SUBJECT INDEX

A Capsule system design ...... 230–231 See also Wireless endoscopy AC dielectric spectroscopy...... 166–167 Catalytic sensors, role ...... 232 AC-electrokinetic, applications ...... 199–205 CEC, see Capillary electrochromatography in cancer cells detection ...... 210 Cell culture devices ...... 66–68 for dielectric properties determination ...... 165–166 Cell level discrimination ...... 150–152 forces, application ...... 151–152 Cells isolation and positioning, in microfluidic See also Dielectrophoresis; Microfabrication channel...... 167 techniques Cellular manipulation and analysis...... 66 Adobe Illustrator, role ...... 86 cell culture devices ...... 66–68 Algae, impedance spectroscopy and optical cell lysis and electroporation...... 69–70 measurement...... 176–179 flow cytometry in measurement...... 70–72 See also Single biological cells, impedance spectroscopy separation and analysis, proteins and and optical analysis DNA ...... 73–74 Analogue to digital converter (ADC) ...... 234 sorting of cells ...... 72 Animal applications and wireless capsule device...... 228 See also Microfluidics See also Wireless endoscopy Centre for Neural Communication Technology...... 142 Application-specific integrated circuit ...... 228 Chemical etching...... 38 ASIC, see Application-specific integrated circuit Chemical mechanical polishing...... 30 Atmospheric pressure CVD (APCVD) ...... 28 Chemical vapor deposition (CVD) ...... 25, 28–29 Chemo-mechanical sensors, role ...... 232 B Chip fabrication process ...... 170–174 Bacillus subtilis, 209 Clausius–Mossotti factor ...... 187, 188, 202 BCE, see Bovine capillary endothelial Clewin program, role...... 86 BESOI, see Bonded and etched-back silicon-on-insulator CMOS, see Complementary metal-oxide-semiconductor wafer CMP, see Chemical mechanical polishing BiCMOS processes, usage...... 139 Complementary metal-oxide-semiconductor...... 228, Biological characterisation, dielectrophoresis...... 205–210 231, 232, 234–236 Bonded and etched-back silicon-on-insulator wafer...... 142 Complex dielectric model...... 157 Bosch etching...... 39 Computer-aided design (CAD) ...... 3 Bovine capillary endothelial...... 68 Conductometric sensors, usage...... 234 Contact photolithography and transparency Buffered hydrofluoric (BHF) ...... 31–32 masks...... 86–88 Buffered oxide etch (BOE)...... 31 See also Microstructures fabrication, by soft C lithography Contact printers, advantage...... 17 Cancer cells Contamination control, microfabrication detection, AC-electrokinetic techniques...... 210 techniques ...... 40–41 separation technique ...... 213–216 cleaning ...... 44 See also Dielectrophoresis clean rooms ...... 42–43 Cancer studies, DEP ...... 210–213 counting particles...... 41 Capillary electrochromatography...... 73 facilities ...... 45–46 Capillary electrophoresis (CE) ...... 63, 73 human behavior ...... 43–44 Capillary wall, modification...... 129 metrology ...... 47–48 See also Electroosmotic flow (EOF) wafer handling ...... 42

M.P. Hughes, K.F. Hoettges (eds.), Microengineering in Biotechnology, Methods in Molecular Biology 583, DOI 10.1007/978-1-60327-106-6, ª Humana Press, a part of Springer Science+Business Media, LLC 2010

