Plasma Res. Express 2 (2020) 013001 https://doi.org/10.1088/2516-1067/ab6c84 TUTORIAL Electrical breakdown from macro to micro/nano scales: a tutorial RECEIVED 31 October 2019 and a review of the state of the art REVISED 23 December 2019 1,2 2 1,2 3 ACCEPTED FOR PUBLICATION Yangyang Fu , Peng Zhang , John P Verboncoeur and Xinxin Wang 16 January 2020 1 Department of Computational Mathematics, Science and Engineering, Michigan State University, East Lansing, Michigan 48824, United PUBLISHED States of America 7 February 2020 2 Department of Electrical and Computer Engineering, Michigan State University, East Lansing, Michigan 48824, United States of America 3 Department of Electrical Engineering, Tsinghua University, Beijing 10084, People’s Republic of China E-mail:
[email protected] Keywords: electrical breakdown, Paschen’s law, secondary electron emission, thermionic emission, field emission, microdischarge, Townsend theory Abstract Fundamental processes for electric breakdown, i.e., electrode emission and bulk ionization, as well as the resultant Paschen’s law, are reviewed under various conditions. The effect of the ramping rate of applied voltage on breakdown is first introduced for macroscopic gaps, followed by showing the significant impact of the electric field nonuniformity due to gap geometry. The classical Paschen’s law assumes uniform electric field; a more general breakdown scaling law is illustrated for both DC and RF fields in geometrically similar gaps, based on the Townsend similarity theory. For a submillimeter gap, effects of electrode surface morphology with local field enhancement and electric shielding on the breakdown curve are discussed, including the most recent efforts. Breakdown characteristics and scaling laws in microgaps with both metallic and non-metallic (e.g., semiconductor) materials are detailed.