Piezo • Nano • Positioning

M-168 Stepper-Mike Precision Linear Non-Rotating Tip, Strokes to 50 mm

Linear & Motors Ordering Information

M-168.12S PiezoWalk® Motors / Actuators High-Resolution Stepper-Mike , 10 mm PILine® Ultrasonic Motors M-168.22S High-Resolution Stepper-Mike DC-Servo & Stepper Actuators Linear Actuator, 25 mm

M-168.52S Piezo Actuators & Components High-Resolution Stepper-Mike Guided / Preloaded Actuators Linear Actuator, 50 mm Unpackaged Stack Actuators Ask about custom designs! Patches /Benders/Tubes /Shear..

M-168 Stepper-Mikes providing Nanopositioning/Piezoelectrics 10, 25 and 50 mm travel range (from front to back)

Nanometrology

࡯ 10, 25 and 50 mm Travel Range Micropositioning ࡯ Resolution <0.1 μm ࡯ 2-Phase Stepper Motor Index ࡯ Manual Positioning Knob ࡯ Sub-nm-Resolution with Optional PZT Actuator ࡯ >5,000 h MTBF

M-168 are compact, high-reso- p. 1-58 for spherical tips and lution linear actuators provid- other options). ing linear motion up to 50 mm with sub-micron resolu- High-Resolution Piezo Option tion. They consist of a microm- The optional piezo tip provides eter drive with non-rotating tip 20 μm travel with sub-nanome- driven by a 6400 microstep/rev ter resolution for dynamic scan- and 2-phase stepper motor. ning and tracking (see p. 1-73).

Non-Rotating Tip Compared to conventional ro- tating-tip micrometer drives, M-168.12S, M-168.22S and M-168.52S dimensions in mm. Sub-D connector 15-pin, 3 m cable included (C-815.38) the non-rotating-tip design of- fers several advantages: Technical Data ࡯ Elimination of torque-indu- ced positioning errors Model M-168.12S M-168.22S M-168.52S Unit ࡯ Elimination of sinusoidal Travel range 10 25 50 mm motion errors Design resolution 0.078 0.078 0.078 μm ࡯ Elimination of wear at the Min. incremental motion 0.3 0.3 0.3 μm contact point Unidirectional repeatability 0.1 0.1 0.1 μm ࡯ Elimination of tip-angle-de- Backlash 2 2 2 μm pendent wobble Max. velocity 5 5 5 mm/s Max. push/pull force 50 50 50 N M-168 Stepper-Mikes feature an Max. lateral force 0.02 0.02 0.02 N (at tip) extremely low-stiction, low-fric- Motor resolution* 6400* 6400* 6400* steps/rev. tion construction allowing for Drive screw pitch 0.5 0.5 0.5 mm/rev. high resolution and repeat- Weight 0.4 0.45 0.5 kg ability. A manual positioning Recommended motor C-663 single-axis C-663 single-axis C-663 single-axis (p. 4-112) knob provides coarse resolu- controllers tion of 5 μm. All models come *2-phase stepper motor, 24 V , max. 0.8 A/phase, 400 full steps/rev.,

© Physik Instrumente (PI) GmbHThe & newest Co. release KG for 2008. data Subjectwith sheets to is change available without for notice. download All at data www.pi.ws. are R1 superseded 10/10/04.0 by any new release. standard flat tips (see motor resolution with C-663 stepper