ECE 5657- Principles of Thin Film Technology

5-155 EE/CSci Bldg 6-1628 office hours: Thurs 12:30-1:30

TA: Madhukar Reddy 4-5034 6-147C EE/CSci

Textbook: Materials Science of Thin Films, M. Ohring

Sept. 2,4 Vacuum Science Teams Pick Material No Lab- form teams in class 9,11 Evaporation Vacuum Systems/Evaporation (1) Team proposal (due Thurs)

16,18 Sputtering Sputtering (1) Hwk 1

23, 25 Chemical Techniques Thickness (2)

Oct. 30, 2 Finish fabrication X-ray Diffraction (3) Hwk 2

7, 9 Review of Material Science SEM/EDS (3)

14, 16 Film Formation Team Films (1) Hwk 3

21, 23 Epitaxy & Film Structure AFM (3) Individual Project draft (7q)

28, 30 Structure and Characterization RBS (3) Hwk 4

Nov. 4, 6 Interfacial Issues Electrical Testing (2) Team Lab report draft

11, 13 Electric & Magnetic Properties VSM (1) Hwk 5

18, 20 Mechanical Properties Teams Free (1) Hwk 7 question due

25 Student Presentations Mechanical Testing (3) Hwk 6

Dec. 2, 4 “ “ Teams Free (1)

9 Optical Properties Optical Spectroscopy (3) Hwk 7, Papers Due

*Things in “DUE” column are due in class of Tuesday that week. Prelabs (not shown) are due in lab.

Lab locations are (1) 5-142 EE/CSci Bldg, (2) NFC- 1st floor EE/CSci Bldg, (3) CharFac- Basement of Shepherd Lab

Grading:

7 Hwks (40%), Project (20%), Lab (40%)

Individual Classwork (you may work together, but do not copy from text or each other!)

Homeworks- Biweekly, about 7 problems each

Literature Review Project- three parts, see Project description (Beware plagerism!)

Draft (5%)

Presentation- Fifteen minutes. (5%)

Paper 10-15 pages. (10%)

Labwork (Work in Teams)

Individual participation (20%)-graded by individual attendence and by evaluations.

Team grades (20%) will be made up based on a team proposal, a lab report draft, and a lab report, see Lab Description Handout.