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Laser (Static Light Scattering)

© 2007 HORIBA, Ltd. All rights reserved. When a Light beam Strikes a

„ Some of the light is: z Diffracted Reflected Refracted z Reflected z Refracted Absorbed and z Absorbed and Reradiated Reradiated Diffracted

„ Small require knowledge of optical properties: z Real Index (degree of refraction) z Imaginary Index (absorption of light within particle) z Light must be collected over large range of angles z Index values less significant for large particles

© 2007 HORIBA, Ltd. All rights reserved. Diffraction Pattern

© 2007 HORIBA, Ltd. All rights reserved. Diffraction Patterns

© 2007 HORIBA, Ltd. All rights reserved. Young’s Experiment

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Single slit diffraction pattern Double slit diffraction pattern

© 2007 HORIBA, Ltd. All rights reserved. Fraunhofer Diffraction: Young’s Double Slit

„ Distance between slits is INVERSELY proportional to angle (θ)

nλ =d sin θ d=nλ / sin θ For a given measurement system with a fixed θ , the product nλ is constant

n= order of diffraction λ = wavelength of light d= distance between slits θ = angle of diffraction

© 2007 HORIBA, Ltd. All rights reserved. Fraunhofer Diffraction: Pinhole

„ The diameter of the pinhole is INVERSELY proportional to angle (θ)

nλ =d sin θ d=nλ / sin θ For a given measurement system with a fixed θ wavelength, the product nλ is constant

n= order of diffraction λ = wavelength of light d= distance between slits θ = angle of diffraction

© 2007 HORIBA, Ltd. All rights reserved. FRAUNHOFER DIFFRACTION - PARTICLE

„ Angle of scatter from a particle is INVERSELY proportional to angle (θ)

nλ =d sin θ d=nλ / sin θ For a given measurement system with a fixed θ wavelength, the product nλ is constant

n = order of diffraction λ = wavelength of light d = distance between slits θ = angle of diffraction

© 2007 HORIBA, Ltd. All rights reserved. Edge Scattering Phenomenon

„ Light Scatter occurs whether from a slit, a pinhole or a particle. It occurs at the edge of an object. A SLIT and θ PARTICLE of the same size produce the same diffraction pattern

θ θ

© 2007 HORIBA, Ltd. All rights reserved. Fraunhofer Diffraction: Particles

„ Large particles scatter light through SMALLER angles

θ „ Small particles scatter light through LARGER angles

Large Particle θ Small Particle

© 2007 HORIBA, Ltd. All rights reserved. Diffraction Pattern: Large vs. Small Particles

„ LARGE PARTICLE: z Low angle scatter z Large signal

Wide Pattern - Low intensity „ SMALL PARTICLE: z High Angle Scatter z Small Signal Narrow Pattern - High intensity

© 2007 HORIBA, Ltd. All rights reserved. Angle of Scatter vs. Particle Size

„ Fraunhofer Diffraction describes technology. Scatter angles are relatively small, less than 30°

„ ANGLE OF SCATTER is INVERSELY proportional to particle size. SMALL particles scatter at larger angles than large particles. „ The AMOUNT OF LIGHT scattered is DIRECTLY proportional to particle size. LARGE particles scatter MORE light than small particles.

© 2007 HORIBA, Ltd. All rights reserved. Light Scattering

S1(Θ) and S2(Θ) are dimensionless, complex functions defined in general , describing the change of amplitude in respectively the perpendicular and the parallel polarized light as a function of angle Θ with respect to the forward direction. Computer algorithms have been developed in order to allow computation of these functions and, thus, of I(Θ).

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I (W)

λ = Wavelength of light A = Radius of Particle W = Angle with respect to optic axis

1.22λ 1.22λ 2.23λ 2.23λ 2A 2A 3.24λ 2A 2A 3.24λ 2A 2A

W

© 2007 HORIBA, Ltd. All rights reserved. Comparison of Models

„ Fraunhofer (left) vs. Mie (right)

© 2007 HORIBA, Ltd. All rights reserved. Fraunhofer Approximation

dimensionless size parameter α = πx/λ; J1 is the Bessel function of the first kind of order unity. Assumptions: a) all particles are much larger than the light wavelength (only scattering at the contour of the particle is considered; this also means that the same scattering pattern is obtained as for thin two-dimensional circular disks) b) only scattering in the near-forward direction is considered (Q is small).

Limitation: (diameter at least about 40 the wavelength of the light, or a >>1)* If λ=680nm (.68 μm), then 40 x .68 = 27 μm If the particle size is larger than about 50 μm, then the Fraunhofer approximation gives good results.

