And Auger Electron Spectroscopy (AES)
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6/9/2008 Advanced Materials Characterization Workshop X‐ray Photoelectron Spectroscopy (XPS) and Auger Electron Spectroscopy (AES) Rick Haasch, Ph.D. Supported by the U.S. Department of Energy under grants DEFG02-07-ER46453 and DEFG02-07-ER46471 © 2008 University of Illinois Board of Trustees. All rights reserved. What is Surface Analysis? >1000 nm 100 nm <10 nm Bulk Analysis Thin- Thin-filmfilm Analysis Surface Analysis The Study of the Outer-Most Layers of Materials (~10 nm). 2 © 2008 University of Illinois Board of Trustees. All rights reserved. 1 6/9/2008 Particle Surface Interactions Primary beam Secondary beam (source) (spectrometers, detectors) Ions Ions Elec trons Elec trons Photons Photons Vacuum 3 © 2008 University of Illinois Board of Trustees. All rights reserved. Spatial resolution versus Detection Limit 4 © 2008 University of Illinois Board of Trustees. All rights reserved. 2 6/9/2008 Particle Surface Interactions Photoelectron Spectroscopy Ions Ions Electrons Electrons Photons Photons Joe E. Greene2) Vacuum 5 © 2008 University of Illinois Board of Trustees. All rights reserved. X-ray Photoelectron Spectroscopy (XPS) X-ray Photoelectron Spectroscopy (XPS), also known as Electron Spectroscopy for Chemical Analysis (ESCA) is a widely used technique to investigate the chemical composition of surfaces. X-ray1 Photoelectron spectroscopy, based on the photoelectric effect,2,3 was developed in the mid-1960’s as a practical technique by Kai Siegbahn and his research group at the University of Uppsala, Sweden.4 Wilhelm Conrad Röntgen Heinrich Rudolf Hertz Albert Einstein Kai M. Siegbahn 1. W. Röntgen, 1901 Nobel Prize in Physics “in recognition of the extraordinary services he has rendered by the discovery of the remarkable rays subsequently named after him.” 2. H. Hertz, Ann. Physik 31,983 (1887). 3. A. Einstein, Ann. Physik 17,132 (1905). 1921 Nobel Prize in Physics “for his services to Theoretical Physics, and especially for his discovery of the law of the photoelectric effect.” 4. 4. K. Siegbahn, Et. Al.,Nova Acta Regiae Soc.Sci., Ser. IV, Vol. 20 (1967). 1981 Nobel Prize in Physics “for his contribution to the development of high resolution electron spectroscopy.” 6 © 2008 University of Illinois Board of Trustees. All rights reserved. 3 6/9/2008 X-ray Photoelectron Spectroscopy Small Area Detection Electrons are extracted only from a narrow solid angle. X-ray Beam X-ray penetration depth ~1μm. Electrons can be excited in this 10 nm entire volume. 10 μm- 1 mm dia. X-ray excitation area ~1 mm-1 cm diameter. Electrons are emitted from this entire area 7 © 2008 University of Illinois Board of Trustees. All rights reserved. Photoelectron and Auger Electron Emission KE (measured) = hν (known) - BE - Φspec (calibrated) Emitted Auger Electron Eincident X-ray = hν Free Electron Level Φ Conduction Band Conduction Band Fermi Level Valence Band Valence Band BE 2p L2,L3 2s L1 1s K Calculate: BE = hν - KE - Φspec BE – binding energy depends on Z, i.e. characteristic for the element 8 © 2008 University of Illinois Board of Trustees. All rights reserved. 4 6/9/2008 Photoelectron and Auger Electron Emission KE (measured) = hν (known) - BE - Φspec (calibrated) Emited X-ray Photon Eincident X-ray = hν Free Electron Level Φ Conduction Band Conduction Band Fermi Level Valence Band Valence Band BE 2p L2,L3 2s L1 1s K Calculate: BE = hν - KE - Φspec BE – binding energy depends on Z, i.e. characteristic for the element 9 © 2008 University of Illinois Board of Trustees. All rights reserved. Photoelectron and Auger Electron Emission 10 © 2008 University of Illinois Board of Trustees. All rights reserved. 5 6/9/2008 Photoelectron and Auger Electron Emission 11 © 2008 University of Illinois Board of Trustees. All rights reserved. Photoelectron and Auger Electron Emission Energy Scales Conduction Band 0 Fermi Level Valence Band Binding Energy Kinetic Energy Photoelectron Lines Auger Electron Lines 12 © 2008 University of Illinois Board of Trustees. All rights reserved. 6 6/9/2008 Photoelectron and Auger Electron Emission X-ray Photoelectron Spectroscopy Conduction Band Fermi Level Valence Band Al Kα = 1486.6 eV MKMg Kα = 1253. 6 e V XPS can probe all of the orbitals in only the light elements. e.g. BE C 1s = 285 eV, Mg 1s =1304 eV, Au 1s ≈ 81000 eV Predominantly, soft X-rays are used. 13 © 2008 University of Illinois Board of Trustees. All rights reserved. Photoelectron and Auger Electron Emission Ultraviolet Photoelectron Spectroscopy Conduction Band Fermi Level Valence Band He II = 40.8 eV He I = 22.4 eV 14 © 2008 University of Illinois Board of Trustees. All rights reserved. 