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Technical Program (PDF) Program Key 2D 2D Materials AC Actinides and Rare Earths Focus Topic AP Atomic Scale Processing Focus Topic AS Applied Surface Science Division BI Biomaterial Interfaces Division BP Biomaterials Plenary Session: Materials and Biology for the Future of Energy and the Environment CA Chemical Analysis and Imaging at Interfaces Focus Topic EL Spectroscopic Ellipsometry Focus Topic EM Electronic Materials and Photonics Division EW Exhibitor Technology Spotlight Workshops HC Fundamental Discoveries in Heterogeneous Catalysis Focus Topic HI Advanced Ion Microscopy and Ion Beam Nano-engineering Focus Topic LD Leaders in Energy and the Environment Focus Topic LS New Trends in Structural Electronic Characterization of Materials, Interfaces, and Surfaces Using Synchrotron and FEL Based Light Sources Focus Topic MI Magnetic Interfaces and Nanostructures Division MN MEMS and NEMS Group MS Manufacturing Science and Technology Group NP Nanoscale Science and Technology Plenary Session NS Nanoscale Science and Technology Division PS Plasma Science and Technology Division QS Materials and Processes for Quantum Information Science Focus Topic SE Advanced Surface Engineering Division SM Smart Multifunctional Materials for Nanomedicine Focus Topic SS Surface Science Division TF Thin Films Division UN Undergraduate Poster Session VT Vacuum Technology Division Key to Session/Paper Numbers Sessions sponsored by multiple topics are labeled with all topic acronyms (e.g. AC+EM+SS), then a number to indicate simultaneous sessions sponsored by the same topic(s) (e.g. SS1, SS2), then a dash followed by the first two characters of the day of the week: Monday, Tuesday, Wednesday, Thursday, Friday, then a single letter for Morning, Afternoon, Evening, Poster, and finally a number indicating the starting time slot for the paper. Example: SS1-MoM9 (Surface Science, Monday morning, 11:00 am). Program Key 1 Program Overview Room 205ABCD W 206A W 206B W 207ABC W 207D W 208 W 209A W 209B W /Time SuA MoM VT-MoM: 2D+AP+EM+PS+S AP+2D+EM+MN+ TF+BI+EM-MoM: TF+BI+EM+MI- EL+TF-MoM: HC+AS+CA+LS+SS- SS+CA+TF-MoM: Vacuum S+TF-MoM: 2D PS+TF-MoM: Area Vap Dep & Vap MoM: TF for Optical Charact of MoM: Bridging Dynamics and Measurement, Materials Growth Sel Proc & Int of Infil for Synt Org- Emerg Apps incl. Thin Films and Gaps & Amb. Mech at Surfaces Partial Pressure, and Fabrication Dep & Etch for Inorg Hyb TF & Int Phot & Plasmonics Nanostructures Press Stud of and Interfaces and Gas Analysis Adv Matl Heterogeneous MoA VT-MoA: Outgas, 2D+MI-MoA: LD+2D+NS+SSProcessing - TF+2D+MI-MoA: TF+AP-MoA: EL-MoA: Spectros HC+2D+NS+SS+TFCatalysis - SS+AP+AS+HC+LD Pumping, and Electron Micro MoA: Pushing the Chalcogenide Molecular Layer Ellip: Novel Apps MoA: Nanopart & +SE+TF-MoA: Operation of High and Spectroscopy Bound of Energy Materials and Dep & Hybrid Org- & Theor Nanoscale Struct Oxides Surfaces Vacuum Systems of 2D Materials Trans in Materials Applications Inorg Materials Approaches in Hetero Catalysis and Interfaces TuM VT+PS-TuM: 2D+HC+MN+NS+S AP+EL+MS+NS+SS EM+TF-TuM: Wide TF+EM-TuM: TF TF+PS+SE-TuM: HC+SS-TuM: SS+2D+AP+PS+TF- Vacuum S-TuM: SPM and +TF-TuM: Adv and Ultra-Wide for Microelect HiPIMS and PVD Single Atom TuM: Surf Chem Technology for Spectroscopy of