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Novel RF MEMS Devices for W-Band Beam-Steering Front-Ends

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Novel RF MEMS Devices for W-Band Beam-Steering Front-Ends Novel RF MEMS Devices for W-Band Beam-Steering Front-Ends Nutapong Somjit MICROSYSTEM TECHNOLOGY LABORATORY SCHOOL OF ELECTRICAL ENGINEERING ROYAL INSTITUTE OF TECHNOLOGY ISBN 978-91-7501-296-4 ISSN 1653-5146 TRITA-EE 2012 : 011 Submitted to the School of Electrical Engineering KTH - Royal Institute of Technology, Stockholm, Sweden in partial fulfillment of the requirements for the degree of Doctor of Philosophy Stockholm 2012 The front cover shows a SEM image of the first prototype of the fabricated three- stage dielectric-block phase shifter composed of 15°, 30°, and 45° stage (left). The different phase-shifts of the silicon block are achieved by tailor-making the block with different etch-hole sizes. The right picture is a SEM image of silicon grass (or black silicon) observed during the 890-µm deep-reactive ion-etch (DRIE) step of the though-silicon holes for the semiconductor-substrate-integrated helical antenna fabrication. The aspect ratio between the etch-depth and the opening area is 22.25. Copyright © 2012 by Nutapong Somjit All rights reserved for the summary part of this thesis, including all pictures and figures, unless otherwise indicated. No part of this publication may be reproduced or transmitted in any form or by any means, without prior permission in writing from the copyright holder. The copyrights for the appended journal papers belong to the publishing houses of the journals concerned. The copyrights for the appended manuscripts belong to their authors. Printed by Universitetsservice US-AB, Stockholm 2012. Thesis for the degree of Doctor of Philosophy at the Royal Institute of Technology, Stockholm, Sweden, 2012. Abstract iii Abstract This thesis presents novel millimeter-wave microelectromechanical-systems (MEMS) components for W-band reconfigurable beam-steering front-ends. The proposed MEMS components are novel monocrystalline-silicon dielectric-block phase shifters, and substrate-integrated three-dimensional (3D) micromachined helical antennas designed for the nominal frequency of 75 GHz. The novel monocrystalline-silicon dielectric-block phase shifters are comprised of multi-stages of a tailor-made monocrystalline-silicon block suspended on top of a 3D micromachined coplanar-waveguide transmission line. The relative phase-shift is obtained by vertically pulling the suspended monocrystalline-silicon block down with an electrostatic actuator, resulting in a phase difference between the up and downstate of the silicon block. The phase- shifter prototypes were successfully implemented on a high-resistivity silicon substrate using standard cleanroom fabrication processes. The RF and non- linearity measurements indicate that this novel phase-shifter design has an excellent figure of merit that offers the best RF performance reported to date in terms of loss/bit at the nominal frequency, and maximum return and insertion loss over the whole W-band, as compared to other state-of-the-art MEMS phase shifters. Moreover, this novel design offers high power handling capability and superior mechanical stability compared to the conventional MEMS phase-shifter designs, since no thin moving metallic membranes are employed in the MEMS structures. This feature allows MEMS phase-shifter technology to be utilized in high-power applications. Furthermore, the return loss of the dielectric-block phase shifter can be minimized by appropriately varying the individual distance between each phase-shifting stage. This thesis also investigates 3D micromachined substrate-integrated W- band helical antennas. In contrast to conventional on-chip antenna designs that only utilize the surface of the wafer, the novel helical radiator is fully embedded into the substrate, thereby utilizing the whole volume of the wafer and resulting in a compact high-gain antenna design. The performance of the antenna is substantially enhanced by properly etching the substrate, tailor making the antenna core, and by modifying size and geometry of the substrate-integrated ground plane. A linear line antenna array is composed of eight radiating elements and is demonstrated by simulations. Each antenna is connected to the input port through a multi-stage 3-dB power divider. The input and output of the single- stage 3-dB power divider is well matched to the 50-Ω impedance by four-section Chebyshev transformers. The simulation results indicate that the novel helical antenna arrays offer a narrow radiation beam with an excellent radiation gain that result in high-resolution scan angles on the azimuth plane. The proposed helical antenna structures can be fabricated by employing standard cleanroom micromachining processes. Nutapong Somjit, [email protected] Microsystem Technology Laboratory, School of Electrical Engineering KTH Royal Institute of Technology, SE-100 44 Stockholm, Sweden Novel RF MEMS Devices for W-Band Beam-Steering Front-Ends Abstract iv Novel RF MEMS Devices for W-Band Beam-Steering Front-Ends Contents v Contents Abstract iii List of Publications vii 1. Introduction 1.1 General introduction 1 1.2 Structure of this thesis 2 2. RF MEMS beam-steering front-end 2.1 RF MEMS background 3 2.2 Electronic beam-steering front-end 3 2.3 RF MEMS components for beam-steering front-ends 4 2.3.1 Some selected MEMS Phase shifters 4 2.3.1.1 MEMS TTD phase shifters 4 2.3.1.2 DMTL phase shifters 6 2.3.2 Micromachined antennas 7 3. Novel W-band phase shifters 3.1 Novel phase-shifter concept and design 11 3.1.1 Single-stage phase shifters 11 3.1.2 Multi-stage phase shifters 14 3.1.2.1 Linear-coded phase shifters 14 3.1.2.2 Binary-coded phase shifters 14 3.1.3 MEMS actuator design 15 3.2 Prototype fabrication 17 3.3 RF measurements 18 3.3.1 Single-stage phase shifters 18 3.3.2 Linear-coded phase shifters 19 3.3.3 Binary-coded phase shifters 20 3.4 MEMS characterization and reliability 23 3.4.1 Actuator characteristics 23 3.4.2 Life-cycle and reliability test 24 3.5 Non-linearity analysis 25 3.5.1 Power modulation 25 3.5.2 Intermodulation products 26 3.6 Thermal property and power handling analysis 28 3.6.1 Design comparisons of conventional MEMS phase shifters 28 3.6.2 Measurement setup and results at 3 GHz 30 3.6.3 Extension of results to 75 GHz 33 3.6.4 Comparisons of power handling 36 3.7 Design optimization for minimizing signal reflection 37 3.7.1 Two-stage phase shifters 38 3.7.2 Multi-stage phase shifters 39 Novel RF MEMS Devices for W-Band Beam-Steering Front-Ends Contents vi 3.7.3 Simulation results 41 3.7.4 Measurement results 43 4. Substrate-integrated helical antenna 4.1 Substrate-embedded square helical antennas 47 4.2 Influence of substrate 49 4.3 Influence of dielectric core 52 4.4 Ground plane variations 55 4.5 Antenna arrays 57 4.6 Feed network and matching 59 4.6.1 Four-stage Chebyshev matching transformer 59 4.6.2 3-dB power divider 60 5. Conclusions 63 References 65 Acknowledgement 79 Summary of the appended papers 81 Paper reprints 83 Novel RF MEMS Devices for W-Band Beam-Steering Front-Ends List of Publications vii List of Publications The thesis is based on the following papers in reviewed international journals: 1. "Binary-Coded 4.25-Bit W-Band Monocrystalline-Silicon MEMS Multi- Stage Dielectric-Block Phase Shifters," N. Somjit, G. Stemme, J. Oberhammer. IEEE Transactions on Microwave Theory and Techniques, vol. 57, issue 11, pp. 2834-2840, Nov. 2009. 2. "Deep-Reactive Ion-Etched Wafer-Scale-Transferred All-Silicon Dielectric-Blocks Millimeter-Wave MEMS Phase Shifters," N. Somjit, G. Stemme, J. Oberhammer. IEEE/ASME Journal of Microelectromechanical Systems, vol. 19, issue 1, pp. 120-128, Feb. 2010. 3. "Power-Handling Analysis of High-Power W-band All-Silicon MEMS Phase Shifters," N. Somjit, G. Stemme, J. Oberhammer. IEEE Transactions on Electron Devices, vol.58, no.5, pp.1548-1555, May 2011. 4. "Microwave MEMS Devices Designed for Process Robustness and Operational Reliability," M. Sterner, N. Somjit, U. Shah, S. Dudorov, D. Chicherin, A. Räisänen, J. Oberhammer. EuMA International Journal of Microwave and Wireless Technologies, vol. 3, special issue 5 (RF MEMS), pp. 547-563, Oct. 2011. 5. "Design Optimization of Millimeter-Wave MEMS Dielectric-Block Phase Shifters," N. Somjit, J. Oberhammer. Submitted for journal publication. 6. "Three-Dimensional Micromachined Silicon-Substrate Integrated Millimeter-Wave Helical Antennas," N. Somjit, J. Oberhammer. Submitted for journal publication. 7. "RF Characterization of Gold-Coated Nickel-Wire Through Silicon Vias Fabricated by Magnetic Assembly," N. Somjit, A. Fischer, S. Bleiker, U. Shah, G. Stemme, J. Oberhammer, F. Niklaus. Manuscript for journal publication. Novel RF MEMS Devices for W-Band Beam-Steering Front-Ends List of Publications viii The contribution of Nutapong Somjit to the publications: 1. Major part of design, all fabrication, all experiments, and major part of writing. 2. Major part of design, all fabrication, all experiments, and major part of writing. 3. Major part of design, all fabrication, all experiments, and major part of writing. 4. Part of design, part of fabrication, part of experiments, and part of writing. 5. Major part of design, all fabrication, all experiments, and major part of writing. 6. Major part of design, and major part of writing. 7. Major part of RF design, all RF experiments, and major part of writing. The work has been presented at these reviewed international conferences: 8. "Novel RF MEMS Mechanically Tunable Dielectric Phase Shifter," N. Somjit, G. Stemme, J. Oberhammer. Proceedings of IEEE International Conference on Infrared, Millimeter, and Terahertz Waves, Pasadena, CA, USA, Sept. 2008, oral presentation. 9. "Novel Concept of Microwave MEMS Reconfigurable 7×45º Multi-Stage Dielectric-Block Phase Shifters," N. Somjit, G. Stemme, J. Oberhammer. Proceedings of IEEE International Conference on Micro Electro Mechanical Systems, Sorrento, Italy, Jan.
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