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HB-LED Committee China TC Chapter Meeting Summary and Minutes HB-LED Committee China TC Chapter Meeting Summary and Minutes China Fall Standards Meeting 2018 Wednesday, October 24th, 2018, 09:00-12:10 Shangri-La Hotel, No.669 Cuilin Road, Honggutan District, Nanchang, Jiangxi Province, China. TC Chapter Announcements Next TC Chapter Meeting Friday, March 29th, 2019, 13:30-17:00 Shanghai, China Table 1 Meeting Attendees Italics indicate virtual participants Co-Chairs: Hongbo Zuo (AURORA), Jiangbo Wang (HC-SEMITEK) SEMI Staff: Daniel Qi (SEMI China), Isadora Jin (SEMI China), Mina Chen (SEMI China), Ein Wu (SEMI China) Company Last First Company Last First AURORA Zuo Hongbo HC SEMITEK Wang Jiangbo AURORA Yang Xinhong GCL Liu Yifeng AMEC Li Tianxiao HIT Gan Yang Monocrystal Niu Chongshi BST Liu Jianzhe E-Xinhe Zheng Songsen GAPSS Wei Mingde SMTC Wu Liangwen AK OPTICS Ma Tiezhong JINGAN Zhang Heng JINGAN Si Fanghu DDXDF Zhao Songbin Air Liquide(China)Holding Guo Junsong SINOPATT Zhang Neng Air Liquide(China)Holding Yu Yunhong Euchner China Lu Ji Air Liquide(China)Holding Xiao Yanping SCH Electronics Zhang Shiyu SANAN Liu Jianming China Fortune Land Development Xu Yan Schneider Chen Yongyang China Fortune Land Development Jiang Zeyu Micro-Power Scientific Jin Xiaoliang AMEC Liu Yingbin IAWBS Lu Min AMEC Cao Han AURORA An Zijian AMEC Zhu Qiulong AURORA Yan Zhehua GHTOT Qi Liuyun AURORA Du Wei 3E Semiconductor Zhang Yaxian CENTROTHERM Jia Xinan HAOYUE Zhu Wenhao Kingsemi Wang Dong HAOYUE Zhang Li Kingsemi Yu Jianbin KUREHA Huang Zijian Kingsemi Liu Chi SGL carbon Liu Nelson SGL carbon Zhu Ray Chuanbei Vacuum Technology Liu Shenghui Chuanbei Vacuum Technology Fu Kai Amplitude Laser Group Hanson Han Schneider Electric Kong Rui KLA-Tencor David Yeh ALLIN CAPITAL Wang Zhaohua <Committee Name> <Region> TC Chapter 1 <date of meeting> Meeting Minutes <city, state/country> Company Last First Company Last First SMTC Lin Yifeng Evatec China Henfy Su OPTIROM Liu Diping SXT Song Weihong SCIENTECH Xi Dandan KLA Edwin Chew HAMAMATSU Xiang Chenghao HDSC Liu Xinjie ATTL Yang Yajie HDSC Li Jinxiang DAS Wu Bin Aixtron Wu Bin Winifred Li Xiaodong Schunk Xycarb Technology Xu Andy Revasum Shen Jun Schunk Xycarb Technology Wang Jeremy Beijing Asia Science&Tech Liu Pan NJUPT Cheng Jianbing AST Wang Xiang KALLEX Lin Bowen TS PROSDA GREENTECH Chen Weizhi Lianovation Liu Yang CETC48 Gong Xiaoliang DelphiLaser Jiang Xiang GREE ELECTRIC Chen Daokun DelphiLaser Wang Yanping APPLIANCES Huaqiao University Lai Zhiyuan Lapmaster-Wolters Zhang Wei SPTS Technologies Sun Ping LEUVEN Wang Yonglin DONG RONG ELECTRONICS Du Xianghua Micro-Power Scientific Li Deng NUOHUA CERAMICS Dong Jiahai AMEC Ji Hua AMEC Wang Zhijun AMEC Zhou Jianfu AMEC Cao Yu AMEC Liu Yi Table 2 Leadership Changes WG/TF/SC/TC Name Previous Leader New Leader HB-LED Equipment Communication Steven Lee (AMEC) Steven Lee (AMEC) Interface Task Force Edward Lee (AMEC) Clare Liu (Cimetrix) Table 3 Committee Structure Changes Previous WG/TF/SC Name New WG/TF/SC Name or Status Change None Table 4 Ballot Results Document # Document Title Committee Action 5775D New Standard: Specification for Sapphire Single Crystal Ingot Intended for Use Passed with technical for Manufacturing HB-LED Wafers changes and editorial changes. Ratification ballot to be issued. 