Still Evolving: 200Mm
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V10/Issue 1/2015 Growing Scope 2 Demand for 20 China: 32 of 200mm Applications 200mm Tools Investment Fever Drives Advances in MEMS Outstrips Supply Kicks IC Industry Process Technologies Into High Gear Solutions for Factory and Equipment Efficiency Still evolving: 200mm MANAGEMENT SPONSOR Cheryl Knepfler CONTENTS cheryl_knepfl[email protected] PUBLISHER Growing Scope Peggy Marcucci of 200mm Applications [email protected] Drives Advances in MEMS Process Technologies 2 EDITOR-IN-CHIEF Liz Baird [email protected] TECHNOLOGY ADVISOR Helen Armer [email protected] Advanced Service Collaboration— The Fab’s CONTRIBUTING EDITORS New Normal 7 Gary Dagastine David Lammers Silicon Labs Jill O’Nan Tackles IoT Challenges 12 DESIGN Jane Olson Graphic Design Trends in Subfab Energy Consumption and Emissions NANOCHIP is published by Control 16 Applied Materials, Inc. © Copyright Applied Materials, Inc., 2015 20 www.appliedmaterials.com Demand for 200mm Tools Outstrips Supply Nanochip Fab Solutions is now delivered in an environmentally friendly online version. 26 Printed copies are available upon request. Deploying Multivariate Analysis to Improve For a free subscription, or to Fab Productivity add colleagues to the mailing list, please send an email to [email protected] with the following information: 29 • Name Case Study: • Title Wafer Scrap Reduction in • Company a 300mm Logic Foundry • Business address China: • Business email* Investment Fever Kicks IC Industry *Sorry—no general accounts, e.g., Gmail, AOL, Yahoo Into High Gear 32 All trademarks so designated or PLUS: ABOUT THE COVER: otherwise indicated as product names 38: 10 in 10: Celebrating Just as the chambered nautilus or services are trademarks of Applied Materials, Inc. in the U.S. and A Decade of Nanochip creates a larger shell for itself as it other countries. All other product and 41: The Last Word: grows, 200mm equipment continues Sematech— service marks contained herein are A Look Back to evolve—and thrive—in the era of trademarks of their respective owners. mobility and the Internet of Things. Cover image: Chris 73 at //commons.wikimedia.org/wiki/File:Nautilus CutawayLogarithmicSpiral.jpg under the creative commons cc-by-sa 3.0 license. BACK TO THE FUTURE: BUILDING THE LATEST TECHNOLOGY WITH LEGACY TOOLS A Letter from Charlie Pappis When it comes to the fast-paced world of technology, we tend to assume that whatever’s “the latest” is also “the greatest.” Just look at the long lines that form outside your local Apple store every time a new version of the iPhone is released. CHARLIE PAPPIS That’s why the unprecedented surge in demand for 200mm legacy tools, largely driven by mobility GROUP VICE PRESIDENT innovations—including smartphones and the Internet of Things (IoT)—presents such an interesting AND GENERAL MANAGER, challenge for the semiconductor industry. Although FinFETs, 3D NAND and other leading-edge device APPLIED GLOBAL SERVICES designs continue to push the IC technology roadmap, the fact is more than 75% of the ICs in the latest iPhone 6 Plus were manufactured on trailing-edge 150mm and 200mm equipment—much of it first delivered back in the 1980s. These legacy tools are vital to delivering a steady stream of cost-sensitive “More-than-Moore” devices. Fabricated with non-leading edge die, these devices are produced in fabs that must continuously evolve to operate flexibly and with peak yield and maximized output. This is a high-value problem that Applied Materials understands very well, and is committed to helping our customers address. In this issue of Nanochip you’ll learn how Applied Materials is continuing to invest in manufacturing, technology and service o¬erings for 200mm platforms through our R&D facility in Xi’an, China, our 200mm lab in Singapore, our manufacturing operation in Austin, Texas, and other satellite operations in Gloucester, Massachusetts, Kalispell, Montana, and Tel Aviv, Israel. A great example is the new Applied Vita controller, introduced last fall. Many 200mm systems have controllers that were designed decades ago and haven’t been updated since. The Vita controller includes a much more powerful processor, flash memory and other features that can bring 200mm Applied Endura and Centura systems up to modern levels of performance and process control. When combined with our growing portfolio of advanced, technology-enabled service and consulting options, which we discuss in this issue, customers can increase output and improve 200mm device performance and yield. A tangible example of our new outcome-based service programs is a case study describing how a foundry with Applied Centura tools engaged our FabVantage Consulting Group with a goal to cut scrap rates by 50%. The Applied consultants ultimately exceeded the customer’s target, with recommendations and services which, when implemented, reduced wafer scrap to <0.2% and spending on certain parts by 4x. Also detailed in this issue is the interesting strategy of Silicon Labs, a fast-growing, fabless supplier of devices