247 MICROENGINEERING IN BIOTECHNOLOGY 248 Subject Index

Contamination control (continued) DMA, see N,N-dimethylacrylamide water...... 46–47 DNA and proteins analysis, CE method ...... 73–74 wipers ...... 44–45 Dry etching ...... 35–38 See also Microfabrication techniques See also Etching Coulomb’s law ...... 201 Dynamic coating procedures, in EOF...... 130 Coulter method...... 153 Covalent bound polymers, in EOF suppression...... 130 E Covalent coatings, in EOF...... 129–130 E-beam evaporators ...... 25 Cryogenic pump, characteristics...... 24 EDL model, see Electrical double-layer See also Microfabrication techniques model Cryptosporidium parvum ...... 208 Elastomeric membranes, microfabrication ...... 84–85 Cuff electrodes...... 136–138 Electrical double-layer model...... 122 See also Microengineered neural probes Electrical rule check (ERC)...... 238 Cyclospora cayetanesis ...... 209 Electric field geometry, importance...... 155 D Electrode geometries, in DEP medium influence ...... 195–196 Data-logging telemetry capsules, usage...... 228 micro-electrodes...... 191–193 DEA, see N,N-diethylacrylamide needles...... 190–191 Debye–Hu¨ckel linearization scheme ...... 124 three-dimensional electrode systems ...... 193–195 Deep reactive ion etcher (DRIE) ...... 37 See also Dielectrophoresis DEP, see Dielectrophoresis Electrohydrodynamic (EHD)...... 61 DEP field-flow fractionation (DEP-FFF)...... 215 Electrokinetic methods, microfluidic devices DEPIM, see Dielectrophoretic impedance measurement dielectrophoresis (DEP) ...... 61–62 Design rule check (DRC)...... 238 electroosmosis ...... 61 Dielctrophoresis collection rate (DCR) ...... 206 EP ...... 60–61 Dielectric properties determination...... 162–165 electrorotation (ROT) ...... 62–63 AC dielectric spectroscopy...... 166–167 See also Microfluidics AC electrokinetic techniques...... 165–166 Electromagnetic induction, advantage ...... 241 See also Single biological cells, impedance Electron-beam evaporator, usage ...... 25 spectroscopy and optical analysis Electron cylclotron resonance (ECR)...... 37 Dielectrophoresis ...... 61–62, Electroosmotic flow (EOF)...... 110, 121–122 183–185 control and modification, coatings used...... 129–130 for biological characterisation...... 205–210 polymers used for EOF control...... 131–133 cancer cells, separation technique ...... 213–216 principles...... 112–113 cancer studies ...... 210–213 theory ...... 122–123 classification ...... 201–205 advantages and limitation ...... 128–129 electrode geometries charge distribution...... 123–124 medium influence ...... 195–196 cylindrical capillary...... 124–125 micro-electrodes...... 191–193 flow profile...... 125–127 needles...... 190–191 pH and ionic concentration effect ...... 127–128 three-dimensional electrode systems ...... 193–195 transient flow time scale ...... 127 measurement See also Microfabrication techniques collection rate measurements...... 185–186 Electrophoresis (EP), definition and crossover measurements...... 186 application...... 60–61 impedance sensing ...... 186 Electroplating ...... 29–30 levitation height measurement ...... 186 Electrorotation (ROT) ...... 62–63 particle velocity measurements ...... 186 and cell lysis ...... 69–70 modelling and interpretation cell properties measurements ...... 152 theory of particle modelling...... 187–189 See also Microfluidics usage...... 73, 200 Enzyme-linked immunosorbent assay Dielectrophoretic impedance measurement ...... 209 (ELISA)...... 74, 81 Dielectrophoretic separation...... 152 Etching Diffusion immunoassay (DIA)...... 74 dry etching ...... 35–38 Dimethyl sulfoxide (DMSO) ...... 211 metal etchants ...... 33–35 MICROENGINEERING IN BIOTECHNOLOGY Subject Index 249