Metrol & Char to Bandgap Matls and and Quantum TF for Emerg & Catalysis of Film Growth Fusion Research 2D Materials Enable ASP Devices Materials Advanced Matls and Etching TuB TuL TuA VT-TuA: 2D+EM+HC+NS+Q AP+2D+HI+MN+ EM+PS+TF-TuA: TF+HC+SS-TuA: LS+2D+MI+SS- HC+SS-TuA: Single SS+CA+HC+NS+TF- Vacuum S+TF-TuA: Dop., MS+PS+SS+TF- New Dev & Matls Thin Films for TuA: Mag Dich & Atom Catal & TuA: Photochem, Technology for Defects, & Edges TuA: Beam for Logic, Mem, & Energy and Spin-Res Tech of Theo Mod for Het- Electrochem & Accelerators in 2D Mtls Studies/ Interconnects Catalysis Magnetic Matls Cat Reactions Dyn at Surfaces Surf Reac Anal TuP and Emerging Applications of Atomic Scale Processing WeM VT-WeM: 2D+AP+EM+NS+P AP+PS+TF-WeM: EM+MI-WeM: TF+AP+MN+SS- LS+CA+MI+SE+SS- HC+SS-WeM: Vacuum S+SS+TF-WeM: Thermal Atomic Elect & Phot Matls WeM: Novel ALD WeM: Micro & Mechanisms and Technology for Growth & Prop Layer Etching & Dev for Energy & CVD Processes Imag Tech Exploit Reaction Applications of 2D Materials Conv & Storage I & ALD Manuf Enh Coh & Prop Pathways in and Time- Heterogeneously- WeB Resolved Methods Catalyzed Reactions WeA MN+2D+NS+QS- 2D+EM+MN+NS+ EM+MI-WeA: Elect TF+EM-WeA: QS+EM+MN-WeA: CA+AS+LS+MN+SS LD+HC+SS-WeA: WeA: MEMS & QS-WeA: Elect, & Phot Matls & Wide & Ultra- Syst & Devices for +VT-WeA: Env Catalysis at the NEMS Enab. Sens. Optical & Ferro Dev for Ener Stor & Wide Bandgap TF: Quantum Inter (2:20-4:40 Metal Oxide Imag, & Prec. Prop in 2D Mtls Conv II Adv in Dep & Information pm)/Model & Interface Mea Novel Materials Multi-Dimensional ThM MN+2D+NS+QS- 2D+EM+NS+PS+Q AC+LS-ThM: HI1-ThM: Adv Ion TF+AP+SS-ThM: QS+EM+SS-ThM: DataCA+2D+AS+BI+HC Processing of ThM: Emer MEMS S-ThM: 2D Mtls: Forensics and Micro & Surf Anal Nuc. & Interface Syst and Devices +LS+MN+NS+SM+Interfacial & NEMS Mtls, Heterostructures Novel Apps HI2-ThM: Phenomena in TF for Quantum ProcessesSS-ThM: In (4:40 Situ - Dev, & Process and Twistronics Spectroscopy Emerg Ion Sour, Dep & ASD Computing Mic6:00, Spect pm) & Optics, and Processing at ThA 2D+EM+LD+SS- AC+LS-ThA: Early HIApplications-ThA: Novel TF+2D+AP+SS- QS+EM+VT-ThA: CA+2D+AS+BI+HCLiquid-Solid-Gas SS+2D+AP+BI+NS+ ThA: 2D Materials Career Scientists Beam Induced ThA: ALD & CVD: Color Centers: +LS+MN+NS+SM+Interfaces I TF-ThA: Molecular for Device Matl Engineering & Surf React, Mech, From Materials to SS-ThA: In Situ Organization at Applications Nano patterning & Precursors Quantum Micro, Spect & Surfaces Technologies Processing at ThP Liquid-Solid -Gas Interfaces II FrM MN+AP+BI+EM+N 2D+AP+BI+HC+NS AC+LS+MI-FrM: TF+AP-FrM: ALD TF+SS-FrM: QS+2D+EM+MN- CA+2D+AS+MN+S SS+SE-FrM: S+PS+SE+TF-FrM: +PS+SS+TF-FrM: Mag, Elect, and CVD for Nano Epitaxial Thin FrM: Quantum Sci E+SM+SS-FrM: Environ & Nano at Atom- Chemical Applic. Correl, Supercond & High Aspect Films and to Quantum Met, Prog & Chall in Astrochem, & Surf Flat Surf & of 2D Materials & Oxid in the Act Ratio Materials Interfaces Sens & Hetero Ind Apps (8:20 - for Space Apps Interfaces & RE 10:20 am)/Novel On ON DEMAND SESSIONS: Available for viewing by all AVS 67 Registered attendeesDevelopments from Demand and Approaches October 24, 2021, 8:00 a.m. – November 30, 2021, in the AVS 67 Mobile App/Onlineof Interfacial Planner. Analysis (10:20 - 11:40 am) Program Overview 2 Program Overview Room 209C