Safety Data Sheet Material Name: TICL4 SDS ID: ADC23550 (SINGAPORE)

SECTION 1: Identification

Product identifier Material Name TICL4 Synonyms TETRACHLORIDE; TITANIUM ; TITANIC CHLORIDE; TETRACHLOROTITANIUM; TITANIUM CHLORIDE (TiCl4) (T-4)-; TITANIUM(IV) CHLORIDE; T-308; SMOKE STICKS #15-049; UN 1838; Cl4Ti Chemical Family inorganic, halogenated Product Use semiconductor manufacture Restrictions on Use None known. Details of the supplier of the safety data sheet Entegris, Inc.

129 Concord Road Building 2 Billerica, MA 01821 USA

Telephone Number: +1-952-556-4181 Telephone Number: +1-800-394-4083 (toll free within North America)

Supplier Entegris Singapore Pte. Ltd. 31 Kaki Bukit Road 3, Techlink, #06-08/11 Singapore 417818 Telephone: +65-6745-2422 Fax: +65-6745-4477

Emergency # 800-101-2201(CHEMTREC) 1-703-527-3887 (International)

E-mail: [email protected]

SECTION 2: Hazards identification

Singapore Standard SS 586-2:2014 Acute Toxicity - Oral - Category 4 Acute Toxicity - Inhalation - Vapor - Category 1 Skin Corrosion/Irritation - Category 1 Serious Eye Damage/Eye Irritation - Category 1 Specific Target Organ Toxicity - Single Exposure - Category 3 ( respiratory system )

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Safety Data Sheet Material Name: TICL4 SDS ID: ADC23550 (SINGAPORE)

Label elements Hazard symbols

Signal word Danger Hazard statements H330 Fatal if inhaled. H302 Harmful if swallowed. H314 Causes severe skin burns and eye damage. H335 May cause respiratory irritation. Precautionary statements Prevention P260 Do not breathe vapor or mist. P264 Wash thoroughly after handling. P280 Wear protective gloves/protective clothing/eye protection/face protection. P284 Wear respiratory protection. P270 Do not eat, drink or smoke when using this product. P271 Use only outdoors or in a well-ventilated area. Response P310 Immediately call a POISON CENTER or doctor/physician. P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing. P320 Specific treatment is urgent (see label). P303+P361+P353 IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. P363 Wash contaminated clothing before reuse. P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. P301+P330+P331 IF SWALLOWED: Rinse mouth. Do NOT induce vomiting. Storage P403+P233 Store in a well-ventilated place. Keep container tightly closed. P405 Store locked up. Disposal P501 Dispose of contents/container in accordance with local/regional/national/international regulations. Other Hazards Which Do Not Result in Classification Reacts violently with water.

SECTION 3: Composition / information on ingredients

CAS Component Name Percent

7550-45-0 TITANIUM TETRACHLORIDE 100 Impurities and stabilizing additives contributing to the GHS Classification

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Safety Data Sheet Material Name: TICL4 SDS ID: ADC23550 (SINGAPORE)

None

SECTION 4: First aid measures

Inhalation If adverse effects occur, remove to uncontaminated area. Give artificial respiration if not breathing. If breathing is difficult, should be administered by qualified personnel. Get immediate medical attention. Skin contact Wash skin with soap and water for at least 15 minutes while removing contaminated clothing and shoes. Get immediate medical attention. Thoroughly clean and dry contaminated clothing before reuse. Destroy contaminated shoes. Eye contact Immediately flush eyes with plenty of water for at least 60 minutes. Remove contact lenses, if present and easy to do. Continue rinsing. Then get immediate medical attention. Ingestion If swallowed, do NOT induce vomiting. Rinse mouth. Get immediate medical attention. Most Important Symptoms/Effects Acute Fatal if inhaled, Harmful if swallowed, respiratory tract burns, skin burns, eye burns, mucous membrane burns Delayed bronchitis Indication of any immediate medical attention and special treatment needed For inhalation, consider oxygen. Avoid gastric lavage or emesis.

