Custody Transfer Metering

Total Page:16

File Type:pdf, Size:1020Kb

Custody Transfer Metering flotek.g 2017- “Innovative Solutions in Flow Measurement and Control - Oil, Water and Gas” August 28-30, 2017, FCRI, Palakkad, Kerala, India CUSTODY TRANSFER METERING Pranali Salunke Mahanagar Gas Ltd. Email: [email protected] Mobile: +91 9167910584 Mumbai, India custody transfer. A flow prover can be ABSTRACT installed in a custody transfer system While performing a flow measurement in a to provide the most accurate process control, the accuracy of measurement possible. measurement is typically not as important as the repeatability of the measurement. When There have been large changes in the controlling a process, engineers can tolerate instrumentation and related systems some inaccuracy in flow measurement as used for custody transfer. Meters with long as the inaccuracy is consistent and intelligence i.e. with modern repeatable. In some measurement electronics, software, firmware and applications, however, accuracy is an connectivity can perform diagnostics extremely important quality, and this is and communicate information, particularly true for custody transfer. The alarms, process variables digitally. money paid is a function of the quantity of fluid transferred from one party to another. Small KEY WORDS error in the metering can add up to big losses Custody Transfer, Ultrasonic flow in terms of money. meter, Coriolis meter, Standards, proving Until now, five technologies are used when it comes to custody transfer metering: 1.0 INRODUCTION 1. Differential Pressure (DP) flow meters Custody Transfer in oil and gas 2. Turbine meters industry refers to the transactions 3. Positive displacement meters involving transporting physical 4. Coriolis meters substance from one party to another. 5. Ultrasonic meters The term "fiscal metering" is often Many aspects are taken into consideration interchanged with custody transfer, when a flow meter is to be selected for and refers to metering that is a point of custody transfer metering. The accuracy, a commercial transaction such as repeatability, rangeability, availability in when a change in ownership takes higher line sizes etc are some of the factors place. Custody transfer takes place which suggest why multipath Ultrasonic flow any time fluids are passed from the meters are the most preferred in custody possession of one party to another. transfer metering systems. Factors affecting accuracy are vital parameters to be studied during designing of a custody transfer metering system. There are meteorological parameters, installation parameters, and external interferences that can disturb the accuracy of the flow meter. Periodic proving of the flow meter is necessary to confirm or re-establish the performance accuracy of the accounting meter before, during, and after a Figure 1-A custody transfer depiction 1 Measurement errors in custody transfer can be natural gas. In 1930, the AGA issued Report very expensive, hence custody transfer and AGA-1 to cover the use of DP flowmeters with fiscal metering are regulated in most countries orifice plates for custody transfer applications. by National Metrology standards and involve Differential pressure (DP) flowmeters are used for the custody transfer of liquid and gas to government taxation and contractual measure the flow of liquid, gas, and steam. The agreements between custody transfer parties. DP flowmeter consist of a differential pressure Custody transfers are also influenced by a transmitter and a primary element. The primary number of industry associations and standards element places a constriction in a flow stream, organizations such as American Gas while the DP transmitter measures the Association (AGA), American Petroleum difference in Industry (API), US National Institute for pressure upstream and downstream of the Standards and Technology (NIST), constriction. Physikalisch-Technische Bundesanstalt (PTB) In many cases, pressure transmitters and in Germany, China Metrology Certificate primary elements are bought by the end-users (CMC), and gosudarstvennyy standard (GOST) from different suppliers. However, several in Russia. vendors have integrated the pressure transmitter with the primary element to form a complete flowmeter. The advantage of this is Custody transfer applications require more that they can be calibrated with the primary than an accurate flowmeter. There are a element and DP transmitter already in place. number of critical components that comprise a complete metering system including: • Multiple meter runs with multiple meters in parallel • Pressure and temperature transmitters • Flow computers • Quality measurement - For gas energy content, online gas chromatography - For liquids, sampling systems and water monitoring • In-situ calibration using provers or Figure 2-A typical orifice plate steam flowmetering master meters DP meters can operate in very harsh • Automation environments and also feature a high degree of robustness and reliability. A disadvantage of 2.0 Custody Transfer Metering using a DP flowmeters is that they introduce a Methodologies and Measurement pressure drop into the flowmeter line. This is a Technologies necessary result of the constriction in the line that While there are many types of flow meters in is required to make the DP flow measurement general industrial use, many of these are not (fig.3) suitable for custody transfer. Generally, five technologies are used for custody transfer measurements. Differential pressure (DP) flowmeters are the oldest of the technologies and the first to be studied and approved for custody transfer for 2 main reasons