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The Impact of Dennard's Scaling Theory Sscs NL0107 1/8/07 9:54 AM Page 2 sscs_NL0107 1/8/07 9:54 AM Page 1 SSCSSSSCSSSSCCSS IEEE SOLID-STATE CIRCUITS SOCIETY NEWS Winter 2007 Vol. 12, No. 1 www.ieee.org/sscs-news The Impact of Dennard's Scaling Theory sscs_NL0107 1/8/07 9:54 AM Page 2 Editor’s Column e appre- ed topic, with background articles that address the theme: ciate all (that is, the ‘original sources’) and (1) “A 30 Year Retrospective on Wof your new articles by experts who Dennard's MOSFET Scaling feedback on our describe the current state of affairs Paper,” by Mark Bohr of Intel first issue in Septem- in technology and the impact of the Corporation; ber, 2006 on “The original papers and/or patents. (2) “Device Scaling: The Treadmill Technical Impact of The theme of the Winter 2007 that Fueled Three Decades of Moore's Law.” With the Winter, 2007 issue is “The Impact of Dennard's Semiconductor Industry Growth,” issue, we are continuing our new Scaling Theory.” by Pallab Chatterjee of i2 Tech- policy of mailing a hard copy of the This issue contains one Research nologies; SSCS News to all 11,500 members. Highlights article: “Analog IC Design (3) “Recollections on MOSFET This issue is the first of four that SSCS at the University of Twente,” by Scaling,” by Dale Critchlow, plans to publish annually (one each Bram Nauta, Head of the IC Design the University of Vermont; in Winter, Spring, Summer, and Fall). Group at the University of Twente, (4) “The Business of Scaling,” by The goal of every issue is to be a The Netherlands. The issue also Rakesh Kumar, TCX, Inc. Tech- self-contained resource on a select- contains seven short feature articles nology Connexions; (5) “A Perspective on the Theory of MOSFET Scaling and its IEEE Solid-State Circuits Society AdCom Impact,” by Tak Ning, IBM; President: Newsletter Coeditor: Richard C. Jaeger Mary Y. Lanzerotti (6) “Impact of Scaling and the Alabama Microelectronics Center IBM T.J. Watson Research Center environment in which the Scal- Auburn University, AL [email protected] [email protected] Fax: +1 914 945 1358 ing developed Fax: +1 334 844-1888 at that time," by Yoshio Nishi, Stan- Vice President: Elected AdCom Members at Large Terms to 31 Dec. 07: ford University; Willy Sansen K. U. Leuven Bill Bidermann (7) "It's All About Scale," by Hans Leuven, Belgium David Johns Stork, TI. Terri Fiez Secretary: Three original papers by Den- David A. Johns Takayasu Sakurai University of Toronto Mehmet Soyuer nard, from 1972 (IEDM Conference), Toronto, Ontario, Canada Terms to 31 Dec. 08: 1973 (IEDM Conference), and 1974 Wanda K. Gass Treasurer: (IEEE Journal of Solid-State Cir- Rakesh Kumar Ali Hajimiri Technology Connexions Paul J. Hurst cuits), are also reprinted in this Poway, CA Akira Matsuzawa issue. Ian Young Past President: Terms to 31 Dec. 09: Thank you for taking the time to Stephen H. Lewis University of California John J. Corcoran read the SSCS News. We appreciate Davis, CA Kevin Kornegay your comments and feedback! Please Hae-Seung (Harry) Lee Other Representatives: Thomas H. Lee send comments to [email protected]. Representative to Sensors Council Jan Van der Spiegel Darrin Young Representative from CAS to SSCS Chairs of Standing Committees: Domine Leenaerts Awards David Hodges Representative to CAS from SSCS Chapters Jan Van der Spiegel Un-Ku Moon Education CK Ken Yang Newsletter Editor: Meetings Anantha Chandrakasan Lewis Terman Membership Bruce Hecht IBM T. J. Watson Research Center Nominations Stephen H. Lewis [email protected] Publications Bernhard Boser Fax: +1 914 945-4160 For detailed contact information, see the Soci- ety e-News: www.ieee.org/portal/site/sscs For questions regarding Society business, contact the SSCS Executive Office. Contributions for the Spring 2007 issue of the Newsletter must be received by 8 February 2007 at the SSCS Executive Office. A complete media kit for advertisers is available at www.spectrum.ieee.org/mc_print. Scroll down to find SSCS Anne O’Neill, Executive Director Katherine Olstein, SSCS Administrator IEEE SSCS IEEE SSCS 445 Hoes Lane 445 Hoes Lane, Piscataway, NJ 08854 Piscataway, NJ 08854 Tel: +1 732 981 3400 Tel: +1 732 981 3410 Fax: +1 732 981 3401 Fax: +1 732 981 3401 Email: [email protected] Email: [email protected] 2 IEEE SSCS NEWSLETTER Winter 2007 sscs_NL0107 1/8/07 9:55 AM Page 3 ©Copyright IBM Corporation 2006. All rights reserved. Reproduced by permission of IBM Corporation. Winter 2007 Volume 12, Number 1 Editor’s Column . .2 President’s Message . .4 Corrections . .4 RESEARCH HIGHLIGHTS Analog IC Design at the University of Twente . .5 TECHNICAL LITERATURE A 30 Year Retrospective on Dennard’s MOSFET Scaling Paper . .11 Device Scaling: The Treadmill that Fueled Three Decades of Semi- conductor Industry Growth . .14 Recollections