plasma processes...... 38–40 Ion enhanced etching...... 39 wet etching...... 30–33 Ion-sensitive field effect transistor ...... 234, 242, 243 See also Microfabrication techniques Iridium oxide film (IrOx), usage ...... 156 1-Ethyl-3-(dimethylamino)propylcarbodiimide (EDC)....102 ISFET, see Ion-sensitive field effect transistor ISM, see Industrial, scientific and medical F Isochrysis galbana...... 177 Isoelectric focusing...... 73 Field-flow fractionation (FFF)...... 214, 215 Isopropyl alcohol (IPA) ...... 19, 20, 44 Fluorescence-activated cell sorter (FACS)...... 70, 72, 150 G L Lab-on-a-chip system...... 153 Gastro-oesophageal reflux disease...... 225 Laboratory-in-a-pill device...... 232 Genistein (GEN)...... 212 Laminar flow and microfluidic channel ...... 57–58 GERD, see Gastro-oesophageal reflux disease See also Microfluidics Giardia muris...... 209 Laser printer, role ...... 86 Glass fluidic systems, EOF in ...... 122 Layout versus schematic...... 238 Glass substrates, application ...... 6 LIAP, see Laboratory-in-a-pill device Guard ring, usage...... 158–159 LIGA, see Lithographie, galvanoformung, and abformung H Light-emitting diodes (LEDs)...... 228 Lithographie, galvanoformung, and abformung ...... 18 Hardware description language ...... 238 Lithography, microfabrication techniques HDL, see Hardware description language descum and hard bake...... 19 Helmholtz-Smoluchowski relation, usage ...... 122 developing...... 18–19 HEPA, see High efficiency particulate air lithography tools and exposure ...... 16–18 Hexamethyldisilazane (HMDS)...... 14, 83 resist stripping...... 19–20 Hexamethylene bisacetamide...... 211 rinsing and drying...... 22 H-filter...... 60 spinning...... 14–16 High efficiency particulate air ...... 42 substrate cleaning...... 20–22 HMBA, see Hexamethylene bisacetamide See also Microfabrication techniques Human medicine and wireless capsule device ...... 225–228 Low pressure CVD (LPCVD)...... 28 See also Wireless endoscopy LVS, see Layout versus schematic Hydrodynamic pumping, advantage and disadvantage .. 110 M I Macromedia Freehand, role...... 86 ICP, see Inductively coupled plasma Magnetron sputtering system ...... 26–27 IEF, see Isoelectric focusing MAP, see Microlens Array Photolithography Impedance sensing, role...... 186 Marangoni effect...... 22 See also Dielectrophoresis See also Microfabrication techniques Impedance spectroscopy, see Single biological cells, MDR, see Multidrug resistance impedance spectroscopy and optical analysis MEA, see Microelectrode arrays Indium tin oxide (ITO)...... 33 MEMS, see Micro-electro-mechanical systems Inductively coupled plasma...... 36 Metal etchants ...... 33–35 Industrial, scientific and medical...... 229 See also Etching Inflammatory bowel diseases (IBDs)...... 226 Metal organic CVD (MOCVD)...... 28–29 Integrated circuit (IC) ...... 1 Metal substrates, application ...... 6 aluminum...... 33 Microelectrode arrays...... 68 fabrication ...... 2 Micro-electro-mechanical systems ...... 55, 63, 232 formation ...... 4 Microengineered neural probes packaging ...... 13 characteristics...... 136 Integrated sensors, role ...... 231–236 cuff electrode...... 136–138 Interdigitated castellated electrodes, role ...... 192 penetrating electrodes ...... 140–146 See also Dielectrophoresis regenerating electrodes ...... 138–140 Ion assisted etching...... 39 Microfabricated broadband single-cell dielectric Ion beam etching ...... 38, 39 spectroscopy, usage ...... 72 MICROENGINEERING IN BIOTECHNOLOGY 250 Subject Index

