HB-LED Committee China TC Chapter Meeting Summary and Minutes
China Fall Standards Meeting 2018 Wednesday, October 24th, 2018, 09:00-12:10 Shangri-La Hotel, No.669 Cuilin Road, Honggutan District, Nanchang, Jiangxi Province, China.
TC Chapter Announcements Next TC Chapter Meeting Friday, March 29th, 2019, 13:30-17:00 Shanghai, China
Table 1 Meeting Attendees Italics indicate virtual participants
Co-Chairs: Hongbo Zuo (AURORA), Jiangbo Wang (HC-SEMITEK) SEMI Staff: Daniel Qi (SEMI China), Isadora Jin (SEMI China), Mina Chen (SEMI China), Ein Wu (SEMI China) Company Last First Company Last First AURORA Zuo Hongbo HC SEMITEK Wang Jiangbo AURORA Yang Xinhong GCL Liu Yifeng AMEC Li Tianxiao HIT Gan Yang Monocrystal Niu Chongshi BST Liu Jianzhe E-Xinhe Zheng Songsen GAPSS Wei Mingde SMTC Wu Liangwen AK OPTICS Ma Tiezhong JINGAN Zhang Heng JINGAN Si Fanghu DDXDF Zhao Songbin Air Liquide(China)Holding Guo Junsong SINOPATT Zhang Neng Air Liquide(China)Holding Yu Yunhong Euchner China Lu Ji Air Liquide(China)Holding Xiao Yanping SCH Electronics Zhang Shiyu SANAN Liu Jianming China Fortune Land Development Xu Yan Schneider Chen Yongyang China Fortune Land Development Jiang Zeyu Micro-Power Scientific Jin Xiaoliang AMEC Liu Yingbin IAWBS Lu Min AMEC Cao Han AURORA An Zijian AMEC Zhu Qiulong AURORA Yan Zhehua GHTOT Qi Liuyun AURORA Du Wei 3E Semiconductor Zhang Yaxian CENTROTHERM Jia Xinan HAOYUE Zhu Wenhao Kingsemi Wang Dong HAOYUE Zhang Li Kingsemi Yu Jianbin KUREHA Huang Zijian Kingsemi Liu Chi SGL carbon Liu Nelson SGL carbon Zhu Ray Chuanbei Vacuum Technology Liu Shenghui Chuanbei Vacuum Technology Fu Kai Amplitude Laser Group Hanson Han Schneider Electric Kong Rui KLA-Tencor David Yeh ALLIN CAPITAL Wang Zhaohua
Company Last First Company Last First
SMTC Lin Yifeng Evatec China Henfy Su OPTIROM Liu Diping SXT Song Weihong SCIENTECH Xi Dandan KLA Edwin Chew HAMAMATSU Xiang Chenghao HDSC Liu Xinjie ATTL Yang Yajie HDSC Li Jinxiang DAS Wu Bin Aixtron Wu Bin Winifred Li Xiaodong Schunk Xycarb Technology Xu Andy Revasum Shen Jun Schunk Xycarb Technology Wang Jeremy Beijing Asia Science&Tech Liu Pan NJUPT Cheng Jianbing AST Wang Xiang KALLEX Lin Bowen TS PROSDA GREENTECH Chen Weizhi Lianovation Liu Yang CETC48 Gong Xiaoliang DelphiLaser Jiang Xiang GREE ELECTRIC Chen Daokun DelphiLaser Wang Yanping APPLIANCES Huaqiao University Lai Zhiyuan Lapmaster-Wolters Zhang Wei SPTS Technologies Sun Ping LEUVEN Wang Yonglin DONG RONG ELECTRONICS Du Xianghua Micro-Power Scientific Li Deng NUOHUA CERAMICS Dong Jiahai AMEC Ji Hua AMEC Wang Zhijun AMEC Zhou Jianfu AMEC Cao Yu AMEC Liu Yi
Table 2 Leadership Changes
WG/TF/SC/TC Name Previous Leader New Leader HB-LED Equipment Communication Steven Lee (AMEC) Steven Lee (AMEC) Interface Task Force Edward Lee (AMEC) Clare Liu (Cimetrix)
Table 3 Committee Structure Changes
Previous WG/TF/SC Name New WG/TF/SC Name or Status Change None
Table 4 Ballot Results
Document # Document Title Committee Action 5775D New Standard: Specification for Sapphire Single Crystal Ingot Intended for Use Passed with technical for Manufacturing HB-LED Wafers changes and editorial changes. Ratification ballot to be issued. 6192 New Standard: Specification for Dry Etching Patterned Sapphire Substrate Failed and return to (DPSS) TF for re-work and reballot in Cycle 9- 2018
#1 Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review. #2 Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.