SECTION 5: Firefighting measures

Flammable Properties Negligible fire hazard. Suitable extinguishing media regular dry chemical, dioxide. Large fires: Flood with water. Apply water from a protected location or from a safe distance. Unsuitable Extinguishing Media water Special Hazards Arising from the Chemical Negligible fire hazard. Hazardous combustion products , oxides of titanium, Fire Fighting Measures Do not get water inside container. Do not scatter spilled material with high-pressure water streams. Move container from fire area if it can be done without risk. Cool containers with water spray until well after the fire is out. Stay away from the ends of tanks. Use extinguishing agents appropriate for surrounding fire. Do not get water directly on material. Large fires: Flood with fine water spray. Reduce vapors with water spray. Apply water from a protected location or from a safe distance. Avoid inhalation of material or combustion by-products. Stay upwind and keep out of low areas. Special Protective Equipment and Precautions for Firefighters Wear full protective fire fighting gear including self contained breathing apparatus (SCBA) for protection against possible exposure. ______Page 3 of 10 Issue date: 2018-12-03 Revision 2.1 Print date: 2018-12-03

Safety Data Sheet Material Name: TICL4 SDS ID: ADC23550 (SINGAPORE)

SECTION 6: Accidental release measures

Personal precautions, protective equipment and emergency procedures Wear personal protective clothing and equipment. Environmental precautions Avoid release to the environment. Methods and Materials for Containment and Cleaning Up Stop leak if possible without personal risk. Reduce vapors with water spray. Do not get water directly on material. Avoid contact with combustible materials. Do not touch spilled material. Do not get water inside container. Only personnel trained for the hazards of this material should perform clean up and disposal. Dike for later disposal. Do not use water. Keep unnecessary people away, isolate hazard area and deny entry. Ventilate closed spaces before entering.

SECTION 7: Handling and storage

Precautions for safe handling Do not breathe vapor or mist. Wash thoroughly after handling. Use only outdoors or in a well-ventilated area. Do not eat, drink, or smoke when using this product. Wear respiratory protection. Wear protective gloves/clothing and eye/face protection. Conditions for safe storage, including any incompatibilities Store in a well-ventilated place. Keep container tightly closed. Store locked up. Store and handle in accordance with all current regulations and standards. Protect from physical damage. Store in a cool, dry place. Store outside or in a detached building. Keep separated from incompatible substances. Incompatible Materials metals, peroxides, water

SECTION 8: Exposure controls/personal protection

Exposure Guidelines Component Exposure Limits Singapore and ACGIH have not developed exposure limits for any of this product's components. Biological limit value There are no biological limit values for any of this product's components. Engineering controls Provide local exhaust or process enclosure ventilation system. Ensure compliance with applicable exposure limits. PERSONAL PROTECTIVE EQUIPMENT Eye/face protection Wear splash resistant safety goggles with a faceshield. Provide an emergency eye wash fountain and quick drench shower in the immediate work area. Protective Clothing Wear appropriate chemical resistant clothing. Glove Recommendations Wear appropriate chemical resistant gloves. Protective Materials polyvinyl chloride (PVC), rubber Respiratory Protection ______Page 4 of 10 Issue date: 2018-12-03 Revision 2.1 Print date: 2018-12-03

Safety Data Sheet Material Name: TICL4 SDS ID: ADC23550 (SINGAPORE)

Under conditions of frequent use or heavy exposure, respiratory protection may be needed. Respiratory protection is ranked in order from minimum to maximum. Consider warning properties before use. Any air- purifying full-facepiece respirator equipped with an N95, R95, or P95 filter. The following filters may also be used: N99, R99, P99, N100, R100 or P100. Any powered, air-purifying respirator with a tight-fitting facepiece and a high-efficiency particulate filter. Any supplied-air respirator with a full facepiece that is operated in a pressure-demand or other positive-pressure mode. For Unknown Concentrations or Immediately Dangerous to Life or Health -: Any supplied-air respirator with a full facepiece that is operated in a pressure-demand or other positive-pressure mode in combination with an auxiliary self-contained breathing apparatus operated in pressure-demand or other positive-pressure mode. Any self-contained breathing apparatus that has a full facepiece and is operated in a pressure-demand or other positive-pressure mode.

