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Automation of Magnetic Hard Disk Production Lines Automation of Magnetic Hard Disk Production Lines Hiroshi Hashida Eiichi Fujisawa Motonori Nakazawa 1. Introduction Fig.1 Schematic diagram of an automated transfer system In industry, the main aim of production line Empty cassette transfer point automation is to reduce the workforce. However in the Loaded cassette magnetic hard disk (hereinafter referred to as the disk) transfer point industry, the aim is to improve quality and to enhance stability of the disk through a cleaner working environ- Cassette transfer point ment as well as to reduce the workforce. Sputter The surface area of the disk per bit (0.8 × 0.07 µm Overhead transfer track at present) and the size of particles and defects under consideration are decreasing year by year as the storage capacity of disks increases. To cope with this, automation of the disk production line can prevent damage to the disk caused by manual transfer and can prevent dust from adhering to the disk in the case of a Lift for Loading machine clean transfer. overhead transfer Ever-increasing demand for higher-quality disk, however, cannot be satisfied only by automation of the disk production line, resulting in the necessity of an automated transfer system integrated with clean room improve cleanliness of the disk. design. Since an automated transfer system equipped with 2.1 Space savings in the clean room a cleaning function for a disk production line is highly Automated transfer systems within a single pro- specialized, there are very few dedicated systems cess or between several processes require a rather compared with other industries. Thus, transfer sys- large amount of space in a clean room for installation. tems for this purpose have mainly been developed Especially when installed on the floor, such a system jointly with transfer system manufacturers based on can obstruct passage and reduce workspace, resulting their existing systems. in increased cost of the clean room. This paper describes examples of the introduction As for the introduction of an automated transfer of an automated transfer system into an existing system into an existing production line, it is difficult to production line, replacing a previous manual transfer secure space for its installation. Thus, we designed an system, and introduction into a newly built production overhead-transfer system that saves space by utilizing line. Also described is an example of an automated the space near the clean room ceiling. transfer system as a total system for integrating clean Consequently, the space under the transfer system room design to meet the requirements of a cleaner could be used for the existing passage and workspace. work environment. This has enabled the introduction of a clean transfer system without requiring expansion of the clean room. 2. Introduction of an Automated Transfer Sys- tem into an Existing Production Line 2.2 Purification due to the overhead-transfer system Since the transfer system was installed close to the Figure 1 shows a schematic diagram of an automat- ceiling, the clean area directly underneath the fan ed transfer system introduced between processes filter unit has become a transfer route for disk where disk cassettes have traditionally been manually cassettes. This separates the disk from the workers, a transferred. This automated transfer system aims to source of particles. 26 Vol. 46 No. 1 FUJI ELECTRIC REVIEW Automation can also reduce the quantity of goods- Fig.2 Schematic diagram of an overhead automated transfer in-process between operations and the time during system introduced in a new production line which disk is left exposed. The above measures were implemented to realize Fan filter unit clean media transfer that prevents particles from adhering to the disk. 2.3 Considerations regarding the automation of an existing line Straight type transfer unit In the above example of the automation of an existing line, the transfer system could not be suspend- Cassette ed from the ceiling of the clean room due to insufficient strength, but was instead supported by standalone (a) Straight type transfer unit posts and by using existing facilities. However, the locations of supporting posts and the transfer route were restricted to secure space for the existing produc- tion line. Rail In this manner, installation of the automated Loop type transfer unit transfer system in the clean room was subjected to Cassette various constraints due to the construction of the clean room and the facilities layout. Thus, it has become important to design an integrated production line and clean room that incor- (b) Loop type transfer unit porates the concept of an automated transfer system in Fan filter unit the early stages of the clean room design. Based on this overhead transfer system, we have developed subsequent automated transfer systems. Cassette 3. Introduction of an Automated Transfer Sys- tem into a New Production Line Clean conveyer type transfer unit 3.1 Selection of a transfer system in accordance with its (c) Clean conveyer type transfer unit uses Figure 2 shows a schematic diagram of