Micro-fabricated electrodes, usage ...... 191–193 fluids behaviour, at small scale See also Dielectrophoresis diffusion ...... 58–60 Microfabrication techniques...... 1–4, 81–82 electrokinetic...... 60–63 chemical vapor deposition (CVD)...... 28–29 laminar flow ...... 57–58 contamination control...... 40–41 surface to volume effects...... 63 cleaning ...... 44 Microlens Array Photolithography ...... 83, 89–93 clean rooms ...... 42–43 Microlens projection photolithography, procedure.... 91–93 counting particles...... 41 Micromachining, defined ...... 4 facilities ...... 45–46 See also Microfabrication techniques human behavior ...... 43–44 Microreactors, chemical synthesis ...... 109–112 metrology ...... 47–48 electroosmotic flow...... 112–113 wafer handling ...... 41–42 peptide synthesis ...... 113–116 water...... 46–47 product purification ...... 116–118 wipers ...... 44–45 See also Electroosmotic flow (EOF) electroplating...... 29–30 Microscope Projection Photolithography...... 83, 88–89 etching Microscopic physics, of EOF ...... 122–123 dry etching ...... 35–38 Microstereolithography technique...... 65–66 metal etchants ...... 33–35 Microstructures fabrication, by soft lithography ...... 81–82 plasma processes...... 38–40 fabrication of engineered surface ...... 98–102 wet etching...... 30–33 fabrication of masters lithography contact photolithography...... 86–88 descum and hard bake...... 19 MAP ...... 89–93 developing ...... 18–19 MPP...... 88–89 lithography tools and exposure ...... 16–18 transparency-based photomasks fabrication...... 84–86 photoresist spinning defects...... 16 fabrication of microfluidic channels ...... 96–98 resist stripping...... 19–20 fabrication of PDMS replicas ...... 93–96 rinsing and drying...... 22 materials...... 83–84 spinning...... 14–16 Micro Total Analysis Systems...... 149 substrate cleaning...... 20–22 Miniaturised total analytical systems...... 111 photomask design ...... 6–7 Miniaturized electrical approaches ...... 151 alignment keys ...... 11 MPP, see Microscope Projection Photolithography m photomasks ...... 7–14 TAS, see Micro Total Analysis Systems; Miniaturised photoresist profiles...... 10 total analytical systems process bias during exposure and etching...... 9 Multidrug resistance ...... 210 substrate, selection and specifications...... 4–6 N thin film deposition chemical vapor deposition...... 28–29 Nanosecond pulsed electric fields (nsPEF) ...... 69 electroplating...... 29–30 Navier–Stokes (NS) equation...... 125 high-vacuum pumps ...... 24 Needles electrode, usage ...... 190–191 physical vapor deposition...... 25–28 See also Dielectrophoresis thin films...... 25 Negative dielectrophoresis (nDEP)...... 62, 70, 72, 167 vacuums system...... 23–25 Neural probes...... 135 See also Microengineered neural probes See also Microengineered neural probes Microfluidic channels, fabrication...... 96–98 Neural recordings development...... 135–136 See also Microstructures fabrication, by soft lithography NeuroControl Corporation, usage ...... 138 Microfluidic chip, process flow for...... 170 N,N-diethylacrylamide ...... 130 Microfluidics...... 55–56 N,N-dimethylacrylamide ...... 130 applications Non-volatile residue (NVR)...... 41 cellular manipulation and analysis ...... 66–72 O macromolecules...... 73–74 device fabrication Oil diffusion pump, characteristics...... 24 biocompatibility ...... 65 See also Microfabrication techniques polymer-based microfluidics...... 64–65 Optical analysis, for single biological cells...... 149–150 silicon and glass based micromachining ...... 63–64 cell level discrimination ...... 150–152 MICROENGINEERING IN BIOTECHNOLOGY Subject Index 251

cell manipulation...... 167–169 Polymer chains, in PDMA and PDEA...... 130 chip fabrication process...... 170–174 Polymers, for EOF control detection techniques covalent coatings...... 132 dielectric properties determination...... 162–167 dynamic coating ...... 131–132 impedance measurement...... 153–160 See also Electroosmotic flow (EOF) optical detection...... 160–161 Polymer substrates, application ...... 6 sample preparation and chip maintenance ...... 161–162 Polymethyl methacrylate substrates...... 18, 65 measurements...... 174–179 Polynomial electrodes, usage ...... 192, 193 system platform and integration...... 152–153 Potentiometric sensors, usage...... 234 Optical sensors, role...... 232 Pressure-driven flow (PDF) ...... 167 Printed circuit board (PCB) ...... 215 P Projection printers, usage...... 17 Paralysed Hand Control System, usage...... 138 R PBSC, see Peripheral blood stem cell PDMS, see Polydimethoxysilane; Polydimethylsiloxane Radio-frequency identification...... 228 Penetrating electrodes...... 140–146 Reactive ion etching...... 35, 38 See also Microengineered neural probes Regenerating electrodes...... 138–140 Pentafluorophenyl (PFP) ester ...... 117 See also Microengineered neural probes Peptide synthesis, in microreactor ...... 113–116 Reticle, advantage ...... 7 See also Microreactors, chemical synthesis See also Microfabrication techniques

