V10/Issue 1/2015 Growing Scope 2 Demand for 20 China: 32 of 200mm Applications 200mm Tools Investment Fever Drives Advances in MEMS Outstrips Supply Kicks IC Industry Process Technologies Into High Gear Solutions for Factory and Equipment Efficiency Still evolving: 200mm MANAGEMENT SPONSOR Cheryl Knepfler CONTENTS cheryl_knepfl
[email protected] PUBLISHER Growing Scope Peggy Marcucci of 200mm Applications
[email protected] Drives Advances in MEMS Process Technologies 2 EDITOR-IN-CHIEF Liz Baird
[email protected] TECHNOLOGY ADVISOR Helen Armer
[email protected] Advanced Service Collaboration— The Fab’s CONTRIBUTING EDITORS New Normal 7 Gary Dagastine David Lammers Silicon Labs Jill O’Nan Tackles IoT Challenges 12 DESIGN Jane Olson Graphic Design Trends in Subfab Energy Consumption and Emissions NANOCHIP is published by Control 16 Applied Materials, Inc. © Copyright Applied Materials, Inc., 2015 20 www.appliedmaterials.com Demand for 200mm Tools Outstrips Supply Nanochip Fab Solutions is now delivered in an environmentally friendly online version. 26 Printed copies are available upon request. Deploying Multivariate Analysis to Improve For a free subscription, or to Fab Productivity add colleagues to the mailing list, please send an email to
[email protected] with the following information: 29 • Name Case Study: • Title Wafer Scrap Reduction in • Company a 300mm Logic Foundry • Business address China: • Business email* Investment Fever Kicks IC Industry *Sorry—no general accounts, e.g., Gmail, AOL, Yahoo Into High Gear 32 All trademarks so designated or PLUS: ABOUT THE COVER: otherwise indicated as product names 38: 10 in 10: Celebrating Just as the chambered nautilus or services are trademarks of Applied Materials, Inc.