6192 New Standard: Specification for Dry Etching Patterned Sapphire Substrate Failed and return to (DPSS) TF for re-work and reballot in Cycle 9- 2018 <Committee Name> <Region> TC Chapter 2 <date of meeting> Meeting Minutes <city, state/country> #1 Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review. #2 Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning. Table 5 Activities Approved by the GCS between meetings of the TC Chapter # Type SC/TF/WG Details None Table 6 Authorized Activities Listing of all revised or new SNARF(s) approved by the Originating TC Chapter. # Type SC/TF/WG Details None #1 SNARFs and TFOFs are available for review on the SEMI Web site at: http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF Table 7 Authorized Ballots # When TF Details 6370 Cycle 9 - HB-LED New Standard: Specification of Susceptors for HB-LED MOCVD Equipment 2018 Equipment Communication Interface Communication Interface Task Force 6371 Cycle 1 - Patterned New Standard: Test Method for Determining Geometrical Parameters of Patterns on 2019 Sapphire Patterned Sapphire Substrate Substrate Task Force R5775D TBD Sapphire Single New Standard: Specification for Sapphire Single Crystal Ingot Intended for Use for Crystal Ingot Manufacturing HB-LED Wafers Task Force 6192A Cycle 9- Patterned New Standard: Specification for Dry-Etched Patterned Sapphire Substrates (DPSS) 2018 Sapphire Substrate Task Force Table 8 SNARF(s) Granted a One-Year Extension # TF Title Expiration Date 5946 Single Crystal New Standard: Test Method for Grain Boundary of Single Crystal 2019/9/18 Sapphire Task Sapphire by Optical Homogeneity Technique (OHT) Force Table 9 SNARF(s) Abolished # TF Title None Table 10 Standard(s) to receive Inactive Status Standard Designation Title None <Committee Name> <Region> TC Chapter 3 <date of meeting> Meeting Minutes <city, state/country> Table 11 New Action Items Item # Assigned to Details None Table 12 Previous Meeting Action Items Item # Assigned to Details China HB- Ruting Zhen Sapphire Single Crystal Orientation Task Force go to inactive status, motion by LED-0418-01 (DDXDF) Ruting Zhen (DDXDF), Second by Yang Gan, No discussion, vote 25 passed China HB- Hongbo Zuo Take over the SNARF # 5629, New Standard: Guide for Identification of Features LED-0416-01 from Aurora on the Surface of Sapphire Wafers from NA, to complete the standard. ONGOING China HB- Jiangbo Wang Take over the SNARF # 5776, New Standard: Test Method for Detecting Surface LED-0416-02 from HC Defects of GaN based LED Epitaxial Wafer Used for Manufacturing HB-LED, SEMITEK since the previous author was left from THTF. Go to A&R 1 Welcome, Reminders, and Introductions Daniel Qi (SEMI) called the meeting to order at 09:00. Committee co-chair Hongbo Zuo chaired the meeting and welcomed all attendees. The meeting reminders on antitrust issues, intellectual property issues and holding meetings with international attendance were reviewed. Attendees introduced themselves. Agenda was reviewed. Attachment: 1 Chinese SEMI Standard Meeting Reminders 2 HB-LED TC Fall Meeting 2018 Agenda 2 Review of Previous Meeting Minutes The TC Chapter reviewed the minutes of the previous meeting. Motion: To approve the minutes of the previous meeting as written By / 2nd: Jiangbo Wang (HC SEMITEK) / Steven Lee (AMEC) Discussion: None Vote: 32 in favor