Table 5 Activities Approved by the GCS between meetings of the TC Chapter
# Type SC/TF/WG Details None
Table 6 Authorized Activities Listing of all revised or new SNARF(s) approved by the Originating TC Chapter. # Type SC/TF/WG Details None #1 SNARFs and TFOFs are available for review on the SEMI Web site at: http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Table 7 Authorized Ballots
# When TF Details 6370 Cycle 9 - HB-LED New Standard: Specification of Susceptors for HB-LED MOCVD Equipment 2018 Equipment Communication Interface Communication Interface Task Force 6371 Cycle 1 - Patterned New Standard: Test Method for Determining Geometrical Parameters of Patterns on 2019 Sapphire Patterned Sapphire Substrate Substrate Task Force R5775D TBD Sapphire Single New Standard: Specification for Sapphire Single Crystal Ingot Intended for Use for Crystal Ingot Manufacturing HB-LED Wafers Task Force 6192A Cycle 9- Patterned New Standard: Specification for Dry-Etched Patterned Sapphire Substrates (DPSS) 2018 Sapphire Substrate Task Force
Table 8 SNARF(s) Granted a One-Year Extension
# TF Title Expiration Date 5946 Single Crystal New Standard: Test Method for Grain Boundary of Single Crystal 2019/9/18 Sapphire Task Sapphire by Optical Homogeneity Technique (OHT) Force
Table 9 SNARF(s) Abolished
# TF Title None
Table 10 Standard(s) to receive Inactive Status
Standard Designation Title None
Table 11 New Action Items
Item # Assigned to Details None
Table 12 Previous Meeting Action Items
Item # Assigned to Details China HB- Ruting Zhen Sapphire Single Crystal Orientation Task Force go to inactive status, motion by LED-0418-01 (DDXDF) Ruting Zhen (DDXDF), Second by Yang Gan, No discussion, vote 25 passed China HB- Hongbo Zuo Take over the SNARF # 5629, New Standard: Guide for Identification of Features LED-0416-01 from Aurora on the Surface of Sapphire Wafers from NA, to complete the standard. ONGOING China HB- Jiangbo Wang Take over the SNARF # 5776, New Standard: Test Method for Detecting Surface LED-0416-02 from HC Defects of GaN based LED Epitaxial Wafer Used for Manufacturing HB-LED, SEMITEK since the previous author was left from THTF. Go to A&R
1 Welcome, Reminders, and Introductions Daniel Qi (SEMI) called the meeting to order at 09:00. Committee co-chair Hongbo Zuo chaired the meeting and welcomed all attendees. The meeting reminders on antitrust issues, intellectual property issues and holding meetings with international attendance were reviewed. Attendees introduced themselves. Agenda was reviewed. Attachment: 1 Chinese SEMI Standard Meeting Reminders 2 HB-LED TC Fall Meeting 2018 Agenda
2 Review of Previous Meeting Minutes The TC Chapter reviewed the minutes of the previous meeting.
Motion: To approve the minutes of the previous meeting as written By / 2nd: Jiangbo Wang (HC SEMITEK) / Steven Lee (AMEC) Discussion: None Vote: 32 in favor and 0 opposed (Total 30 companies.) Motion Passed. Attachment: 3 China HB-LED TC Meeting Minutes 20180418
3 Liaison Reports 3.1 HB-LED North America TC Chapter Isadora Jin (SEMI) reported for the HB-LED North America TC Chapter. Of note:
Action Item: Next meeting - NA Spring Standards Meeting. SEMI HQ in Milpitas CA, November 8, 2018 Iain Black (Philips Lumileds) stepped down from Co-Chair role The Co-chairs of North America HB-LED TC are Andrew Kim (InnovationforX), Chris Moore (Frontier Semiconductor) and Mike Feng (Silian)
Ballot results ➢ Doc. 6387, Reapproval to SEMI HB2-0613, Specification for 150 mm Open Plastic and Metal Wafer Cassettes Intended for Use for Manufacturing HB-LED Devices Passed Cycle 5-2018 as balloted. Authorized SNARF(s) ➢ New SNARF, Reapproval to SEMI HB4-0913, Specification of Communication Interfaces for High Brightness LED Manufacturing Equipment (HB-LED ECI) Authorized Ballots ➢ Doc. 6340, Reapproval to SEMI HB4-0913, Specification of Communication Interfaces for High Brightness LED Manufacturing Equipment (HB-LED ECI) requests for Cycle 7-2018 Plan to combine PSS TF with HB-LED Wafer TF. Both TFs are looking for new members. Attachment: 4 NA HB-LED Liaison Report July 2018