SECTION 9: Physical and chemical properties

colorless to yellow Appearance Physical State liquid liquid colorless to Odor irritating odor Color yellow Odor Threshold Not available pH Not available -25 °C 136 °C Boiling Point Range Not available Freezing point Not available Evaporation Rate Not available Flammability (solid, gas) Not applicable

Autoignition (Not flammable Not available Flash Point Temperature ) Lower Explosive Not available Decomposition temperature Not available Limit Upper Explosive 23 mmHg @ 38 Not available Vapor Pressure Limit °C Vapor Density 6.6 Specific Gravity (water=1) 1.726 (air=1) Partition coefficient: n- Water (Reacts violently ) Not available octanol/water

Viscosity 0.079 cP Kinematic Not available moisture- Solubility (Other) Not available Change in color sensitive 1.726 g/cm3 at 20 Density Physical Form fuming liquid °C Molecular Formula Ti-Cl4 Molecular Weight 189.69 Solubility ______Page 5 of 10 Issue date: 2018-12-03 Revision 2.1 Print date: 2018-12-03

Safety Data Sheet Material Name: TICL4 SDS ID: ADC23550 (SINGAPORE)

Soluble dilute hydrochloric acid, alcohol

SECTION 10: Stability and reactivity

Reactivity May react with evolution of heat on contact with water. Releases toxic, corrosive, flammable or explosive gases. Chemical stability May react with evolution of heat on contact with water. Releases toxic, corrosive, flammable or explosive gases. Possibility of hazardous reactions Will not polymerize. Conditions to avoid Avoid contact with combustible materials. Keep dry. Dangerous gases may accumulate in confined spaces. Keep out of water supplies and sewers. Materials to Avoid (Incompatibilities) metals, peroxides, water Hazardous decomposition products Thermal decomposition products hydrochloric acid, oxides of titanium, chlorine Water or Moisture hydrochloric acid, titanium compounds

SECTION 11: Toxicological information

Information on Likely Routes of Exposure Inhalation: Fatal if inhaled, burns Skin contact burns Eye contact eye burns Ingestion Harmful if swallowed, mucous membrane burns Component Analysis - LD50/LC50 The components of this material have been reviewed in various sources and the following selected endpoints are published: TITANIUM TETRACHLORIDE (7550-45-0) Oral LD50 Rat 464 mg/kg Dermal LD50 Rabbit 3160 mg/kg Inhalation LC50 Rat 460 mg/m3 4 h Acute Toxicity Estimate Dermal >2000 mg/kg

Inhalation - Vapor 0.460 mg/L

Oral 464 mg/kg

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Safety Data Sheet Material Name: TICL4 SDS ID: ADC23550 (SINGAPORE)

Immediate Effects Fatal if inhaled, Harmful if swallowed, respiratory tract burns, skin burns, eye burns, mucous membrane burns Delayed Effects bronchitis Irritation/Corrosivity Data respiratory tract burns, skin burns, eye burns, mucous membrane burns Respiratory Sensitization No data available. Dermal Sensitization No data available. Carcinogenicity Component Carcinogenicity None of this product's components are listed by ACGIH, IARC, NTP, DFG or OSHA. Mutagenic Data No data available. Reproductive Effects Data No data available. Tumorigenic Data Animal inhalation study produced squamous cell carcinomas; significance for humans is unknown. Specific Target Organ Toxicity - Single Exposure respiratory system Specific Target Organ Toxicity - Repeated Exposure lungs Aspiration hazard Not expected to be an aspiration hazard. Medical Conditions Aggravated by Exposure eye disorders, heart or cardiovascular disorders, respiratory disorders, skin disorders and allergies

SECTION 12: Ecological information

Component Analysis - Aquatic Toxicity No LOLI ecotoxicity data are available for this product's components. Abiotic degradation Hydrolyzes on contact with water to form hydrochloric acid and titanium oxychloride. Persistence No data available. Bioaccumulative potential No data available. Mobility No data available. Other adverse effects Titanium tetrachloride hydrolyzes rapidly upon contact with moist air to form a vapor of hydrochloric acid, , and titanium oxychloride.