an overhead automated transfer system introduced between pro- cesses of a new production line. The system, jointly 3.2 Automated production line integrated with clean room developed in collaboration with a transfer system design manufacturer, is based on the overhead disk cassette In the introduction of a transfer system, the design transfer system that has been introduced into existing and installation of the transfer system along with the production lines. design of the clean room take into consideration, from (1) Straight type transfer system (linear transfer the outset, the required transfer area, attachment of system) hanging bolts to the ceiling, ceiling strength, arrange- Applicable to a high-class clean area where trans- ment within the clean room and air flow in the clean fer distance is short, buffers between processes are room due to cover mounting. not required, and high transfer speed is required Consequently, an automated transfer system can (2) Loop type transfer system (track feed system) be introduced smoothly without impairing the function Applicable to a middle- or low-class clean area of a clean room and resulting in reduced installation where multiple input and output devices are cost. installed to transfer multiple transfer cassettes After the installation, minor changes such as (3) Clean conveyer type transfer system alterations of floor openings and the addition of covers Applicable to a high- or middle-class clean area were performed to improve the cleanliness in the room where a buffer function for disk cassettes is based on the results of investigation and analysis of required between processes particles and airflow in the clean room. An automated transfer system that complies with If even higher quality is required, it is necessary to high quality requirements was realized by choosing design a clean room and automated transfer systems from among the above-mentioned systems according to between processes as a total system, including the the use and operating environment of the transfer placement of peripheral equipment of the transfer system. system and clean room construction. Automation of Magnetic Hard Disk Production Lines 27 Fig.3 Schematic diagram of a total system Fig.5 Schematic diagram of low cost clean transfer system Opening for exhaust Return area Chemical Exhaust filter (ULPA) Clean unit Clean unit (ULPA) (ULPA) Clean unit Overhead Class 10 (ULPA) transfer system area Production Opening equipment for cassette Cassette chuck Opening for exhaust Transfer point Rail Transfer unit Cassette chuck Cassette Fig.4 Schematic diagram of area separation sources. In addition, no shielding materials were used OA OA over the disk cassette transfer routes in order to secure Return area a laminar flow of air. Figure 4 shows a schematic diagram of the area separation. (ULPA) (ULPA) (ULPA) (ULPA) (ULPA) (ULPA) (ULPA) Thus, dust sources and the disk were completely Auto- mated transfer isolated in the clean room to create a clean environ- Return area Maintenance Equipment Cassette Working ment that maintained the required cleanliness in each area area area (Passage) transfer Class 100 Class 10 area Class 10 area even if there was dust from human bodies and Class 10 facilities. Equipment 4.2 Development of a transfer system for improving cleanliness Traditionally, transfer systems in areas requiring Exhaust a high level of cleanliness were not popular because of their high cost. By improving the track feed system (the loop type transfer system mentioned above) and integrating it with a clean room, Fuji Electric has developed a low- cost clean transfer system which can be used in an 4. Design as a Total System ultra high-class clean area. Previously, track feed systems could only be applied to medium- and low- To cope with higher quality requirements for the class clean areas. Figure 5 shows a schematic diagram disk, an example of an automated transfer system of the newly developed low-cost clean transfer system. introduced between processes will be described. In the previous type of transfer systems, disk Figure 3 shows a schematic diagram of the total cassette chucks were provided under the transfer system. system body. In the new system, the chucks were removed from the system and placed outside the body 4.1 Area separation cover to separate them from dust sources. In addition, In designing an automated transfer system, areas to provide a clean power supply system to the transfer in and between processes were separated from each system body, an induction type feed system (non- other in accordance with the required cleanliness. contact type) was developed to replace the brush type Due to economical and technical limitations, it is feed system (contact type) because the latter emits a impossible to make dust source free of the system. relatively large amount of dust. Therefore, disk cassette transfer routes, facilities in- The transfer system was developed as part of the stallation areas, and maintenance and working areas total system, integrating a clean room design around were completely separated to isolate the disk and dust the transfer system.
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