targeting IoT applications, along with a compelling inside view of China’s e¬orts to become an IC powerhouse. By leveraging government seed money and matching investments that could total US $170 billion over the next 5 to 10 years, China hopes to emerge as a major new player in chip manufacturing. Finally, we salute the 10th anniversary of Nanochip Fab Solutions with a look back at how much our industry has changed over the past decade. But what hasn’t changed, and what I hope you take away from these pages, is that Applied Materials is here for you. Whether you’re trying to optimize a legacy 200mm system, move to a new technology node on a state-of-the-art 300mm system, increase output, or reduce total costs, we can help you achieve your goals. Define the performance and the results you want, and we’ll deliver the technology, service and support to get you there. NANOCHIP 1 2 NANOCHIP Interestingly, evidence which can accommodate Trend for 200mm Volume Fabs suggests that these might be more than twice as many dies Count of Companies and Fabs unduly pessimistic conclusions, as 200mm wafers. By 2013, 250 Companies Volume Fabs similar to the misrepresentation 300mm wafers represented Fab Count: +5% to +10% 200 that prompted Mark Twain to approximately 57% of overall comment, “The report of my semicondutor capacity, with IC 150 death was an exaggeration.” Insights forecasting a rise to 64% Count 100 Even with the transition to in 2018.[3] Production on 300mm 300mm wafers, fabs running wafers is predominantly in high- 50 200mm wafers have continued volume commodity chips, includ- 0 to fabricate specialty memories; ing DRAM, flash memory, and 2007 2015 image sensors; micro-controller microprocessors. Foundries and [6] units (MCUs); analog products; IDMs favor them to best amortize Figure 1. Production on 200mm tools is making small but steady gains. motion, audio, and radio- their manufacturing costs per die. followed spurred adoption of electronics, power management frequency (RF) communication However, 300mm systems are “More-than-Moore” devices. applications, and emerging IoT- devices embodying MEMS; and also used for some production of These comprise micro-scale, related MEMS and sensors.[5] discrete passive components image sensors, power manage- systems-in-package or system- such as resistors, capacitors, ment devices, and complex logic on-chip devices, integrating KEY 200MM antennas, filters and switches. and micro-component ICs with processing power with sensors, MARKET SEGMENTS Production of such devices large die sizes. RF communication, and a range makes good economic sense The automotive industry The automotive industry and of other functionalities. They in fully depreciated 200mm was among the first users of the consumer electronics sectors can be fabricated using die with fabs, including those formerly devices fabricated on 200mm have been responsible for most feature sizes greater than 1µm used for making devices now wafers and has been steadily of the 200mm production since and profitably produced on produced on 300mm wafers;[2] expanding its use of sensors for before the 2008–09 industry 200mm systems. furthermore, new market forces improving vehicle e´ciencies downturn (see figure 2). Since Although ~5% of the are re-energizing the 200mm and safety. Similarly, industrial the early 2000s, cars produced total WFE market in 2014,[1] equipment scene. Leveraging and medical applications have in the U.S. have been equipped 200mm applications are its core capabilities in precision contributed to this market. with devices like tire pressure steadily multiplying (see figure materials engineering, Applied However, the advent of wireless sensors that send data to the 1). In 2014, fab investments by Materials is addressing the new and motion-tracking technologies vehicles’ central computers. The leading foundries and IDMs challenges accompanying these in consumer electronics has been average new car now contains resulted in a 45% increase in rapidly growing market segments the major stimulus for growth in 60 microprocessors; electronics spending for secondary 200mm through sustained investment in applications produced on 200mm for such functions as advanced equipment.[4] Foundries account R&D to expand the capabilities of platforms. Sold in the hundreds of driver assistance, heating and for two-thirds of this increase, its 200mm systems. millions per year, first the iPhone air conditioning, and rear-view responding to expanding The drive to reduce chip and then the proliferation of cameras account for 40% of a demand for MCUs for costs was the leading factor in other smartphones, tablet PCs, car’s cost.[6] According to Gartner, automotive devices, consumer the transition to 300mm wafers, and related digital devices that sensors will represent 31.3% Average Electronics Content per Car Global MEMS Market (Components) for Cell Phones and Tablets 1000 7000 Tablet 6000 900 Cell Phone 5000 800 4000 $M 700 3000 2000 600 1000 500 0 2006 2008 2010 2012 2014 2016 2018 2020 2010 2011 2012 2013 2014 2015 2016 2017 2018 Figure 2.