PCT Pub. Date: Apr. 23, 2009 (57) ABSTRACT Improved Solar collectors (40) comprising glass tubing (42) (65) Prior Publication Data attached to bellows (44) by airtight seals (56) enclose solar US 2010/0313875 A1 Dec. 16, 2010 absorber tubes (50) inside an annular evacuated space (54. The exterior surfaces of the solar absorber tubes (50) are (51) Int. Cl. coated with improved solar selective coatings {48} which F24, 2/50 (2006.01) provide higher absorbance, lower emittance and resistance to F24, 2/48 (2006.01) atmospheric oxidation at elevated temperatures. The coatings F24, 2/05 (2006.01) are multilayered structures comprising Solar absorbent layers F24, 2/46 (2006.01) (26) applied to the meta surface of the absorber tubes (50), GO2B5/28 (2006.01) typically stainless steel, topped with antireflective Savers (28) (52) U.S.
    [Show full text]
  • Niobium As Mint Metal: Production – Properties - Processing
    212 RM 21 R. Grill, A. Gnadenberger Niobium As Mint Metal: Production – Properties - Processing Robert Grill 1, Alfred Gnadenberger ² 1 Plansee Aktiengesellschaft, A-6600 Reutte, ² Münze Österreich, A-1031 Wien Summary For application as coin metal the used materials must be able to meet the demands in a wide range. This paper describes the selection criteria’s for coin metals and gives an overview about the quality and production requirements needed for special collector coins. Niobium was selected as core metal for a special 25 Euro bi-metallic coin collectors series issued by the Austrian Mint. As counterpart Silver is used as surrounding metal. A special feature of this bi-metallic coin is the use of coloured Niobium inserts. The combination of these materials with distinct different material properties, especially the deformation behaviour, and the use of the coloured Niobium insert makes an adaptation of production parameters and manufacturing philosophy necessary. Beside a general overview about the properties and applications of Niobium the paper describes the experience made during production of the bi-metallic coins. Keywords Niobium, properties, surface treatment, bi-metallic coin R. Grill, A. Gnadenberger RM 21 213 1. Introduction In the mid-term idea store of the Austrian Mint the issue of a collector’s coin on the occasion of the 700 years anniversary of the city Hall / Tyrol was foreseen. The special commemorative coin should be a continuation of the so called “25 Euro Millennium Coin” series, which was started with the material combination Ag/Ti, focusing on telecommunication and mobility published in 2000 and 2001 respectively.
    [Show full text]
  • Ceramics NATIONAL BUREAU of STANDARDS
    NBS SPECIAL PUBLICATION 396-2 National Bureau of Standards U.S. DEPARTMENT OF COMMERCE / Critical Surveys of Data Sources: Ceramics NATIONAL BUREAU OF STANDARDS The National Bureau of Standards^ was established by an act of Congress March 3, 1901. The Bureau's overall goal is to strengthen and advance the Nation's science and technology and facilitate their effective application for public benefit. To this end, the Bureau conducts research and provides: (1) a basis for the Nation's physical measurement system, (2) scientific and technological services for industry and government, (3) a technical basis for equity in trade, and (4) technical services to promote public safety. The Bureau consists of the Institute for Basic Standards, the Institute for Materials Research, the Institute for Applied Technology, the Institute for Computer Sciences and Technology, and the Office for Information Programs. THE INSTITUTE FOR BASIC STANDARDS provides the central basis within the United States of a complete and consistent system of physical measurement; coordinates that system with measurement systems of other nations; and furnishes essential services leading to accurate and uniform physical measurements throughout the Nation's scientific community, industry, and commerce. The Institute consists of the Office of Measurement Services, the Office of Radiation Measurement and the following Center and divisions: Applied Mathematics — Electricity — Mechanics — Heat — Optical Physics — Center for Radiation Research: Nuclear Sciences; Applied Radiation — Laboratory Astrophysics" — Cryogenics " — Electromagnetics " — Time and Frequency THE INSTITUTE FOR MATERIALS RESEARCH conducts materials research leading to improved methods of measurement, standards, and data on the properties of well-characterized materials needed by industry, commerce, educational institutions, and Government; provides advisory and research services to other Government agencies; and develops, produces, and distributes standard reference materials.
    [Show full text]
  • Refractory Alloy Technology for Space Nuclear Power Applications
    CONF-8308130 (DE84001745) January 1984 Distribution Category UC-25 DE04 001745 REFRACTORY ALLOY TECHNOLOGY FOR SPACE NUCLEAR POWER APPLICATIONS Proceedings of a symposium held at Oak Ridge, Tennessee August 10-11,1983 Sponsored by SP-100 Project Office Edited by R. H. Cooper, Jr. E. E. Hoffman January 1984 Published by Technical Information Center Office of Scientific and Technical Information United States Department of Energy Conference Organization GENERAL CHAIRMAN W. 0. Harms, Oak Ridge National Laboratory PROGRAM ORGANIZERS AND TECHNICAL PROGRAM CHAIRMEN R H. Cooper, Jr., Oak Ridge National Laboratory E. E. Hoffman, U. S. Department of Energy, Oak Ridge Operations ADVISORY COMMITTEES Compatibility R L. Dairies, NASA Lewis Research Center N. J. Hoffman, Rockwell International, Energy Technology Engineering Center P. Roy, General Electric Company. Advanced Reactor Systems Department S. A. Shiels, Westinghouse Electric Corporation, Advanced Energy Systems Division Processing and Production G. C. Bodine, Combustion Engineering, Inc. R L. Heestand, Oak Ridge National Laboratory R E. McDonald, Consultant R A. Perkins, Lockheed Missiles and Space Company, Inc., Palo Alto Research Laboratory W. E. Ray, Westinghouse Electric Corporation, Advance 1 Energy Systems Division Welding and Component Fabrication E. A. Franco-Ferreira, Consultant Services W. C. Hagel, Climax Molybdenum Company of Michigan T. A. Moss, Rockwell International, Energy Systems GiOup G. M. Slaughter, Oak Ridge National Laboratory, Metals and Ceramics Division Mechanical and Physical Properties R L. Amman, Westinghouse Electric Corporation, Advanced Energy Systems Division W. C. Hagel, Climax Molybdenum Company of Michigan H. E. McCoy, Oak Ridge National Laboratory Effects of Irradiation M. L. Bleiberg, Westinghouse Electric Corporation, Advanced Energy Systems Division J.
    [Show full text]