were the higher accuracy of many turbine flowmeters, along with their greater rangeability and cost effectiveness. Turbine meters are also used for custody transfer of petroleum liquids. The disadvantage of turbine flowmeters is that they have moving parts that are subject to wear. Positive displacement (PD) meters are Figure 3-Pressure loss across the DP meter common for small line size applications. These flowmeters are highly accurate meters that are Turbine meters were approved by the AGA widely used for custody transfer through the AGA-7 in 1981. Turbine flowmeters of commercial and industrial water, as well as consist of a rotor with propeller-like blades that for custody transfer of many other liquids. PD spins as water or some other fluid passes over flowmeters have the advantage that they have it. The rotor spins in proportion to flow rate. The been approved by a number of regulatory turbine flowmeter is most useful when bodies for this purpose, and they have not yet measuring clean, steady, high-speed flow been displaced by other applications. It is of low-viscosity fluids. unusual to find PD meters in line sizes above 10”. PD meters excel at measuring low flows, and also at measuring highly viscous flows, because PD meters captures the flow in a container of known volume. Speed of flow doesn’t matter when using a PD meter. Downsides of PD meters include pressure drop and mechanical moving parts. Figure 5-The oval gear positive displacement method Figure 4-Cross section of a typical turbine meter Recent advances in measurement technology have introduced two highly accurate and In comparison to other flowmeters, the turbine repeatable flow measurement technologies to flowmeter has a significant cost advantage custody transfer: Coriolis mass flow meters and over ultrasonic flowmeters, especially in the multiple-path ultrasonic flow meters. larger line sizes, and it also has a favourable price compared to the prices of DP flowmeters, In oil and gas industry, as in many others, the especially in cases where one turbine meter transition from traditional-technology to new- can replace several DP meters. During the technology flowmeters is evident not only in 1990s, turbine flowmeters began to replace DP custody transfer applications, but also flowmeters, especially for gas applications. The elsewhere in the flowmeter world. However, 3 traditional meters still have the advantage of a do not have any moving parts and provide long large installed base. term stability, repeatability, and reliability. Because they are direct mass flow It has to be mentioned that any measurement measurement devices, Coriolis meters can instrument that relies on one measurement handle the widest range of fluids from gases to principle only will show a higher measurement heavy liquids and are not impacted by viscosity uncertainty under two-phase flow conditions. or density changes that often effect velocity Conventional measurement principles, based technologies (PD, Turbine, Ultrasonic). like positive displacement, turbine With the widest flow range capability of any flow meters, orifice plates will seemingly continue to technology, Coriolis can be sized for low measure, but will not be able to inform the user pressure drop. This combined with the fact that about the occurrence of two-phase flow. Yet they are not flow profile dependent helps modern principles based on the Coriolis eliminate the need for straight runs and flow effect or ultrasonic flow measurement will conditioning which enables custody transfer inform the user by means of diagnostic systems to be designed with minimal pressure functions. drop. Coriolis Mass Flowmeters Unlike other meters, Coriolis flowmeters are not volumetric flowmeters, but instead measure mass flow directly. As fluid flows through a Coriolis flowmeter, the measuring tubes twist slightly due to the Coriolis force. The natural vibration frequency of the tubes changes with the mass flow of the fluid (fig.6). Figure
Recommended publications
  • National Pollutant Discharge Elimination System (NPDES) Compliance Inspection Manual
    NPDES Compliance Inspection Manual Chapter 6 EPA Publication Number: 305-K-17-001 Interim Revised Version, January 2017 U.S. EPA Interim Revised NPDES Inspection Manual | 2017 CHAPTER 6 – FLOW MEASUREMENT Contents A. Evaluation of Permittee's Flow Measurement ..................................................................... 118 Objective and Requirements ................................................................................................. 118 Evaluation of Facility Installed Flow Devices and Data ......................................................... 118 Evaluation of Permittee Data Handling and Reporting ......................................................... 120 Evaluation of Permittee Quality Control ............................................................................... 121 B. Flow Measurement Compliance ......................................................................................... 121 Objectives .............................................................................................................................. 121 Flow Measurement System Evaluation ................................................................................. 121 Closed Conduit Evaluation Procedures ................................................................................. 123 Primary Device Inspection Procedures ................................................................................. 123 Secondary Device Inspection Procedures ............................................................................