Perchloric acid (HClO4), usage...... 31 Reynolds number ...... 57 Peripheral blood stem cell...... 214 RFID, see Radio-frequency identification Photographic techniques, usage...... 141 Rhodosorus m...... 177 Photomask design RIE, see Reactive ion etching chrome ...... 13 ROT torque, measurement...... 62–63 design stage...... 7–8 Rough pump, usage ...... 23–24 limitation...... 11–12 See also Microfabrication techniques objective ...... 6–7 S price determining...... 8 process bias...... 9 S. cerevisiae ...... 206, 207 shadow mask...... 13–14 Selenastrum capricornutum ...... 209 See also Microfabrication techniques Self-assembled monolayers (SAMs)...... 68, 98 Photomask, generation ...... 84 Shadow mask ...... 13–14 Photoresist spinning defects ...... 16 Signal processing, in cuff electrodes ...... 137 Photosensitive polyimide precursor, usage ...... 170–171 Silicon and glass based micromachining ...... 63–64 Physical vapor deposition (PVD) ...... 25–28 See also Microfluidics Phytoplankton, measurement and analysis...... 176–179 Silicon substrate, advantage...... 5–6 See also Single biological cells, impedance spectroscopy Single biological cells, impedance spectroscopy and optical and optical analysis analysis ...... 149–150 Plasma enhanced CVD (PECVD)...... 28 cell level discrimination ...... 150–152 Plasma etching...... 38 cell manipulation...... 167–169 See also Etching chip fabrication process...... 170–174 Platinum wire for electrodes, usage ...... 137 detection techniques Plug-like flow, of EOF...... 126 dielectric properties determination...... 162–167 PMMA, see Polymethyl methacrylate substrates impedance measurement...... 153–160 Poisson–Boltzmann (PB) equation ...... 124 optical detection...... 160–161 Polycarbonate, usage...... 65 sample preparation and chip maintenance ... 161–162 Polydimethoxysilane ...... 18, 66 measurements...... 174–179 Polydimethylsiloxane ...... 64–65, system platform and integration...... 152–153 83, 103 Single-cell electroporation...... 69 fabrication ...... 93–96 Soft lithography, in microstructures fabrication...... 81–82 and photoresist-coated wafer...... 90 engineered surface fabrication ...... 98–102 Polyimide–polyimide bonding process, feature...... 171–172 masters fabrication ...... 84–93 Polymer-based microfluidics ...... 64–65 materials...... 83–84 MICROENGINEERING IN BIOTECHNOLOGY 252 Subject Index

Soft lithography (continued) U microfluidic channels fabrication...... 96–98 PDMS replicas fabrication ...... 93–96 Utah Intracortical Electrode Array Spin on glasses (SOG)...... 16 (UIEA)...... 144 Sputter etching...... 38 Staphylococcus epidermidis...... 209 V Steppers, usage...... 17 Stern, Helmholtz, compact or inner layer ...... 122–123 Vagus Nerve Stimulation System, Substrates, in microfabrication ...... 4–6 usage...... 138 See also Microfabrication techniques Vapor prime systems, advantages ...... 14 SU-8, role ...... 87 Voltage-clamp circuit, usage...... 136 Synechococcus sp...... 177 Voltammetric sensors, role ...... 232 System-on-chip (SoC)...... 230 See also Wireless endoscopy System platform and integration ...... 152–153 W T Water system, continuous flow deionized...... 46 Tetramethyl ammonium hydroxide...... 18 Wet etching, role ...... 30–33 Thermal evaporator, usage...... 25 See also Etching Thermoelectric sensors, role ...... 232 Wireless endoscopy...... 221–223 Thin film deposition applications chemical vapor deposition...... 28–29 animal applications ...... 228 electroplating...... 29–30 human medicine...... 225–228 physical vapor deposition...... 25–28 environment...... 239–241 evaporator schematics ...... 26 packaging ...... 241–243 magnetron sputtering system...... 27 system design methodology ...... 236–237 stresses in ...... 28 analogue electronic front-end signal thin films...... 25 vacuums...... 23–25 design ...... 237–238 See also Microfabrication techniques digital system design...... 238–239 Titanium sputter pump, characteristics ...... 24 technology TMAH, see Tetramethyl ammonium hydroxide capsule system design...... 230–231 Transient flow time scale...... 127 design constraints...... 228–229 See also Electroosmotic flow (EOF) integrated sensors...... 231–236 T-sensor...... 59–60 traditional diagnostic techniques See also Microfluidics invasive techniques...... 224 Turbomolecular pump, characteristics...... 24 non-invasive techniques...... 224 See also Microfabrication techniques See also Microfabrication techniques