7 6/9/2008 Surface Sensitivity: Electron Spectroscopy Inelastic Mean-Free Path: The mean distance an electron can travel between inelastic scattering events. Inelastic mean-free paths (calculated) based on TPP-2* 5 4.5 m) 4 XPS 3.5 Carbon 3 Aluminum 2.5 Copper Silver 2 Gold 1.5 elastic Mean-Free Path(n Mean-Free elastic 1 n I 0.5 0 0 500 1000 1500 2000 2500 3000 Kinetic Energy (eV) Electrons travel only a few nanometers through solids. *S. Tanuma, C. J. Powell, D. R. Penn, Surface and Interface Analysis, 17, 911-926 (1991). 15 © 2008 University of Illinois Board of Trustees. All rights reserved. Surface Sensitivity: Electron Spectroscopy Inelastic Mean-Free Path: The mean distance an electron can travel between inelastic scattering events. Inelastic mean-free paths (calculated) based on TPP-2* 5 4.5 m) 4 Auger 3.5 Carbon 3 Aluminum 2.5 Copper Silver 2 Gold 1.5 elastic Mean-Free Path(n Mean-Free elastic 1 n I 0.5 0 0 500 1000 1500 2000 2500 3000 Kinetic Energy (eV) Electrons travel only a few nanometers through solids. *S. Tanuma, C. J. Powell, D. R. Penn, Surface and Interface Analysis, 17, 911-926 (1991). 16 © 2008 University of Illinois Board of Trustees. All rights reserved. 8 6/9/2008 Surface Sensitivity: Electron Spectroscopy Assuming Inelastic Scattering Only 1 Beer-Lambert relationship: 0.8 I = I0exp(-d/λcosθ) where d = depth 0.6 λ = Inelastic mean free path I/I0 0.4 at 3λ, I/I0 = 0.05 0.2 at 1000 eV, λ≈1.6 nm 0 01234 d/λ 95% of the signal comes from within 5 nm of the surface or less! 17 © 2008 University of Illinois Board of Trustees. All rights reserved. Surface Sensitivity: Electron Spectroscopy Surface Analysis Advantage Disadvantage Extremely surface sensitive! Extremely surface sensitive! 18 © 2008 University of Illinois Board of Trustees. All rights reserved. 9 6/9/2008 Ion Sputtering 0.5 – 5 keV Ar+ •Ions striking a surface interact with a number of atoms in a series collisions. • recoiled target atoms in turn collide with atom at rest generating a collision cascade. • The initial ion energy and momentum are distributed to among the target recoil atoms. • When Ei > 1 keV, the cascade is “linear”, i.e. approximated by a series of binary collisions in a stationary matrix. Causes physical and chemical damage P. Sigmund, “Sputtering by ion bombardment: theoretical concepts,” in Sputtering by particle bombardment I, edited by R. Behrish, Springer-Verlag, 1981 19 © 2008 University of Illinois Board of Trustees. All rights reserved. X-ray Photoelectron Spectrometer Hemispherical Energy Analyzer X-ray Monochromator Extraction Detector Lenses Sample 54.7 X-ray Source 20 © 2008 University of Illinois Board of Trustees. All rights reserved. 10 6/9/2008 X-ray Photoelectron Spectrometer Physical Electronics PHI 5400 21 © 2008 University of Illinois Board of Trustees. All rights reserved. Elemental Shifts Pure Element Fermi Level ElectronElectron--electronelectron Binding repulsion Energy Look for changes Electron here by observing electron binding ElectronElectron--nucleusnucleus energies attraction Electron- Nucleus Separation Nucleus 22 © 2008 University of Illinois Board of Trustees. All rights reserved. 11 6/9/2008 Elemental Shifts 23 © 2008 University of Illinois Board of Trustees. All rights reserved. Elemental Shifts Core Level Binding Energies 1400 1s 2s 2p 1200 1000 3s 800 3p 600 3d Binding Energy (eV) Binding Energy 400 200 4s 4p 0 0 5 10 15 20 25 30 35 40 45 50 Atomic Number 24 © 2008 University of Illinois Board of Trustees. All rights reserved. 12 6/9/2008 Elemental Shifts First-Row Transition Metals Binding Energy (eV) Element 2p3/2 3p Δ Sc 399 29 370 Ti 454 33 421 V 512 37 475 Cr 574 43 531 Mn 639 48 591 Fe 707 53 654 Co 778 60 718 Ni 853 67 786 Cu 933 75 858 Zn 1022 89 933 25 © 2008 University of Illinois Board of Trustees. All rights reserved. Elemental Shifts: An Example First-Row Transition Metal Nitr ides: ScN, TiN, VN, and CrN Sc2p Metal and N Auger Lines Sc2s N1s Sc3p ScN Sc3s Ti2p Ti2s N1s Ti3p TiN Ti3s V2p V2s N1s V3p VN V3s ounts (arb. units) Cr2p C Cr2s N1s Cr3p CrN Cr3s 1200 1000 800 600 400 200 0 Binding energy (eV) Surface Science Spectra, 7, 167-280, 2000. 26 © 2008 University of Illinois Board of Trustees. All rights reserved. 13 6/9/2008 Chemical Shifts Electronegativity Effects Carbon-Oxygen Bond Oxygen Atom Electron-oxygen atom attraction Valence Level (Oxygen Electro- C 1s C 2p negativity) Binding Core Level Energy Shift to higher C 1s binding energy Electron-nucleus attraction (Loss of Electronic Screening) Carbon Nucleus 27 © 2008 University of Illinois Board of Trustees. All rights reserved. Chemical Shifts Functional C 1s Binding Group Energy (eV) hydrocarbon C-H, C-C 285.0 amine C-N 286.0 alcohol, ether C-O-H, C-O-C 286.5 Cl bound to C C-Cl 286.5 F bound to C C-F 287.8 carbonyl C=O 288.0 28 © 2008 University of Illinois Board of Trustees.