    [Show full text]
  • Magellan Pipeline Company,L.P
    R.C.T. XXX MAGELLAN PIPELINE COMPANY,L.P. LOCAL PIPELINE TARIFF CONTAINING RULES AND REGULATIONS GOVERNING THE TRANSPORTATION AND HANDLING OF CRUDE PETROLEUM TRANSPORTED BY PIPELINE The rate published in this tariff is for the interstate transportation of Crude Petroleum by pipeline, subject to the regulations named herein. Rate is payable in U.S. currency. The matter published herein will have no adverse effect on the quality of the human environment. EFFECTIVE: XXX, 2010 Issued & Compiled By: Tina R. Granger, Pipeline Tariffs MAGELLAN PIPELINE COMPANY, L.P. One Williams Center Tulsa, Oklahoma 74172 (918) 574-7415 SECTION I Rules and Regulations of Railroad Commission of Texas Rule §3.71, Pipeline Tariffs 1. ALL MARKETABLE OIL TO BE RECEIVED FOR TRANSPORATION By the term “marketable oil” is meant any crude petroleum adapted for refining or fuel purposes, properly settled and containing not more than two percent (2.0%) of basic sediment, water, or other impurities above a point six (6) inches below the pipeline connection with the tank. Pipelines shall receive for transportation all such “marketable oil” tendered; but no pipeline shall be required to receive for shipment from any one person an amount exceeding three thousand (3,000) barrels of petroleum in any one day; and, if the oil tendered for transportation differs materially in character from that usually produced in the field and being transported there from by the pipeline, then it shall be transported under such terms as the shipper and the owner of the pipeline may agree or the commission may require. 2. BASIC SEDIMENT, HOW DETERMINED – TEMPERATURE In determining the amount of sediment, water or other impurities, a pipeline is authorized to make a test of the oil offered for transportation from an average sample from each such tank, by the use of centrifugal machine, or by the use of any other appliance agreed upon by the pipeline and the shipper.
    [Show full text]
  • Ultrasonic Sensors for Flow Metering Piezoceramics in Ultrasonic Applications
    Ultrasonic Sensors for Flow Metering Piezoceramics in Ultrasonic Applications THE CERAMIC EXPERTS Flow Sensors for Ultrasonic Metering CeramTec presents its ultrasonic flow sensors, ideal for use in ultrasonic metering of gas, water and sub-metering applications. Designed using our world class piezoelectric materials and expertise in transducer design and manu- facture, this product range is suitable to world leading temperature and pressure classifications. Gas Flow Measurement For gas flow meter applications the design, selection and use of high quality matching layers is particularly important to ensure high sensitivity and optimal bandwidth. We offer two standard air coupled sensors ideally suited for this application. Water Flow Measurement For liquid applications the design and manufacture of the sensor housing is particularly important to ensure the sensor is able to operate reliable under high pressure and within a wide range of temperatures. Our water coupled sensor is ideally suited for these applications. We can also custom designs for particularly challenging environments, particularly well-suited for operating up to 150°C. Measuring the flow of clean liquid can be achieved by mounting transducers at an angle, by reflective blocks, or by channelling the flow stream between the sensors. CeramTec offers a manufacturing service for reflective blocks made of alumina, proven to show better acoustic properties and less degradation over accelerated lifetime testing of over 20 years – a study undertaken by Loughborough University. Flow Sensors for Ultrasonic Metering Water Coupled Flow Sensors for Ultrasonic Flow Metering CeramTec presents its new range of water coupled ultra- sonic sensors, ideal for applications such as water metering, heat metering and any other fluid measurement devices.