© 2007 HORIBA, Ltd. All rights reserved. Fraunhofer Approximation

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© 2007 HORIBA, Ltd. All rights reserved. Mie vs. Fraunhofer

1.E+05 100 μm 1.E+04

1.E+03 3 μm 1.E+02

1.E+01

1.E+00

1.E-01

Relative Intensity 3.0 µm by Mie 1.E-02 3.0 µm by Fraunhofer 100.0 µm by Mie 1.E-03 100.0 µm by Fraunhofer

1.E-04 0.01 0.1 1 10 100 Angle in degrees Figure A.3 -- Comparison of scattering patterns of non-absorbing particles according to Fraunhofer and Mie calculations (Np = 1,59 – 0,0; nwater = 1,33; wavelength = 633 nm)

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4 5 Legend shows Legend shows 4.5 3.5 Particle Particle 4 Refractive Index 3 3.5

2.5 3 Efficiency 2 2.5 2 1.5 1.46 - 0.001 1.39 - 0.0 Extinction 1.5 Extinction Efficiency Extinction 1 1.46 - 0.02 1.59 - 0.0 1.46 - 0.05 1 1.79 - 0.0 0.5 1.46 - 0.1 0.5 1.99 - 0.0 1.46 - 0.2 2.19 - 0.0 0 0 0.1 1 10 100 0.1 1 10 100 Particle Size μm Particle Size μm Figure A.2 -- Extinction efficiencies in relation to particle size and refractive index (Mie prediction). (np and kp as indicated; nwater = 1,33; wavelength = 633 nm) (Fraunhofer assumes an extinction efficiency of 2 for all particle sizes) Good agreement for transparent particles >50 μm “ “ “ opaque particles > 2 μm

© 2007 HORIBA, Ltd. All rights reserved. Scattering intensity pattern for single particles in relation to size

1.0E+11 For single 1.0E+10 Legend Particle 0.1 particles 1.0E+09 Size μm 1.0E+08 0.5 range from 1.0E+07 2 0.1 to 100 μm 1.0E+06 5 is 1013 1.0E+05 10 1.0E+04 100 Reduce by 1.0E+03 weighting to 1.0E+02 volume Relative Intensity 1.0E+01 1.0E+00 1.0E-01 1.0E-02 1.0E-03 1.0E-04 0.1 1 10 100 1000 Angle degrees

Mie calculation; wavelength 633 nm; Np = 1,59 – 0,0 i; nm = 1,33

© 2007 HORIBA, Ltd. All rights reserved. Light intensity scattering patterns for equal particle volumes in relation to size

1.E+05 Weighting 1.E+04 Legend Particle 0.1 to third Size μm 0.5 power of 1.E+03 2 size 1.E+02 5 10 1.E+01 100 1.E+00 Relative Intensity 1.E-01

1.E-02

1.E-03 0.1 1 10 100 1000 Angle in degrees

Mie calculation; wavelength 633 nm; Np = 1,59 – 0,0 ; nm = 1,33

© 2007 HORIBA, Ltd. All rights reserved. Influence of particle size on angular light intensity scattering patterns

Width = 1% (COV)

© 2007 HORIBA, Ltd. All rights reserved. Influence of imaginary parts of RI (absorbancies)

Width = 1% (COV)

© 2007 HORIBA, Ltd. All rights reserved. Influence of distribution width on angular light intensity scattering patterns

© 2007 HORIBA, Ltd. All rights reserved. Result Calculation

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© 2007 HORIBA, Ltd. All rights reserved. Iterations „ How many times to calculate new (better) results before reporting final result? „ For LA-930 standard = 30, sharp = 150 „ For LA-950 standard = 15, sharp = 1000 „ Fewer iterations = broader peak „ More iterations = narrow peak „ Too many iterations = fit to noise, over-resolved

© 2007 HORIBA, Ltd. All rights reserved. Viewing Raw Data

© 2007 HORIBA, Ltd. All rights reserved. LA-950

© 2007 HORIBA, Ltd. All rights reserved. Why 2 ?

30, 40, 50, 70 nm latex standards

© 2007 HORIBA, Ltd. All rights reserved. Practical Application of Theory: Mie vs. Fraunhofer for Glass Beads

© 2007 HORIBA, Ltd. All rights reserved. Practical Application of Theory: Mie vs. Fraunhofer for CMP Slurry

© 2007 HORIBA, Ltd. All rights reserved. Conclusions

„ It helps to know some of the theory to best use a diffraction particle size analyzer z Small particles – wide angles z Large particles – low angles „ Look at Intensity curves, R parameter & Chi square calculations „ Use Mie theory at all times (default whenever choosing an RI kernel other than Fraunhofer)

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