and 0 opposed (Total 30 companies.) Motion Passed. Attachment: 3 China HB-LED TC Meeting Minutes 20180418 3 Liaison Reports 3.1 HB-LED North America TC Chapter Isadora Jin (SEMI) reported for the HB-LED North America TC Chapter. Of note: Action Item: Next meeting - NA Spring Standards Meeting. SEMI HQ in Milpitas CA, November 8, 2018 Iain Black (Philips Lumileds) stepped down from Co-Chair role The Co-chairs of North America HB-LED TC are Andrew Kim (InnovationforX), Chris Moore (Frontier Semiconductor) and Mike Feng (Silian) <Committee Name> <Region> TC Chapter 4 <date of meeting> Meeting Minutes <city, state/country> Ballot results ➢ Doc. 6387, Reapproval to SEMI HB2-0613, Specification for 150 mm Open Plastic and Metal Wafer Cassettes Intended for Use for Manufacturing HB-LED Devices Passed Cycle 5-2018 as balloted. Authorized SNARF(s) ➢ New SNARF, Reapproval to SEMI HB4-0913, Specification of Communication Interfaces for High Brightness LED Manufacturing Equipment (HB-LED ECI) Authorized Ballots ➢ Doc. 6340, Reapproval to SEMI HB4-0913, Specification of Communication Interfaces for High Brightness LED Manufacturing Equipment (HB-LED ECI) requests for Cycle 7-2018 Plan to combine PSS TF with HB-LED Wafer TF. Both TFs are looking for new members. Attachment: 4 NA HB-LED Liaison Report July 2018 3.2 SEMI Staff Report Isadora Jin (SEMI) gave the SEMI Staff Report. Of note: • SEMI Standards Overview • SEMI Global 2018 Calendar of Events • 2018 Critical Dates for SEMI Standards Ballots • SEMI Standards Publications • HB-LED Standards Publications in 2018 Q3 and Q4 • China HB-LED TC Update • Enhance Task Force Management • Core Members Attendance Record • Necessary Info. from Website Attachment: 5 SEMI Staff Report 20181024 4 Ballot Review NOTE 1: TC Chapter adjudication on ballots reviewed is detailed in the Audits & Review (A&R) Subcommittee Forms for procedural review. The A&R forms are available as attachments to these minutes. The attachment number for each balloted document is provided under each ballot review section below. 4.1 Document R5723C, New Standard: Specification for Single Crystal Sapphire Intended for Use for Manufacturing HB-LED Wafers Motion: Liuyun Qi (GHTOT) moved that this Standard should be published without revise. By / 2nd: Liuyun Qi (GHTOT) /Yang Gan (HIT) Discussion: None Vote: 32 in favor and 0 opposed. (Total 32 companies.) Motion Passed. Attachment: 6 R5723C Ratification Ballot Review <Committee Name> <Region> TC Chapter 5 <date of meeting> Meeting Minutes <city, state/country> 4.2 Document 5775D, New Standard: Specification for Sapphire Single Crystal Ingot Intended for Use for Manufacturing HB-LED Wafers Zhehua Yan (AURORA) moved that this Standard passed TC Chapter review with technical changes and Motion: editorial changes and will be forwarded to the ISC A&R SC for procedural review. A Ratification Ballot will be issued to verify the technical changes. By / 2nd: Zhehua Yan (AURORA) / Yang Gan (HIT) Discussion: 1 Jianzhe Liu (BST): The standard referred should be specified. HB10-1018 is published which could be reference in this document. 2 Mingde Wei (GAPSS): The requirement on crack in optics may be taken in consideration. The scratch is on axial. It shall be described in quantitative method. Vote: 30 in favor and 2 opposed.
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