    [Show full text]
  • Oil & Gas Custody Transfer
    Process Solutions Guide Oil & Gas Custody Transfer Crude Oil Crude Oil Natural Gas Distribution Natural Gas Liquids Refined Products Crude Oil is the first unit in this four-step overview of the Custody Transfer process Overview of Crude Oil Process Some 80 million barrels of oil per day is typically transported from producing oilfields around the world. Trucks, trains and pipelines are utilized to move oil over land to high capacity storage terminals, refinery facilities or exportation ports. Tankers ship the majority of the world's internationally traded crude oil from producing to consuming nations. Small diameter ‘gathering’ pipelines (approximately 2-8 inches in diameter) collect crude oil from different oil production facilities into central storage facilities or into ‘trunk’ lines (generally 8-24 inch diameter) which move oil in bulk over great distances. Crude oil may be stored in tanks at a storage terminal to better manage changes in supply and demand. A storage terminal may also have truck and rail car off-loading facilities to support other means of oil gathering transportation. Crude oil pipeline companies are generally separate from the producing/receiving companies and only provide transportation services for crude oils that vary widely in density, viscosity, sulfur content, and in other fluid properties. As such, pipeline operations regulate the amount of water and sulfur that can be transported and end-users strictly specify by contract the oil quality that they are purchasing. Computer-aided automation systems - located in central control rooms - monitor rates of flow, pressures and fluid characteristics to quickly detect possible pipeline leaks and to control pipeline valves and pumps to ensure contractual demands are met.
    [Show full text]
  • LNG CUSTODY TRANSFER HANDBOOK 5Th Edition: 2017 GIIGNL Document Status and Purpose
    LNG CUSTODY TRANSFER HANDBOOK 5th Edition: 2017 GIIGNL Document status and purpose This fifth (2017) edition of the GIIGNL LNG transfer and LNG transfer from an onshore This latest version replaces all previous editions Custody Transfer Handbook reflects GIIGNL’s terminal to small scale LNG carriers. More than of the custody transfer handbook. Please always understanding of best current practice at the pointing at the differences and highlighting the consult the GIIGNL website www.giignl.org to time of publication. points of attention when dealing with these new check for the latest version of this handbook, operations, this fifth version provides answers esp. when referring to a pdf download or a The purpose of this handbook is to serve as a and solutions for setting up (slightly) altered or printout of this handbook reference manual to assist readers to new custody transfer procedures. As a reminder, understand the procedures and equipment (Photo front cover : © Fluxys Belgium – P. Henderyckx) it is not specifically intended to work out available to and used by the members of GIIGNL procedures for overland LNG custody transfer to determine the energy quantity of LNG operations involving LNG trucks, containers or transferred between LNG ships and LNG trains, or for small scale LNG transfer such as terminals. It is neither a standard nor a bunkering or refueling of ships and trucks. For specification. these, kind reference is made to the GIIGNL This handbook is not intended to provide the Retail LNG / LNG as a fuel handbook. reader with a detailed LNG ship-shore custody No proprietary procedure, nor particular transfer procedure as such, but sets out the manufacture of equipment, is recommended or practical issues and requirements to guide and implied suitable for any specific purpose in this facilitate a skilled operator team to work out a handbook.