SECTION 13: Disposal considerations

Disposal Methods Dispose in accordance with all applicable regulations. Component waste information ______Page 7 of 10 Issue date: 2018-12-03 Revision 2.1 Print date: 2018-12-03

Safety Data Sheet Material Name: TICL4 SDS ID: ADC23550 (SINGAPORE)

There is no applicable waste information for this product's components. Contaminated packaging disposal Dispose in accordance with all applicable regulations.

SECTION 14: Transport information

IATA Information: Shipping Name: TITANIUM TETRACHLORIDE Hazard Class: 6.1 UN#: UN1838 Forbidden by Air

ICAO Information: Shipping Name: TITANIUM TETRACHLORIDE Hazard Class: 6.1 UN#: UN1838 Forbidden by Air

IMDG Information: Shipping Name: TITANIUM TETRACHLORIDE Hazard Class: 6.1 UN#: UN1838 Packing Group: I Required Label(s): 6.1, 8 International Bulk Chemical Code This material does not contain any chemicals required by the IBC Code to be identified as dangerous chemicals in bulk. Special precautions None

SECTION 15: Regulatory information

Singapore Regulations List of Hazardous Substances TITANIUM TETRACHLORIDE 7550-45-0

Present Poisons List No information was found for the substance(s) on the List of Hazardous Substances. Hazardous Substance Transport Quantities TITANIUM TETRACHLORIDE 7550-45-0

1000 kg Maritime and Port Authority This product contains no components identified on Singapore's Maritime and Port Authority - Dangerous Goods. Arms and Explosives Act ______Page 8 of 10 Issue date: 2018-12-03 Revision 2.1 Print date: 2018-12-03

Safety Data Sheet Material Name: TICL4 SDS ID: ADC23550 (SINGAPORE)

None of this product's components are on the list. Schedule of Chemical Weapons None of this product's components are on the list. Misuse of Drugs Act None of this product's components are on the list. Petroleum and Flammable Materials This product contains no components identified on Singapore's Petroleum and Flammable Materials. Strategic Goods Control This product contains no components identified on Singapore's Strategic Goods Control. Toxic Industrial Wastes This product contains no components identified on Singapore's Toxic Industrial Wastes. Component Analysis - Inventory TITANIUM TETRACHLORIDE (7550-45-0) US CA AU CN EU JP - ENCS JP - ISHL KR KECI - Annex 1 KR KECI - Annex 2

Yes DSL Yes Yes EIN Yes Yes Yes No

KR - REACH CCA MX NZ PH TH-TECI TW VN (Draft)