on MOSFET Scaling . .19 The Business of Scaling . .22 A Perspective on the Theory of MOSFET Scaling and its Impact . .27 The Impact of Scaling and the Scaling Development Environment 31 It’s All About Scale . .33 Design of Micron MOS Switching Devices . .35 20 Ion Implanted MOSFET’s with Very Short Channel Lengths . .36 Design of Ion-Implanted MOSFET’s with Very Small Physical Dimensions 38 PEOPLE An Interview with James Meindl - 2006 IEEE Medal of Honor Recipient 51 Hugo De Man Awarded for Leadership in Integrated Circuit Design . .53 Yannis P. Tsividis to Receive IEEE Kirchhoff Award . .56 IEEE Educational Innovation Award to Terri Fiez . .58 16 New Speakers Diversify SSCS Distinguished Lecturer Program . .61 New Senior Members . .67 Tools: How to Write Readable Reports and Winning Proposals . .67 CHAPTER NEWS 51 SSCS Awards $35,000 in Chapter Subsidies . .69 Far East Chapters Meet in Hangzhou, China . .70 V. Oklobdzija Offers IEEE DL Talks in Western Australia . .71 Denver Hosts Technical Seminars on Cutting-Edge CMOS Technology .72 CONFERENCES Second A-SSCC Considers Challenges for the e-Life . .74 Solid-State Circuits Conference Will Focus on Nano-Era Synergy . .76 Invitation from the ISSCC 2007 Chair . .75 AACD Conference Will Convene on 27-29 March 2006 . .78 NEWS SSCS AdCom Election for 2007-2009 Term . .80 IEEE Design Council Newsletter Completes Inaugural Year . .80 IEEE Teaching Awards . .81 56 Call for Nominations: SSCS Predoctoral Fellowships . .82 Winter 2007 IEEE SSCS NEWSLETTER 3 sscs_NL0107 1/8/07 9:55 AM Page 4 Message from the President In 2007, look for an unadvertised bonus the recent addition of Tainan (Taiwan) and South with your SSCS membership: A free Brazil. Celebrate our anniversary by browsing your subscription to the brand new quarterly technical articles online. Nanotechnology Magazine. We believe I’ve been active in the last quarter attending many of that circuit experts need to be in touch the conferences that SSCS cosponsors to sample their with this rapidly progressing technolo- quality, focus, and differences, as well as to increase the gy. Some day it will be a fruitful area Society’s visibility and support for these important gath- for circuits development, and opportunities to con- erings of technical experts. ESSCIRC in Montreux, tribute will arise. Switzerland last fall was fully overlapped with the ESS- The minimal subscription cost to the Society for the DERC device conference. One was able to move freely launch year of the new magazine prompted the AdCom between the co-located meetings. The wide variety of to join the Nanotechnology Council. We hope the plenary topics covered by the two meetings was of par- Council’s magazine effort will be of comparable interest ticular interest. Welcoming the Asian-Solid-State Circuits to its Transactions on Nanotechnology, which is just Conference in Hangzhou, China two months later, I was beginning its sixth year and has among the highest rates able to talk with circuit experts from around the world, of citation as measured by the Thompson ISI. I would and by the time this issue reaches you, I will have cel- like to receive feedback from you on how useful a tool ebrated the opening of the 20th International Confer- the new magazine is. Look for the first issue in the ence on VLSI Design in Bangalore. spring of 2007. Thanks to all of our members who voted in our fall 2007 is the Society’s 10th anniversary, having election. Welcome to our new additions to AdCom, evolved from the Solid-State Circuits Council that orig- Kevin Kornegay from Georgia Tech and Harry Lee from inated in 1970. We’ve updated the SSCS logo for this MIT. And welcome back to returning AdCom members year to draw attention to our progress. Since 1997, the John Corcoran from Agilent Laboratories, Tom Lee from Journal of Solid-State Circuits has increased coverage of Stanford, and Jan Van der Spiegel from the University of technical articles by 40%, and the SSCS Newsletter by 2 Pennsylvania. The Society is beginning a review of its 1/2 times. The JSSC continues to be the most read in priorities for 2007 and beyond. As Society members, IEEE Xplore and the most cited in patents. Your SSCS please make your interests known to your AdCom rep- membership provides online access not only to the resentatives. Start a conversation and help the Society Journal but also to the digests of our five major solid- point to the future that you feel is coming. state circuits conferences and most of their historic record. Local chapters have grown from 2 to 59, with Richard C. Jaeger Corrections In the article entitled “Overview of the caption for Figure 4 should read: and the first commercially-available CMOS Technology Development in Fig. 4 Gate leakage current in integrated circuit in Figs 3 & 4.
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