    [Show full text]
  • Obtaining High Accuracy Flow Measurement Which Flowmeter Technology Is Best for Your Specific Application?
    ~rr,;LUID COMPONENTS INTL a limited liability company Obtaining high accuracy flow measurement Which flowmeter technology is best for your specific application? temperature may also be provided by thermal technology. Coriolis mass flow measurement ,requires fluid flowing through a vibrat­ ing flow tube that causes a deflection of the flow tube proportional to mass flow rate. Coriolis flowmeters Coriolis can be used to measure the mass flow flowmeters rate of11quids, slurries, gases, or vapors. They provide can be used ccurate flow measurement impacts process safety, excellent measurement accuracy. Measurement of fluid to measure the Athro,1ghput, n :- cip c:, qu,i.liry and cost, affecting bot­ density or concentration is also provided by Coriolis mass flow of .tom line profit or loss. Obtaining accurate flow technology. They are not affected by pressure, tempera­ liquids, slurries, measurement begins with selecting the best flowmeter ture or viscosity and offer accuracy exceeding 0.10% of gases or vapors. technology for your specific application media. There are actual flow. three basic types of flowmeters: mass, volumetric and velocity. For each type of flowmeter, there are multiple Volumetric sensing technologies; Coriolis and thermal sensing are Differential Pressure (DP) flowmeter technology includes orifice plates, venturis, and sonic nozzles. DP flowmeters can be used to measure volumetric flow rate Obtaining accurate flow measurement of most liquids, gases, and vapors, including steam. DP begins with selecting the best flowmeters have no moving parts and, because they are so well known, are easy to use. They create a non-recov­ flowmeter for your application. erable pressure loss and lose accuracy when fouled.
    [Show full text]
  • Industrial Flow Measurement Basics and Practice This Document Including All Its Parts Is Copyright Protected
    The features and characteristics of the most important methods of measuring the flowrate and quantities of flowing fluids are described and compared. Numerous practical details provide the user with valuable information about flow metering in industrial applications. D184B075U02 Rev. 08 09.2011 Industrial flow measurement Industrial flow measurement Industrial flow measurement Basics and practice This document including all its parts is copyright protected. Translation, reproduction and distribution in any form – including edited or excerpts – in particular reproductions, photo-mechanical, electronic or storage in information retrieval and data processing or network systems without the express consent of the copyright holder is expressly prohibited and violations will be prosecuted. The editor and the team of authors kindly request your understanding that, due to the large amount of data described, they cannot assume any liability for the correctness of all these data. In case of doubt, the cited source documents, standards and regulations are valid. © 2011 ABB Automation Products GmbH Industrial Flow Measurement Basics and Practice Authors: F. Frenzel, H. Grothey, C. Habersetzer, M. Hiatt, W. Hogrefe, M. Kirchner, G. Lütkepohl, W. Marchewka, U. Mecke, M. Ohm, F. Otto, K.-H. Rackebrandt, D. Sievert, A. Thöne, H.-J. Wegener, F. Buhl, C. Koch, L. Deppe, E. Horlebein, A. Schüssler, U. Pohl, B. Jung, H. Lawrence, F. Lohrengel, G. Rasche, S. Pagano, A. Kaiser, T. Mutongo ABB Automation Products GmbH Introduction In the recent decades, the market for the products of the industrial process industries has changed greatly. The manufacture of mass products has shifted to locations where raw materials are available economically. Competitive pressures have forced a swing to specialization as well as to an ability to adapt to customers desires.
