MEMS &NEMS and Molecular Engineering

Dr.Marc Madou Chancellor’s Professor UC Irvine Tsukuba, February 28 , 2005 Outline of Presentation

„ Two Approaches to Miniaturization

„ Biomimetics: Icarus Revisited?

„ Applications:

„ Move to Point of Care (POC) with DNA Arrays on a CD

„ Nanomanipulator Platform-Beyond Moore’s Law

„ Responsive Drug Delivery-Smart Pills

„ C-MEMS

„ Conclusions Two Approaches to Miniaturization

„ Nanomachining (top-down) is an extension of micromachining:

„ EUV (13.4 nm) ⇑

„ Very thin resists including SAM’s

„ Surface imaging resists

„ Phase shift masks

„ X-ray lithography⇓

„ 3D instead of 2-D

„ Soft-lithography

„ Proximal tool writing

Harold Craighead Cornell Two Approaches to Miniaturization

„ Nanochemistry (bottom-up) is a biomimetic approach to make nanodevices :

„ Self assembly

„ Crystals

„ Langmuir-Blodgett monolayers and multilayers on solids

„ Self-assembled monolayers (SAM) (e.g., thiols on Au, silanes on SiO2) „ Mechanosynthesis with proximal probes „ Hints: flexible instead of stiff materials, C instead of Si (C-MEMS), self-assembly (SAM), massive parallelism, writing with nano- particles, make hybrids of top-down (e.g., proteins, DNA) and bottom-up (e.g., fluidic platforms) http://www.almaden.ibm.com/vis/stm/atomo.html Biomimetics: Icarus Revisted?

„ Nature and mankind have developed competitive manufacturing methods on the macro level (e.g., steel versus bone) „ Biomimetics on the macro-level mostly failed. Background reading: Cats’ Paws and Catapults by Steven Vogel (Efficiency of mechanical systems in biology and human engineering in the macro-world). „ On the nanoscale nature is outperforming us by far (perhaps because nature has had more time working towards biological molecules/ cells than towards making larger organisms such as trees and us). „ NEMS might be inspired by biology but will most likely be different again -- the drivers for human and natural manufacturing techniques are very different. Move to Point of Care (POC) with DNA Arrays on a CD

Memory devices today and tomorrow

Molecular diagnostics today and tomorrow

DNA bacteria, Hybridization Raw sample RNA cancer cell, Electrophoresis WBC, et al protein Sequencing Cell Cell Lysis, Amplification Separation Purification

Sample Preparation Move to Point of Care (POC) with DNA Arrays on a CD

„ Nanogen’s active DNA array (100, 400, 10,000 sites)

„ Transport

„ Addressing

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„ Stringency

„ Improvements needed: make much smaller, merging with sample preparation, and avoid desalting while maintaining speed of hybridization reaction

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10,00010,000-Site-Site CMOSCMOS ChipChip Move to Point of Care (POC) with DNA Arrays on a CD Instrument „ Fluidics Power „ Mechanical pressure Propulsion „ Electrokinetics (AC and Heater (PCR) DC) Electronics „ Centrifuge Detection

„ (Acoustic)

Disposable Cassette Reagents Fluidics PROPULSION

Mechanical pressure Acoustic Centrifugal Electrokinetic Move to Point of Care (POC) with DNA Arrays on a CD

„ Closed Chip Electrokinetic (DC) 2 „ l

„ Fluid contact

„ First products (Caliper)

„ Not generic

„ May solve liquid valving but not for vapors !

„ Mixing difficult to implement

„ Many parameters influence propulsion force

„ High voltage source is not convenient

„ Better for high-throughput screening and smaller samples Move to Point of Care (POC) with DNA Arrays on a CD

„ Centrifugal 3 „ l

„ No fluid contact

„ Established

„ Generic

„ Solves liquid valving elegantly

„ Widest dynamic range

„ Simple and inexpensive CD player for drive

„ Mixing easy to implement QuickTime™ and a YUV420 codec decompressor „ Most functions are needed to see this picture. demonstrated

„ Cell work easier

„ Sample preparation easier

„ Better for diagnostics Move to Point of Care (POC) with DNA Arrays on a CD

Center „ Software code enables us to design quickly simple fluidic elements on the CD. Now we

R1 are focusing on implementing porous materials on the CD (e.g., for a separation r column). Modeling is much harder here. R2 dP c = ρω 2 r θ dr ω R + R ∆P = ρω 2(R − R ) 2 1 = ρω 2∆R ⋅ R c 2 1 2 γ cos θ ⋅ C ∆ P = s A 1 1 γ cosθ ⋅C 2 γ cosθ 2 fb ≥ ( 2 ) = ( 2 ) π ρ⋅ R ⋅∆R ⋅ 4A π ρ ⋅ R ⋅∆R ⋅d H Nanomanipulator-Beyond Moore

„ Use DC and AC electrokinetics to write with particles:

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Particle less polarizable than medium Nanomanipulator-Beyond Moore

Separation of Listeria from Whole Blood

Before Separation: 10 kHz, Wash blood off 10Vpp

After wash blood off Wash Listeria off Nanomanipulator-Beyond Moore

A) An array of microelectrodes is fabricated using standard photolithographic techniques

(B) nanoparticles move electrokinetically on top of a substrate and induce a submicron wide surface change. Responsive Drug Delivery Responsive Drug Delivery Responsive Drug Delivery

CaM-immobilized polymer chain

phenothiazine-immobilized polymer chain

S

Cl N

N free chlorpromazine Change in Flow Rate

Stimulus QuickTime™ and a TIFF (Uncompressed) decompressor are needed to see this picture. C-MEMS SU-8/Au(3000Å)/Ti(200Å)/SiO2/Si

before C-MEMS

„ Pyrolysis of patterned photoresist:

„ Excellent electrochemical material

„ Sensors

„ Batteries

„ Ultra-capacitors, etc

„ Mechanical/electrical properties can be selected ! C-MEMS CMOS

Battery unit

Smart switchable battery arrays: baxels are addressable just like pixels: in a serial arrangement, voltages add up; in a parallel arrangement, currents add up C-MEMS C-MEMS

Carbon film (AZ4620)

‰The electrolyte was 1 M LiClO4 in a 1:1 volume mixture of ethylene carbonate (EC) and dimethyl carbonate (DMC). ‰0.070 mAh cm-2 for the second and subsequent cycles. ‰For a fully dense film, this corresponds to ~ 220 mAh g-1, which is within the range of reversible capacities reported for coke. Conclusions

„ Moore and more … „ The biotech century is here and wealth of nations will be more and more based on exploitation of genomics and proteomics

„ Molecular Diagnostics : not if but when. Merging of DNA arrays with microfluidics will enable the move from research instrument to disposable diagnostics

„ New less expensive detection techniques will be the other important contributor to success in molecular diagnostics „ Nanomanipulator to move micro- and nano-particles and even to write with those particles (non-lithography method to go beyond 0.1 µm) „ Move back to in-vivo because of better telemetry, batteries, sensors, MEMS and drugs. Smart pills. „ C-MEMS: Patterning other materials than Si. Smart , switchable batteries. „ Hybrid top-down and bottom-up devices. Dank u wel,

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