3.2 SEMI Staff Report Isadora Jin (SEMI) gave the SEMI Staff Report. Of note: • SEMI Standards Overview • SEMI Global 2018 Calendar of Events • 2018 Critical Dates for SEMI Standards Ballots • SEMI Standards Publications • HB-LED Standards Publications in 2018 Q3 and Q4 • China HB-LED TC Update • Enhance Task Force Management • Core Members Attendance Record • Necessary Info. from Website Attachment: 5 SEMI Staff Report 20181024
4 Ballot Review NOTE 1: TC Chapter adjudication on ballots reviewed is detailed in the Audits & Review (A&R) Subcommittee Forms for procedural review. The A&R forms are available as attachments to these minutes. The attachment number for each balloted document is provided under each ballot review section below. 4.1 Document R5723C, New Standard: Specification for Single Crystal Sapphire Intended for Use for Manufacturing HB-LED Wafers
Motion: Liuyun Qi (GHTOT) moved that this Standard should be published without revise. By / 2nd: Liuyun Qi (GHTOT) /Yang Gan (HIT) Discussion: None Vote: 32 in favor and 0 opposed. (Total 32 companies.) Motion Passed. Attachment: 6 R5723C Ratification Ballot Review
4.2 Document 5775D, New Standard: Specification for Sapphire Single Crystal Ingot Intended for Use for Manufacturing HB-LED Wafers
Zhehua Yan (AURORA) moved that this Standard passed TC Chapter review with technical changes and Motion: editorial changes and will be forwarded to the ISC A&R SC for procedural review. A Ratification Ballot will be issued to verify the technical changes. By / 2nd: Zhehua Yan (AURORA) / Yang Gan (HIT) Discussion: 1 Jianzhe Liu (BST): The standard referred should be specified. HB10-1018 is published which could be reference in this document. 2 Mingde Wei (GAPSS): The requirement on crack in optics may be taken in consideration. The scratch is on axial. It shall be described in quantitative method. Vote: 30 in favor and 2 opposed. (Total 32 companies.) Motion Passed. Attachment: 7 Ballot Report PPT-5775D
4.3 Document 6192, New Standard: Specification for Dry Etching Patterned Sapphire Substrates (DPSS) Heng Zhang (JINGAN) moved that the committee approve SEMI Document 6192 to return to Motion: Patterned Sapphire Substrate Task Force for rework and reballoting in Cycle 9-2018. By / 2nd: Heng Zhang (JINGAN) / Jianzhe Liu (BST) Discussion: 1 Jianzhe Liu (BST): ZETA should be defined. 2 Mingde Wei (GAPSS): The defined value and tolerance should be taken into consideration. The quantized measurement and defined value should be determined first. 3 Tiezhong Ma (AK OPTICS): Splicing is referred between light and dark lines. What about entity detection? 4 Hongbo Zuo (AURORA): DPSS is suggested to define clearly. 5 Yang Gan (HIT): Shape and array are suggested to illustrate more clearly. 6 Jiangbo Wang (HC SEMITEK): Is radian of side wall included in shape? 7 Heng Zhang (JINGAN): We took deviation in definition into account. Vote: 31 in favor and 1 opposed. (Total 32 companies.) Motion Passed. Attachment: 8 Ballot Report PPT-6192
5 Subcommittee and Task Force Reports 5.1 Single Crystal Sapphire Task Force Liuyun Qi (GHTOT) reported for the Single Crystal Sapphire Task Force. This report contained information on: • Introduced the task force’s leaders and members • Working on ➢ Doc 5946, New Standard: Test Method for Grain Boundary of Single Crystal Sapphire by Optical Homogeneity Technique (OHT) TC Chapter authorized ➢ Doc 5629, New Standard: Guide for Identification Defects on Bare Surfaces of Sapphire Wafers TC Chapter authorized Attachment: 9 Single Crystal Sapphire Task Force Report-2018-10-24
5.2 Sapphire Single Crystal Ingot Task Force Zhehua Yan (AURORA) reported for the Sapphire Single Crystal Ingot Task Force. This report contained information on:
• Introduced the task force’s leaders and members • Working on ➢ Doc 5775D, New Standard: Specification for Sapphire Single Crystal Ingot Intended for Use for Manufacturing HB-LED Wafers Attachment: 10 Sapphire Single Crystal Ingot TF Report