    [Show full text]
  • The Basics of Gas Ultrasonic Flow Meters for Custody Transfer
    BASICS OF ULTRASONIC FLOW METERS David Crandall Flow Solutions Sales Manager Cameron Measurement Systems 1000 McClaren Woods Drive Coraopolis, PA 15108 Introduction The purpose of this paper is to explain the measurement of natural gas for custody transfer applications through the use of ultrasonic meters. Specifically, this paper explains the operation of ultrasonic meters, issues surrounding their performance in natural gas, calibration procedures, and proper installation considerations. Additionally, the electronics making the measurements generate calculated values relating to the operation of the meter and as a result a database is available to provide analysis of the meter’s ongoing performance. Meter health parameters can be evaluated to verify the meter’s operation and these principles are explained. Background The ultrasonic meter measures and calculates volumetric flow by summing weighted fluid velocities across the meter diameter. Piezo electric transducers are mounted on opposite sides of the meter to form one or more measuring paths and these measuring paths provide the average fluid velocity. The volumetric flow calculation is the fluid velocity of each path times the cross sectional area. The conversion of individual path velocities into volumetric flow is performed through the use of Gaussian integration techniques. Both liquids and gases are measured using ultrasonic flow meters. The reasons most frequently cited for implementing ultrasonic flow meters are: Low Pressure Loss – Ultrasonic meters have no moving parts and the pressure losses are typically equal to the length of equivalent pipe. High flow rates - An ultrasonic meter handles exceptionally high flow rates with a single meter. There are installations of ultrasonic meters with meter diameters of 30 inches.
    [Show full text]
  • 43 CFR 3174 – Measurement Of
    § 3174.1 43 CFR Ch. II (10–1–17 Edition) Subpart 3174—Measurement of conditions where a series of meter fac- Oil tors have been determined over a range of normal operating conditions. Event log means an electronic record SOURCE: 81 FR 81504, Nov. 17, 2016, unless otherwise noted. of all exceptions and changes to the flow parameters contained within the § 3174.1 Definitions and acronyms. configuration log that occur and have (a) As used in this subpart, the term: an impact on a quantity transaction Barrel (bbl) means 42 standard United record. States gallons. Gross standard volume means a vol- Base pressure means 14.696 pounds per ume of oil corrected to base pressure square inch, absolute (psia). and temperature. Base temperature means 60 °F. Indicated volume means the uncor- Certificate of calibration means a docu- rected volume indicated by the meter ment stating the base prover volume in a lease automatic custody transfer and other physical data required for system or the Coriolis meter in a CMS. the calibration of flow meters. For a positive displacement meter, the Composite meter factor means a meter indicated volume is represented by the factor corrected from normal operating non-resettable totalizer on the meter pressure to base pressure. The com- head. For Coriolis meters, the indi- posite meter factor is determined by cated volume is the uncorrected (with- proving operations where the pressure out the meter factor) mass of liquid di- is considered constant during the vided by the density. measurement period between provings. Innage gauging means the level of a Configuration log means the list of liquid in a tank measured from the constant flow parameters, calculation datum plate or tank bottom to the sur- methods, alarm set points, and other face of the liquid.
    [Show full text]
  • Highly Sensitive Micro Coriolis Mass Flow Sensor J
    HIGHLY SENSITIVE MICRO CORIOLIS MASS FLOW SENSOR J. Haneveld, T.S.J. Lammerink, M. Dijkstra, H. Droogendijk, M.J. de Boer and R.J. Wiegerink. MESA+ Institute for Nanotechnology, University of Twente, The Netherlands. E-mail: [email protected] ABSTRACT Where L is the length of the rectangular tube (see Figure We have realized a micromachined micro Coriolis 1). The Coriolis force induces a “flapping mode” vibration mass flow sensor consisting of a silicon nitride resonant with an amplitude proportional to the mass flow. tube of 40 µm diameter and 1.2 µm wall thickness. Actuation of the sensor in resonance mode is achieved by Lorentz forces. First measurements with both gas and liquid flow have demonstrated a resolution in the order of 10 milligram per hour. The sensor can simultaneously be used as a density sensor. 1. INTRODUCTION Integrated microfluidic systems have gained interest in recent years for many applications including (bio)chemical, medical, automotive, and industrial devices. A major reason is the need for accurate, reliable, and cost-effective liquid and gas handling systems with increasing complexity and reduced size. In these systems, flow sensors are generally one of the key components. Figure 1: Rectangle-shaped Coriolis flow sensor (ω is the Most MEMS flow sensors are based on a thermal torsion mode actuation vector, Fc indicates the Coriolis force measurement principle. It has been demonstrated [1,2] due to mass flow). that such sensors are capable of measuring liquid flow down to a few nl/min. These sensors require accurate 2. SENSOR DESIGN measurement of very small flow-induced temperature Earlier attempts to realize micromachined Coriolis flow changes.