W 209DE W 209F W 210 W 211 W Ballroom BC Hall A On Demand /Time SuA NP-SuA: BP-SuA: Bio Nanoscale Plenary Session: Science and Matls & Bio for the Technology Future of Energy Plenary Session and the MoM AS+BI+CA+LS+NS MS+AP+NS+TF- EM+BI+MI+MN+N BIEnvironment-MoM: Microbes (ALL PS-MoM: +SE+SS-MoM: MoM: Science S+PS+TF-MoM: INVITEDand Fouling SESSION) at Modelling of Anal of Surf & and Technology Atomic-Scale, Surfaces Plasmas, Plasma- Inter Rel to for Atomically Bottom-Up Driven Processes, Energy & Env I Precise Nanostructure, and Machine MoA AS+BI+CA+LS+SS- ManufacturingMS+AP-MoA: EM+BI+NS+PS+TFand 2.5/3D BI-MoA: PS-MoA:Learning Plasma MoA: Science and -MoA:Integration Electronic Biomolecules and Chem, Catalysis, & Quantitative Technology of Processingand Photonic of Biophysics at Plasma-eng. Surface Analysis I Manufacturing AI ElectronicMaterials and Interfaces Materials Hardware PhotonicDevices AS+BI+CA+LS+NS SM+AS+BI+CA+MI NS+MN+QS+SM+ BI-TuM: Char of PS+AS+BI+EM+SS- TuM Materials and +SE+SS-TuM: +SS-TuM: Hybrid SS-TuM: Nano – Biological and TuM: Plasma- Devices Analysis of Nanomaterials Incl Nano-Depend Biomaterials Surface Surfaces and Based On Matls' Prop & Surfaces Interactions Interfaces Biologically- Quantum Effects TuB Related to Energy Inspired EW-TuB: and the Approaches and Exhibitor Environment II Plasma Chemistry Technology Spotlight Session I TuL EW-TuL: Exhibitor Technology Spotlight II TuA AS+BI+CA+LS+SS- SM+BI-TuA: NS+AP+BI+MI+S BI-TuA: Bioanal & PS1-TuA: Plasma TuA: Quantitative Nanomed, M-TuA: Nanofab Diag for SARS-CoV- Prize Lectures Surface Analysis II Theranos, Wound & Nanoelectronic 2 & Otr Health PS2-TuA: Plasma Healing & Tissue Devices Conc & Flash Treatments and Repair Presentations Processes for the TuP Environment, Ecology and Poster Sessions Biology WeM AS+AC+BI+CA- AC+AS-WeM: NS+MI+QS+SS- BI+NS-WeM: PS+EM-WeM: WeM: Analysis of Chemi and WeM: Emer Prop Biomaterials and Advanced BEOL Complex Systems Physics of the of Surfaces: Opt Nanomaterials Processing with SIMS Actinides and Wetting, & Quant Fabrication Rare Earths WeB EW-WeB: Exhibitor Tech. Spotlight Session III WeA AS+SS-WeA: MI+2D+TF-WeA: NS+AS+BI+EM+LD SE+MN+PS+TF- PS-WeA: Charles S. Fadley Mini Symposium: +SS-WeA: WeA: Vapor Advanced FEOL Memorial Session Highlighting Scanning Probe Deposition Processing, Multi- (ALL INVITED) Women Microscopy and Technologies and patterning, and Researching Spectroscopy for New Trends in EUV ThM HC+SS-ThM: MI+2D+TFMagnetism-ThM: NS+AP+BI+SSEmerging - SE+BI+SSSurfac-ThM:e PS+AP+TF-ThM: Advances in Topological ThM:Technologies Advances in NanostructuredEngineering Plasma-assisted Heterogeneous Insulators Scanning Probe and Deposition and Electrocatalysis Heterostructures Technologies Multifunctional ALD and Magnetic Thin Films and ThA AS+BI+CA+LS+SS- SpinAS+HC+PS+SE+S Structures in PS-ThA: Plasma SE+AS+LS+MN+SSCoatings - PS+SE-ThA: ThA: Quantitative M-ThA:Real Modand of Diagnostics, ThA: Mech & Trib Plasma Sources Surface Analysis SurfMomentum & Inter for Sensors and Prop/Char of Thin III Pract ApplicationsSpace Control Films and Coatings ThP Poster Sessions FrM NS+BI+SS+TF- MI+2D+TF-FrM: PS+SE-FrM: PS-FrM: Plasma FrM: Mag Structures Atmos Pressure Assisted ALE & Nanophotonics for Energy- Plasmas and their Proc.
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