Sensors 2014, 14, 1394-1473; doi:10.3390/s140101394 OPEN ACCESS sensors ISSN 1424-8220 www.mdpi.com/journal/sensors Review The Development of Micromachined Gyroscope Structure and Circuitry Technology Dunzhu Xia *, Cheng Yu and Lun Kong Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China; E-Mails:
[email protected] (C.Y.);
[email protected] (L.K.) * Author to whom correspondence should be addressed; E-Mail:
[email protected]; Tel./Fax: +86-25-8379-3552. Received: 27 October 2013; in revised form: 28 November 2013 / Accepted: 11 December 2013 / Published: 14 January 2014 Abstract: This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface acoustic wave (SAW) gyroscopes, bulk acoustic wave (BAW) gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs), magnetically suspended gyroscopes (MSGs), micro fiber optic gyroscopes (MFOGs), micro fluid gyroscopes (MFGs), micro atom gyroscopes (MAGs), and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical