Un-Conventional Metal Surfacing with Conductive Coating
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Characterization of Copper Electroplating And
CHARACTERIZATION OF COPPER ELECTROPLATING AND ELECTROPOLISHING PROCESSES FOR SEMICONDUCTOR INTERCONNECT METALLIZATION by JULIE MARIE MENDEZ Submitted in partial fulfillment of the requirements For the degree of Doctor of Philosophy Dissertation Advisor: Dr. Uziel Landau Department of Chemical Engineering CASE WESTERN RESERVE UNIVERSITY August, 2009 CASE WESTERN RESERVE UNIVERSITY SCHOOL OF GRADUATE STUDIES We hereby approve the thesis/dissertation of _____________________________________________________ candidate for the ______________________degree *. (signed)_______________________________________________ (chair of the committee) ________________________________________________ ________________________________________________ ________________________________________________ ________________________________________________ ________________________________________________ (date) _______________________ *We also certify that written approval has been obtained for any proprietary material contained therein. TABLE OF CONTENTS Page Number List of Tables 3 List of Figures 4 Acknowledgements 9 List of Symbols 10 Abstract 13 1. Introduction 15 1.1 Semiconductor Interconnect Metallization – Process Description 15 1.2 Mechanistic Aspects of Bottom-up Fill 20 1.3 Electropolishing 22 1.4 Topics Addressed in the Dissertation 24 2. Experimental Studies of Copper Electropolishing 26 2.1 Experimental Procedure 29 2.2 Polarization Studies 30 2.3 Current Steps 34 2.3.1 Current Stepped to a Level below Limiting Current 34 2.3.2 Current Stepped to the Limiting -
OVERVIEW of FOUNDRY PROCESSES Contents 1
Cleaner Production Manual for the Queensland Foundry Industry November 1999 PART 5: OVERVIEW OF FOUNDRY PROCESSES Contents 1. Overview of Casting Processes...................................................................... 3 2. Casting Processes.......................................................................................... 6 2.1 Sand Casting ............................................................................................ 6 2.1.1 Pattern Making ................................................................................... 7 2.1.2 Mould Making ..................................................................................... 7 2.1.3 Melting and Pouring ........................................................................... 8 2.1.4 Cooling and Shakeout ........................................................................ 9 2.1.5 Sand Reclamation .............................................................................. 9 2.1.6 Fettling, Cleaning and Finishing....................................................... 10 2.1.7 Advantages of Sand Casting............................................................ 10 2.1.8 Limitations ........................................................................................ 10 2.1.9 By-products Generated .................................................................... 10 2.2 Shell Moulding ........................................................................................ 13 2.2.1 Advantages...................................................................................... -
Implementation of Metal Casting Best Practices
Implementation of Metal Casting Best Practices January 2007 Prepared for ITP Metal Casting Authors: Robert Eppich, Eppich Technologies Robert D. Naranjo, BCS, Incorporated Acknowledgement This project was a collaborative effort by Robert Eppich (Eppich Technologies) and Robert Naranjo (BCS, Incorporated). Mr. Eppich coordinated this project and was the technical lead for this effort. He guided the data collection and analysis. Mr. Naranjo assisted in the data collection and analysis of the results and led the development of the final report. The final report was prepared by Robert Naranjo, Lee Schultz, Rajita Majumdar, Bill Choate, Ellen Glover, and Krista Jones of BCS, Incorporated. The cover was designed by Borys Mararytsya of BCS, Incorporated. We also gratefully acknowledge the support of the U.S. Department of Energy, the Advanced Technology Institute, and the Cast Metals Coalition in conducting this project. Disclaimer This report was prepared as an account of work sponsored by an Agency of the United States Government. Neither the United States Government nor any Agency thereof, nor any of their employees, makes any warranty, expressed or implied, or assumes any legal liability or responsibility for the accuracy, completeness, or usefulness of any information, apparatus, product, or process disclosed, or represents that its use would not infringe privately owned rights. Reference herein to any specific commercial product, process, or service by trade name, trademark, manufacturer, or otherwise does not necessarily constitute or imply its endorsement, recommendation, or favoring by the United States Government or any Agency thereof. The views and opinions expressed by the authors herein do not necessarily state or reflect those of the United States Government or any Agency thereof. -
The MG Chemicals Professional Prototyping Process
The MG Chemicals Professional Prototyping Process Introduction ..................................................................................................................................................................3 Before you begin ..........................................................................................................................................................4 Read the instructions in their entirety.......................................................................................................................4 Get everything you need...........................................................................................................................................4 Plan for safety...........................................................................................................................................................5 Plan for disposal .......................................................................................................................................................5 Design your circuit for the MG process ...................................................................................................................6 Step 1: Cutting and Routing .........................................................................................................................................6 Ingredients required..................................................................................................................................................6 Overview: -
Electroplating of Stainless Steel with Gold
ION SOURCECABLE TO HIGH POWER Fig. 5 Schematic diagram of an SUPPLYVOLTAGE POWER ENCLOSURE SUPPLY_ apparatus which would be suitable for lessing on a ION BEAM FORMING AND laboratory scale the economie ACCELERATINGn SECTION feasibility of gold ion implanta- tion ION CRYOPUMP 'VACUUM LOCK FOR LOADING WORK P1ECES CHAMBER This is not too difficult and sources exist and have References been used to generate gold ions with relatively few 1 E. W. Williams, Gold Bull., 1978, 11, (2), 30-34 2 G. Dearnaley, 'Defects in Crystalline Solids, Vol. 8, Ion Im- problems because the metal is chemically inert and plantation', North Holland Publishing Co., 1973 any alloying effects or reactive effects can be avoided 3 J. Lindhard, M. Scharff and H. E. Schiott, K. Dan. Vidensk. Selsk. Mat.-Fys., 1963, 33, (14), 1-39 by choosing appropriate materials. More recently, the 4 V. 0. Nielson, 'Electromagnetically Enriched Isotopes and liquid field emission sources of Clampitt (13) and Mass Spectrometry', Academie Press, New York, 1956 5 J. F. Gibbons, W. S. Johnson and S. W. Mylroie, 'Projected Swanson (14) have also been used to generate gold Range Statistics', 2nd Edition, Halsted Press, 1975 ions. These are remarkably simple and can operate at 6 H. H. Anderson, 'Seventh Yugoslav Symposium on Physics of Ionized Gases', September 1974 a temperature just above the melting point of gold, 7 0. Almen and G. Bruce, Nucl. lustrum. Methods, 1961, (11), say at 1100°C. Their advantages include long, stable 257-278 8 P. H. Rose, in 'Proceedings of the Symposium on Electron and lifetimes and almost no demand on the vacuum Ion Beam Science & Technology', 1978, pp. -
Electroplating for Decorative Applications: Recent Trends in Research and Development
coatings Review Electroplating for Decorative Applications: Recent Trends in Research and Development Walter Giurlani 1,2,* ID , Giovanni Zangari 3, Filippo Gambinossi 1 ID , Maurizio Passaponti 1,2, Emanuele Salvietti 1,2, Francesco Di Benedetto 2,4 ID , Stefano Caporali 2,5 ID and Massimo Innocenti 1,2,* ID 1 Dipartimento di Chimica, Università Degli Studi di Firenze, via Della Lastruccia 3, 50019 Sesto Fiorentino, Italy; [email protected] (F.G.); maurizio.passaponti@unifi.it (M.P.); emanuele.salvietti@unifi.it (E.S.) 2 Consorzio Interuniversitario Nazionale per la Scienza e Tecnologia dei Materiali, via G. Giusti 9, 50121 Firenze, Italy; francesco.dibenedetto@unifi.it (F.D.B.); stefano.caporali@unifi.it (S.C.) 3 Department of Materials Science and Engineering, University of Virginia, Charlottesville, VA 22904, USA; [email protected] 4 Dipartimento di Scienze Della Terra, Università Degli Studi di Firenze, via La Pira 4, 50121 Firenze, Italy 5 Dipartimento di Ingegneria Industriale, Università Degli Studi di Firenze, via Santa Marta 3, 50139 Firenze, Italy * Correspondence: walter.giurlani@unifi.it (W.G.); m.innocenti@unifi.it (M.I.); Tel.: +39-055-457-3097 (W.G. & M.I.) Received: 25 May 2018; Accepted: 19 July 2018; Published: 25 July 2018 Abstract: Electroplating processes are widely employed in industrial environments for a large variety of metallic coatings, ranging from technological to decorative applications. Even if the galvanic electrodeposition is certainly a mature technology, new concepts, novel applications, environmental legislation and the new material requirements for next-generation devices make the scientific research in this field still very active. This review focuses mostly at the decorative and wearable applications, and aims to create a bridge between the past knowledge and the future direction that this process, i.e., electrodeposition, is taking. -
Classification 1
ME477 Fall 2004 NonTraditional Processes (NTP) NONTRADITIONAL • Conventional Machining Processes (cutting, milling, MACHINING AND THERMAL drilling & grinding) use a sharp cutting tool • NTP - A group of processes that remove excess CUTTING PROCESSES material without a sharp cutting tool by various techniques involving mechanical, thermal, electrical, or chemical energy (or combinations) developed since 1. Mechanical Energy Processes World War II (1940’s). 2. Electrochemical Machining Processes • Motivations in Aerospace and Electronics Industries – to machine new (harder, stronger & tougher) materials difficult 3. Thermal Energy Processes or impossible to machine conventionally – for unusual & complex geometries that cannot easily 4. Chemical Machining machined conventionally – to achieve stringent surface (finish & texture) requirements not possible with conventional machining 1 2 Classification 1. Mechanical Energy Processes • Ultrasonic Machining (USM) • Mechanical - Erosion of work material by a high – Abrasives (20-60 volume %) in a slurry are driven High-frequency oscillation velocity stream of abrasives and/or fluid at high velocity by the tool vibrating at low Flow – Ultrasonic machining, Water jet cutting (WJC), Abrasive water amplitude (0.05-0.125mm) and high frequency Flow jet cutting (AWJC) and Abrasive jet machining (AJM) (20kHz). • Electrical - Electrochemical energy to remove material – Tool oscillation is perpendicular to work surface – Electrochemical machining (ECM), Electrochemical deburring – Tool: soft and stainless steels fed slowly into work. (ECD) and Electrochemical grinding (ECG) – Abrasives (Grit size 100 (rough) to 2000(fine)) – BN, BC, Al O , SiC & Diamond • Thermal - Thermal energy applied to small portion of 2 3 – The vibration amplitude equals to grit size, which work surface, removing by fusion and/or vaporization also determines the resulting surface finish. -
Electrodeposition Research
NAT'L INST OF STANDARDS & TECH R.I.C. All 101 888778 /National Bureau of Standards circular QC100 .U555 V529;1953 C.1 NBS-PUB-R 1947 •'>1 A 1 .. _ 1- • .. yil Ur U . ^ 4 1 'U tt mm, Co mm ere ureat) ;o UNITED STATES DEPARTMENT OF COMMERCE • Sinclair Weeks, Secretary NATIONAL BUREAU OF STANDARDS • A. V. Astin, Director Electrodeposition Research Proceedings of the NBS Semicentennial Symposium on Electrodeposition Research Held at the NBS on December 4-6, 1951 National Bureau of Standards Circular 529 Issued May 22, 1953 For sale by the Superintendent of Documents, U. S. Government Printing Office Washington 25, D. C. - Price 31-50 Buckram National Bureau of Standards AUG 2 8 1953 Sli5£ QC 100 0555 Foreword Electrodeposition processes have become an integral and important part of many industries—for example, the printing, metal refining, extractive metallurgy, hardware, automobile, and electronic indus- tries. This has come about largely as a result of extensive research in the field of electrodeposition, especially during the past 25 years. To encourage further research in this field, to present current re- search results and problems, and to facilitate the exchange of informa- tion, the National Bureau of Standards held the Symposium on Electrodeposition Research as the last of a series of twelve symposia conducted during the Bureau’s semicentennial in 1951. The papers presented at the Symposium are published in this volume. These papers represent a cross section of research currently being conducted in electrodeposition by industrial, university, and government labora- tories in Europe and the United States. -
Considerations in the Use of Pulsed Water Jet Techniques for The
2007 American WJTA Conference and Expo August 19-21, 2007 ● Houston, Texas Paper CONSIDERATIONS IN THE USE OF PULSED WATER JET TECHNIQUES FOR THE REMOVAL OF HVOF COATINGS Andrew Tieu, Wenzhuo Yan and Mohan Vijay VLN Advanced Technologies Ottawa, Ontario, Canada ABSTRACT Thermal spray coatings are becoming increasingly common in a wide variety of industrial applications. Specifically, Tungsten Carbide - High Velocity Oxygen Fuel (HVOF) coating, which is a derivation of thermal spray technology, is currently being tested on landing gear components. The authors have conducted extensive laboratory work on the removal of HVOF coatings from landing gear pins and other aircraft/aerospace components using forced-pulsed waterjet (FPWJ). These tests were conducted at pressures ≤ 104 MPa (15 kpsi) using only pure (tap) water. Several measurements were taken to assess the performance, and to ensure that the process meets the criteria specified by the aircraft/aerospace industry. Surface roughness measurements, taken by one of the aerospace companies, indicated no significant difference between the measurements taken before and after the removal process, indicating the substrate experienced minimal to no surface damage. Post stress analysis of the substrate, using x-ray diffraction technique, showed compressive stresses initially induced by peening to improve fatigue life, was not relieved by the removal method. Organized and Sponsored by the WaterJet Technology Association 1 INTRODUCTION Thermal-spray coatings are becoming increasingly common for coating in a wide variety of industrial applications. Specifically, Tungsten Carbide - High Velocity Oxygen Fuel (HVOF) coating, which is a derivation of thermal-spray technology, is currently being tested on landing gear components. HVOF coatings can be easily applied and are highly resistant to abrasion wear. -
Inst-109 Electroless Nickel
SELECTION. SERVICE. SATISFACTION.™ 200 S. Front St. Montezuma, IA 50171 800-741-0015 or 641-623-4000 • www.brownells.com ELECTROLESS NICKEL PLATING INSTRUCTIONS & EQUIPMENT by Ralph Walker and the Crew at Brownells, Inc. cally rough. Often pieces have to be pulled out, wire brushed to “reactivate” the surface and put back into the plating bath. An easily applied, beautiful, durable, attractive, long-wear- Then, the final finish is so rough that extensive polishing has ing and non-rusting finish for metal gun parts has long been to be done to bring the gun up to the expected “bright stan- sought by the firearms industry. Nickel plating has been one dards of nickel plating”. of the favorite plated finishes, meeting all of these require- ments except the first one - “easily applied” - until now. Finally, Fortunately, about 1945 a method of depositing nickel on the we can offer you a simple to do, easy to apply, absolutely fool- surface of the steel was discovered that did not require elec- proof, nickel plating system for the individual gun shop that tricity, but used chemical action to do the work of the anode, will give you a beautiful, uniform, evenly-plated, ready-for- cathode and cyanide salts solutions. Because of intense indus- assembly finish of the exact thickness you want each time you trial interest in the success of the process, it has been devel- use it. And, you can do it yourself in your own shop using safe- oped to the point now that almost universally perfect results to-handle chemicals with a minimum of extra equipment. -
Special Aspects of Electrodeposition on Zinc Die Castings
NASF SURFACE TECHNOLOGY WHITE PAPERS 82 (8), 1-9 (May 2018) Special Aspects of Electrodeposition on Zinc Die Castings by Valeriia Reveko1,2* and Per Møller2* 1Collini GmbH, Hohenems, Austria 2Technical University of Denmark, Lyngby, Denmark ABSTRACT Metal die casting has become a popular choice for the manufacturing of different consumer goods. Among the various engineering alloys and other metals, zinc alloys have often been preferred by manufacturers due to their qualities such as castability, dimensional stability and moderate solidification temperature, which provides energy and cost savings. Electroplating is a frequent choice to give zinc die cast components a high quality protective and decorative surface finish. However, applying this kind of treatment for die cast zinc components presents hidden challenges. In order to overcome these issues, a thorough morphology and composition analysis of die cast items was conducted. Special aspects of zinc die cast as a plating substrate are described and linked to the die casting process. Keywords: electrodeposition, zinc die cast, surface finishing, electroplating defects Introduction: why do we need to improve zinc die cast parts? Currently, metal die casting has become a popular choice for the manufacturing of finished products. An increasing number of industrial producers are attracted by this highly economical and efficient process capable of providing near-net shaped components that fully satisfy the geometrical requirements. Zinc, as a basis material, offers a broad range of desirable properties, beginning with hardness, ductility, impact strength, self- lubricating characteristics,1 and exhibits excellent thermal and heat conductivity. Among the various engineering alloys and other metals, zinc alloys have often been preferred by manufacturers because of their castability, dimensional stability and moderate solidification temperatures, which provide significant energy and cost savings. -
Controlling Hexavalent Chromium Exposures During Electroplating Electroplating Is a Metal Finishing Process in Which an Object Is Covered with a Metal Coating
FactSheet Controlling Hexavalent Chromium Exposures during Electroplating Electroplating is a metal finishing process in which an object is covered with a metal coating. Workers performing electroplating are exposed to hexavalent chromium [Cr(VI)] which can cause severe health effects including lung cancer. Electroplating uses an electrical current passed through a chemical electrolyte solution containing the plating metal. OSHA’s Permissible Exposure Limit (PEL) for Cr(VI) is 5 µg/m3 as an 8-hour time-weighted average and OSHA regulates worker exposure to this hazardous substance under its Chromium(VI) standard, 29 CFR 1910.1026. Types of chrome electroplating • Hard chrome (HC) plating: a thick layer of chromium is electrodeposited on a base material (usually steel) to provide a surface with functional properties such as wear resistance, a low coefficient of friction, hardness and corrosion resistance. It is used in: – Piston rings – Hydraulic cylinder rods – Machine rollers • Decorative or bright (DC) plating: a thin layer of chromium is electrodeposited onto a base metal or other electrodeposited metals (nickel) Hard chrome electroplating baths. (Photo courtesy of NIOSH). for cosmetic and tarnish resistance purposes. It is used in: How electroplating operations cause Cr(VI) exposure in the workplace – Chrome alloy wheels There are several factors that contribute to – Appliances hexavalent chromium exposure in the workplace, – Plumbing fixtures including: Anodizing, sometimes confused with electroplating, • Mist generation during plating: is used to increase the thickness of the natural oxide hydrogen layer on the surface of a metal part. Aluminum bubbles that form in the plating tanks burst alloys can be anodized using chromic acid.