No Yes Yes Yes Yes Yes Yes

SECTION 16: Other information

NFPA Ratings Health: 3 Fire: 0 Instability: 2 Other: W Hazard Scale: 0 = Minimal 1 = Slight 2 = Moderate 3 = Serious 4 = Severe Summary of Changes 12/3/2018 - Update to Section(s) 2, 11. Preparation and Revision Date 12/15/2015 Revision date 12/3/2018 Key / Legend ACGIH - American Conference of Governmental Industrial Hygienists; ADR - European Road Transport; AU - Australia; BOD - Biochemical Oxygen Demand; C - Celsius; CA - Canada; CA/MA/MN/NJ/PA - California/Massachusetts/Minnesota/New Jersey/Pennsylvania*; CAS - Chemical Abstracts Service; CERCLA - Comprehensive Environmental Response, Compensation, and Liability Act; CFR - Code of Federal Regulations (US); CLP - Classification, Labelling, and Packaging; CN - China; CPR - Controlled Products Regulations; DFG - Deutsche Forschungsgemeinschaft; DOT - Department of Transportation; DSD - Dangerous Substance Directive; DSL - Domestic Substances List; EC – European Commission; EEC - European Economic Community; EIN - European Inventory of (Existing Commercial Chemical Substances); EINECS - European Inventory of Existing Commercial Chemical Substances; ENCS - Japan Existing and New Chemical Substance Inventory; EPA - Environmental Protection Agency; EU - European Union; F - Fahrenheit; F - Background (for Venezuela Biological Exposure Indices); IARC - International Agency for Research on Cancer; IATA - International Air Transport Association; ICAO - International Civil Aviation Organization; IDL - Ingredient Disclosure List; IDLH - Immediately Dangerous to Life and Health; IMDG - International Maritime Dangerous Goods; ISHL - Japan Industrial Safety and Health Law; IUCLID - ______Page 9 of 10 Issue date: 2018-12-03 Revision 2.1 Print date: 2018-12-03

Safety Data Sheet Material Name: TICL4 SDS ID: ADC23550 (SINGAPORE)

International Uniform Chemical Information Database; JP - Japan; Kow - Octanol/water partition coefficient; KR KECI Annex 1 - Korea Existing Chemicals Inventory (KECI) / Korea Existing Chemicals List (KECL); KR KECI Annex 2 - Korea Existing Chemicals Inventory (KECI) / Korea Existing Chemicals List (KECL) , KR - Korea; LD50/LC50 - Lethal Dose/ Lethal Concentration; LEL - Lower Explosive Limit; LLV - Level Limit Value; LOLI - List Of LIsts™ - ChemADVISOR’s Regulatory Database; MAK - Maximum Concentration Value in the Workplace; MEL - Maximum Exposure Limits; MX – Mexico; Ne- Non-specific; NFPA - National Fire Protection Agency; NIOSH - National Institute for Occupational Safety and Health; NJTSR - New Jersey Trade Secret Registry; Nq - Non-quantitative; NSL – Non-Domestic Substance List (Canada); NTP - National Toxicology Program; NZ - New Zealand; OSHA - Occupational Safety and Health Administration; PEL- Permissible Exposure Limit; PH - Philippines; RCRA - Resource Conservation and Recovery Act; REACH- Registration, Evaluation, Authorisation, and restriction of Chemicals; RID - European Rail Transport; SARA - Superfund Amendments and Reauthorization Act; Sc - Semi-quantitative; STEL - Short-term Exposure Limit; TCCA – Korea Toxic Chemicals Control Act; TDG - Transportation of Dangerous Goods; TLV - Threshold Limit Value; TSCA - Toxic Substances Control Act; TW – Taiwan; TWA - Time Weighted Average; UEL - Upper Explosive Limit; UN/NA - United Nations /North American; US - United States; VLE - Exposure Limit Value (Mexico); VN (Draft) - Vietnam (Draft); WHMIS - Workplace Hazardous Materials Information System (Canada). Other Information Disclaimer: The information in this (Material) Safety Data Sheet ("(M)SDS") is believed to be current and accurate as of the time of shipment of the product by Entegris. Entegris makes no warranties, express or implied, with respect to such information, including, without limitation, the implied warranties of merchantability and fitness for a particular purpose. Entegris assumes no liability for any loss or injury which may result from the use of the information contained in this (M)SDS. The chemical, physical and toxicological properties of the Entegris product described in this (M)SDS have not been thoroughly investigated. Users are responsible for exercising due care in using the Entegris product, and for conducting their own investigation to determine whether the product is fit for their particular purpose and suitable for their method of use or application. It is the user's responsibility to ensure that its activities comply with all applicable laws and regulations. Entegris is a registered trademark of Entegris Inc. or an affiliated company. © 2015 Entegris Inc. or affiliated company. All rights reserved.

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