micromachines Review A Review of MEMS Capacitive Microphones Siti Aisyah Zawawi 1,2 , Azrul Azlan Hamzah 1 , Burhanuddin Yeop Majlis 1 and Faisal Mohd-Yasin 3,* 1 Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi, Selangor 43600, Malaysia;
[email protected] (S.A.Z.);
[email protected] (A.A.H.);
[email protected] (B.Y.M.) 2 UiTM Foundation Centre, Universiti Teknologi Mara, Dengkil Campus, Dengkil, Selangor 43800, Malaysia 3 Queensland Micro- and Nanotechnology Centre, Griffith University, Brisbane QLD 4111, Australia * Correspondence: f.mohd-yasin@griffith.edu.au Received: 28 February 2020; Accepted: 30 April 2020; Published: 8 May 2020 Abstract: This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrication method, material, dimension, and performances. This is followed by discussions on diaphragm, backplate and chamber, and performance parameters. This review is beneficial for those who are interested with the evolutions of this acoustic sensor. Keywords: micro-electro-mechanical system (MEMS); capacitive microphone; condenser microphone; acoustic sensor; evolution 1. Introduction Ever since the introduction of modern microphone back in the late 19th century, tremendous progress had been made due to its broad and evolving list of applications in consumer [1,2], medical [3,4], and automotive applications [5,6]. Johann Philipp Reis and Alexander Graham Bell are acknowledged as the inventors of the first microphones [7]. These early prototypes produced electrical signals with low amplitude and limited frequency ranges.