    [Show full text]
  • Experiment (8) Flow Measurements Introduction Flow Measurement Is an Important Topic in the Study of Fluid Dynamics
    Experiment (8) Flow Measurements Introduction Flow measurement is an important topic in the study of fluid dynamics. It must be made in chemical plants, refineries, power plants, and any other place where the quality of the product or performance of the plant depends on having a precise flow rate. Flow measurements also enter into our everyday lives in the metering of water and natural gas into our homes and gasoline into our cars. There are many instruments used in flow measurements. In this experiment, we are going to use the following devices: 1) Venturi. 2) Orifice plate. 3) Rotameter. Objectives This experiment aims to: 1- Familiarize students with some common devices and methods used in measuring flow rate. 2- Each flow measurement device will be compared to the standard method of using the catch-tank and stopwatch to measure the flow rate. 3- Determine the energy loss incurred by each of these devices. 4- Determine the energy loss arising in a rapid enlargement and a 900 elbow. Apparatus Figures (1) and (2) show the Flow Measurement apparatus. Water from the Hydraulic Bench enters the equipment through a Venturi meter, which consists of a gradually converging section, followed by a throat, and a long gradually diverging section. After a change in cross-section through a rapidly diverging section, the flow continues along a settling length and through an orifice meter. This is made from a plate with a hole of reduced diameter through which the fluid flows. The water then continues around a bend and up through a rotameter-type flowmeter.
    [Show full text]
  • A MEMS-Based Flow Rate and Flow Direction Sensing Platform with Integrated Temperature Compensation Scheme
    Sensors 2009, 9, 5460-5476; doi:10.3390/s90705460 OPEN ACCESS sensors ISSN 1424-8220 www.mdpi.com/journal/sensors Article A MEMS-Based Flow Rate and Flow Direction Sensing Platform with Integrated Temperature Compensation Scheme Rong-Hua Ma 1, Dung-An Wang 2, Tzu-Han Hsueh 3 and Chia-Yen Lee 4,* 1 Department of Mechanical Engineering, Chinese Military Academy, Kaohsiung 830, Taiwan; E-Mail: [email protected] 2 Institute of Precision Engineering, National Chung Hsing University, Taichung 402, Taiwan; E-Mail: [email protected] 3 Department of Mechanical and Automation Engineering, Da-Yeh University, Changhua 515, Taiwan; E-Mail: [email protected] 4 Department of Materials Engineering, National Pingtung University of Science and Technology, Pingtung 912, Taiwan * Author to whom correspondence should be addressed; E-Mail: [email protected]; Tel.: +886-8-7703202-7561; Fax: +886-8-7740552 Received: 11 May 2009; in revised form: 26 June 2009 / Accepted: 29 June 2009 / Published: 9 July 2009 Abstract: This study develops a MEMS-based low-cost sensing platform for sensing gas flow rate and flow direction comprising four silicon nitride cantilever beams arranged in a cross-form configuration, a circular hot-wire flow meter suspended on a silicon nitride membrane, and an integrated resistive temperature detector (RTD). In the proposed device, the flow rate is inversely derived from the change in the resistance signal of the flow meter when exposed to the sensed air stream. To compensate for the effects of the ambient temperature on the accuracy of the flow rate measurements, the output signal from the flow meter is compensated using the resistance signal generated by the RTD.
    [Show full text]