5.3 GaN based LED Epitaxial Wafer Task Force Jiangbo Wang (HC SEMITEK) reported for GaN based LED Epitaxial Wafer Task Force. This report contained information on: • Introduced the task force’s leaders and members • Introduced the task force’s leaders and members • TF Work Plan for the Next Step Attachment: 11 GaN based LED Epitaxial Wafer Task Force-20181024
5.4 Sapphire Single Crystal Orientation Task Force Songbin Zhao (DDXDF) reported for Sapphire Single Crystal Orientation Task Force. This report contained information on: • Introduced the task force’s leaders and members • Working on: ➢ Doc 5945, New Standard: Test Method for Determining Orientation of A Sapphire Single Crystal Attachment: 12 Sapphire Single Crystal Orientation TF Report
5.5 Pattern Sapphire Substrate Task Force Jianzhe Liu (ECBO) reported for Pattern Sapphire Substrate Task Force. This report contained information on: • Introduced the task force’s leaders and members • Working on: ➢ Doc 6192, New Standard: Specification for Dry Etching Patterned Sapphire Substrate (DPSS) ➢ Doc 6371, New Standard: Test Method for Determining Geometrical Parameters of Patterns on Patterned Sapphire Substrate Attachment: 13 Pattern Sapphire Substrate Task Force Report
5.6 HB-LED Equipment Communication Interface Task Force Steven Lee (AMEC) reported for HB-LED Equipment Communication Interface Task Force. This report contained information on: • Introduced the task force’s leaders and members • Working on: ➢ Doc 6370, New Standard: Specification of Susceptors for HB-LED MOCVD Equipment Communication Interface Attachment: 14 Equipment Communication Interface Task Force
6 Old Business 6.1 Refer to Table 12 Previous Meeting Action Items
7 New Business 7.1 Requests for ballots in Cycle 9-2018 Doc.6370, New Standard: Specification of Susceptors for HB-LED MOCVD Equipment Communication Interface Motion: Han Cao (AMEC) moved the Committee to approve the Doc 6370 for ballot in cycle 9-2018. By / 2nd: Han Cao (AMEC)/Tiezhong Ma (AK OPTICS) Discussion: None Vote: 32Y-0N
7.2 Requests for ballots in Cycle 1-2019 Doc.6371, New Standard: Test Method for Determining Geometrical Parameters of Patterns on Patterned Sapphire Motion: Jianzhe Liu (BST) moved the Committee to approve the Doc 6371 for ballot in cycle 1-2019. By / 2nd: Jianzhe Liu (BST) /Tiezhong Ma (AK OPTICS) Discussion: 1 Min Lu (IAWBS): Reflectivity maybe good approach to test parameter. 2 Neng Zhang (Sinopatt): Is it possible to specify sapphire plane indicators. Vote: 32Y-0N
Attachment: 15 6371 Request for Ballot
8 Next Meeting and Adjournment The next meeting is scheduled for April 26th, 2019 in Shanghai, China. See http://www.semi.org/standards-events for the current list of events.
Adjournment: 12:10.
Respectfully submitted by: Isadora Jin Standards, Senior Specialist SEMI China Phone:86-21-6027-8578 Email: [email protected]
Minutes tentatively approved by:
Hongbo Zuo (AURORA), Co-chair <2018/12/07> Jiangbo Wang (HC-SEMITEK), Co-chair <2018/12/07>
Table 13 Index of Available Attachments#1
Title Title 1 Chinese SEMI Standard Meeting Reminders 2 HB-LED TC Fall Meeting 2018 Agenda 3 China HB-LED TC Meeting Minutes 20180418 4 NA HB-LED Liaison Report July 2018 5 SEMI Staff Report 20181024 6 R5723C Ratification Ballot Review 7 Ballot Report PPT-5775D 8 Ballot Report PPT-6192 9 Single Crystal Sapphire Task Force Report-2018-10-24 10 Sapphire Single Crystal Ingot TF Report 11 GaN based LED Epitaxial Wafer Task Force-20181024 12 Sapphire Single Crystal Orientation TF Report 13 Pattern Sapphire Substrate Task Force 14 Equipment Communication Interface Task Force 15 6371 Request for Ballot #1 Due to file size and delivery issues, attachments must be downloaded separately. A .zip file containing all attachments for these minutes is available at www.semi.org. For additional information or to obtain individual attachments, please contact [SEMI Staff Name] at the contact information above.